Surface inspection device for cylindrical body

Abstract

A surface inspection device for a cylindrical body, provided with: an illumination light source (11) disposed above a cylindrical body (W); a beam splitter (13) disposed above the cylindrical body (W) so as to correspond to the illumination light source (11); and a surface condition recognition means (2) disposed above the beam splitter (13). Illumination light (L) emitted from the illumination light source (11) is reflected by the beam splitter (13) and applied coaxially to the surface of the cylindrical body, and the reflected light (Lr) reflected by the surface of the cylindrical body transmits through the beam splitter (13) and is recognized by the surface condition recognition means (2). The device is configured so that the illumination light (L) from the illumination light source (11) is applied from one end side of the cylindrical body (W) in the axis direction (X) toward the other end side so as to be parallel to the axis direction (X). The device can detect, among streak-like surface irregularities, only a defective streak-like surface irregularity.

Description

technical field [0001] The present invention relates to a cylindrical body surface inspection device for inspecting the surface state of a cylindrical body and related technologies. Background technique [0002] Cylindrical bodies such as substrates for photosensitive drums require high surface accuracy, so surface inspection is performed to exclude cylindrical bodies with surface defects such as scratches, unevenness, foreign matter adhesion, and dirt. [0003] For example, the surface inspection device of the cylindrical body disclosed in the following patent document 1 is as Figure 8 As shown, the cylinder W is irradiated with illumination light L from the light source 101 arranged on the upper side with respect to the cylinder W, and on the other hand, the regular reflected light (reflected light image) Lr thereof is photographed by the camera 102. Based on the photographed data , to detect surface defects of the cylinder 1. [0004] However, in recent years, as a subs...

AI Technical Summary

Problems solved by technology

In this way, the recesses D are detected by the difference in the light intensity of the specularly reflected light Lr. Therefore, although the depths and / or shapes of the recesses D are slightly different, all the recesses D are detected, and the non-defective stripe-shaped recess Da and the defective stripe cannot be accurately distinguished. shaped concave portion Db, there is a problem that inspection accuracy decreases

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