Horizontal dual-drive precision piezoelectric stick-slip linear device and its driving method

A dual-drive, horizontal technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problems of small output thrust, short stroke, low precision, etc. The effect of large output thrust, reduced frictional resistance and high precision

Active Publication Date: 2020-06-02
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors such as small output thrust, short stroke, and low precision due to single-stator drive, the present invention discloses a horizontal double-drive precision piezoelectric stick-slip linear device and its drive method

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  • Horizontal dual-drive precision piezoelectric stick-slip linear device and its driving method
  • Horizontal dual-drive precision piezoelectric stick-slip linear device and its driving method
  • Horizontal dual-drive precision piezoelectric stick-slip linear device and its driving method

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specific Embodiment approach 1

[0033] Specific implementation mode one: combine Figure 1~Figure 10 This embodiment is described. This embodiment provides a specific implementation of a horizontal double-drive precision piezoelectric stick-slip linear device. The specific implementation of the horizontal double-drive precision piezoelectric stick-slip linear device is expressed as follows:

[0034] The horizontal double-drive precision piezoelectric stick-slip linear device is composed of a cable-stayed horizontal stator 1 , a mover 2 , a base 3 , a displacement regulator 4 , a dovetail platform 5 and a dovetail platform limit bar 6 . Among them, two cable-stayed horizontal stators 1 with piezoelectric stacks 1-1 as driving elements are fixed on the base 3 in parallel, the mover 2 is installed on the front end of the dovetail platform 5, and the displacement regulator 4 is installed on the rear end of the base 3 The dovetail platform 5 is installed on the base 3 and is defined in the dovetail platform limit...

specific Embodiment approach 2

[0041] Specific implementation mode two: combination Figure 11~12 To illustrate this embodiment, this embodiment proposes a specific implementation of a driving method for a horizontal double-drive precision piezoelectric stick-slip linear device. The driving method for a horizontal double-drive precision piezoelectric stick-slip linear device is expressed as follows:

[0042] The driving method of the horizontal double-drive precision piezoelectric stick-slip linear device can be divided into output enhancement type and motion emergency stop type. The main reason is that the horizontal double-drive precision piezoelectric stick-slip linear device adopts a cable-stayed motion conversion beam 1- The 4-6 structure makes the axial stiffness distribution of the cable-stayed horizontal stator 1 uneven and produces lateral displacement. Adjust the positive pressure of the contact between the cable-stayed horizontal stator 1 and the mover 2, and then adjust the cable-stayed horizonta...

specific Embodiment approach 3

[0066] Specific implementation mode three: combination Figure 11 , 13 , 14 This embodiment is described. This embodiment proposes a specific implementation of the driving method of a horizontal double-drive precision piezoelectric stick-slip linear device installed back-to-back with a cable-stayed horizontal stator 1. The cable-stayed horizontal stator The driving method of the horizontal dual-drive precision piezoelectric stick-slip linear device installed back-to-back is expressed as follows:

[0067] The driving method of the horizontal double-drive precision piezoelectric stick-slip linear device with cable-stayed horizontal stator 1 back-to-back installation can be divided into output enhancement type and motion emergency stop type, mainly the horizontal double drive with the cable-stayed horizontal stator back-to-back installation The type precision piezoelectric stick-slip linear device adopts a cable-stayed motion conversion beam 1-2-6 structure, so that the axial st...

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Abstract

A horizontal double-drive precision piezoelectric stick-slip linear device and a driving method thereof are provided in order to solve the technical problems of low output thrust, small stroke and lowprecision caused by the fact that the current piezoelectric stick-slip linear motor is driven by a single stator. The horizontal double-drive precision piezoelectric stick-slip linear device is composed of oblique pulling horizontal stators, a mover, a base, a displacement regulator, a dovetail platform and dovetail platform limit strips. The oblique pulling horizontal stators produce lateral displacement to adjust the positive pressure of contact with the mover, so as to realize comprehensive control of the friction. Meanwhile, the oblique pulling horizontal stators are excited by differentasymmetric electrical signal combinations, and a variety of driving modes, such as an output strengthening driving mode and a motion emergency stop driving mode, can be achieved. The horizontal double-drive precision piezoelectric stick-slip linear device has the characteristics of large output thrust, high precision and large stroke, and has a good application prospect in the field of micro nanoprecision driving and positioning, such as optical precision instrument and semiconductor processing.

Description

technical field [0001] The invention relates to a horizontal dual-drive precision piezoelectric stick-slip linear device and a drive method thereof, belonging to the technical field of micro-nano precision drive and positioning. Background technique [0002] Piezoelectric motor is a new type of driving device that uses the inverse piezoelectric effect of piezoelectric materials to achieve precise output motion. Piezoelectric elements have the advantages of good stability, rapid response, precise positioning, high energy conversion rate, and large driving force. Commonly used piezoelectric materials are suitable for being processed into various shapes, and multilayer piezoelectric elements manufactured by special processes The piezoelectric stack composed of ceramic sheets has very good performance, so it is suitable to be applied in the field of ultra-precise positioning technology. Due to the many advantages of piezoelectric drive, piezoelectric precision micro-drive techn...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/04H02N2/06
CPCH02N2/04H02N2/06
Inventor 程廷海杨伟雄唐晚静卢晓晖乔永禄曹展豪贾荣
Owner CHANGCHUN UNIV OF TECH
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