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Rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor and composite excitation method thereof
ActiveCN105827143AIncrease frictionIncreased frictional driving forcePiezoelectric/electrostriction/magnetostriction machinesMicro nanoFriction force
The invention provides a rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor and a composite excitation method thereof to solve the problem that in an existing piezoelectric stick-slip linear motor, the mechanical output property is limited due to the fact that comprehensive regulation on friction force is difficult. The rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor is composed of an oblique-wedge stator, a preloading device, a mounting support and a rotor; the oblique-wedge stator adopts asymmetrical hinges of a wedged structure, lateral displacement is generated through an oblique-wedge rhombus motion converter and the ununiform axial rigidity distribution characteristic of a stator drive foot, the friction drive force is increased, and the friction resistance is decreased; meanwhile, friction regulation waves are overlapped into sawtooth drive waves in the rapid deformation stage of the stator, comprehensive regulation on the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly promoted. The rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like and has the good application prospect in the fields of micro-nano precise driving and positioning such as machining of precise medical instruments, optical precise instruments and semiconductors.
Owner:CHANGCHUN UNIV OF TECH
Composite flexural vibration sandwich type double-foot linear ultrasonic motor vibrator
ActiveCN102361413AIncrease flexibilityAchieve macro motion outputPiezoelectric/electrostriction/magnetostriction machinesAcousticsSandwich type
The invention discloses a composite flexural vibration sandwich type double-foot linear ultrasonic motor vibrator, and belongs to the technical field of piezoelectric ultrasonic motors. The vibrator solves the problem that the output thrust of a motor is affected by inconsistent vibration properties of two driving feet of the conventional flexural vibration modal beam type linear ultrasonic motor vibrator. Eight flexural vibration piezoelectric ceramic chips are sleeved on a stud of the vibrator, two end covers are respectively screwed at two ends of the stud to compact the eight flexural vibration piezoelectric ceramic chips, an electrode plate is respectively arranged between the adjacent flexural vibration piezoelectric ceramic chips and between the contact faces of the flexural vibration piezoelectric ceramic chip and the big end face of the end cover, insulating bushes are arranged between the contact faces of all the flexural vibration piezoelectric ceramic chips and the stud and between the contact faces of all the electrode plates and the stud, two thin-wall beams are symmetrically arranged at two sides of the big end face of each end cover, a mounting seat is fixed at the outer side of each thin-wall beam, a driving foot is arranged on the small end face of each end cover, and the driving feet are blocks, the sections of which are in the same shape as the small end faces. The vibrator is suitable for an ultrasonic motor.
Owner:HARBIN INST OF TECH
Orthographic double-driving-type precise piezoelectric stick-slip linear motor and driving method thereof
InactiveCN108199615AIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesElectricityMicro nano
The invention relates to an orthographic double-driving-type precise piezoelectric stick-slip linear motor and a driving method thereof. The technical problems are solved that since single-stator driving is adopted for an existing piezoelectric stick-slip linear motor, the output thrust is small, the stroke is short, and the precision is low. The motor comprises an inclined trapezoidal orthographic driving assembly, a rotor assembly, a base, a displacement adjuster, a dovetail platform and dovetail platform limit strips. The inclined trapezoidal orthographic driving assembly generates lateraldisplacement, the contact positive pressure between the inclined trapezoidal orthographic driving assembly and the rotor assembly is adjusted, and comprehensive regulation and control for the frictionforce are achieved; meanwhile, the inclined trapezoidal orthographic driving assembly is driven through different combinations of asymmetric electric signals, and multiple kinds of driving modes suchas output reinforcement type and motion emergent-stopping type can be achieved. The orthographic double-driving-type precise piezoelectric stick-slip linear motor has the advantages of large output thrust, high precision, long stroke and the like and has great application prospects in micro-nano precise driving and poisoning fields such as processing of optical precise instruments and semiconductors.
Owner:CHANGCHUN UNIV OF TECH
J-type structure precise piezoelectric stick-slip linear motor and drive method thereof
ActiveCN105932902AIncrease frictionIncreased frictional driving forcePiezoelectric/electrostriction/magnetostriction machinesAviationMicro nano
The invention discloses a J-type structure precise piezoelectric stick-slip linear motor and a drive method thereof. The problem that the output mechanical property is limited since the current piezoelectric stick-slip linear motor is difficult in friction force comprehensive regulation is solved. The motor is composed of four parts: a fixed base, a pre-pressure loading mechanism, a J-type structure stator and a rotor; the stator adopts a J-type hinge mechanism so that the axial rigidity distribution of the stator is non-uniform, the stator drive end is excited to produce the lateral displacement so as to increase the friction drive force and reduce the friction resistance; and meanwhile, the friction regulation wave is coupled and overlapped to the sawtooth drive wave of the slanted-slot type stator at the fast deformation stage, thereby reducing the friction resistance between the stator and the rotor at the fast deformation stage, implementing the comprehensive regulation on the friction force, and obviously promoting the mechanical output feature of the piezoelectric stick-slip linear motor. The motor disclosed by the invention has the features of being simple in structure, high in precision and large in travel, and has good application prospect in the aerospace aviation, optical precision instrument, semiconductor processing and like micro-nano precise driving and positioning field.
Owner:CHANGCHUN UNIV OF TECH
Parallel drive piezoelectric stick-slip linear motor and drive method therefor
InactiveCN108173453AIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoContact pressure
The invention discloses a parallel drive piezoelectric stick-slip linear motor and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The parallel drive piezoelectric stick-slip linear motor comprises oblique trapezoid drive assemblies, locking screws, a base, a dovetail platform displacement adjuster, a dovetail platform, dovetail platform limiting strips and a sliding assembly. The oblique trapezoid drive assemblies adjust the positive contact pressure between the oblique trapezoid drive assemblies and the sliding assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique trapezoid drive assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The parallel drive piezoelectric stick-slip linear motor has the characteristics of large output thrust, high precision and large stroke, andhas a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.
Owner:CHANGCHUN UNIV OF TECH
Slanted-slot type precise piezoelectric stick-slip linear motor and driving method thereof
ActiveCN105827140AReduce frictional resistanceImprove mechanical output characteristicsPiezoelectric/electrostriction/magnetostriction machinesMicro nanoStator
Provided are a slanted-slot type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment mechanism, a slanted-slot type stator and a slanted-slot type rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, due to the fact that rigidity distribution of slanted slots and a semicircular drive foot in the axial direction is nonuniform, lateral displacement is produced, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly improved. The slanted-slot type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.
Owner:CHANGCHUN UNIV OF TECH
Double-stator fixed piezoelectric inertial actuator and drive method therefor
ActiveCN108173454AIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoElectricity
The invention discloses a double-stator fixed piezoelectric inertial actuator and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The double-stator fixed piezoelectric inertial actuator comprises oblique-pull stator assemblies, a rotor assembly, a sliding boss, a micro-displacement adjuster and a base. The oblique-pull stator assemblies adjust the positive contact pressure between the oblique-pull stator assemblies and the rotor assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique-pull stator assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The double-stator fixed piezoelectric inertial actuator has the characteristics of being simple in structure, high in load capacity and stable in movement, and has a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.
Owner:CHANGCHUN UNIV OF TECH
Diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof
ActiveCN105897043AIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesElectricityLinear motor
The invention relates to a diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and a recombination excitation method thereof, aims to solve the problem that the output mechanical property of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive control on a friction force. The piezoelectric stick-slip linear motor comprises a pre-tightening force adjustment device, an oblique-pulling stator and a rotor, wherein the oblique-pulling stator generates lateral displacement by an oblique-pulling diamond-shaped movement converter, the friction driving force is increased, and the friction resistance is reduced; and meanwhile, a friction control wave is combined and superposed to a sawtooth driving wave in a rapid deformation stage of the oblique-pulling stator, so that the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, the comprehensive control on the friction force is achieved, and the mechanical output property of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the characteristics of compact structure, high precision, large stroke and the like, and has favorable application prospect in the fields with miniature structures, high positioning accuracy requirements and the like such as semiconductor processing and optical focusing.
Owner:CHANGCHUN UNIV OF TECH
Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof
InactiveCN108199614ADecrease the displacement return rateImprove mechanical output characteristicsPiezoelectric/electrostriction/magnetostriction machinesMicro nanoLateral displacement
The invention relates to a bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof, in order to solve the technical problems of small output thrust, short stroke, low precision and the like caused by adopting single stator driving. The invention comprises an asymmetrical driving component, a guide rail assembly, a sliding table, a pre-tightening force loader and a fixed platform. The said asymmetrical driving component adjusts the contact positive pressure between the asymmetrical driving component and the guide rail component by generating lateral displacement so as to realize the comprehensive regulation of the friction force; meanwhile, the invention drives the asymmetric driving component through the combination of different asymmetric electric signals so as to realize a plurality of driving modes such as an output reinforced type and a moving emergency stop type. The invention has the characteristics of simple structure, strong loading capacity, stable motion and the like, and has good application prospects in the field of micro-nano precise driving and positioning, such as optical manufacturing, semiconductor processing and the like.
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip motor using H-shaped structure and driving method thereof
ActiveCN108322088AImprove mechanical output characteristicsEasy to adjustPiezoelectric/electrostriction/magnetostriction machinesElectricityMicro nano
The invention discloses a piezoelectric stick-slip motor using an H-shaped structure and a driving method thereof, which can solves the technical problems that the current piezoelectric stick-slip displacement platforms are complicated in structure, are unstable in the force applied to a guide rail, and the pre-tightening force is inconveniently adjusted. The piezoelectric stick-slip motor includes a base, a guide rail, a drive stator, a guide rail mounting bolt, a loading mechanism, a thread pair, a drive stator mounting bolt, and a loading mechanism mounting bolt. The driving stator utilizesslow extension of stacked piezoelectric ceramics to drive the deformation of a flexible hinge, and reciprocating motion of the guide rail is realized by introducing sawtooth waves into a piezoelectric stack on the basis of the stick-slip principle. The piezoelectric stick-slip motor has the characteristics of simple structure, high stability and large stroke, and has good application prospect inthe field of micro-nano drive and positioning such as optical precise instruments and semiconductor processing.
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip linear motor equipped with inclined-ladder-shaped amplitude amplifying mechanism, and excitation method for piezoelectric stick-slip linear motor
ActiveCN106059381AImprove mechanical output characteristicsDisplacement retreat rate reducedPiezoelectric/electrostriction/magnetostriction machinesPhysicsMicro nano
The invention discloses a piezoelectric stick-slip linear motor equipped with an inclined-ladder-shaped amplitude amplifying mechanism, and an excitation method for the piezoelectric stick-slip linear motor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a base, a pre-loading assembly, an inclined-ladder-shaped stator and a mover, wherein the inclined-ladder-shaped amplitude amplifying switching mechanism of the stator has a micro-displacement amplifying function, and lateral displacement can be generated due to the axial uneven rigidity distribution; meanwhile, the friction driving force is increased while the friction resistance is decreased; the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation driving stage of the inclined-ladder-shaped stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation driving stage; and therefore, the comprehensive regulation and control on the friction force is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the characteristics of compact structure, convenience in assembling, high positioning precision, long journey and the like, and can be widely applied to semiconductor processing, and other micro-nano precision driving and positioning technical fields.
Owner:CHANGCHUN UNIV OF TECH
Inclined precision piezoelectric stick-slip linear motor and its driving method
ActiveCN105827140BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoElectricity
Provided are a slanted-slot type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment mechanism, a slanted-slot type stator and a slanted-slot type rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, due to the fact that rigidity distribution of slanted slots and a semicircular drive foot in the axial direction is nonuniform, lateral displacement is produced, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly improved. The slanted-slot type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.
Owner:CHANGCHUN UNIV OF TECH
Rhombus-hinge oblique-pull orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method
ActiveCN105897043BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesEngineeringLinear motor
Owner:CHANGCHUN UNIV OF TECH
Precision piezoelectric stick-slip linear motor with asymmetric structure and its driving method
ActiveCN105827142BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoEngineering
The invention provides a precise piezoelectric stick-slip linear motor with an asymmetric structure and a driving method thereof, and aims at solving the problem that mechanical output characteristics of an existing piezoelectric stick-slip linear motor are limited due to the fact that comprehensive regulation of friction is difficult and other problems. The precise piezoelectric stick-slip linear motor is composed of a fixed support, a loading mechanism, a stator and a rotor, and lateral displacement of the stator is produced by means of an asymmetric flexible hinge structure, so that friction driving force is increased, and friction resistance is reduced; meanwhile, a friction regulation wave is complexly superimposed in a sawtooth driving wave in the rapid deformation stage of the stator, therefore, the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction is achieved, and the mechanical output characteristics of the piezoelectric stick-slip linear motor are significantly improved. The precise piezoelectric stick-slip linear motor with the asymmetric structure has the advantages of being simple in structure, high in precision, large in stroke and the like and has good application prospects in the fields of micro-nano precision driving and positioning of aerospace, optical precision instruments, semiconductor machining and the like.
Owner:CHANGCHUN UNIV OF TECH
Compact-type precise piezoelectric stick-slip lifting platform and driving method thereof
ActiveCN108092549AReduce frictional resistanceImprove mechanical output characteristicsPiezoelectric/electrostriction/magnetostriction machinesPositional TechniqueWorking environment
The invention relates to a compact-type precise piezoelectric stick-slip lifting platform. By the compact-type precise piezoelectric stick-slip lifting platform, the problems of relatively low positioning accuracy and severe working environment requirement of a current electromagnetic motor-type driving platform and small range, serious wear, control complexity and difficulty in integral frictionforce control are solved. The lifting platform comprises a limitation table, a displacement table, dual-line cross roller guide rails, a fixed base, a driving stator, a pair of threads, an end cover,an end cover installation screw, a stator installation screw, a limitation table screw, a displacement table screw and a guide rail installation screw. The compact-type precise piezoelectric stick-slip lifting platform proposed by the invention has the advantages of simple and compact structure, high positioning accuracy, large range and the like and is convenient to control; and moreover, integral friction force control of the precise piezoelectric stick-slip lifting platform during the whole driving process is achieved, the mechanical output characteristic of the platform is improved, the positioning accuracy under an open-ring condition can reach nanoscale, and the compact-type precise piezoelectric stick-slip lifting platform can be widely applied to the technical field of precise driving and positioning.
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip linear motor with cable-pull diamond-shaped amplifying mechanism and its excitation method
ActiveCN105915109BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoPositional Technique
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip linear motor equipped with asymmetric rhombic amplifying mechanism and excitation method for piezoelectric stick-slip linear motor
ActiveCN106026765AImprove mechanical output characteristicsDisplacement retreat rate reducedPiezoelectric/electrostriction/magnetostriction machinesMicro nanoOptical instrument
The invention discloses a piezoelectric stick-slip linear motor equipped with an asymmetric rhombic amplifying mechanism and an excitation method for the piezoelectric stick-slip linear motor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force. The piezoelectric stick-slip linear motor comprises three parts: a pre-pressure regulating apparatus, a stator and a mover, wherein the asymmetric rhombic amplifying conversion mechanism of the stator has a micro-displacement amplifying function; side displacement can be generated by the asymmetric structure; meanwhile, the friction driving force is increased while the friction resistance is decreased; the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation driving stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation driving stage; and therefore, the comprehensive regulation and control on the friction force is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the characteristics of simple and compact structure, easy assembling, high precision, long journey and the like, and can be widely applied to the fields of precision optical instrument, semiconductor processing and other micro-nano precision driving and positioning technologies.
Owner:CHANGCHUN UNIV OF TECH
Ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator pretightened by using wedge blocks
InactiveCN102324868AImprove mechanical output capabilityImprove mechanical output characteristicsPiezoelectric/electrostriction/magnetostriction machinesElectricityHigh torque
The invention relates to a ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator pretightened by using wedge blocks, belonging to the technical field of piezoelectric ultrasonic motors. The problems of low electromechanical coupling efficiency and poor mechanical output capability of the traditional cylindrical traveling wave ultrasonic motor due to the d31 working mode of adopted piezoelectric ceramics are solved. The ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator comprises a metal matrix, 4n piezoelectric ceramic piece pairs, 8n wedge blocks, 4n electrode pieces and 4n insulation spacers, wherein n is a natural number greater than or equal to 3. The application of pretightening and prepressing to the piezoelectric ceramic pieces is realized by using the wedge blocks, the piezoelectric ceramic pieces work in the d33 vibration mode with high electromechanical coupling efficiency, and the d33 vibration mode is a mode in which the ceramic pieces made stretching vibration along the thickness direction. The ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator has high electromechanical coupling efficiency, and high torque output can be realized.
Owner:HARBIN INST OF TECH
Rhombus hinge paddle type orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method
ActiveCN106026766BComprehensive control of frictionIncreased frictional driving forcePiezoelectric/electrostriction/magnetostriction machinesElectricityOptical instrument
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip linear motor with chute-type diamond-shaped amplifying mechanism and its excitation method
ActiveCN105932901BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesPositional TechniqueMicro nano
The invention discloses a slanted-slot type diamond amplification mechanism piezoelectric stick-slip linear motor and an excitation method thereof. The problem that the output mechanical property is limited since the current piezoelectric stick-slip linear motor is difficult in friction force comprehensive regulation is solved. The motor comprises a pre-loading mechanism, a slanted-slot type stator and a rotor; the slanted-slot type diamond movement conversion mechanism set by the slanted-slot type stator can realize the displacement amplification, and is capable of increasing the friction drive force and reducing the friction resistance since the non-uniform axial rigidity distribution thereof produces the lateral displacement; and meanwhile, the friction regulation wave is coupled and overlapped to the sawtooth drive wave of the slanted-slot type stator at the fast deformation drive stage, thereby reducing the friction resistance between the stator and the rotor at the fast deformation drive stage, implementing the comprehensive regulation on the friction force, and obviously promoting the mechanical output feature of the piezoelectric stick-slip linear motor. The motor disclosed by the invention has the advantages of being compact in structure, convenient for controlling, high in positioning precision and unlimited in travel, so that the motor can be well applied to the precise optical instruments and like micro-nano precise drive and positioning technical field.
Owner:CHANGCHUN UNIV OF TECH
Composite flexural vibration sandwich type double-foot linear ultrasonic motor vibrator
ActiveCN102361413BIncrease flexibilityAchieve macro motion outputPiezoelectric/electrostriction/magnetostriction machinesAcousticsSandwich type
The invention discloses a composite flexural vibration sandwich type double-foot linear ultrasonic motor vibrator, and belongs to the technical field of piezoelectric ultrasonic motors. The vibrator solves the problem that the output thrust of a motor is affected by inconsistent vibration properties of two driving feet of the conventional flexural vibration modal beam type linear ultrasonic motor vibrator. Eight flexural vibration piezoelectric ceramic chips are sleeved on a stud of the vibrator, two end covers are respectively screwed at two ends of the stud to compact the eight flexural vibration piezoelectric ceramic chips, an electrode plate is respectively arranged between the adjacent flexural vibration piezoelectric ceramic chips and between the contact faces of the flexural vibration piezoelectric ceramic chip and the big end face of the end cover, insulating bushes are arranged between the contact faces of all the flexural vibration piezoelectric ceramic chips and the stud and between the contact faces of all the electrode plates and the stud, two thin-wall beams are symmetrically arranged at two sides of the big end face of each end cover, a mounting seat is fixed at the outer side of each thin-wall beam, a driving foot is arranged on the small end face of each end cover, and the driving feet are blocks, the sections of which are in the same shape as the small end faces. The vibrator is suitable for an ultrasonic motor.
Owner:HARBIN INST OF TECH
Piezoelectric stick-slip linear motor with asymmetric rhombic amplifying mechanism and its excitation method
ActiveCN106026765BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoNon symmetric
The invention discloses a piezoelectric stick-slip linear motor equipped with an asymmetric rhombic amplifying mechanism and an excitation method for the piezoelectric stick-slip linear motor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force. The piezoelectric stick-slip linear motor comprises three parts: a pre-pressure regulating apparatus, a stator and a mover, wherein the asymmetric rhombic amplifying conversion mechanism of the stator has a micro-displacement amplifying function; side displacement can be generated by the asymmetric structure; meanwhile, the friction driving force is increased while the friction resistance is decreased; the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation driving stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation driving stage; and therefore, the comprehensive regulation and control on the friction force is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the characteristics of simple and compact structure, easy assembling, high precision, long journey and the like, and can be widely applied to the fields of precision optical instrument, semiconductor processing and other micro-nano precision driving and positioning technologies.
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip linear motor with single hook displacement conversion mechanism and its excitation method
ActiveCN106059380BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesElectricityTransfer mechanism
The invention discloses a single hook type displacement transfer mechanism piezoelectric stick-slip linear motor and a motivation method thereof, for solving the problem that mechanical output performance of a current piezoelectric stick-slip linear motor is limited as a friction force is difficult to adjust synthetically. The motor is composed of a loading mechanism, a single hook type stator and a rotor, wherein a single hook type diamond displacement amplification and transfer mechanism of the stator has a micrometric displacement amplification function, due to non-uniform axial rigidity distribution of the single hook type stator, lateral displacement is generated, while a friction driving force is increased, and a friction resistance is reduced; meanwhile, friction control waves are coupled and superposed into saw-toothed drive waves of the single hook type stator in a rapid deformation stage, so that the friction resistance between the stator and the rotor in the rapid reformation stage is reduced, synthetic control on the friction force is achieved, and the mechanical output performance of the piezoelectric stick-slip linear motor is obviously enhanced. Due to the advantages of being simple and compact in structure, convenient to assemble, high in positioning accuracy and not limited in stroke, the single hook type displacement transfer mechanism piezoelectric stick-slip linear motor can be widely applied to the field of micro / nano precision driving and positioning technologies such as semiconductor processing.
Owner:CHANGCHUN UNIV OF TECH
Piezoelectric stick-slip linear motor with inclined wedge type rhombus amplifying mechanism and its excitation method
ActiveCN105897044BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMicro nanoPre stressing
Owner:CHANGCHUN UNIV OF TECH
Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor
ActiveCN106059382AIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesElectricityLinear motor
The invention discloses a rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and a composite excitation method therefor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a pre-tightening force regulating apparatus, a stator and a mover, wherein the stator generates side displacement by a skewed slot type rhombic movement converter, so that the friction driving force is increased while the friction resistance is decreased; the mover driving is achieved by the generated side displacement through a driving foot; meanwhile, the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation stage; and therefore, the displacement band-returning rate is lowered, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the advantages of compact structure, simple control, high positioning precision and the like, and can be widely applied to the advanced technical fields of semiconductor processing, optical precision instrument, and the like.
Owner:CHANGCHUN UNIV OF TECH
Inclined Trapezoid Orthogonal Drive Type Piezoelectric Stick-Slip Linear Motor and Its Composite Excitation Method
ActiveCN105827144BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesMiniaturizationLinear motor
Provided are an oblique-trapezoid orthogonal driving type piezoelectric stick-slip linear motor and a compound excitation method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is degraded is solved. The motor is composed of a loading device, a stator and a rotor; the stator utilizes an oblique-trapezoid motion converter to produce lateral displacement, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the linear piezoelectric motor is significantly improved. The oblique-trapezoid orthogonal driving type piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the fields such as semiconductor processing and optical focusing which achieve miniaturization of the structure and require accurate positioning is achieved.
Owner:CHANGCHUN UNIV OF TECH
Double-stator fixed piezoelectric inertial driver and its driving method
ActiveCN108173454BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesClassical mechanicsLinear motor
The invention discloses a double-stator fixed piezoelectric inertial actuator and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The double-stator fixed piezoelectric inertial actuator comprises oblique-pull stator assemblies, a rotor assembly, a sliding boss, a micro-displacement adjuster and a base. The oblique-pull stator assemblies adjust the positive contact pressure between the oblique-pull stator assemblies and the rotor assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique-pull stator assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The double-stator fixed piezoelectric inertial actuator has the characteristics of being simple in structure, high in load capacity and stable in movement, and has a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.
Owner:CHANGCHUN UNIV OF TECH
Rhombus wedge-type orthogonal drive piezoelectric stick-slip linear motor and its composite excitation method
ActiveCN105827143BIncrease frictionIncreased frictional driving forcePiezoelectric/electrostriction/magnetostriction machinesMicro nanoFriction force
Owner:CHANGCHUN UNIV OF TECH
Rhombus hinge chute type orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method
ActiveCN106059382BIncreased frictional driving forceReduce frictional resistancePiezoelectric/electrostriction/magnetostriction machinesEngineeringLinear motor
The invention discloses a rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and a composite excitation method therefor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a pre-tightening force regulating apparatus, a stator and a mover, wherein the stator generates side displacement by a skewed slot type rhombic movement converter, so that the friction driving force is increased while the friction resistance is decreased; the mover driving is achieved by the generated side displacement through a driving foot; meanwhile, the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation stage; and therefore, the displacement band-returning rate is lowered, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the advantages of compact structure, simple control, high positioning precision and the like, and can be widely applied to the advanced technical fields of semiconductor processing, optical precision instrument, and the like.
Owner:CHANGCHUN UNIV OF TECH
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