Saturation method of graphite frame and graphite frame
A technology of graphite frame and passivation film, applied in the field of solar cells, can solve the problems of easy occurrence of red edges and affect the passivation effect of silicon wafers, and achieve the effects of prolonging the cleaning cycle, improving the passivation effect and reducing the manufacturing cost.
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- Publication Date
- 2019-11-01
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Abstract
Description
technical field
[0001] The invention relates to the technical field of solar cells, in particular to a graphite frame saturation method and the graphite frame. Background technique
[0002] At present, after the saturation treatment of the graphite frame, the passivation of the silicon wafer obtained by placing the silicon wafer in the graphite frame tends to have red edges around the periphery of the passivated silicon wafer, which affects the passivation effect of the silicon wafer. Contents of the invention
[0003] In order to solve the above-mentioned technical problems, an object of the present invention is to provide a method for saturating a graphite frame. The graphite frame prepared by the saturation method is used to passivate silicon wafers, which greatly reduces the risk of silicon wafers with abnormal appearance. Quantity, the passivation effect of the silicon wafer is improved, and the saturation method shortens the saturation time of the graphite frame. ...
Examples
Embodiment 1
[0050] (1) Take the old graphite frame 10, and use 5% to 15% hydrofluoric acid to clean the graphite frame 10 for 8 hours to remove the silicon nitride passivation layer deposited on the surface of the graphite frame 10;
[0051] (2) Use pure water to rinse the graphite frame 10 after removing the passivation layer for 0.5 hours;
[0052] (3) Use pure water to soak the graphite frame 10 for 4 hours;
[0053] (4) Use an oven to dry the graphite frame 10 for the first time at a temperature of 150°C to 200°C for 6 hours;
[0054] (5) Carry out a second drying treatment on the graphite frame 10 in the plate plasma enhanced chemical vapor deposition equipment, the temperature of the drying treatment is 400-450°C, and the drying treatment time is 1h;
[0055] (6) After drying the graphite frame 10 for the second time in the plasma-enhanced chemical vapor deposition equipment, feed ammonia and silane, turn on the radio frequency power supply, and deposit a silicon nitride passivatio...