Slanted-slot type precise piezoelectric stick-slip linear motor and driving method thereof

A linear motor and chute technology, applied in the field of micro-nano precision drive and positioning, can solve the problems of zigzag-like uneven motion output, difficulty in comprehensive control of friction force, limited output mechanical performance, etc., to improve mechanical output characteristics, The effect of reducing the displacement back-off rate and improving the output efficiency

Active Publication Date: 2016-08-03
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction force between the stator and the mover, the limited output mech

Method used

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  • Slanted-slot type precise piezoelectric stick-slip linear motor and driving method thereof
  • Slanted-slot type precise piezoelectric stick-slip linear motor and driving method thereof
  • Slanted-slot type precise piezoelectric stick-slip linear motor and driving method thereof

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Example Embodiment

[0024] Embodiment 1: Combining Figure 1~Figure 9 This embodiment will be described. This embodiment provides a specific embodiment of a chute type precision piezoelectric stick-slip linear motor. The inclined slot type precision piezoelectric stick-slip linear motor is composed of a base 1 , a pre-pressure adjusting mechanism 2 , an inclined slot type stator 3 and a mover 4 .

[0025] The base 1 includes a base mounting hole 1-1, a pre-pressure adjusting mechanism mounting hole 1-2, a guide rail fixed mounting contact plane 1-3 and a guide rail screw mounting hole 1-4, and the base 1 can be made of an aluminum alloy material. The base mounting hole 1-1 is a countersunk hole, which can fix the base 1 and other peripheral devices. The pre-pressure adjustment mechanism mounting hole 1-2 is used for the fixation of the pre-pressure adjustment mechanism 2. The guide rail is fixed and installed in contact with The planes 1-3 and the threaded mounting holes 1-4 of the guide rail a...

Example Embodiment

[0029] Specific implementation mode 2: Combining Figure 10 The figure explains this embodiment. This embodiment provides a specific embodiment of a method for driving a precision piezoelectric stick-slip linear motor with an oblique slot. The drive method of the inclined slot type precision piezoelectric stick-slip linear motor is as follows.

[0030] The composite excitation electrical signal used in the driving method is compounded and superimposed on the sawtooth driving wave in the stage of rapid stator deformation by the friction regulating wave, the driving wave is a sawtooth wave, and the friction regulating wave is a sine wave. Specifically, the driving method can reduce the frictional resistance between the stator and the mover in the rapid deformation stage, suppress the generation of retraction motion, and optimize the output performance. The period of the sawtooth driving wave is T 1 , the excitation voltage amplitude is V 1 , the symmetry is D, and the period...

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Abstract

Provided are a slanted-slot type precise piezoelectric stick-slip linear motor and a driving method thereof. The problem that for a current piezoelectric stick-slip linear motor, due to the fact that comprehensive regulation of friction force is difficult, the mechanical output characteristic is limited is solved. The motor is composed of a base, a pre-pressure adjustment mechanism, a slanted-slot type stator and a slanted-slot type rotor, the stator adopts a symmetric flexible hinge structure to produce displacement amplification, due to the fact that rigidity distribution of slanted slots and a semicircular drive foot in the axial direction is nonuniform, lateral displacement is produced, friction drive force is increased, and frictional resistance is reduced; meanwhile, a friction regulation wave is compositely overlaid in a sawtooth drive wave in the rapid deformation stage of the stator, the frictional resistance between the staror and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly improved. The slanted-slot type precise piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like, and an excellent application prospect in the micro-nano precision driving and positioning fields such as aerospace, optical precision instruments and semiconductor processing is achieved.

Description

technical field [0001] The invention relates to a chute-type precision piezoelectric stick-slip linear motor and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical energy output through the frictional coupling between the vibrator and the mover. precision micro-nano actuators. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with the resonant piezoelectric mot...

Claims

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Application Information

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IPC IPC(8): H02N2/02H02N2/04H02N2/06
CPCH02N2/02H02N2/04H02N2/06
Inventor 程廷海林洁琼何猛何璞殷梦飞
Owner CHANGCHUN UNIV OF TECH
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