Clamping device for helium leak detection of three-way micro welding joint

Abstract

The utility model provides a clamping device for helium leak detection of a three-way micro-welding joint, which comprises a positioning assembly which can be detached and replaced and is used for positioning micro-welding joints of various specifications and models, and a needle type air cylinder sealing assembly which is used for clamping and sealing the two ends of the three-way micro-welding joint. The supporting rod is used for connecting the lower base with an upper base platform, the guide column guide sleeves are used for connecting the lower base with the upper base platform and accurately positioning the position of the lower base and the upper base platform, and the two ends of the pressing plate are arranged on the guide column guide sleeves in a sliding mode. The standard air cylinder controls the pressing plate to move up and down and is used for clamping and sealing the upper end and the lower end of the three-way micro welding head, positioning is rapidly achieved, and the productivity is improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductors and photovoltaic equipment, and in particular to a clamping device for helium leak detection of a three-way micro-welding joint. Background Art

[0002] In the field of photovoltaic and semiconductor equipment, a large number of micro-welding joints are used. They are mainly made of stainless steel and require helium mass spectrometer leak detectors to pass the inspection before they can be accepted for use. The existing manufacturing technology basically uses simple tooling for single inspection, which is time-consuming to clamp and has low production efficiency; therefore, a clamping device that improves production efficiency is needed to achieve full inspection and improve production efficiency to meet production needs. Summary of the invention

[0003] In order to solve the above problems, the present invention discloses a clamping device for helium leak detection of three-way micro-welding joints, which can clamp 2-10 micro-welding joints at the same time, prevent loosening during the leak detection process, ensure the sealing effect, and improve the leak detection work efficiency.

[0004] The clamping device for helium leak detection of three-way micro-welding joints comprises an upper seat and a lower seat, the upper seat and the lower seat are connected by a support rod, a standard cylinder is fixed on the top of the upper seat and the cylinder shaft is connected to a pressure plate; wherein the two ends of the pressure plate are slidably arranged on the guide column and guide sleeve; wherein a positioning assembly is provided on the lower seat; the three-way micro-welding joint is located in the clamping space formed between the pressure plate and the positioning assembly, so as to realize the vertical clamping and sealing of the three-way micro-welding joint; the three-way micro-welding joint is located in the clamping space formed between the needle-type cylinder sealing assemblies on both sides, so as to realize the clamping and sealing of the two lateral ends of the three-way micro-welding joint; a leak detector connecting assembly is provided on the left end face of the lower seat for connecting the leak detector; the diverter assemblies on both sides of the lower seat are connected to the needle-type cylinder sealing assemblies; the hand valve assembly is connected to the diverter assembly to realize the clamping and sealing braking of the two end faces of the three-way micro-welding joint; the hand-pull valve assembly is connected to the standard cylinder to realize the clamping and sealing braking of the middle end of the three-way micro-welding joint.

[0005] Furthermore, the needle cylinder sealing assembly includes a needle cylinder positioning plate, a sealing assembly, a needle cylinder and a straight joint; the needle cylinder is installed on the needle cylinder positioning plate; the head of the needle cylinder is connected to the sealing assembly, and the straight joint is connected to the needle cylinder; a plurality of first hexagon socket head screws are provided on the top of the needle cylinder positioning plate.

[0006] Furthermore, the positioning assembly includes an O-ring, a positioning strip and a second hexagon socket head screw, the O-ring is placed in the inner hole groove of the positioning strip, and the second hexagon socket head screw is connected and fixed to the lower seat through the positioning strip.

[0007] Furthermore, a hand-pull valve assembly and a hand-plate valve assembly are provided, wherein the hand-plate valve assembly controls the lateral clamping and loosening of the needle-type cylinder, and the hand-pull valve assembly controls the longitudinal clamping and loosening of the standard cylinder, so as to quickly realize the positioning, clamping and sealing.

[0008] Furthermore, the upper plane of the lower seat abuts against the lower plane of the positioning assembly.

[0009] Furthermore, the internal groove size of the positioning strip in the positioning assembly matches the external size of the middle head of the three-way micro-welding joint and plays a positioning role, and the upper plane of the middle head of the three-way micro-welding joint abuts against the arc surface of the O-ring in the positioning strip.

[0010] Furthermore, the lower plane of the pressing plate abuts against the lower plane of the micro welding head.

[0011] Furthermore, the standard cylinder is equipped with a speed regulating throttle valve to control the opening and closing clamping force of the standard cylinder.

[0012] The beneficial effects of the present invention are:

[0013] 1. The air inlet at the air source end is connected to two control valves, one of which is a hand-operated valve assembly that controls the clamping and loosening of the needle-type cylinder installed on the lower seat. In the clamped state, the sealing assembly connected to the head of the needle-type cylinder contacts the two end surfaces of the micro-welded three-way joint to seal. The other hand-pulled valve assembly controls the clamping and loosening of the three standard cylinders on the upper seat. In the clamped state, the pressure plate connected to the head of the standard cylinder abuts against the bottom surface of the three-way micro-welded joint so that the upper end surface of the middle end of the three-way micro-welded joint abuts against the O-ring in the positioning assembly on the lower seat to seal. The helium mass spectrometer leak detector is connected to the leak detector connection assembly to evacuate the machine and start the leak detection operation;

[0014] 2. The micro-welding head is located in the clamping space formed between the positioning component and the pressure plate, realizing vertical clamping of the three-way micro-welding head. The positioning component and the micro-welding head are positioned and limited. The micro-welding head is located in the clamping space formed between the needle-type cylinders at both ends, realizing horizontal clamping of the micro-welding head. The cylindrical sealing ring on the needle-type cylinder is clamped and sealed with the two end surfaces of the micro-welding head, realizing positioning quickly and improving productivity;

[0015] 3. The positioning assembly is connected to the lower seat by screws, with a simple structure and easy installation and disassembly;

[0016] 4. The contoured groove on the positioning component matches the shape of the three-way micro-welding joint, and the positioning and matching effect is better;

[0017] 5. The O-ring in the positioning assembly abuts against the middle end face of the three-way micro-welding joint, which provides better clamping and sealing effects;

[0018] 6. The lower plane of the pressure plate abuts against the bottom surface of the three-way micro-welding joint, and the clamping effect is better;

[0019] 7. The sealing cylinder of the needle cylinder head matches the two end faces of the micro-welding joint, and the clamping and sealing effect is better; BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a structural diagram of a micro-welded three-way joint that is an implementation object of a clamping and adjusting device according to an embodiment of the present invention;

[0021] Figure 2 is a three-dimensional front view of an embodiment of the present invention;

[0022] Figure 3 A three-dimensional side view of an embodiment of the present invention Figure 1 ;

[0023] Figure 4 A three-dimensional side view of an embodiment of the present invention Figure 2 ;

[0024] Figure 5 yes Figure 4 Cross-section of EE;

[0025] Figure 6 , a schematic diagram of the cooperation between the sealing assembly and the needle-type cylinder sealing assembly and the three-way micro-welding joint;

[0026] Figure 7 is a structural diagram of a needle-type cylinder seal assembly of the present invention;

[0027] Figure 8 is a schematic diagram of the clamping assembly of the present invention;

[0028] Fig. 9 is a cross-sectional view of the fixture assembly;

[0029] List of reference numerals:

[0030] 1. Standard cylinder, 2. Upper seat, 3. Lower seat, 4. Support rod, 5. Pressure plate, 6. Guide column and guide sleeve, 7. Positioning assembly, 7.1. O-ring, 7.2. Positioning strip, 7.3. Second hexagon socket head screw, 8. Needle cylinder sealing assembly, 8.1 Needle cylinder positioning plate, 8.2. First hexagon socket head screw, 8.3. Sealing assembly, 8.4 Needle cylinder, 8.5. Straight-through connector, 9. Hand-pull valve assembly, 10. Hand-pull valve assembly, 11. Speed ​​regulating throttle valve, 12. Diverter assembly, 13. Leak detector connection assembly, 14. Three-way micro-welding joint. DETAILED DESCRIPTION

[0031] The present invention is further explained below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to directions in the accompanying drawings, and the words "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively.

[0032] See also Figure 1-9 One embodiment of the present invention provides a clamping device for helium leak detection of a three-way micro-welding joint. The three-way micro-welding joint 14 is located in the clamping space formed between the pressure plate 5 and the positioning assembly 7, so as to realize the vertical clamping and sealing of the three-way micro-welding joint 14. The three-way micro-welding joint 14 is located in the clamping space formed between the needle-type cylinder sealing assemblies 8 on both sides, so as to realize the clamping and sealing of the two lateral ends of the three-way micro-welding joint 14. The hand-pull valve assembly 9 controls the vertical clamping and loosening, and the hand-pull valve assembly 10 controls the lateral clamping and loosening, so as to quickly realize the positioning clamping and sealing and improve the production efficiency.

[0033] like Figure 8-9 As shown, in some embodiments, the clamping assembly positioning assembly 7 includes an O-ring 7.1 and a positioning strip 7.2, which are easy to install and disassemble. The inner groove of the positioning assembly 7 matches the three-way micro-welding joint 14, and the positioning and limiting effects are better, and the damage to the side of the three-way micro-welding joint 14 is reduced. The O-ring 7.1 in the positioning assembly 7 contacts the end face of the middle head of the three-way micro-welding joint 14, and the sealing effect is better. The pressure plate 5 is clamped by the hand-pull valve assembly 9, so that the middle end face of the three-way micro-welding joint 14 is tightly attached to the O-ring 7.1 in the inner groove of the positioning assembly 7, and the sealing effect is better.

[0034] like Figure 6-7 As shown, in some embodiments, the clamping assembly needle cylinder sealing assembly 8 includes a needle cylinder positioning plate 8.1, a first hexagon socket head screw 8.2, a sealing assembly 8.3, a needle cylinder 8.4, and a straight joint 8.5, which is easy to install and disassemble. Through the clamping control of the hand-pull valve assembly 10, the two lateral end surfaces of the three-way micro-welding joint 14 are closely attached to the sealing assembly 8.3 on the needle cylinder 8.4 on both sides, and the sealing effect is better.

[0035] The technical means disclosed in the scheme of the present invention are not limited to the technical means disclosed in the above-mentioned implementation mode, but also include technical schemes composed of any combination of the above technical features.

Claims

1. A clamping device for helium leak detection of a three-way micro-welding joint, characterized in that: The invention comprises an upper seat (2) and a lower seat (3), wherein the upper seat (2) and the lower seat (3) are connected via a support rod (4), a standard cylinder (1) is fixed on the top of the upper seat (2), and the cylinder shaft is connected to a pressure plate (5); wherein the two ends of the pressure plate (5) are slidably arranged on a guide column and a guide sleeve (6); wherein a positioning assembly (7) is provided on the lower seat (3); a three-way micro-welding joint (14) is located in a clamping space formed between the pressure plate (5) and the positioning assembly (7), so as to realize vertical clamping and sealing of the three-way micro-welding joint (14); and the three-way micro-welding joint (14) is located on both sides of the needle-type gas The clamping seal of the two lateral ends of the three-way micro-welding joint (14) is achieved in the clamping space formed between the cylinder sealing components (8); the left end face of the lower seat (3) is provided with a leak detector connecting component (13) for connecting the leak detector; the diverter components (12) on both sides of the lower seat (3) are connected to the needle-type cylinder sealing component (8); the hand valve component (10) is connected to the diverter component (12) to achieve the clamping seal braking of the two end faces of the three-way micro-welding joint (14); the hand valve component (9) is connected to the standard cylinder (1) to achieve the clamping seal braking of the middle end of the three-way micro-welding joint (14).

2. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: The needle cylinder sealing assembly (8) comprises a needle cylinder positioning plate (8.1), a sealing assembly (8.3), a needle cylinder (8.4) and a straight joint (8.5); the needle cylinder (8.4) is mounted on the needle cylinder positioning plate (8.1); the head of the needle cylinder (8.4) is connected to the sealing assembly (8.3), and the straight joint (8.5) is connected to the needle cylinder (8.4); and a plurality of first hexagon socket head screws (8.2) are provided on the top of the needle cylinder positioning plate (8.1).

3. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: The positioning assembly (7) comprises an O-ring (7.1), a positioning strip (7.2) and a second hexagon socket head screw (7.3); the O-ring (7.1) is placed in an inner hole groove of the positioning strip (7.2); and the second hexagon socket head screw (7.3) is connected and fixed to the lower seat (3) via the positioning strip (7.2).

4. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: A hand-pull valve assembly (9) and a hand-valve assembly (10) are also provided, wherein the hand-valve assembly (10) controls the transverse clamping and loosening of the needle cylinder (8.4), and the hand-pull valve assembly (9) controls the longitudinal clamping and loosening of the standard cylinder (1), thereby quickly achieving positioning, clamping and sealing.

5. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: The upper plane of the lower seat (3) abuts against the lower plane of the positioning assembly (7).

6. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: The internal groove size of the positioning strip (7.2) in the positioning assembly (7) matches the external size of the middle head of the three-way micro-welding joint (14) and plays a positioning role, and the upper plane of the middle head of the three-way micro-welding joint (14) abuts against the arc surface of the O-ring (7.1) in the positioning strip (7.2).

7. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: The lower plane of the pressing plate (5) abuts against the lower plane of the micro-welding joint.

8. The clamping device for helium leak detection of a three-way micro-welding joint according to claim 1 is characterized in that: The standard cylinder (1) is equipped with a speed regulating throttle valve (11) to control the opening and closing clamping force of the standard cylinder (1).

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