A double-grating nanostructure composed of quadrangular biconical arrays and its preparation method

A nanostructure, quadrangular bipyramid technology, applied in the field of double grating nanostructures and their preparation, can solve problems such as hindering the improvement of geometric shapes and affecting the AR effect of pyramid gratings.

Active Publication Date: 2021-02-02
THE CHINESE UNIV OF HONG KONG SHENZHEN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the anisotropic etching characteristic of silicon hinders further improvement of the geometry, thus affecting the AR effect of the pyramidal grating

Method used

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  • A double-grating nanostructure composed of quadrangular biconical arrays and its preparation method
  • A double-grating nanostructure composed of quadrangular biconical arrays and its preparation method
  • A double-grating nanostructure composed of quadrangular biconical arrays and its preparation method

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preparation example Construction

[0033] The embodiment of the present invention also provides a method for preparing a double-grating nanostructure composed of the above-mentioned quadrangular bipyramid array, which includes:

[0034] Drop polydimethylsiloxane on the mounting surface of a porous silicon substrate, cover it with another porous silicon substrate, align the holes of the two porous silicon substrates, and form multiple grating nanostructure units; peeling off Any one of the two porous silicon substrates can obtain the double grating nanostructure composed of the quadrangular bipyramid array.

[0035] Furthermore, the conditions for forming multiple grating nanostructure units are heating at 50-70°C for 10-15 h. Under the above conditions, polydimethylsiloxane can be promoted to form better and obtain the desired shape.

[0036] Further, the porous silicon substrate can be prepared by the following method:

[0037] S1. Deposition of SiO on the etched side of the silicon substrate 2 cover layer,...

Embodiment

[0052] This embodiment provides a double grating nanostructure 100 composed of a quadrangular bipyramid array, the structure of which is as follows figure 1 As shown, it includes a porous silicon substrate 110 and a plurality of grating nanostructure units 120 .

[0053] Wherein, the porous silicon substrate 110 includes a mounting surface 111, and a plurality of holes 112 for installing the grating nanostructure unit 120 are arrayed on the mounting surface 111. The shape of the holes 112 is an inverted quadrangular pyramid, and the apex of the quadrangular pyramid faces the porous silicon substrate. Inside, the bottom surface is located on the mounting surface 111 . The quadrangular pyramid-shaped hole 112 has a depth of 700 nm and a bottom surface of a square with a side length of 200 nm.

[0054] The material of the grating nanostructure unit 120 is polydimethylsiloxane. A plurality of grating nanostructure units 120 correspond to a plurality of holes 112, and each gratin...

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Abstract

A double grating nanostructure composed of quadrangular bipyramid arrays relates to the field of optical devices, which includes a porous silicon substrate and a plurality of grating nanostructure units. The shapes of the grating nanostructure units are all quadrangular bipyramids, half of which are buried in the porous silicon substrate, and half of which are exposed outside the porous silicon substrate. The quadrangular biconical grating nanostructure unit can provide a more gradual effective refractive index distribution between the air and the device, thereby improving the light sensitivity and light energy collection rate of the device. A method for preparing a double-grating nanostructure composed of a quadrangular bipyramid array has simple operation and low equipment requirements, and can be extremely conveniently used in the preparation of the above-mentioned double-grating nanostructure composed of a quadrangular bipyramid array.

Description

technical field [0001] The invention relates to the field of optical devices, in particular to a double-grating nanostructure composed of a quadrangular bipyramid array and a preparation method thereof. Background technique [0002] Today's light energy utilization and collection has entered a period of rapid development, in which more sensitive light collection (photodetectors) and more light energy collection (solar cells) are becoming more and more important. In order to achieve the above goals and reduce the loss of light due to reflection, many scientists focus on the broad-band anti-reflection (AR) performance of the instrument surface and the performance under large angle of incidence (Angle of Incidence, AOI). For thin-film solar cells, These properties are even more important in various devices such as optical oscilloscopes and photodetectors. [0003] As a traditional way, half-wavelength AR coatings are widely used to reduce the reflection on the surface of optic...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): G02B5/18G03F1/80G03F7/00B82Y20/00B82Y40/00
CPCB82Y20/00B82Y40/00G02B5/18G03F1/80G03F7/00
Inventor张昭宇袁牧锋崔雨舟
OwnerTHE CHINESE UNIV OF HONG KONG SHENZHEN