Rectifying tower for producing boron trichloride gas

Abstract

The rectifying tower for producing the boron trichloride gas comprises a rectifying tower body, an exhaust pipe and a discharging pipe are arranged at the top and the bottom of the rectifying tower body respectively, a second electromagnetic valve is arranged on the surface of the discharging pipe, a U-shaped pipe is arranged in the middle of the exhaust pipe, an extension pipe is arranged in the center of the bottom of the U-shaped pipe, and a baffle is arranged in the extension pipe. A heating pipe is arranged in the extension pipe and located at the bottom of the baffle, a third electromagnetic valve is arranged at the top of the surface of the exhaust pipe, a one-way valve is arranged on the surface of the exhaust pipe and located behind the third electromagnetic valve, a backflow preventing device is arranged in the exhaust pipe and located behind the third electromagnetic valve, and a feeding pipe is arranged on the surface of the rectifying tower body. A first electromagnetic valve is arranged on the surface of the feeding pipe; according to the utility model, the one-way valve is arranged at the exhaust pipe, so that the gas is prevented from flowing back and entering the rectifying tower again, the purity of the distilled and purified gas is reduced, and the rectifying efficiency is further reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of boron trichloride purification, in particular to a distillation tower for producing boron trichloride gas. Background Art

[0002] Electronic gas is one of the essential key basic materials for the microelectronics industry. It is known as the "blood" and "food" of the electronics industry and plays a pivotal role in the manufacturing process of semiconductor integrated circuits, optical fibers and solar cells. With the rapid development of the world's electronics industry, the production and sales of electronic gases are showing a steady upward trend and have broad development prospects. Boron trichloride is mainly used to manufacture high-purity boron and catalysts for organic synthesis.

[0003] In the production process of boron trichloride gas, a distillation tower is needed for purification. China has authorized the utility model disclosure (announcement) number: CN215505557U. A distillation tower for purifying boron trichloride includes a distillation tower body, a feed pipe is fixed on one side of the distillation tower body, a fourth solenoid valve is installed on the inner side of the feed pipe, a condenser is installed on the top of the inner side of the distillation tower body, a partition is fixed on the lower half of the inner side of the distillation tower body, a heating tube is installed on the inner side of the distillation tower body and at the bottom of the partition, and a liquid level sensor is fixed on the inner side of the distillation tower body and at the top of the partition.

[0004] However, when the distillation tower of the prior art is performing distillation, the gas in the first recovery pipe and the second recovery pipe may flow back and re-enter the distillation tower, thereby reducing the purity of the gas purified by distillation and further reducing the efficiency of distillation. Utility Model Content

[0005] The utility model aims to provide a distillation tower for producing boron trichloride gas to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A distillation tower for producing boron trichloride gas comprises a distillation tower body, wherein an exhaust pipe and a discharge pipe are respectively arranged at the top and the bottom of the distillation tower body, a second solenoid valve is arranged on the surface of the discharge pipe, a U-shaped tube is arranged in the middle of the exhaust pipe, an extension pipe is arranged at the bottom center of the U-shaped tube, a baffle is arranged inside the extension pipe, a heating pipe is arranged inside the extension pipe and at the bottom of the baffle, a third solenoid valve is arranged on the top of the surface of the exhaust pipe, a one-way valve is arranged on the surface of the exhaust pipe and at the rear of the third solenoid valve, a backflow prevention device is arranged inside the exhaust pipe and at the rear of the third solenoid valve, a feed pipe is arranged on the surface of the distillation tower body, and a first solenoid valve is arranged on the surface of the feed pipe.

[0008] Preferably, the backflow prevention device includes a fixing plate and a pressing plate, the outer surface of the fixing plate is connected to the inner wall of the exhaust pipe, the top and bottom centers of the fixing plate are provided with through holes, the through holes are provided with clamping columns, the top of the clamping columns is provided with conical columns, and the top of the conical columns is connected to the bottom center of the pressing plate.

[0009] Preferably, the bottom periphery of the pressure plate and the top periphery of the fixed plate are connected via a plurality of piston rods, and a spring is sleeved on the plurality of piston rods, one end of the spring is connected to the bottom of the pressure plate, and the other end of the spring is connected to the top of the fixed plate.

[0010] Preferably, the diameter of the pressing plate is smaller than the diameter of the fixing plate.

[0011] Preferably, a sealing sleeve is provided on the surface of the clamping column.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model discloses a distillation tower for producing boron trichloride gas. On the basis of the prior art, an exhaust pipe is improved. A one-way valve is arranged at the exhaust pipe to prevent the gas from flowing back and re-entering the distillation tower, thereby reducing the purity of the distilled and purified gas and thus reducing the efficiency of the distillation.

[0014] The utility model discloses a distillation tower for producing boron trichloride gas. The middle part of the exhaust pipe is designed to be a U-shaped pipe. During the exhaust process of the exhaust pipe, liquid may appear in the exhaust pipe. At this time, the liquid will gather at the lowest point of the U-shaped pipe. When the amount of liquid is large, the heating pipe is turned on. The heating pipe will heat the liquid to make it turn into gas again and be discharged from the exhaust pipe.

[0015] The utility model discloses a distillation tower for producing boron trichloride gas. When the liquid at the bottom of a U-shaped tube is heated by a heating tube, the irregular movement of the gas will cause the gas to diffuse everywhere, and the gas will be blocked by a backflow prevention device, thereby preventing the gas from flowing back. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the structure of the utility model;

[0018] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0019] Figure 4 for Figure 2 Enlarged view of point B in the middle.

[0020] In the figure: 1. distillation tower body; 2. feed pipe; 3. first solenoid valve; 4. discharge pipe; 5. second solenoid valve; 6. exhaust pipe; 7. third solenoid valve; 8. one-way valve; 9. U-shaped pipe; 10. extension pipe; 11. fixing plate; 12. clamping column; 13. conical column; 14. pressure plate; 15. piston rod; 16. spring; 17. baffle; 18. heating tube. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0023] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] See also Figure 1-4 , the utility model provides a technical solution:

[0025] A distillation tower for producing boron trichloride gas comprises a distillation tower body 1, wherein an exhaust pipe 6 and a discharge pipe 4 are respectively arranged at the top and the bottom of the distillation tower body 1, a second solenoid valve 5 is arranged on the surface of the discharge pipe 4, a U-shaped tube 9 is arranged in the middle of the exhaust pipe 6, an extension tube 10 is arranged at the bottom center of the U-shaped tube 9, a baffle 17 is arranged inside the extension tube 10, a heating tube 18 is arranged inside the extension tube 10 and at the bottom of the baffle 17, a third solenoid valve 7 is arranged on the top of the surface of the exhaust pipe 6, a check valve 8 is arranged on the surface of the exhaust pipe 6 and behind the third solenoid valve 7, by arranging the check valve 8 at the exhaust pipe 6, the gas is prevented from flowing back and re-entering the distillation tower, the purity of the gas purified by distillation is reduced, and the efficiency of distillation is reduced, a backflow prevention device is arranged inside the exhaust pipe 6 and behind the third solenoid valve 7, a feed pipe 2 is arranged on the surface of the distillation tower body 1, and a first solenoid valve 3 is arranged on the surface of the feed pipe 2.

[0026] Furthermore, the backflow prevention device includes a fixing plate 11 and a pressing plate 14. The outer surface of the fixing plate 11 is connected to the inner wall of the exhaust pipe 6. Through holes are provided at the top and bottom centers of the fixing plate 11. A clamping column 12 is provided at the through holes. A conical column 13 is provided at the top of the clamping column 12. The top of the conical column 13 is connected to the bottom center of the pressing plate 14.

[0027] Furthermore, the bottom periphery of the pressure plate 14 is connected to the top periphery of the fixed plate 11 via a plurality of piston rods 15 , and a spring 16 is sleeved on the plurality of piston rods 15 , one end of the spring 16 is connected to the bottom of the pressure plate 14 , and the other end of the spring 16 is connected to the top of the fixed plate 11 .

[0028] Furthermore, the diameter of the pressing plate 14 is smaller than the diameter of the fixing plate 11 . The unique design here allows the gas to flow better without being blocked by the pressing plate 14 .

[0029] Furthermore, a sealing sleeve is provided on the surface of the clamping column 12, thereby improving the sealing performance between the clamping column 12 and the through hole of the fixing plate 11, and preventing gas from flowing out from the gap.

[0030] Working principle:

[0031] The interior of the distillation tower body 1 in the utility model uses the existing technology, and the specific structure and working principle of the interior of the distillation tower body 1 will not be described in detail here. In addition, the utility model designs the middle part of the exhaust pipe 6 into a U-shaped tube 9. During the distillation process, light components such as O2 and N2 are discharged from the exhaust pipe 6. Liquid may appear in the exhaust pipe 6. At this time, the liquid will gather at the lowest point of the U-shaped tube 9. When the amount of liquid is large, the heating tube 18 is turned on. The heating tube 18 will heat the liquid to make it turn back into gas and be discharged from the exhaust pipe 6.

[0032] When the liquid at the bottom of the U-shaped tube 9 is heated by the heating tube 18, the irregular movement of the gas will cause the gas to diffuse everywhere, and the gas will be blocked by the backflow prevention device, thereby preventing the gas from flowing back.

[0033] Specifically, the baffle 17 is made of a metal material that can transfer heat. When the gas at the bottom of the anti-backflow device acts on the fixed plate 11, it will be difficult for the gas to flow out from the through hole of the fixed plate 11. If the gas is located at the top of the anti-backflow device, the gas will exert a force on the pressure plate 14. The pressure plate 14 will move downward after being acted upon by the force. The movement of the pressure plate 14 will cause the conical column 13 and the clamping column 12 to move downward. When the conical column 13 moves to the through hole of the fixed plate 11, the gas will enter the bottom of the fixed plate 11 from the through hole. At the same time, the pressure plate 14 will compress the piston rod 15 after being acted upon by the force. When the force disappears, the spring 16 will rebound, thereby returning the pressure plate 14 to its initial position.

[0034] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A distillation tower for producing boron trichloride gas, comprising a distillation tower body (1), characterized in that: An exhaust pipe (6) and a discharge pipe (4) are respectively arranged at the top and bottom of the distillation tower body (1), a second solenoid valve (5) is arranged on the surface of the discharge pipe (4), a U-shaped pipe (9) is arranged in the middle of the exhaust pipe (6), an extension pipe (10) is arranged at the bottom center of the U-shaped pipe (9), a baffle (17) is arranged inside the extension pipe (10), a heating pipe (18) is arranged inside the extension pipe (10) and at the bottom of the baffle (17), a third solenoid valve (7) is arranged at the top of the surface of the exhaust pipe (6), a one-way valve (8) is arranged on the surface of the exhaust pipe (6) and behind the third solenoid valve (7), a backflow prevention device is arranged inside the exhaust pipe (6) and behind the third solenoid valve (7), a feed pipe (2) is arranged on the surface of the distillation tower body (1), and a first solenoid valve (3) is arranged on the surface of the feed pipe (2).

2. A distillation tower for producing boron trichloride gas according to claim 1, characterized in that: The backflow prevention device comprises a fixing plate (11) and a pressing plate (14), wherein the outer surface of the fixing plate (11) is connected to the inner wall of the exhaust pipe (6), through holes are arranged at the top and bottom centers of the fixing plate (11), clamping columns (12) are arranged at the through holes, a conical column (13) is arranged at the top of the clamping column (12), and the top of the conical column (13) is connected to the bottom center of the pressing plate (14).

3. A distillation tower for producing boron trichloride gas according to claim 2, characterized in that: The bottom periphery of the pressure plate (14) and the top periphery of the fixed plate (11) are connected via a plurality of piston rods (15), and a spring (16) is sleeved on the plurality of piston rods (15), one end of the spring (16) is connected to the bottom of the pressure plate (14), and the other end of the spring (16) is connected to the top of the fixed plate (11).

4. A distillation tower for producing boron trichloride gas according to claim 2, characterized in that: The diameter of the pressing plate (14) is smaller than the diameter of the fixing plate (11).

5. A distillation tower for producing boron trichloride gas according to claim 2, characterized in that: A sealing sleeve is provided on the surface of the clamping column (12).

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