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Rhombus-hinge oblique-pull orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method

A linear motor, cable-pull technology, applied in the field of micro-nano precision drive and positioning, can solve the problems of zigzag-like uneven motion output, deteriorating the mechanical output performance of the driver, and limited mechanical output characteristics, and improve the mechanical output characteristics. , The effect of reducing the displacement back-off rate and improving the output efficiency

Active Publication Date: 2017-08-29
CHANGCHUN UNIV OF TECH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation and control of the friction between the stator and the mover, the limited mechanical output characteristics, the generation of sawtooth-like uneven motion output, and the deterioration of the mechanical output performance of the driver, the present invention Disclosed is a rhombus hinge oblique pull type orthogonal drive type piezoelectric stick-slip linear motor and its compound excitation method

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  • Rhombus-hinge oblique-pull orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method
  • Rhombus-hinge oblique-pull orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method
  • Rhombus-hinge oblique-pull orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method

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specific Embodiment approach 1

[0022] Specific implementation mode one: combine Figure 1~Figure 9 This embodiment will be described. This embodiment provides a specific implementation of a rhombus-hinge inclined-pull orthogonally driven piezoelectric stick-slip linear motor. The rhombus-hinge cable-stayed orthogonal drive piezoelectric stick-slip linear motor is composed of a preload adjusting device 1 , a cable-stayed stator 2 and a mover 3 .

[0023]The pre-tightening force adjusting device 1 is a pre-tightening force adjusting device of a rhombus hinge oblique-pull type orthogonal drive type piezoelectric stick-slip linear motor, and the pre-tightening force adjusting device 1 is composed of a mounting support 1-1, a moving slide table 1-2 and a preload adjusting screw 1-3, the preload adjusting device 1 can be made of aluminum alloy. The installation support 1-1 is provided with an installation positioning hole 1-1-1 and a positioning support plane 1-1-8 for installing the mover 3; the bottom of the ...

specific Embodiment approach 2

[0026] Specific implementation mode two: combination Figure 10 This embodiment will be described. This embodiment provides a specific embodiment of a compound excitation method for a rhombus hinge oblique pull type orthogonal drive piezoelectric stick-slip linear motor. The composite excitation method of the rhombohedral-hinge inclined-pull orthogonally driven piezoelectric stick-slip linear motor is as follows.

[0027] The composite excitation electric signal used in the composite excitation method is formed by superimposing the friction regulation wave on the driving wave in the rapid deformation driving stage of the cable-stayed stator. The friction regulation wave is a sine wave, and the driving wave is a sawtooth wave. Specifically, the composite excitation electrical signal used in the composite excitation method is compounded by the sawtooth driving wave in the rapid deformation driving stage of the cable-stayed stator superimposed on the micro-amplitude friction sin...

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Abstract

The invention relates to a diamond-shaped hinge oblique-pulling quadratured driving type piezoelectric stick-slip linear motor and a recombination excitation method thereof, aims to solve the problem that the output mechanical property of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive control on a friction force. The piezoelectric stick-slip linear motor comprises a pre-tightening force adjustment device, an oblique-pulling stator and a rotor, wherein the oblique-pulling stator generates lateral displacement by an oblique-pulling diamond-shaped movement converter, the friction driving force is increased, and the friction resistance is reduced; and meanwhile, a friction control wave is combined and superposed to a sawtooth driving wave in a rapid deformation stage of the oblique-pulling stator, so that the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, the comprehensive control on the friction force is achieved, and the mechanical output property of the piezoelectric stick-slip linear motor is improved. The piezoelectric stick-slip linear motor has the characteristics of compact structure, high precision, large stroke and the like, and has favorable application prospect in the fields with miniature structures, high positioning accuracy requirements and the like such as semiconductor processing and optical focusing.

Description

technical field [0001] The invention relates to a diamond hinge oblique pull type orthogonal drive piezoelectric stick-slip linear motor and a compound excitation method thereof, belonging to the technical field of micro-nano precision drive and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical output through the frictional coupling between the vibrator and the mover. precision piezoelectric motor. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/04H02N2/06
CPCH02N2/04H02N2/06
Inventor 程廷海张邦成柳虹亮何猛高琪李博文
Owner CHANGCHUN UNIV OF TECH
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