Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method

A technology of communication protocol and function simulation, applied in digital transmission system, electrical components, error prevention, etc.

Active Publication Date: 2011-02-02
TSINGHUA UNIV
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  • Abstract
  • Description
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Problems solved by technology

[0014] The main purpose of the present invention is to solve the general configurability problem of the communication protocol for equipment simulation in the field of semiconductor manufacturing equipment, and to propose a communication protocol mode configuration method for functional simulation of semiconductor manufacturing equipment

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  • Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method
  • Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method
  • Semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method

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Embodiment Construction

[0037] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0038] The present invention is based on Windows XP operating system, adopts Visual studio2008 to realize. It can complete the flexible configuration function of the communication protocol format of semiconductor equipment, and can configure various communication protocol formats in a unified configuration interface, which is suitable for the configuration of communication protocols of various communication interface types in the field of semiconductor manufacturing equipment. The system of the present invention is developed based on the...

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Abstract

The invention provides a semiconductor manufacturing equipment functional simulation-oriented communication protocol mode configuration method, which comprises the following steps of: configuring a Boolean type communication protocol at a digital IO port, configuring a value type communication protocol at an analog IO port, and configuring a character string type communication protocol at a serial port, an Ethernet port and a DeviceNet port; and communicating between a simulation system and equipment by selecting corresponding Boolean type communication protocol, value type communication protocol or character string type communication protocol according to the type of the equipment. The system provides a unified configuration interface externally, and a call interface in the packing, unpacking and assignment process according to the three communication protocol types is the same interface. In addition, all communication protocol formats in the field of semiconductor manufacturing equipment can be configured, so the system has the characteristic of universality in the field of semiconductor manufacturing equipment.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a communication protocol mode configuration method for semiconductor manufacturing equipment function simulation. Background technique [0002] In the field of semiconductor manufacturing equipment, the communication modes between devices can be divided into five main types: direct IO, serial port, Ethernet, and DeviceNet. The control terminal sends the control command to the device side through a certain protocol format, and the device side sends the feedback information back to the control terminal through a certain protocol format. There are many equipment manufacturers in the field of semiconductor manufacturing equipment, and the communication protocols of each equipment are different. In order to realize the general configurable simulation system of the semiconductor manufacturing equipment platform, it is necessary to realize the configurability of vari...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04L29/06H04L1/00
Inventor 徐华王巍高士云李垒邓俊辉潘晨光
Owner TSINGHUA UNIV
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