Inclined precision piezoelectric stick-slip linear motor and its driving method

A linear motor and chute technology, applied in the field of micro-nano precision drive and positioning, can solve the problems of saw-tooth-like unstable motion output, difficulty in comprehensive control of friction, and limited output mechanical performance, so as to improve mechanical output characteristics, The effect of reducing the displacement retraction rate and improving the output efficiency

Active Publication Date: 2017-08-22
CHANGCHUN UNIV OF TECH
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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction force between the stator and the mover, the limited output mechanical performance, the generation of sawtooth-like unstable motion output, and the degradation of output performance, the present invention discloses A chute-type precision piezoelectric stick-slip linear motor and its driving method

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  • Inclined precision piezoelectric stick-slip linear motor and its driving method
  • Inclined precision piezoelectric stick-slip linear motor and its driving method
  • Inclined precision piezoelectric stick-slip linear motor and its driving method

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specific Embodiment approach 1

[0024] Specific embodiment one: combination Figure 1~Figure 9 This embodiment will be described. This embodiment provides a specific implementation of a chute type precision piezoelectric stick-slip linear motor. The chute type precision piezoelectric stick-slip linear motor is composed of a base 1, a pre-pressure adjusting mechanism 2, a chute type stator 3 and a mover 4.

[0025] The base 1 includes a base mounting hole 1-1, a pre-compression adjusting mechanism mounting hole 1-2, a guide rail fixed installation contact plane 1-3, and a guide rail threaded mounting hole 1-4. The base 1 can be made of aluminum alloy. The base mounting hole 1-1 is a countersunk hole, which can fix the base 1 with other peripheral devices. The pre-pressure adjusting mechanism mounting hole 1-2 is used to fix the pre-pressure adjusting mechanism 2. The guide rail is fixedly installed and contacted. The plane 1-3 and the threaded mounting holes 1-4 of the guide rail are used to fix and install th...

specific Embodiment approach 2

[0029] Specific implementation manner two: combination Picture 10 The figure illustrates this embodiment. This embodiment provides a specific implementation of a chute type precision piezoelectric stick-slip linear motor driving method. The driving method of the chute type precision piezoelectric stick-slip linear motor is as follows.

[0030] The composite excitation electrical signal used in the driving method is compositely superimposed on the sawtooth drive wave in the rapid deformation stage of the stator by the friction control wave, the drive wave is a sawtooth wave, and the friction control wave is a sine wave. Specifically, the driving method can reduce the frictional resistance between the stator and the mover in the rapid deformation stage, suppress the generation of retreat motion, and optimize the output performance. The period of the sawtooth drive wave is T 1 , The excitation voltage amplitude is V 1 , The symmetry is D, and the period of the slight friction sine...

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Abstract

Provided are a slanted-slot type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment mechanism, a slanted-slot type stator and a slanted-slot type rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, due to the fact that rigidity distribution of slanted slots and a semicircular drive foot in the axial direction is nonuniform, lateral displacement is produced, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly improved. The slanted-slot type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.

Description

Technical field [0001] The invention relates to a chute type precision piezoelectric stick-slip linear motor and a driving method thereof, and belongs to the technical field of micro-nano precision driving and positioning. Background technique [0002] Piezoelectric stick-slip linear motor uses the inverse piezoelectric effect of piezoelectric elements to excite a vibrator (or stator) to produce a slight vibration under the excitation of an asymmetric electrical signal, and achieve mechanical energy output through the frictional coupling between the vibrator and the mover The precision micro-nano drive. According to different driving principles, piezoelectric stick-slip linear motors are mainly divided into resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with resonant piezoelectric motors, piezoelectric stick-slip linear motors have the advantages of simple and compact str...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/02H02N2/04H02N2/06
CPCH02N2/02H02N2/04H02N2/06
Inventor 程廷海林洁琼何猛何璞殷梦飞
Owner CHANGCHUN UNIV OF TECH
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