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Device and method for classification

A sorting device and display device technology, applied in measuring devices, analysis materials, image analysis, etc., can solve problems such as poor resolution

Inactive Publication Date: 2007-04-04
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Defect area 872 → poor resolution (determination factor: 0.9)

Method used

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  • Device and method for classification
  • Device and method for classification
  • Device and method for classification

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Embodiment Construction

[0047] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The description will be made with respect to the case where the present invention is applied to a defect classification device used for macroscopic inspection targeting a semiconductor wafer or a flat panel display substrate. However, this is by no means limiting and the invention can also be used, for example, for the purpose of classifying various cells and displaying representative results.

[0048]FIG. 1 shows the configuration of a defect classification device according to an embodiment of the present invention. This defect sorting device comprises: illuminator 101, is used for illuminating test object 112; Bandpass filter 102, is used for limiting the wavelength of the illuminating light from illuminator 101; The CCD camera 104 is used to convert the formed test object image into an electrical signal; the image input board 105 is us...

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Abstract

The invention provides classification device and method. A classification device having region extracting means (107) for extracting regions from an image, classifying means (108) for classifying each of the extracted regions into a predetermined category, and representative category determining means (109) for determining the representative category in the entire image based on the result of the classification of each region in the image.

Description

technical field [0001] The present invention relates to a classification device and a classification method. Background technique [0002] Currently, there are various devices available that perform classification using images obtained by imaging a test object. These devices can be classified into types in which there is only one object to be classified in the processed image and types in which there are multiple objects to be classified in the processed image. As a specific example, a defect classification device used in a manufacturing process of a semiconductor wafer will be considered. [0003] In the case of defect classification for microscopic inspections that aim to find very small defects such as wiring pattern abnormalities or crystal defects, locally expand and image the previously detected defect location, and use its image to classify the target defect . Therefore, this case corresponds to a type in which there is only one object to be classified in the proce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/956H01L21/66G01N21/47G01N21/95G02F1/13G06T1/00G06T7/00
CPCG06T7/0004G01N21/4788G01N21/9501G01N21/956
Inventor 神田大和菊地奖
Owner OLYMPUS CORP