A three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force

Abstract

The invention discloses a three-degree-of-freedom large-stroke micro-positioning platform achieving driving force decoupling. The three-degree-of-freedom large-stroke micro-positioning platform comprises a micro-moving platform base body which sequentially comprises a bottom plate, a middle part and a top layer part from bottom to top; two transferring beams are arranged in the center of the middle part, wherein the first transferring beam is used for connecting the middle part and flexible hinge deformation structures of two Y-direction ends of the top layer part, and the second transferring beam is used for connecting the middle part and flexible hinge deformation structures of two X-direction ends of the top layer part; the top layer part is sequentially provided with the flexible hinge deformation structures, a moving platform and an output platform from outside to inside, and the output platform is arranged in the center of the moving platform; and the two ends of the output platform are connected with piezo-ceramic actuators through lever amplifying mechanisms correspondingly. According to the three-degree-of-freedom large-stroke micro-positioning platform achieving driving force decoupling, the flexible beams are used for connecting two decoupled parts of the moving platform, and equal distribution and decoupling of the driving force are achieved; and through driving of two voice coil motors, high-precision and large-stroke movement of the moving platform in the X-Y plane is achieved.

Description

technical field [0001] The present invention relates to the technical field of micro-positioning platforms, in particular to a three-degree-of-freedom large-stroke micro-positioning platform with driving force decoupling, in particular to a three-degree-of-freedom large-stroke high-precision platform driven by a voice coil motor and piezoelectric ceramics , driving force decoupling flexible micro-positioning platform, used in microelectronics manufacturing, biomedical engineering, optical micro-assembly and ultra-precision processing and other fields. Background technique [0002] With the continuous development of fields such as microelectronics manufacturing, biomedical engineering, optical microassembly and ultra-precision machining, these fields also put forward higher requirements for micro-positioning platforms. The current micro-positioning platform technology has made great progress, but there is still a lot of room for improvement in terms of response speed, stabili...

AI Technical Summary

Problems solved by technology

[0003] Traditional mechanisms are usually connected by kinematic pairs, which are composed of assembled assemblies, which have disadvantages such as friction, lubrication, and empty back characteristics.

Existing micro-positioning platforms widely use flexible hinge components, and use the resettable elastic deformation of the weak part of the rod to transmit motion, force and energy. It has many advantages such as no mechanical friction, no gap, no lubrication, stable movement, and high sensitivity. Accurate angular deformation in a small range, combined with the widely used parallel structure at the same time, overcomes the shortcomings of the traditional series configuration, such as serious error accumulation, low bearing capacity, and low response ability, and has made great achievements in the small-stroke precision positioning platform technology. major breakthrough

[0004] However, the existing micro-positioning platforms that use voice coil motors or piezoelectric ceramic drivers as driving elements and flexible hinge parallel mechanisms as supporting rails still have too small strokes and large volumes, and due to the limitations of driving force distribution and structure in different There is a certain coupling effect between the motion directions, which seriously affects the further improvement of the performance of the positioning platform

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