Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor

A linear motor and drive-type technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., can solve the problem of sawtooth-like unstable motion output and degraded drive output performance , limited mechanical output characteristics, etc., to achieve the effect of improving mechanical output characteristics, output efficiency, and output force

Active Publication Date: 2016-10-26
CHANGCHUN UNIV OF TECH
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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction between the stator and the mover, the limited mechanical output characteristics, the generation of sawtooth-like uneven motion output, and the deterioration of the output performance of the driver, the present invention Disclosed is a diamond hinge chute type orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method

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  • Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor
  • Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor
  • Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor

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specific Embodiment approach 1

[0021] Specific implementation mode one: combine Figure 1~Figure 9 This embodiment will be described. This embodiment provides a specific implementation of a rhombus hinge chute type orthogonal drive piezoelectric stick-slip linear motor. The rhombus hinge chute type orthogonal drive piezoelectric stick-slip linear motor is composed of a preload adjusting device 1 , a stator 2 and a mover 3 .

[0022]The preload adjusting device 1 is composed of a fixed support 1-1, an object stage 1-2 and a preload mechanism 1-3. The fixed support 1-1 is provided with a fixed guide rail installation hole 1-1-1 and a fixed guide rail installation plane 1-1-8 for installing the mover 3; the bottom of the fixed support 1-1 is provided with an installation threaded hole 1-1-2, the fixing of the fixed support 1-1 and the peripheral device can be realized through threaded connection; the fixed support 1-1 is provided with a rolling frame 1-1-4, which is used for the mounting of the stage 1-2 Sl...

specific Embodiment approach 2

[0025] Specific implementation mode two: combination Figure 10 This embodiment will be described. This embodiment provides a specific embodiment of a compound excitation method for a rhombus hinge chute type orthogonal drive piezoelectric stick-slip linear motor. The composite excitation method of the diamond hinge chute type orthogonal drive piezoelectric stick-slip linear motor is as follows.

[0026] The composite excitation electrical signal used in the composite excitation method is compounded and superimposed on the driving wave in the rapid deformation stage of the stator by the friction control wave. The friction control wave is a sine wave, and the driving wave is a sawtooth wave. Among them, the period of the sawtooth driving wave is T 1 , the excitation voltage amplitude is V 1 , the symmetry is D; the period of the micro-amplitude friction sinusoidal control wave is T 2 , the excitation voltage amplitude is V 2 . T 1 / T 2 =10~100000, the excitation voltag...

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Abstract

The invention discloses a rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and a composite excitation method therefor, and solves the problem that the output mechanical performance of the current piezoelectric stick-slip linear motor is limited caused by difficulty in comprehensive regulation and control on the friction force, and the like. The piezoelectric stick-slip linear motor comprises a pre-tightening force regulating apparatus, a stator and a mover, wherein the stator generates side displacement by a skewed slot type rhombic movement converter, so that the friction driving force is increased while the friction resistance is decreased; the mover driving is achieved by the generated side displacement through a driving foot; meanwhile, the friction regulation and control wave is coupled and overlapped to the sawtooth driving wave in the rapid deformation stage of the stator so as to reduce the friction resistance between the stator and the mover in the rapid deformation stage; and therefore, the displacement band-returning rate is lowered, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is remarkably improved. The piezoelectric stick-slip linear motor has the advantages of compact structure, simple control, high positioning precision and the like, and can be widely applied to the advanced technical fields of semiconductor processing, optical precision instrument, and the like.

Description

technical field [0001] The invention relates to a diamond-shaped hinge chute-type orthogonal drive piezoelectric stick-slip linear motor, which belongs to the advanced technical fields of semiconductor processing and optical precision instruments. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical energy output through the frictional coupling between the vibrator and the mover. precision micro-nano actuators. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/06
CPCH02N2/02H02N2/065
Inventor 程廷海王占礼张邦成柳虹亮宋兆阳秦峰
Owner CHANGCHUN UNIV OF TECH
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