40results about How to "Improve mechanical output characteristics" patented technology

The invention provides a rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor and a composite excitation method thereof to solve the problem that in an existing piezoelectric stick-slip linear motor, the mechanical output property is limited due to the fact that comprehensive regulation on friction force is difficult. The rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor is composed of an oblique-wedge stator, a preloading device, a mounting support and a rotor; the oblique-wedge stator adopts asymmetrical hinges of a wedged structure, lateral displacement is generated through an oblique-wedge rhombus motion converter and the ununiform axial rigidity distribution characteristic of a stator drive foot, the friction drive force is increased, and the friction resistance is decreased; meanwhile, friction regulation waves are overlapped into sawtooth drive waves in the rapid deformation stage of the stator, comprehensive regulation on the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly promoted. The rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like and has the good application prospect in the fields of micro-nano precise driving and positioning such as machining of precise medical instruments, optical precise instruments and semiconductors.

The invention relates to an orthographic double-driving-type precise piezoelectric stick-slip linear motor and a driving method thereof. The technical problems are solved that since single-stator driving is adopted for an existing piezoelectric stick-slip linear motor, the output thrust is small, the stroke is short, and the precision is low. The motor comprises an inclined trapezoidal orthographic driving assembly, a rotor assembly, a base, a displacement adjuster, a dovetail platform and dovetail platform limit strips. The inclined trapezoidal orthographic driving assembly generates lateraldisplacement, the contact positive pressure between the inclined trapezoidal orthographic driving assembly and the rotor assembly is adjusted, and comprehensive regulation and control for the frictionforce are achieved; meanwhile, the inclined trapezoidal orthographic driving assembly is driven through different combinations of asymmetric electric signals, and multiple kinds of driving modes suchas output reinforcement type and motion emergent-stopping type can be achieved. The orthographic double-driving-type precise piezoelectric stick-slip linear motor has the advantages of large output thrust, high precision, long stroke and the like and has great application prospects in micro-nano precise driving and poisoning fields such as processing of optical precise instruments and semiconductors.

The invention discloses a J-type structure precise piezoelectric stick-slip linear motor and a drive method thereof. The problem that the output mechanical property is limited since the current piezoelectric stick-slip linear motor is difficult in friction force comprehensive regulation is solved. The motor is composed of four parts: a fixed base, a pre-pressure loading mechanism, a J-type structure stator and a rotor; the stator adopts a J-type hinge mechanism so that the axial rigidity distribution of the stator is non-uniform, the stator drive end is excited to produce the lateral displacement so as to increase the friction drive force and reduce the friction resistance; and meanwhile, the friction regulation wave is coupled and overlapped to the sawtooth drive wave of the slanted-slot type stator at the fast deformation stage, thereby reducing the friction resistance between the stator and the rotor at the fast deformation stage, implementing the comprehensive regulation on the friction force, and obviously promoting the mechanical output feature of the piezoelectric stick-slip linear motor. The motor disclosed by the invention has the features of being simple in structure, high in precision and large in travel, and has good application prospect in the aerospace aviation, optical precision instrument, semiconductor processing and like micro-nano precise driving and positioning field.

The invention discloses a parallel drive piezoelectric stick-slip linear motor and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The parallel drive piezoelectric stick-slip linear motor comprises oblique trapezoid drive assemblies, locking screws, a base, a dovetail platform displacement adjuster, a dovetail platform, dovetail platform limiting strips and a sliding assembly. The oblique trapezoid drive assemblies adjust the positive contact pressure between the oblique trapezoid drive assemblies and the sliding assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique trapezoid drive assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The parallel drive piezoelectric stick-slip linear motor has the characteristics of large output thrust, high precision and large stroke, andhas a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.

Provided are a slanted-slot type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment mechanism, a slanted-slot type stator and a slanted-slot type rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, due to the fact that rigidity distribution of slanted slots and a semicircular drive foot in the axial direction is nonuniform, lateral displacement is produced, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly improved. The slanted-slot type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.

The invention discloses a double-stator fixed piezoelectric inertial actuator and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The double-stator fixed piezoelectric inertial actuator comprises oblique-pull stator assemblies, a rotor assembly, a sliding boss, a micro-displacement adjuster and a base. The oblique-pull stator assemblies adjust the positive contact pressure between the oblique-pull stator assemblies and the rotor assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique-pull stator assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The double-stator fixed piezoelectric inertial actuator has the characteristics of being simple in structure, high in load capacity and stable in movement, and has a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.

The invention relates to a bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof, in order to solve the technical problems of small output thrust, short stroke, low precision and the like caused by adopting single stator driving. The invention comprises an asymmetrical driving component, a guide rail assembly, a sliding table, a pre-tightening force loader and a fixed platform. The said asymmetrical driving component adjusts the contact positive pressure between the asymmetrical driving component and the guide rail component by generating lateral displacement so as to realize the comprehensive regulation of the friction force; meanwhile, the invention drives the asymmetric driving component through the combination of different asymmetric electric signals so as to realize a plurality of driving modes such as an output reinforced type and a moving emergency stop type. The invention has the characteristics of simple structure, strong loading capacity, stable motion and the like, and has good application prospects in the field of micro-nano precise driving and positioning, such as optical manufacturing, semiconductor processing and the like.

The invention discloses a piezoelectric stick-slip linear motor equipped with an inclined-ladder-shaped amplitude amplifying mechanism, and an excitation method for the piezoelectric stick-slip linear motor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a base, a pre-loading assembly, an inclined-ladder-shaped stator and a mover, wherein the inclined-ladder-shaped amplitude amplifying switching mechanism of the stator has a micro-displacement amplifying function, and lateral displacement can be generated due to the axial uneven rigidity distribution; meanwhile, the friction driving force is increased while the friction resistance is decreased; the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation driving stage of the inclined-ladder-shaped stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation driving stage; and therefore, the comprehensive regulation and control on the friction force is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the characteristics of compact structure, convenience in assembling, high positioning precision, long journey and the like, and can be widely applied to semiconductor processing, and other micro-nano precision driving and positioning technical fields.

The invention relates to a compact-type precise piezoelectric stick-slip lifting platform. By the compact-type precise piezoelectric stick-slip lifting platform, the problems of relatively low positioning accuracy and severe working environment requirement of a current electromagnetic motor-type driving platform and small range, serious wear, control complexity and difficulty in integral frictionforce control are solved. The lifting platform comprises a limitation table, a displacement table, dual-line cross roller guide rails, a fixed base, a driving stator, a pair of threads, an end cover,an end cover installation screw, a stator installation screw, a limitation table screw, a displacement table screw and a guide rail installation screw. The compact-type precise piezoelectric stick-slip lifting platform proposed by the invention has the advantages of simple and compact structure, high positioning accuracy, large range and the like and is convenient to control; and moreover, integral friction force control of the precise piezoelectric stick-slip lifting platform during the whole driving process is achieved, the mechanical output characteristic of the platform is improved, the positioning accuracy under an open-ring condition can reach nanoscale, and the compact-type precise piezoelectric stick-slip lifting platform can be widely applied to the technical field of precise driving and positioning.

The invention discloses a piezoelectric stick-slip linear motor equipped with an asymmetric rhombic amplifying mechanism and an excitation method for the piezoelectric stick-slip linear motor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force. The piezoelectric stick-slip linear motor comprises three parts: a pre-pressure regulating apparatus, a stator and a mover, wherein the asymmetric rhombic amplifying conversion mechanism of the stator has a micro-displacement amplifying function; side displacement can be generated by the asymmetric structure; meanwhile, the friction driving force is increased while the friction resistance is decreased; the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation driving stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation driving stage; and therefore, the comprehensive regulation and control on the friction force is realized, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the characteristics of simple and compact structure, easy assembling, high precision, long journey and the like, and can be widely applied to the fields of precision optical instrument, semiconductor processing and other micro-nano precision driving and positioning technologies.

The invention relates to a ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator pretightened by using wedge blocks, belonging to the technical field of piezoelectric ultrasonic motors. The problems of low electromechanical coupling efficiency and poor mechanical output capability of the traditional cylindrical traveling wave ultrasonic motor due to the d31 working mode of adopted piezoelectric ceramics are solved. The ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator comprises a metal matrix, 4n piezoelectric ceramic piece pairs, 8n wedge blocks, 4n electrode pieces and 4n insulation spacers, wherein n is a natural number greater than or equal to 3. The application of pretightening and prepressing to the piezoelectric ceramic pieces is realized by using the wedge blocks, the piezoelectric ceramic pieces work in the d33 vibration mode with high electromechanical coupling efficiency, and the d33 vibration mode is a mode in which the ceramic pieces made stretching vibration along the thickness direction. The ceramic embedded type cylindrical traveling wave ultrasonic motor vibrator has high electromechanical coupling efficiency, and high torque output can be realized.

The invention discloses a rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and a composite excitation method therefor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a pre-tightening force regulating apparatus, a stator and a mover, wherein the stator generates side displacement by a skewed slot type rhombic movement converter, so that the friction driving force is increased while the friction resistance is decreased; the mover driving is achieved by the generated side displacement through a driving foot; meanwhile, the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation stage; and therefore, the displacement band-returning rate is lowered, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the advantages of compact structure, simple control, high positioning precision and the like, and can be widely applied to the advanced technical fields of semiconductor processing, optical precision instrument, and the like.