Spray plate and coating device

Abstract

The invention relates to a spraying plate and a coating device. The spraying plate comprises a connecting piece set and a spraying piece connected with the connecting piece set, the spraying piece is provided with a plurality of spraying holes, the spraying holes are used for outputting gas, a hollow channel is defined by the spraying piece and the connecting piece set, and the extending direction of the hollow channel intersects with the extending direction of an output channel, used for outputting the gas, of the spraying holes. The hollow channel is formed in the spraying plate, the spraying plate can be compatible with plasma enhanced atomic layer deposition equipment, the extending direction of the hollow channel intersects with the extending direction of the output channel, used for outputting gas, of the spraying hole, and the gas sprayed out of the hollow channel can be evenly mixed with a coating material or other gas sprayed out of the spraying hole; and the coating uniformity of the to-be-coated part is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a spray plate and a coating device. Background Art

[0002] The coating device usually sprays the coating material onto the part to be coated through a spray plate to achieve thin film deposition on the part to be coated. Among them, the spray plate is a key component used in thin film deposition technologies such as physical vapor deposition or chemical vapor deposition, which is used to distribute the coating material onto the part to be coated.

[0003] However, the shower plate in the related art is difficult to be compatible with different plasma enhanced atomic layer deposition equipment, and the uniformity of the film layer coated by the coating device in the related art is poor, and the quality of the film layer coated is poor. Summary of the invention

[0004] Based on this, a shower plate and a coating device are provided, so that the shower plate can be compatible with different plasma enhanced atomic layer deposition equipment, and can improve the uniformity of the coating layer coated by the coating device and improve the quality of the coating layer.

[0005] According to one aspect of the present application, an embodiment of the present application provides a spray plate, the spray plate comprising:

[0006] A connector assembly; and

[0007] A spraying member connected to the connecting member group, wherein the spraying member has a plurality of spraying holes, and the spraying holes are used to output gas;

[0008] The spray member and the connecting member group define a hollow channel, and the extension direction of the hollow channel intersects with the extension direction of the output channel of the spray hole for outputting gas.

[0009] In one embodiment, the connecting member group includes a first connecting member, the spray plate includes at least two spray members, and the at least two spray members are sequentially connected to the first connecting member at intervals.

[0010] In one embodiment, the connecting member group further includes a second connecting member, and the spray member is connected between the first connecting member and the second connecting member;

[0011] The first connecting member and the second connecting member are arranged at intervals along the first direction, the at least two spray members include a first spray member and a second spray member arranged at intervals along the second direction, the first spray member, the first connecting member, the second spray member and the second connecting member are sequentially connected end to end to form a spray frame, and the spray frame defines the hollow channel;

[0012] The first direction and the second direction intersect each other, and the first direction is parallel to the extension direction of the spray element.

[0013] According to another aspect of the present application, an embodiment of the present application provides a coating device, the coating device comprising:

[0014] The housing has a coating cavity;

[0015] A carrier is disposed in the coating chamber; the carrier is used to carry the object to be coated, and the carrier includes a longitudinal central axis located at the center of the carrier and parallel to the first direction; and

[0016] As in any of the above embodiments, the spray plate is arranged on one side of the carrier in the circumferential direction and is at least partially located in the coating cavity; the plurality of spray holes are arranged toward the longitudinal central axis;

[0017] Wherein, the first direction is parallel to the extension direction of the spray element.

[0018] In one embodiment, the spray element has a first surface disposed toward the longitudinal center axis, and all the spray holes are opened on the first surface;

[0019] defining a plane intersecting the first surface and perpendicular to the longitudinal center axis as a first reference plane;

[0020] The first surface intersects with the first reference surface to define a first intersection line, the first intersection line has a first edge point and a second edge point that are arranged opposite to each other, and a line connecting the first edge point and the second edge point is a reference line.

[0021] In one embodiment, a perpendicular bisector of the reference line on the first reference plane is perpendicular to and intersects the longitudinal center axis.

[0022] In one embodiment, the reference line and the first intersection line coincide with each other.

[0023] In one embodiment, the orthographic projection of the first surface on the second reference plane is a straight line; and the second reference plane is a plane perpendicular to the longitudinal center axis.

[0024] In one embodiment, the first intersection line is an arc line.

[0025] In one embodiment, the orthographic projection of the first surface on the third reference plane is an arc; the third reference plane is a plane perpendicular to the longitudinal central axis; and / or

[0026] The center of the circle where the first intersection line is located is located on the longitudinal central axis.

[0027] In one of the embodiments, the spraying member has a plurality of spray hole groups, each of the spray hole groups includes a plurality of the spray holes, and the plurality of the spray hole groups are arranged at intervals along the extending direction of the reference line.

[0028] In one embodiment, a plurality of air inlet channels are provided on the spray element;

[0029] Each of the air inlet channels is correspondingly connected to at least one of the spray hole groups;

[0030] The spray element is provided with a plurality of air inlet parts, all of which constitute a plurality of air inlet part groups, and all of the air inlet part groups are connected to all of the air inlet channels in a one-to-one correspondence;

[0031] The plurality of air intake portions of the same air intake portion group are arranged at intervals along the first direction and are all connected to the corresponding air intake passages;

[0032] The plurality of spray holes in the spray hole group are evenly spaced and arranged along the first direction.

[0033] In one of the embodiments, the coating device comprises a plurality of the spray plates, and at least two of the plurality of the spray plates are sequentially arranged along the extension direction of the first direction;

[0034] And / or, at least two of the plurality of shower plates are arranged in sequence along the extension direction of the second direction;

[0035] And / or, at least two of the plurality of the shower plates are arranged in sequence along an extension direction of the reference line of any of the plurality of the shower plates;

[0036] The first direction, the second direction, and an extending direction of the reference line intersect with each other.

[0037] In one embodiment, the housing is provided with an air inlet and an air outlet respectively located on opposite sides of the coating cavity;

[0038] The coating device further comprises an injection member, which is arranged on a side of the housing close to the air inlet and is used to inject plasma into the coating chamber; the spray member is arranged between the injection member and the carrier;

[0039] The injection path of the injection member passes through the hollow channel and intersects with the injection path of the spray hole.

[0040] In one embodiment, the carrier is configured to be rotatable about the longitudinal center axis.

[0041] The spray plate and coating device of the present application have the following advantages:

[0042] 1. The spray plate of the present application is provided with a hollow channel, which is compatible with plasma enhanced atomic layer deposition equipment, so that the plasma sprayed by the plasma enhanced atomic layer deposition equipment can enter the coating chamber through the hollow channel, thereby achieving compatibility between the spray plate of the present application and various plasma enhanced atomic layer deposition equipment. The extension direction of the hollow channel intersects with the extension direction of the output channel of the spray hole for outputting gas, and the gas sprayed from the hollow channel can be evenly mixed with the coating material or other gas sprayed from the spray hole, which is conducive to improving the uniformity of the coating on the coating part.

[0043] 2. The spray plate of the present application constitutes a spray frame structure. The provision of the spray frame is conducive to improving the convenience of installing the spray plate of the present application and the plasma enhanced atomic layer deposition equipment with each other.

[0044] 3. The spray holes on the spray part of the present application are all facing the longitudinal center axis of the carrier, which is conducive to the coating material or other gas sprayed toward the carrier by the spray hole having a relatively uniform flow rate and concentration at the carrier, and is conducive to spraying the coating material or other gas uniformly onto the parts to be coated, and can have a more uniform spraying effect, so that a film layer with better uniformity can be deposited on the parts to be coated, facilitating the acquisition of a film layer with better quality.

[0045] 4. The first surface of the spray hole in the present application can be set as a curved surface or a flat surface, and the shape of the first surface can be set according to the coating requirements so that the coating material and other gases in the coating cavity can obtain a uniform airflow, thereby facilitating the coating material or other gases to be evenly sprayed onto the workpiece to be coated, thereby facilitating obtaining a film layer with better uniformity.

[0046] 5. The multiple spray holes of the present application constitute multiple spray hole groups, and each spray hole group can independently introduce coating materials or other gases, so that multiple of the multiple spray hole groups can be selected to introduce coating materials, and other multiple of the multiple spray hole groups can be selected to introduce other gases. A variety of different coating materials can also be introduced at the same time, etc. It has a flexible adjustment method, and the coating materials and other gases to be introduced can be selected according to needs to obtain a better coating effect. It has high flexibility and is conducive to obtaining a film layer suitable for different working conditions and with better quality.

[0047] 6. The carrier of the present application can rotate around the longitudinal center axis. When the spray plate sprays the coating material or other gas toward the carrier, the rotation of the carrier can further improve the uniformity of the coating material or other gas sprayed from the spray hole on the workpiece to be coated on the carrier, which is conducive to obtaining a more uniform film layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] FIG1 is a schematic diagram of a top view of a cross-sectional structure of a coating device provided in one embodiment of the present application.

[0049] FIG. 2 is a schematic diagram of the three-dimensional structure of a spray plate provided in an embodiment of the present application.

[0050] FIG. 3 is a front view schematic diagram of the structure of a spray plate provided in an embodiment of the present application.

[0051] FIG. 4 is a schematic diagram of a top view of the structure of a spray surface provided in an embodiment of the present application.

[0052] FIG. 5 is an enlarged view of point A in the embodiment of FIG. 1 .

[0053] FIG. 6 is a schematic diagram of a top view of the structure of a spray surface provided in another embodiment of the present application.

[0054] FIG. 7 is a schematic diagram of a top view of the structure of a spray plate provided in an embodiment of the present application.

[0055] Figure 8a This is a simplified schematic diagram of at least two spray plates arranged in sequence along a first direction according to an embodiment of the present application.

[0056] Figure 8b This is a simplified schematic diagram of at least two spray plates arranged in sequence along the second direction according to an embodiment of the present application.

[0057] Figure 8c This is a simplified schematic diagram of at least two shower plates arranged in sequence along an extension direction of any reference line of a plurality of shower plates according to an embodiment of the present application.

[0058] FIG. 9 is a schematic diagram of a flow field in a coating chamber from a top view according to an embodiment of the present application.

[0059] FIG. 10 is a schematic diagram of a flow field from an inner side view angle of a coating chamber provided in an embodiment of the present application.

[0060] Description of reference numerals:

[0061] 10. Coating device; 20. Spray plate; 21. Hollow channel;

[0062] 100, shell; 110, inner shell; 111, air inlet; 112, air outlet; 120, outer shell; 130, coating cavity;

[0063] 200, Vehicle;

[0064] 300, spray element; 310, spray hole; 311, spray path of the spray hole; 320, air intake channel; 330, first surface; 340, air intake portion; 350, ventilation pipe;

[0065] 400, injection member; 410, injection path of the injection member;

[0066] 500, seals;

[0067] 600, connecting member group; 610, first connecting member; 620, second connecting member;

[0068] 30. Part to be coated; L, longitudinal center axis; M, first edge point; N, second edge point; K, first intersection line; S, first reference plane; I, perpendicular midline; MN, reference line;

[0069] F1, first direction; F2, second direction. DETAILED DESCRIPTION

[0070] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0071] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0072] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0073] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0074] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0075] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0076] The spray plates commonly used in coating equipment in related technologies are generally processed as a whole flat plate, which has high processing costs and is relatively bulky, and its spray holes are usually arranged horizontally on the entire surface of the spray plate. As the number of parts to be coated increases, the flow rate of the coating material sprayed to different parts of the parts to be coated, or sprayed to different parts to be coated, is difficult to maintain consistency, resulting in poor uniformity of the film layer finally formed on different parts of the parts to be coated or on different parts to be coated.

[0077] Based on the above problems, the present application provides a spray plate and a coating device, which have better coating uniformity to improve the quality of the coating layer on the part to be coated.

[0078] Referring to Figures 1, 2 and 3, Figure 1 is a schematic diagram of a top view cross-sectional structure of a coating device 10 provided in one embodiment of the present application. Figure 2 is a schematic diagram of a three-dimensional structure of a spray plate 20 provided in one embodiment of the present application. Figure 3 is a schematic diagram of a front view structure of a spray plate 20 provided in one embodiment of the present application.

[0079] The present application provides a spray plate 20 including a connector group 600 and a spray member 300, wherein the spray member 300 is connected to the connector group 600, and the spray member 300 has a plurality of spray holes 310 for outputting gas, and the spray holes 310 spray out coating materials or other gases to coat the parts to be coated 30. The spray member 300 and the connector group 600 define a hollow channel 21, and the extension direction of the hollow channel 21 intersects with the extension direction of the output channel of the spray holes 310 for outputting gas, so that the gas sprayed from the hollow channel 21 can be evenly mixed with the coating material or other gas sprayed from the spray holes 310, which is conducive to improving the uniformity of coating the parts to be coated 30.

[0080] The shower plate 20 provided in the present application is provided with a hollow channel 21, which is compatible with plasma enhanced atomic layer deposition equipment, so that the plasma ejected by the plasma enhanced atomic layer deposition equipment can pass through the hollow channel 21 and mix with the gas output from the spray hole 310 of the spray part 300, thereby achieving the compatibility of the shower plate 20 of the present application with a variety of plasma enhanced atomic layer deposition equipment. At the same time, the propagation path of the gas ejected from the hollow channel 21 intersects with the propagation path of the coating material or other gas ejected from the spray hole 310, so that the gas ejected from the hollow channel 21 can be evenly mixed with the coating material or other gas ejected from the spray hole 310, which is conducive to improving the uniformity of the coating on the coating part 30.

[0081] In some embodiments, referring to FIG. 2 and FIG. 3 , the connector group 600 further includes a first connector 610 and at least two spray members 300, that is, a plurality of spray members 300 can be provided according to the coating requirements, and at least two spray members 300 are sequentially connected to the first connector 610 at intervals, or in other words, the first connector 610 can realize the connection and fixation between the plurality of spray members 300. By providing at least two spray members 300, the amount of spray material or other gas sprayed into the coating cavity 130 can be increased, thereby improving the spray efficiency, and the type of spray material or other gas sprayed in the spray member 300 can be set according to the requirements, thereby improving the flexibility of the design of the spray plate 20.

[0082] For example, a spraying member 300 may be provided at each end of the first connecting member 610 along its extension direction, and at least one spraying member 300 may be provided between the two spraying members 300 at the two ends of the first connecting member 610, or at least one spraying member 300 may be provided in the middle portion between the two ends of the first connecting member 610, such as one, two, three, or more spraying members. If at least two spraying members 300 are provided, the extension directions of at least two spraying members 300 are parallel to each other. In this way, by adding spraying members 300, other spraying materials or other gases can be sprayed through the newly added spraying members 300, thereby meeting different actual use requirements, and the same type of spraying materials or other gases can also be sprayed through the newly added spraying members 300, which is equivalent to adding spray holes 310 of the spray plate 20, which can increase the spraying efficiency.

[0083] In some embodiments, the coating device 10 further includes a second connector 620. The first connector 610 and the second connector 620 are arranged at intervals along the first direction F1, and are both used to connect multiple spraying members 300. Each spraying member 300 is connected between the first connector 610 and the second connector 620. The arrangement of the first connector 610 and the second connector 620 can improve the connection strength between at least two spraying members 300, thereby improving the stability of the coating device 10.

[0084] It can be understood that if multiple spray parts 300 are provided, the extension directions of the multiple spray parts 300 can be set parallel to each other, and the first connecting member 610 and the second connecting member 620 are respectively provided at the two ends of each spray part 300 along its extension direction. In this way, through the T-shaped cross setting of each spray part 300 in the multiple spray parts 300 and the first connecting member 610 and the second connecting member 620, the connection stability between the multiple spray parts 300 can be improved, the spraying stability of the spray plate 20 can be improved, which is further beneficial to improve the spraying effect of the spray plate 20 and improve the uniformity of the coated film layer.

[0085] At least two spray members 300 include a first spray member and a second spray member arranged at intervals along the second direction F2, the first spray member, the first connecting member 610, the second spray member and the second connecting member 620 are connected end to end in sequence to form a spray frame, and the spray frame defines the above-mentioned hollow channel 21, wherein the first direction F1 and the second direction F2 intersect each other, and the first direction F1 is parallel to the extension direction of the spray member 300. Among them, the extension mode of the spray member 300 mentioned in the present application can be understood as the longitudinal extension direction of the spray member 300, or in other words, the spray member 300 can be a strip structure extending longitudinally, and the length direction of the strip structure is the longitudinal extension direction, that is, the extension direction of the spray member 300. The spray member 300 can also be a columnar structure with a certain extension length, and the extension direction of the columnar structure is the longitudinal extension direction, that is, the extension direction of the spray member 300. It can be understood that the corresponding multiple spray holes 310 are arranged in sequence at intervals along the extension direction of the spray member 300.

[0086] The arrangement of the spray frame facilitates installation between the spray piece 300 and the shell 100, and the frame structure formed by the spray piece 300 and the connecting piece facilitates the spray plate 20 to be installed in a variety of plasma enhanced atomic layer deposition equipment, or in other words, improves the compatibility of the spray plate 20 of the present application with a variety of plasma enhanced atomic layer deposition equipment, such as being compatible with the equipment architecture of ICP-PEALD (Inductively Coupled Plasma - Plasma Enhanced ALD, inductively coupled plasma atomic layer deposition technology).

[0087] In some embodiments, the first connecting member 610 and the second connecting member 620 can be used to connect between at least two spray members 300, and the first connecting member 610 and the second connecting member 620 are detachably connected to the at least two spray members 300, that is, the first connecting member 610 is detachably connected to the at least two spray members 300 respectively. Specifically, in a certain embodiment, the first connecting member 610 is connected to one end of any spray member 300 along its extension direction to achieve an indirect connection between at least two spray members 300, and is combined with the second connecting member 620 to be connected to the other end of any spray member 300 along its extension direction, thereby improving the connection strength between at least two spray members 300, which is beneficial to improving the spraying stability of the spray plate 20, improving the spraying uniformity, and improving the quality of the coated layer. The spray frame composed of the first connecting member 610, the second connecting member 620 and at least two spray members 300 can be detachably connected to the shell 100, which is conducive to improving the convenience of stacking the spray members 300 along the first direction F1, or the detachable function facilitates the sealing installation compatible with batch deposition equipment.

[0088] Referring to FIG. 1 , the present application further provides a coating device 10, which includes a housing 100, a carrier 200, and the above-mentioned spray plate 20, wherein the housing 100 has a coating cavity 130, the carrier 200 is disposed in the coating cavity 130, and the carrier 200 is used to carry a piece to be coated 30. In some embodiments, the carrier 200 includes a plurality of layers of carriers sequentially arranged at intervals along a first direction F1, and each layer of carriers can carry a plurality of pieces to be coated 30.

[0089] The carrier 200 includes a longitudinal central axis located at the center of the carrier 200 and parallel to the first direction F1, and the carrier 200 can rotate around its longitudinal central axis. It can be understood that the first direction F1 of the present application is parallel to the extension direction of the spray member 300 and is the longitudinal direction of the coating device 10, or the vertical direction along the coating device 10 parallel to the gravity direction.

[0090] 1 , 2 and 3 , the spray plate 20 is disposed on one side of the circumference of the carrier 200 and is at least partially located in the coating chamber 130 . The multiple spray holes 310 of the spray member 300 are all disposed toward the longitudinal center axis L, so that the spray holes 310 can spray the coating material or other gas more positively toward the parts to be coated 30 on the carrier 200 , thereby improving the uniformity of the film formed on the parts to be coated 30 .

[0091] The coating device 10 of the present application sprays the coating material or other gas to the coating member 30 through the multiple spray holes 310 on the spray member 300. The spray holes 310 are all oriented toward the longitudinal center axis L of the carrier 200, which is conducive to the coating material or other gas sprayed from the spray holes 310 to the carrier 200 having a relatively uniform flow rate and concentration at the carrier 200. The coating material or other gas sprayed from the spray holes 310 can be laid more evenly on the coating member 30 on the carrier 200. Compared with the related art in which multiple spray holes 310 are arranged on the entire surface of the spray plate 20, the coating material or other gas sprayed from the spray holes 310 can be laid more evenly on the coating member 30 on the carrier 200. The holes are arranged to spray the coating material. In the present application, any spray hole 310 is oriented toward the center of the carrier 200, which reduces the risk of uneven spraying of the coating material or other gas due to the skewness of the spray hole 310, and facilitates the spray hole 310 to spray the coating material or other gas more positively toward the part to be coated 30 on the carrier 200, thereby spraying the coating material or other gas evenly onto the part to be coated 30, thereby achieving a more uniform spraying effect, so that a film layer with better uniformity can be deposited on the part to be coated 30, thereby facilitating obtaining a film layer with better quality.

[0092] In some embodiments, the carrier 200 of the present application is configured to be able to rotate around the longitudinal central axis L, so that the coating material or other gas sprayed by the spray part 300 can be sprayed on multiple parts to be coated 30 on the carrier 200. When the spray plate 20 sprays the coating material or other gas toward the carrier 200, the rotation of the carrier 200 can further improve the uniformity of the coating material or other gas sprayed by the spray hole 310 on the parts to be coated 30 of the carrier 200, which is conducive to obtaining a film layer with better uniformity.

[0093] In some embodiments, referring to FIG. 1, FIG. 2, FIG. 4 and FIG. 5, FIG. 4 is a schematic diagram of a top view of the structure of the spray surface provided in an embodiment of the present application. FIG. 5 is an enlarged view of point A in the embodiment of FIG. 1. The spray member 300 has a first surface 330 disposed toward the longitudinal center axis L, and all spray holes 310 are opened on the first surface 330. That is, a plurality of holes can be opened on the first surface 330 of the spray member 300 to form the above-mentioned plurality of spray holes 310. And the first surface 330 is set toward the longitudinal center axis L, so that the spray holes 310 formed by opening are directly toward the longitudinal center axis L, which reduces the cost of making the spray holes 310 and improves the convenience of making the spray holes 310.

[0094] In some embodiments, please refer to Figures 1, 2 and 4, a plane intersecting the first surface 330 and perpendicular to the longitudinal center axis L is defined as a first reference plane S, the first surface 330 intersects with the first reference plane S to define a first intersection line K, the first intersection line K has a first edge point M and a second edge point N relatively set, the line connecting the first edge point M and the second edge point N is a reference line MN, and the extension direction of the reference line MN is perpendicular to the extension direction of the longitudinal center axis L.

[0095] In this way, first surfaces 330 of different shapes can be set, so that each point on the first surface 330 is facing the longitudinal center axis L, and the spray holes 310 set on the first surface 330 are facing the longitudinal center axis L, without being limited to the specific shape of the first surface 330, so that different shapes of the first surface 330 can be set according to different requirements of the gas flow field in the spray chamber. At the same time, the spray holes 310 are all facing the longitudinal center axis L, which is beneficial to improve the spraying uniformity of the spraying material or other gas.

[0096] It can be understood that the line connecting the first edge point M and the second edge point N can be a curve or a straight line. And the plane where the first surface 330 is located can be a plane intersecting with the extension direction of the longitudinal central axis L, or a plane parallel to the extension direction of the longitudinal central axis L. That is, the first surface 330 can be a plane inclined relative to the extension direction of the longitudinal central axis L, or a plane parallel to the extension direction of the longitudinal central axis L.

[0097] In some embodiments, referring to FIG. 5 , a perpendicular bisector I of the reference line MN and the longitudinal central axis L are perpendicular to and intersect each other.

[0098] In this way, the reference line MN is perpendicular to the perpendicular line I therein, wherein the perpendicular line I is perpendicular to the longitudinal center axis L, and the first surface 330 is symmetrical with respect to a preset plane where the perpendicular line I of the reference line MN and the longitudinal center axis L are located. In this way, the multiple spray holes 310 formed on the first surface 330 are also arranged symmetrically with respect to the preset plane, which is beneficial to further improve the uniformity of the coating material or other gas sprayed from the spray hole 310 toward the longitudinal center axis L, and is beneficial to improve the uniformity of the film layer formed by the coating material on the part to be coated 30.

[0099] In some embodiments, referring to FIG. 5 , the reference line MN and the first intersection line K coincide with each other, that is, the first surface 330 can be set as a surface extended along the extension direction of the longitudinal center axis L using the reference line MN as a unit.

[0100] In this embodiment, the plane where the first surface 330 is located may be a plane parallel to the extension direction of the longitudinal central axis L. The plane where the first surface 330 is located may also be a plane where the distances between the first surface 330 and the longitudinal central axis L are different at various locations along the first direction F1, such as the plane where the first surface 330 is located may be a plane inclined relative to the extension direction of the longitudinal central axis L. It may also be a plane where there is a step structure toward the longitudinal central axis L along the first direction F1. In this way, if there are different coating requirements for multiple pieces 30 to be coated at the same time, such as different parameters such as the thickness of the coated layer, the multiple pieces 30 to be coated with different coating requirements may be placed on different carriers spaced apart along the first direction F1 to correspond to positions on the first surface 330 with different distances from the longitudinal central axis L.

[0101] It can be understood that if the distances between at least two different positions along the first direction F1 on the first surface 330 and the longitudinal center axis L are different, then the distances between the at least two different positions along the first direction F1 on the first surface 330 and the carrier are also different, and the concentration and flow rate of the spray material or other gas sprayed onto the carrier are different. In this way, the corresponding parts to be coated 30 can be adjusted to be located on different carriers along the first direction F1 to adjust the distances between the parts to be coated 30 and the first surface 330, thereby making the concentration and flow rate of the spray material or other gas sprayed onto the parts to be coated 30 different, so that the parts to be coated 30 with different coating requirements can be coated at the same time in the same batch, which is beneficial to improving the coating efficiency and saving manpower and material resources.

[0102] In some embodiments, as shown in FIG. 5 , the orthographic projection of the first surface 330 on the second reference plane is a straight line, the second reference plane is a plane perpendicular to the longitudinal central axis L, and the second reference plane can coincide with the first reference plane S. At this time, the first surface 330 is a plane, and the plane where the first surface 330 is located is parallel to the extension direction of the longitudinal central axis L. In this way, along the first direction F1, the distance between the first surface 330 and the longitudinal central axis L is the same everywhere on the plane where the first surface 330 is located, which is conducive to the consistency of the thickness and other parameters of the coating layer of the parts to be coated 30 on multiple carriers in the first direction F1, and is conducive to the uniform coating of large-scale parts to be coated 30 in batches.

[0103] In some embodiments, refer to FIG. 6, which is a schematic diagram of the top view structure of the spray surface of another embodiment of the present application. The first intersection line K is an arc, and the corresponding first surface 330 is a curved surface, and each point on the curved surface faces the longitudinal central axis L, and the spray hole 310 arranged on the curved surface faces the longitudinal central axis L, which is conducive to the coating material or other gas sprayed from the spray hole 310 to be laid more evenly on the part to be coated 30 on the carrier 200, and is conducive to obtaining a film layer with better uniformity. And the curved surface shape of the first surface 330 adapted to the shape of the inner wall of the coating cavity 130 can be set according to the cavity wall shape of the coating cavity 130, so that the coating cavity 130 can present a better airflow field, which is conducive to improving the circulation of the coating material or other gas in the coating cavity 130, and is conducive to the uniform deposition of the coating material or other gas on the part to be coated 30, which is conducive to improving the uniformity of the film layer on the part to be coated 30.

[0104] The curved first surface 330 can be inclined relative to the longitudinal center axis L, or can be parallel to the longitudinal center axis L, so as to design different shapes of the first surface 330 according to different coating requirements, thereby obtaining a suitable first surface 330, which in turn is beneficial to improving the coating effect and obtaining a better quality film layer.

[0105] In some embodiments, referring to Figure 6, the orthographic projection of the first surface 330 on the third reference plane is an arc, the third reference plane is a plane perpendicular to the longitudinal center axis L, and the third reference plane can coincide with the first reference plane S, and / or the center of the circle where the first intersection line K lies is located on the longitudinal center axis L.

[0106] It can be understood that the first surface 330 can be a plane whose positive projection on the third reference plane is an arc. In this case, the first surface 330 is parallel to the longitudinal center axis L, and the distances between the multiple parts to be coated 30 spaced apart along the first direction F1 and the first surface 330 are relatively balanced or even tend to be consistent, which is conducive to the consistency of parameters such as the thickness of the coating layer of the parts to be coated 30 on the multiple carriers in the first direction F1, and is conducive to improving the overall uniformity of the coating layer of the multiple parts to be coated 30, and is conducive to improving the uniformity of the coating layer of the multiple parts to be coated 30 that are batch-coated with the same parameters of the film, and is conducive to improving the coating uniformity of the corresponding batches of parts to be coated 30.

[0107] The first surface 330 can also be a plane whose center of the circle where the first intersection line K is located is located on the longitudinal central axis L, then the first intersection line K is an arc, and for a support member such as a disc, the first intersection line K of the first surface 330 is set to be an arc with its center located on the longitudinal central axis L, which is beneficial for the first surface 330 and the disc-shaped support member to correspond, then the spray holes 310 on the first surface 330 along the extension direction of the first intersection line K all correspond to the support member, which is beneficial for improving the uniformity of the flow rate of the coating material or other gas sprayed from the spray holes 310 to the support member, and is beneficial for depositing a more uniform coating material or other gas on the member to be coated 30, which is beneficial for improving the uniformity of the coating layer of the member to be coated 30.

[0108] The first surface 330 can also be an orthographic projection of the first surface 330 on the third reference plane as an arc, and the center of the circle where the first intersection line K is located is located on the longitudinal central axis L. In this case, the orthographic projection of the first surface 330 on the third reference plane is an arc, and the center of the arc is located on the longitudinal central axis L. In combination with the orthographic projection of the first surface 330 on the third reference plane as an arc, the corresponding first surface 330 is parallel to the first direction F1. For ease of understanding, in this case, the first surface 330 is a partial cylindrical side surface, which is convenient for corresponding to the carrier 200 having multiple layers of carriers spaced along the first direction F1, so that each spray hole 310 on the first surface 330 faces the longitudinal central axis L, and the spacing of each spray hole 310 relative to the carrier 200 tends to be consistent, which is conducive to the flow rate and concentration of the coating material or other gas sprayed by the spray hole 310 flowing to the carrier tending to be consistent, and is conducive to the deposition and formation of a uniform film layer on each part 30 to be coated.

[0109] In some embodiments, referring to FIG. 2 , all spray holes 310 arranged at intervals along the first direction F1 constitute a spray hole group, and all spray holes 310 constitute multiple spray hole groups. In other words, the spray member 300 has multiple spray hole groups, each spray hole group includes multiple spray holes, and multiple spray hole groups are arranged at intervals along the extension direction of the reference line MN, or the spray holes 310 are arranged at intervals along the first surface 330 along the extension direction of the circumference of the carrier 200.

[0110] The extension direction here depends on the shape of the specific spray surface and is not limited to the straight line direction. For example, when the positive projection of the first surface 330 on the third reference plane is an arc, that is, when the first surface 330 is a circular arc surface, the corresponding extension direction is the arc, and the extension direction is still the arc extension, not the straight line extension. It can be understood that the multiple spray holes 310 in a single spray hole group are arranged longitudinally along the first direction F1, or the spray hole group is a longitudinally arranged spray hole column, and the multiple spray hole groups are multiple longitudinally arranged spray hole columns separated from each other. The provision of multiple spray hole groups facilitates the simultaneous spraying of multiple columns of coating materials or other gases, and facilitates increasing the rate of spraying the coating materials or other gases.

[0111] In some embodiments, refer to FIG. 7, which is a schematic diagram of a top view of a spray member 300 provided in an embodiment of the present application. The spray member 300 is provided with a plurality of air inlet channels 320, and all the air inlet channels 320 are connected to all the spray hole groups in a one-to-one correspondence, so that each spray hole group has a different air inlet channel 320, and then each spray hole group can spray out different coating materials or spray out different other gases. It is also possible to enable each spray hole group to spray out the same coating material or spray out the same other gas. It is also possible to enable one or more of each spray hole group to spray out the coating material, and the rest to spray out other gases.

[0112] In some embodiments, the other gas may be a process gas or a barrier gas, and one or more of the spray hole groups may spray process gas, and another or more of the spray hole groups may spray barrier gas. For example, if multiple spray hole groups spray coating materials, process gas, and barrier gas respectively, the uniformity of the film layer formed on the object 30 to be coated can be further improved.

[0113] In some embodiments, referring to FIG. 2 and FIG. 3 , a plurality of air inlets 340 are provided on the spray element 300, and all the air inlets 340 constitute a plurality of air inlet group, and all the air inlet groups are connected to all the air inlet channels 320 in a one-to-one correspondence, and the air inlet groups are used to inlet air or introduce coating materials or other gases into the corresponding air inlet channels 320. Among them, the plurality of air inlets 340 of the same air inlet group are arranged at intervals along the first direction F1, and are all connected to the corresponding air inlet channels 320.

[0114] It can be understood that the same air inlet channel 320 is connected to multiple air inlet parts 340 spaced apart along the first direction F1. In this way, air can be simultaneously inletted to different positions in the air inlet channel 320 along the first direction F1 through multiple air inlet parts 340, thereby improving the uniformity of air inlet to various locations in the air inlet channel 320, and thus facilitating the improvement of the uniformity of spraying the coating material or other gas from the spray hole 310. It can be understood that if there is only one air inlet part 340, the air flow rate and air flow density of the spray hole 310 farther from the air inlet part 340 are lower. Obviously, the air flow rate of the spray hole 310 farther from the air inlet part 340 and the spray hole 310 closer to the air inlet part 340 are quite different. In this way, the air flow rate of each spray hole 310 is uneven, which is not conducive to the uniformity of coating. The present application provides multiple air inlet portions 340, which can greatly improve the uniformity of the air flow rate of each spray hole 310, thereby helping to improve the uniformity of the air flow rate and air flow density of the coating material or other gases at various locations in the coating cavity 130, thereby helping to improve the quality of the coated layer.

[0115] In some embodiments, as shown in FIG. 2 , the plurality of spray holes 310 of the spray hole group are arranged at intervals along the first direction F1. Correspondingly, the plurality of air inlets 340 on the spray element 300 are also arranged at intervals along the first direction F1, and the plurality of air inlets 340 are respectively connected with at least one spray hole 310 adjacent thereto, so that the coating material or other gas can be introduced into the corresponding at least one spray hole 310 through the air inlet 340. In this way, the coating material or other gas can be introduced into the plurality of spray holes 310 arranged at intervals along the first direction F1 in the corresponding spray hole group through the corresponding air inlet channel 320 and the plurality of air inlets 340 connected with the air inlet channel 320.

[0116] The carrier 200 is provided with a plurality of layers of carriers stacked along the first direction F1, each of which is used to carry the workpiece 30 to be coated. The present application adopts a method of arranging multiple spray holes 310 at intervals along the first direction F1, that is, the multiple spray holes 310 are arranged longitudinally along the first direction F1. Compared with arranging the multiple spray holes 310 transversely, the arrangement of the present application facilitates improving the ability of the workpieces 30 to be coated on each layer of the carrier to receive a coating material or other gas with a relatively uniform flow rate, thereby ultimately facilitating improving the uniformity of the film layer formed on the workpiece 30 to be coated.

[0117] In some embodiments, as shown in FIG. 1 , at least some of the spray holes 310 are evenly spaced along the first direction F1 to further improve the uniformity of spraying the coating material or other gas from the spray holes 310 , so as to improve the uniformity of the film layer formed on the object 30 to be coated.

[0118] In some embodiments, at least some of the spray holes 310 are evenly spaced along the first direction F1, which facilitates the design of stacking multiple spray elements 300 along the first direction F1. Figure 8a As shown, the coating device 10 includes a plurality of spray plates 20, at least two of the plurality of spray plates 20 are sequentially arranged along the extension direction of the first direction F1, and correspondingly, the plurality of spray holes 310 of the plurality of spray members 300 are spaced along the first direction F1, and then the plurality of carriers 200 are stacked along the first direction F1, which can increase the number of the coating members 30 that can be coated at the same time, thereby improving the coating efficiency. In this embodiment, the sealing member ( Figure 8a The spray plate 20 (not shown) is disposed between the housing 100 and at least two spray plates 20 arranged in sequence along the extension direction of the first direction F1 to seal the spray plate and install it on the housing 100. There are no excessive restrictions and no further details are given here.

[0119] In some embodiments, Figure 8b As shown, the arrangement of the plurality of spray plates 20 may also be as follows: at least two of the plurality of spray plates 20 are arranged in sequence along the extension direction of the second direction F2, wherein the first direction F1, the second direction F2 and the extension direction of the reference line MN intersect each other. In other words, at least two of the plurality of spray plates 20 may be arranged in sequence along the second direction F2 in the transverse direction, thereby increasing the number of spray plates 20 in the transverse direction, so as to increase the density of the coating material or other gas sprayed into the coating chamber 130, thereby improving the spraying efficiency. The number of spray plates 20 arranged in the transverse direction may also be reversely adjusted according to factors such as the required thickness of the coating layer and the coating rate, so as to meet actual production needs.

[0120] In this embodiment, the sealing member ( Figure 8b The air vent 350 of the two spray parts 300 adjacent to or closely attached to each other along the second direction F2 of two adjacent spray plates 20 may be disposed at both ends of the corresponding spray parts 300 along the first direction F1 to further connect to the corresponding spray holes 310, thereby preventing the arrangement of the air vent 350 from affecting the superposition of the two adjacent spray plates 20 along the second direction F2.

[0121] In some embodiments, Figure 8cAs shown, the arrangement of the multiple spray plates 20 can also be: at least two of the multiple spray plates 20 are arranged in sequence along the extension direction of the reference line MN of any of the multiple spray plates 20. Specifically, the multiple spray plates 20 can be arranged in sequence along the direction from the center of the spray chamber to the periphery. It can also be understood that the multiple spray plates 20 can be arranged in sequence along the direction from the gas outlet 112 to the gas inlet 111, or in other words, the multiple spray plates 20 can be stacked in sequence in the thickness direction of any spray plate 20. In this way, the amount of coating material or other gas sprayed out at the same time can be increased, and the sprayed coating material or other gas can also be uniformly mixed with the plasma sprayed out by the plasma source, which is beneficial to increase the density of the coating material or other gas sprayed in the coating chamber 130 to improve the coating efficiency, and also to improve the mixing degree of the coating material or other gas and the plasma, which is beneficial to improve the coating uniformity.

[0122] In some embodiments, at least two of the multiple spray plates 20 can be arranged in sequence along the extension direction of the first direction F1, and at least another two of the multiple spray plates 20 can be arranged in sequence along the extension direction of the second direction F2. At least another two of the multiple spray plates 20 can also be arranged in sequence along the extension direction of the reference line MN of any spray plate 20 of the multiple spray plates 20. In this way, the multiple spray plates 20 of the present application can be combined in any of the above combinations without limitation, and the combination settings are more diverse and can be flexibly combined according to actual production needs to meet different production needs, so as to improve coating efficiency and coating uniformity, etc.

[0123] In some other embodiments, the coating device 10 further includes a plurality of ventilation pipes 350, all of which are connected to all of the air inlet groups one by one, and the ventilation pipes 350 are used to introduce various coating materials or various other gases, or the plurality of ventilation pipes 350 can simultaneously introduce the same coating material or the same other gas.

[0124] In some embodiments, as shown in FIG1 , the housing 100 is provided with an air inlet 111 and an air outlet 112 respectively located on opposite sides of the coating chamber 130, and the coating device 10 further includes a spraying member 400, which is arranged on one side of the housing 100 close to the air inlet 111, and is used to spray plasma into the coating chamber 130, and plasma spraying on the part to be coated 30 helps the coating material to be better deposited on the part to be coated 30. The spraying member 300 is arranged between the spraying member 400 and the carrier 200, and the spray path 311 of the spray hole intersects with the spray path 410 of the spraying member. This is conducive to obtaining a more uniform flow field in the coating chamber 130, and is conducive to improving the uniformity of the coating.

[0125] Refer to Figures 9 and 10. Figure 9 is a schematic diagram of the flow field at a top-down angle in the coating cavity 130 provided in an embodiment of the present application. Figure 10 is a schematic diagram of the flow field at a side-down angle in the coating cavity 130 provided in an embodiment of the present application. The title slice: velocity magnitude (m / s) in Figures 9 and 10 both represent the airflow velocity in the coating device 10, specifically the airflow velocity in the coating device 10 from the air inlet 111 to the air outlet 112. The angle shown in Figure 9 is a top-down angle, and the angle shown in Figure 10 is a side-down angle. The arrows in Figures 9 and 10 are the airflow directions, and the right sides in Figures 9 and 10 represent the gray concentration in the left figure corresponding to the airflow velocity of 0m / s-2m / s. As can be seen from Figures 9 and 10, the gray color inside the coating chamber 130 in the coating device 10 is relatively uniform everywhere, reflecting that the air flow velocity in the coating chamber 130 of the present application tends to be consistent and is relatively uniform as a whole, which is conducive to the uniform deposition of the coating material on the part to be coated 30.

[0126] As can be seen from FIG. 10 , the airflow velocity at each location along the first direction F1 in the coating chamber 130 is relatively uniform, so that the airflow received by the multi-layer parts to be coated 30 arranged along the first direction F1 on the carrier 200 is relatively consistent, so that the parameters such as the coating layer thickness and uniformity of the multi-layer parts to be coated 30 of the same batch in the coating chamber 130 are consistent, thereby improving the overall coating quality of each batch of parts to be coated 30. Continuing to refer to the airflow at the position of the spray part 300 in FIG. 9 and FIG. 10 , it can be seen that a vortex is formed at the spray part 300 , and the vortex at this place enables the coating material or other gas sprayed by the spray part 300 to be fully mixed with the plasma sprayed by the injection part 400 , and the plasma is uniformly mixed with the coating material, which is conducive to the uniform deposition of the coating material on the part to be coated 30 , and further helps to improve the uniformity of the film layer formed on the part to be coated 30 , and the non-uniformity of the film layer formed in the thickness direction is less than 2% at each location, so it can be understood that the uniformity of the film layer formed is high at each location, and the film layer quality is better. Combined with the rotation of the carrier 200 around the longitudinal central axis L, it can effectively shorten the single-layer cycle time of the coating material in the coating chamber 130 , which is conducive to shortening the coating time and improving the deposition rate and deposition effect of the coating material on the part to be coated 30 .

[0127] In some embodiments, as shown in FIG. 3 , the coating device 10 further includes a seal 500, which is disposed between the housing 100 and the spray plate 20 to achieve sealing between the spray plate 20 and the housing 100, reduce the risk of gas leakage in the coating chamber 130, and help improve the spray coating efficiency, and help improve the flow field balance in the coating chamber 130, which helps the coating material to be uniformly deposited on the to-be-coated part 30. It can be understood that the provision of the spray frame also facilitates the structural provision of the seal 500, that is, there is no need to provide a seal 500 of an overly complex shape, and a square seal 500 corresponding to the spray frame can be provided to achieve sealing between the spray part 300 and the housing 100.

[0128] In some embodiments, referring to FIG. 1 , the housing 100 includes an inner shell 110 and an outer shell 120, the inner shell 110 defines the above-mentioned coating cavity 130, the outer shell 120 is arranged around the outer periphery of the inner shell 110, and a receiving cavity is defined between the inner shell 110 and the outer shell 120, the spraying member 300 of the coating device 10 is installed at the inner shell 110, and the vent pipe 350 of the coating device 10 is accommodated in the receiving cavity. It can be understood that, on the one hand, the setting of the inner and outer double shells is conducive to improving the sealing effect of the coating cavity 130. On the other hand, the setting of the receiving cavity is convenient for accommodating the vent pipe 350, so that the vent pipe 350 does not need to be accommodated in the coating cavity 130 to affect the gas flow field in the coating cavity 130, thereby facilitating the improvement of the flow field balance in the receiving cavity, and facilitating the improvement of the uniformity of the deposition of the coating material on the part 30 to be coated.

[0129] In some embodiments, the inner shell 110 is configured to be detachably installed in the outer shell 120. Disassembling the inner shell 110 facilitates the application of the coating device 10 of the present application to batch plasma enhanced chemical vapor deposition (PECVD) equipment, and helps to improve the convenience of combining the coating device 10 of the present application with the PECVD equipment.

[0130] The spray plate 20 and the coating device 10 of the present application have the following advantages:

[0131] 1. By arranging a plurality of spray holes 310 toward the longitudinal center axis L, the spray holes 310 can spray the coating material or other gas more positively toward the workpiece 30 to be coated on the carrier 200, so that the coating material or other gas sprayed from the plurality of spray holes 310 to the workpiece 30 to be coated has a relatively uniform flow rate and concentration at the workpiece 30 to be coated, thereby being able to coat a film layer with better uniformity on the workpiece 30 to be coated, thereby facilitating obtaining a film layer with better quality.

[0132] 2. The spray plate 20 is compatible with plasma enhanced atomic layer deposition equipment. The extension direction of the hollow channel 21 on the spray plate 20 intersects with the extension direction of the output channel of the spray hole for outputting gas. The coating material or other gas sprayed from the spray hole 310 of the present application can be fully mixed with the plasma sprayed from the injection part 400, which is beneficial to improve the uniformity of the deposition of the coating material on the part to be coated 30 and to obtain a film layer with better quality.

[0133] 3. The spray holes 310 are provided on the first surface 330, so that the first surface 330 is arranged to face the longitudinal central axis L, and the spray holes 310 provided thereon are directly oriented to the longitudinal central axis L, which can reduce the cost of manufacturing the spray holes 310 and improve the convenience of manufacturing the spray holes 310. The shape of the first surface 330 can be set according to the coating requirements, so that the coating material and other gases in the coating cavity 130 obtain uniform airflow, thereby facilitating the coating material or other gases to be uniformly sprayed onto the object to be coated 30, and facilitating obtaining a film layer with better uniformity.

[0134] 6. Multiple spray holes 310 constitute multiple spray hole groups. Each spray hole group can independently introduce coating materials or other gases. The coating materials and other gases introduced can be selected according to needs to obtain better coating effects. It has high flexibility and is conducive to obtaining film layers with better quality that are suitable for different working conditions.

[0135] 7. The carrier 200 can rotate around the longitudinal central axis, which can further improve the uniformity of the coating material or other gas sprayed from the spray hole 310 on the workpiece 30 to be coated on the carrier 200, which is conducive to obtaining a more uniform film layer.

[0136] 8. Providing at least two spray parts 300 can increase the amount of spray material or other gas sprayed into the coating chamber 130, thereby improving the spray efficiency, and can set the type of spray material or other gas sprayed in the spray part 300 according to needs, thereby improving the flexibility of the design of the spray plate 20.

[0137] 9. The provision of the first connecting member 610 and the second connecting member 620 can improve the connection strength between at least two spraying members 300 and improve the stability of the coating device 10.

[0138] 10. At least two of the multiple spray plates 20 of the present application can be arranged sequentially along the extension direction of the first direction F1, can be arranged sequentially along the extension direction of the second direction F2, can also be arranged sequentially along the extension direction of the reference line MN of any of the multiple spray plates 20, and can also be flexibly combined according to the above three methods to meet different production needs, such as improving the coating efficiency and improving the coating uniformity.

[0139] 11. The shell 100 is provided with an air inlet 111 and an air outlet 112 respectively located on opposite sides of the coating cavity 130, and the injection member 400 is arranged on one side of the shell 100 close to the air inlet 111, etc., which is conducive to obtaining a more uniform flow field in the coating cavity 130 and improving the uniformity of the coating.

[0140] 12. The seal 500 is disposed between the shell 100 and the spray plate 20 to reduce the risk of gas leakage in the coating chamber 130, which is beneficial to improving the spray coating efficiency and the flow field balance in the coating chamber 130, and is beneficial to uniform deposition of the coating material on the workpiece 30 to be coated.

[0141] 13. The housing 100 includes an inner shell 110 and an outer shell 120. The inner and outer double shells are arranged to improve the sealing effect of the coating cavity 130. The arrangement of the accommodating cavity is convenient for accommodating the vent pipe 350, so that the vent pipe 350 does not need to be accommodated in the coating cavity 130 to affect the gas flow field in the coating cavity 130, thereby facilitating the improvement of the flow field balance in the accommodating cavity and the improvement of the uniformity of the deposition of the coating material on the workpiece 30 to be coated.

[0142] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0143] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A spray plate, characterized in that: The spray plate comprises: A connector assembly; and A spraying member connected to the connecting member group, wherein the spraying member has a plurality of spraying holes, and the spraying holes are used to output gas; The spray member and the connecting member group define a hollow channel, and the extension direction of the hollow channel intersects with the extension direction of the output channel of the spray hole for outputting gas.

2. The shower plate according to claim 1, characterized in that: The connecting member group includes a first connecting member, the spray plate includes at least two spray members, and the at least two spray members are sequentially connected to the first connecting member at intervals.

3. The shower plate according to claim 2, characterized in that: The connecting member group further includes a second connecting member, and the spraying member is connected between the first connecting member and the second connecting member; The first connecting member and the second connecting member are arranged at intervals along the first direction, the at least two spray members include a first spray member and a second spray member arranged at intervals along the second direction, the first spray member, the first connecting member, the second spray member and the second connecting member are sequentially connected end to end to form a spray frame, and the spray frame defines the hollow channel; The first direction and the second direction intersect each other, and the first direction is parallel to the extension direction of the spray element.

4. A coating device, characterized in that: The coating device comprises: The housing has a coating cavity; A carrier is disposed in the coating chamber; the carrier is used to carry the object to be coated, and the carrier includes a longitudinal central axis located at the center of the carrier and parallel to the first direction; and The spray plate according to any one of claims 1 to 3, wherein the spray plate is disposed on one side of the carrier in the circumferential direction and is at least partially located in the coating cavity; the plurality of spray holes are all disposed toward the longitudinal central axis; Wherein, the first direction is parallel to the extension direction of the spray element.

5. The coating device according to claim 4, characterized in that: The spraying member has a first surface disposed toward the longitudinal central axis, and all the spraying holes are opened on the first surface; defining a plane intersecting the first surface and perpendicular to the longitudinal center axis as a first reference plane; The first surface intersects with the first reference surface to define a first intersection line, the first intersection line has a first edge point and a second edge point that are arranged opposite to each other, and a line connecting the first edge point and the second edge point is a reference line.

6. The coating device according to claim 5, characterized in that: The perpendicular bisector of the reference line on the first reference plane is perpendicular to and intersects the longitudinal central axis.

7. The coating device according to claim 5, characterized in that: The reference line and the first intersection line coincide with each other.

8. The coating device according to claim 7, characterized in that: The orthographic projection of the first surface on the second reference plane is a straight line; and the second reference plane is a plane perpendicular to the longitudinal central axis.

9. The coating device according to claim 5 or 6, characterized in that: The first intersection line is an arc line.

10. The coating device according to claim 9, characterized in that: The orthographic projection of the first surface on the third reference plane is an arc; the third reference plane is a plane perpendicular to the longitudinal central axis; and / or The center of the circle where the first intersection line is located is located on the longitudinal central axis.

11. The coating device according to claim 5, characterized in that: The spraying member has a plurality of spray hole groups, each of the spray hole groups includes a plurality of the spray holes, and the plurality of spray hole groups are arranged at intervals along the extending direction of the reference line.

12. The coating device according to claim 11, characterized in that: The spray element is provided with a plurality of air inlet channels; Each of the air inlet channels is correspondingly connected to at least one of the spray hole groups; The spray element is provided with a plurality of air inlet parts, all of which constitute a plurality of air inlet part groups, and all of the air inlet part groups are connected to all of the air inlet channels in a one-to-one correspondence; The plurality of air intake portions of the same air intake portion group are arranged at intervals along the first direction and are all connected to the corresponding air intake passages; The plurality of spray holes in the spray hole group are evenly spaced and arranged along the first direction.

13. The coating device according to claim 5, characterized in that: The coating device comprises a plurality of the spray plates, and at least two of the plurality of the spray plates are sequentially arranged along the extension direction of the first direction; And / or, at least two of the plurality of shower plates are arranged sequentially along the extension direction of the second direction; And / or, at least two of the plurality of the shower plates are arranged in sequence along an extension direction of the reference line of any of the plurality of the shower plates; The first direction, the second direction and the extension direction of the reference line intersect each other.

14. The coating device according to claim 4, characterized in that: The shell is provided with an air inlet and an air outlet respectively located on opposite sides of the coating cavity; The coating device further comprises an injection member, which is arranged on a side of the housing close to the air inlet and is used to inject plasma into the coating chamber; The spraying member is arranged between the spraying member and the carrier; The injection path of the injection member passes through the hollow channel and intersects with the injection path of the spray hole.

15. The coating device according to claim 4, characterized in that: The carrier is configured to be rotatable about the longitudinal center axis.

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