A three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force

A technology of micro-positioning platform and degree of freedom, which is applied to the parts, casings, instruments, etc. of the instrument, which can solve the problems of affecting the performance of the positioning platform, low bearing capacity, low response ability, etc., and achieve improved rotational stiffness and motion accuracy, high Natural frequency, effect of improving motion accuracy
CN107464586BActive Publication Date: 2020-02-18TIANJIN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TIANJIN UNIV
Publication Date
2020-02-18

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Abstract

The invention discloses a three-degree-of-freedom large-stroke micro-positioning platform achieving driving force decoupling. The three-degree-of-freedom large-stroke micro-positioning platform comprises a micro-moving platform base body which sequentially comprises a bottom plate, a middle part and a top layer part from bottom to top; two transferring beams are arranged in the center of the middle part, wherein the first transferring beam is used for connecting the middle part and flexible hinge deformation structures of two Y-direction ends of the top layer part, and the second transferring beam is used for connecting the middle part and flexible hinge deformation structures of two X-direction ends of the top layer part; the top layer part is sequentially provided with the flexible hinge deformation structures, a moving platform and an output platform from outside to inside, and the output platform is arranged in the center of the moving platform; and the two ends of the output platform are connected with piezo-ceramic actuators through lever amplifying mechanisms correspondingly. According to the three-degree-of-freedom large-stroke micro-positioning platform achieving driving force decoupling, the flexible beams are used for connecting two decoupled parts of the moving platform, and equal distribution and decoupling of the driving force are achieved; and through driving of two voice coil motors, high-precision and large-stroke movement of the moving platform in the X-Y plane is achieved.
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Description

technical field

[0001] The present invention relates to the technical field of micro-positioning platforms, in particular to a three-degree-of-freedom large-stroke micro-positioning platform with driving force decoupling, in particular to a three-degree-of-freedom large-stroke high-precision platform driven by a voice coil motor and piezoelectric ceramics , driving force decoupling flexible micro-positioning platform, used in microelectronics manufacturing, biomedical engineering, optical micro-assembly and ultra-precision processing and other fields. Background technique

[0002] With the continuous development of fields such as microelectronics manufacturing, biomedical engineering, optical microassembly and ultra-precision machining, these fields also put forward higher requirements for micro-positioning platforms. The current micro-positioning platform technology has made great progress, but there is still a lot of room for improvement in terms of response speed, stabili...

Claims

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