Parallel drive piezoelectric stick-slip linear motor and drive method therefor

A linear motor and drive technology, applied in the field of micro-nano precision drive and positioning, can solve the problems of small output thrust, low precision, and short stroke, and achieve the effect of large output thrust, high precision, and reduced frictional resistance

Inactive Publication Date: 2018-06-15
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors such as small output thrust, short stroke, and low precision due to single-stator drive, the present invention discloses a parallel-driven piezoelectric stick-slip linear motor and its driving method

Method used

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  • Parallel drive piezoelectric stick-slip linear motor and drive method therefor
  • Parallel drive piezoelectric stick-slip linear motor and drive method therefor
  • Parallel drive piezoelectric stick-slip linear motor and drive method therefor

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specific Embodiment approach 1

[0032] Specific implementation mode one: combine Figure 1~Figure 10 To illustrate this embodiment, this embodiment provides a specific implementation of a parallel-driven piezoelectric stick-slip linear motor. The specific implementation of the parallel-driven piezoelectric stick-slip linear motor is expressed as follows:

[0033] The parallel driven piezoelectric stick-slip linear motor consists of an inclined trapezoidal drive assembly 1, a locking screw 2, a base 3, a dovetail platform displacement regulator 4, a dovetail platform 5, a dovetail platform limit bar 6 and a sliding assembly 7 composition. Among them, two oblique trapezoidal drive components 1 are fixed on the dovetail platform 5 in parallel, the locking screw 2 is installed in the corresponding threaded hole of the dovetail platform 5, the dovetail platform displacement regulator 4 is installed on the rear end of the base 3, and the dovetail platform 5 is installed On the base 3 and defined in the dovetail p...

specific Embodiment approach 2

[0040] Specific implementation mode two: combination Figure 11~12 To illustrate this embodiment, this embodiment proposes a specific implementation of a driving method for a parallel-driven piezoelectric stick-slip linear motor. The driving method for a parallel-driven piezoelectric stick-slip linear motor is expressed as follows:

[0041] The driving method of the parallel drive piezoelectric stick-slip linear motor can be divided into output enhancement type and motion emergency stop type. The uneven distribution of the axial stiffness of the trapezoidal drive assembly 1 produces lateral displacement, adjust the normal contact pressure between the inclined trapezoidal drive assembly 1 and the sliding assembly 7, and then adjust the friction between the inclined trapezoidal drive assembly 1 and the sliding assembly 7 ; At the same time, under the excitation of different combinations of asymmetrical electrical signals, various driving modes such as output enhancement type and...

specific Embodiment approach 3

[0065] Specific implementation mode three: combination Figure 11 , 13 , 14 This embodiment is described. This embodiment proposes a specific implementation of a parallel-driven piezoelectric stick-slip linear motor driving method in which the inclined trapezoidal drive assembly 1 is installed back to back. The driving method of the driven piezoelectric stick-slip linear motor is expressed as follows:

[0066] The driving method of the parallel-driven piezoelectric stick-slip linear motor with inclined trapezoidal drive components installed back to back can be divided into output enhancement type and motion emergency stop type, mainly the parallel driven piezoelectric stick-slip linear motor with the inclined trapezoidal drive components installed The linear motor adopts the inclined trapezoidal beam 1-2-6 structure, so that the axial stiffness of the inclined trapezoidal drive assembly 1 is unevenly distributed to cause lateral displacement, and the positive pressure of cont...

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Abstract

The invention discloses a parallel drive piezoelectric stick-slip linear motor and a drive method therefor to solve the technical problems of small output thrust, small stroke and low precision due tothe fact that single stator drive is adopted by an existing piezoelectric stick-slip linear motor. The parallel drive piezoelectric stick-slip linear motor comprises oblique trapezoid drive assemblies, locking screws, a base, a dovetail platform displacement adjuster, a dovetail platform, dovetail platform limiting strips and a sliding assembly. The oblique trapezoid drive assemblies adjust the positive contact pressure between the oblique trapezoid drive assemblies and the sliding assembly through generating lateral displacement to achieve comprehensive adjustment and control on the frictional force; and meanwhile, the oblique trapezoid drive assemblies are excited through different asymmetric electrical signal combinations, so that multiple drive modes, such as an output enhancement drive mode and a moving crashstop drive mode can be achieved. The parallel drive piezoelectric stick-slip linear motor has the characteristics of large output thrust, high precision and large stroke, andhas a good application prospect in the field of micro-nano precision driving and positioning, such as optical precision instrument and semiconductor processing.

Description

technical field [0001] The invention relates to a parallel-driven piezoelectric stick-slip linear motor and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Piezoelectric motor is a new type of driving device that uses the inverse piezoelectric effect of piezoelectric materials to achieve precise output motion. Piezoelectric elements have the advantages of good stability, rapid response, precise positioning, high energy conversion rate, and large driving force. Commonly used piezoelectric materials are suitable for being processed into various shapes, and multilayer piezoelectric elements manufactured by special processes The piezoelectric stack composed of ceramic sheets has very good performance, so it is suitable to be applied in the field of ultra-precise positioning technology. Due to the many advantages of piezoelectric drive, piezoelectric precision micro-drive technology has bec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/06H02N2/04
CPCH02N2/06H02N2/04H02N2/043H02N2/062
Inventor 程廷海唐晚静卢晓晖陈茜炎贾荣曹展豪
Owner CHANGCHUN UNIV OF TECH
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