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Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof

A linear motor, micro-displacement technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve the problems of small load output, poor motion stability, complex structure, etc. , to achieve the effect of reducing the displacement return rate, strong load capacity and simple structure

Inactive Publication Date: 2018-06-22
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of complex structure, small load output and poor motion stability in traditional driving motors, the present invention discloses a two-way micro-displacement amplified precision piezoelectric stick-slip linear motor and its driving method

Method used

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  • Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof
  • Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof
  • Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof

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specific Embodiment approach 1

[0030] Specific implementation mode one: combine Figure 1~Figure 9 Describe this embodiment. This embodiment provides a specific implementation of a bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor. The specific implementation of the bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor is described as follows:

[0031] The bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor is composed of an asymmetric drive assembly 1 , a guide rail assembly 2 , a slide table 3 , a preloader 4 and a fixed table 5 .

[0032] The asymmetric drive assembly 1 includes a square washer 1-1, a hinge fixing bolt 1-2, a pre-tightening screw 1-3, an asymmetric diamond-shaped amplifying mechanism 1-4 and a piezoelectric stack 1-5. The square washer 1-1 and the pre-tightening screw 1-3 fix the piezoelectric stack 1-5 in the asymmetric diamond-shaped amplification mechanism 1-4. The sq...

specific Embodiment approach 2

[0037] Specific implementation mode two: combination Figure 10~11 Describe this embodiment. This embodiment proposes a specific implementation of a two-way micro-displacement amplified precision piezoelectric stick-slip linear motor driving method I. The two-way micro-displacement amplified precision piezoelectric stick-slip linear motor drive method Ⅰ is expressed as follows:

[0038] The driving method of the two-way micro-displacement amplification precision piezoelectric stick-slip linear motor can be divided into output enhancement type and motion emergency stop type. 1-4, so that the asymmetric drive assembly 1 is unevenly distributed along the axial direction to generate lateral displacement, adjust the positive pressure of the contact between the asymmetric drive assembly 1 and the guide rail assembly 2, and then regulate the asymmetric drive assembly 1 At the same time, under the excitation of different combinations of asymmetric electrical signals, various driving ...

specific Embodiment approach 3

[0062] Specific implementation mode three: combination Figure 10 , 12 , 13 This embodiment is described. This embodiment proposes a specific implementation of the two-way micro-displacement amplified precision piezoelectric stick-slip linear motor driving method II with an asymmetric drive assembly 1 installed back to back. The two-way micro-displacement amplified precision piezoelectric stick-slip linear motor drive method II with drive components installed back to back is expressed as follows:

[0063] Asymmetric drive components 1. Two-way micro-displacement amplified precision piezoelectric stick-slip linear motors, which are installed back-to-back. The displacement amplified precision piezoelectric stick-slip linear motor adopts asymmetric diamond-shaped amplifying mechanism 1-4, which makes the asymmetric drive assembly 1 have uneven distribution of axial stiffness and produces lateral displacement. Adjust the asymmetric drive assembly 1 and the guide rail The positiv...

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Abstract

The invention relates to a bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof, in order to solve the technical problems of small output thrust, short stroke, low precision and the like caused by adopting single stator driving. The invention comprises an asymmetrical driving component, a guide rail assembly, a sliding table, a pre-tightening force loader and a fixed platform. The said asymmetrical driving component adjusts the contact positive pressure between the asymmetrical driving component and the guide rail component by generating lateral displacement so as to realize the comprehensive regulation of the friction force; meanwhile, the invention drives the asymmetric driving component through the combination of different asymmetric electric signals so as to realize a plurality of driving modes such as an output reinforced type and a moving emergency stop type. The invention has the characteristics of simple structure, strong loading capacity, stable motion and the like, and has good application prospects in the field of micro-nano precise driving and positioning, such as optical manufacturing, semiconductor processing and the like.

Description

technical field [0001] The invention relates to a bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Due to the rapid development of micro-nano technology, traditional macroscopic large-scale driving devices, such as ordinary motors, gear transmissions, screw nuts, worm gears, etc., have been difficult to meet the precision requirements of modern technology. All kinds of precision and ultra-precision machining and measurement technology, micro-electro-mechanical systems, precision optics, semiconductor manufacturing, modern medicine and biogenetic engineering, aerospace, robotics, military technology and other high-end scientific and technological fields are in urgent need of sub-micron, micro / Nanoscale precision drive motors. The discovery of the inverse piezoelectric effect of piezoelectric m...

Claims

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Application Information

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IPC IPC(8): H02N2/04H02N2/06
CPCH02N2/04H02N2/043H02N2/062
Inventor 程廷海王舒扬唐晚静邢辉达宁鹏杨晨
Owner CHANGCHUN UNIV OF TECH
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