Inspection method of examination system and examination system

Abstract

An inspection method for an examination system configured to image an object and make a good / defective determination of the object on the basis of an image acquired by the imaging comprises displaying a sample image of the object, imaging the displayed sample image by a camera, and making a good / defective determination of the object indicated by the sample image on the basis of the image acquired by imaging of the camera.

Description

[0001] Cross references (references to related applications)

[0002] This application is based on a prior application (patent application 2020-036996) filed in Japan on March 4, 2020, and enjoys priority to all matters described in the prior application. technical field

[0003] The present invention relates to an inspection method and an inspection system used in an inspection system for image inspection. Background technique

[0004] Generally, in a product inspection process, a product is photographed using imaging means such as a camera, and image inspection for determining whether the product is good or not is performed based on the photographed image data. In the image inspection, for example, the determination of whether it is a good product is made by comparing image data of a good product prepared in advance with image data obtained by photographing a product to be inspected. In this case, the image data of the product to be inspected can be compared not only with...

Examples

no. 1 Embodiment

[0026] As the inspection system according to the present embodiment, an inspection system suitable for inspecting the front end portion of a suspension for a magnetic disk device is exemplified. The inspection system can be applied not only to the inspection of the front end of the suspension but also to the image inspection of other products. In each drawing, the relative sizes and positions of the respective components constituting the inspection system are schematically shown. The present invention is not limited to the Examples described below.

[0027] figure 1 It is a schematic side view of an example of the magnetic disk device 1 . like figure 1 As shown, a magnetic disk device (HDD) 1 includes a housing 2 , a plurality of magnetic disks 4 rotating around a spindle 3 , a carriage 6 rotatable around a pivot 5 , and a positioning motor (voice coil motor) 7 for driving the carriage 6 . The housing 2 is sealed by a cover (not shown).

[0028] figure 2 It is a partial...

no. 2 Embodiment

[0067] A second embodiment will be described. The same constituent elements as those in the first embodiment are given the same symbols, and descriptions thereof will be appropriately omitted. Image 6It is a schematic configuration diagram of the inspection system 200 according to the second embodiment. In this embodiment, the monitor 22 is larger than the monitor 21 in the first embodiment, and the reduction lens 60 is provided between the display device 20 and the imaging device 30 . This point is different from the first embodiment.

[0068] For example, even if the sample image displayed on the monitor 22 is larger than the shooting range of the camera 31, by inserting the reducing lens 60 between the display device 20 and the shooting device 30, and reducing the sample image to the actual size of the object, the camera 31 shots available. By using the reduction lens 60 to reduce the sample image displayed on the monitor 22, the camera 31 can take a high-resolution ima...

[0001] Cross references (references to related applications)

[0002] This application is based on a prior application (patent application 2020-036996) filed in Japan on March 4, 2020, and enjoys priority to all matters described in the prior application. technical field

[0003] The present invention relates to an inspection method and an inspection system used in an inspection system for image inspection. Background technique

[0004] Generally, in a product inspection process, a product is photographed using imaging means such as a camera, and image inspection for determining whether the product is good or not is performed based on the photographed image data. In the image inspection, for example, the determination of whether it is a good product is made by comparing image data of a good product prepared in advance with image data obtained by photographing a product to be inspected. In this case, the image data of the product to be inspected can be compared not only with...

Examples

no. 1 Embodiment

[0026] As the inspection system according to the present embodiment, an inspection system suitable for inspecting the front end portion of a suspension for a magnetic disk device is exemplified. The inspection system can be applied not only to the inspection of the front end of the suspension but also to the image inspection of other products. In each drawing, the relative sizes and positions of the respective components constituting the inspection system are schematically shown. The present invention is not limited to the Examples described below.

[0027] figure 1 It is a schematic side view of an example of the magnetic disk device 1 . like figure 1 As shown, a magnetic disk device (HDD) 1 includes a housing 2 , a plurality of magnetic disks 4 rotating around a spindle 3 , a carriage 6 rotatable around a pivot 5 , and a positioning motor (voice coil motor) 7 for driving the carriage 6 . The housing 2 is sealed by a cover (not shown).

[0028] figure 2 It is a partial...

no. 2 Embodiment

[0067] A second embodiment will be described. The same constituent elements as those in the first embodiment are given the same symbols, and descriptions thereof will be appropriately omitted. Image 6It is a schematic configuration diagram of the inspection system 200 according to the second embodiment. In this embodiment, the monitor 22 is larger than the monitor 21 in the first embodiment, and the reduction lens 60 is provided between the display device 20 and the imaging device 30 . This point is different from the first embodiment.

[0068] For example, even if the sample image displayed on the monitor 22 is larger than the shooting range of the camera 31, by inserting the reducing lens 60 between the display device 20 and the shooting device 30, and reducing the sample image to the actual size of the object, the camera 31 shots available. By using the reduction lens 60 to reduce the sample image displayed on the monitor 22, the camera 31 can take a high-resolution ima...

Images