Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof

A linear motor, micro-displacement technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve the problems of small load output, poor motion stability, complex structure, etc. , to achieve the effect of reducing the displacement return rate, strong load capacity and simple structure

Inactive Publication Date: 2018-06-22
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of complex structure, small load output and poor motion stability in traditional driving motors, the

Method used

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  • Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof
  • Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof
  • Bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof

Examples

Experimental program
Comparison scheme
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Example Embodiment

[0030] Embodiment 1: Combining Figure 1~Figure 9 This embodiment is described. This embodiment provides a specific implementation of a bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor, and the specific implementation of the bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor is described. as follows:

[0031] The bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor is composed of an asymmetrical drive assembly 1 , a guide rail assembly 2 , a sliding table 3 , a pre-tightening force loader 4 and a fixing table 5 .

[0032] The asymmetrical drive assembly 1 includes a square washer 1-1, a hinge fixing bolt 1-2, a pre-tightening screw 1-3, an asymmetrical rhombus amplifying mechanism 1-4 and a piezoelectric stack 1-5. The square spacer 1-1 and the preloading screw 1-3 fix the piezoelectric stack 1-5 in the asymmetric diamond-shaped amplifying mechanism 1-4. Th...

Example Embodiment

[0037] Specific implementation mode 2: Combining Figures 10~11 This embodiment is described. This embodiment proposes a specific embodiment of a bidirectional micro-displacement amplification type precision piezoelectric stick-slip linear motor driving method I, the bidirectional micro-displacement amplification type precision piezoelectric stick-slip linear motor driving method. I is expressed as follows:

[0038] The driving method of the bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor can be divided into an output-enhanced type and a motion emergency stop type. 1-4, so that the asymmetrical drive assembly 1 is unevenly distributed along the axial direction to generate lateral displacement, adjust the positive pressure of the contact between the asymmetrical drive assembly 1 and the guide rail assembly 2, and then regulate the asymmetrical drive assembly 1 At the same time, under the excitation of different combinations of asymmet...

Example Embodiment

[0062] Specific implementation three: combination Figure 10 , 12 13. This embodiment is described. This embodiment proposes a specific embodiment of a bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor driving method II with a back-to-back installation of the asymmetric drive assembly 1. The driving method II of the bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor with the drive components installed back-to-back is expressed as follows:

[0063] Asymmetrical drive assembly 1 The two-way micro-displacement amplified precision piezoelectric stick-slip linear motor that is installed back-to-back can be divided into output-enhanced type and motion emergency stop type. The displacement-amplified precision piezoelectric stick-slip linear motor adopts asymmetric diamond-shaped amplifying mechanisms 1-4, so that the asymmetrical drive assembly 1 is unevenly distributed along the axial direction and cau...

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Abstract

The invention relates to a bi-directional micro-displacement large-scale precise piezoelectric stick-slip linear motor and driving method thereof, in order to solve the technical problems of small output thrust, short stroke, low precision and the like caused by adopting single stator driving. The invention comprises an asymmetrical driving component, a guide rail assembly, a sliding table, a pre-tightening force loader and a fixed platform. The said asymmetrical driving component adjusts the contact positive pressure between the asymmetrical driving component and the guide rail component by generating lateral displacement so as to realize the comprehensive regulation of the friction force; meanwhile, the invention drives the asymmetric driving component through the combination of different asymmetric electric signals so as to realize a plurality of driving modes such as an output reinforced type and a moving emergency stop type. The invention has the characteristics of simple structure, strong loading capacity, stable motion and the like, and has good application prospects in the field of micro-nano precise driving and positioning, such as optical manufacturing, semiconductor processing and the like.

Description

technical field [0001] The invention relates to a bidirectional micro-displacement amplified precision piezoelectric stick-slip linear motor and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Due to the rapid development of micro-nano technology, traditional macroscopic large-scale driving devices, such as ordinary motors, gear transmissions, screw nuts, worm gears, etc., have been difficult to meet the precision requirements of modern technology. All kinds of precision and ultra-precision machining and measurement technology, micro-electro-mechanical systems, precision optics, semiconductor manufacturing, modern medicine and biogenetic engineering, aerospace, robotics, military technology and other high-end scientific and technological fields are in urgent need of sub-micron, micro / Nanoscale precision drive motors. The discovery of the inverse piezoelectric effect of piezoelectric m...

Claims

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Application Information

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IPC IPC(8): H02N2/04H02N2/06
CPCH02N2/04H02N2/043H02N2/062
Inventor 程廷海王舒扬唐晚静邢辉达宁鹏杨晨
Owner CHANGCHUN UNIV OF TECH
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