Battery cell processing device

Abstract

The present invention relates to the field of battery manufacturing technology, and specifically provides a battery cell processing device, including: a preheating component, including a preheating cavity, a boat is introduced into the preheating cavity, and the battery cells in the boat are preheated; a deposition component, which is arranged at the discharge end of the preheating component, and the deposition component includes a deposition cavity and a precursor supply mechanism. In the present invention, the precursor supply mechanism in the deposition cavity supplies the precursor and forms a directional precursor supply area. By changing the precursor supply area, the battery cell is allowed to perform thin film deposition under different states, thereby quickly forming a high-quality passivation layer, and a plurality of cooling positions on the cooling component are quickly adjusted to the discharge end of the annealing component in sequence to receive multiple boats and cool the battery cells in the multiple boats, thereby improving production efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of battery manufacturing, and in particular to a battery sheet processing device. Background Art

[0002] In the production process of solar cells, it is necessary to deposit back passivation. The passivation material forms a passivation layer on the surface of the cell, which helps to reduce the carrier recombination on the surface of the cell, thereby improving the minority carrier life of the cell and the overall performance of the battery. The passivation layer has high chemical stability and good insulation properties, which can effectively block the contact between the carrier and the silicon wafer surface and reduce surface recombination losses. The main steps of the deposition process on the cell include preheating, deposition, annealing and cooling of the cell. The preheating is to control the heating rate and avoid thermal stress. The deposition currently uses ALD (atomic layer deposition) or CVD (chemical vapor deposition) to deposit the passivation layer. ALD is a precision thin film deposition technology. CVD is a commonly used material synthesis method. These gases react chemically and are deposited on the surface of the substrate to form a solid film. Annealing is to optimize the lattice structure of the cell and improve the photoelectric conversion efficiency of the cell. Cooling is to cool the annealed cell to room temperature.

[0003] Currently, the battery cell processing device is unable to quickly complete the high-quality deposition processing of the battery cells. After the battery cell annealing process is completed, when the boat is exported, the common cooling components can only receive a small number of cooling positions of the boat, which is inconvenient to conveniently and efficiently receive the boat, thus reducing production efficiency. Summary of the invention

[0004] The object of the present invention is to provide a battery cell processing device, so as to achieve rapid processing of battery cells and solve the problem that a conventional cooling component can accommodate a small number of cooling positions of a boat body.

[0005] To achieve the above-mentioned purpose, in a first aspect, the present invention provides a battery cell processing device, comprising: a preheating component, comprising a preheating cavity, a boat is introduced into the preheating cavity, and the battery cells in the boat are preheated; a deposition component, which is arranged at the discharge end of the preheating component, the deposition component comprises a deposition cavity and a precursor supply mechanism, the deposition component is used to receive the boat, the precursor supply mechanism is installed in the deposition cavity, the precursor supply mechanism is used to supply a precursor and form a precursor supply area, so that the precursor forms a passivation deposition layer on the battery cell; an annealing component, which is arranged at the discharge end of the deposition component, the annealing component comprises an annealing cavity, the annealing component is used to receive the boat, and the annealing cavity is used to anneal the battery cell; a cooling component, which is arranged at the discharge end of the annealing component, the cooling component comprises a plurality of cooling positions, and the plurality of cooling positions can be adjusted to the discharge end of the annealing component in sequence, and the cooling positions are used to place the boat and cool the battery cells.

[0006] In the present invention, a precursor supply mechanism in a deposition chamber supplies precursors and forms a directional precursor supply area. By changing the precursor supply area, the battery cells are allowed to undergo thin film deposition under different conditions, thereby rapidly forming a high-quality passivation layer. In addition, a plurality of cooling positions on a cooling component are rapidly and sequentially adjusted to the discharge end of an annealing component to receive a plurality of boats and cool the battery cells in the plurality of boats, thereby improving production efficiency.

[0007] In some embodiments, the cooling component further includes a chassis component and a lifting component; the chassis component is arranged opposite to one side of the discharge end of the annealing component; a plurality of the cooling positions are arranged at the top of the chassis component; the lifting component is arranged between the plurality of cooling positions and between the cooling position and the chassis component, and the lifting component is used to adjust the height of the cooling position so that the plurality of cooling positions can be adjusted to the discharge end of the annealing component in sequence. The beneficial effect is that the plurality of cooling positions are adjusted by a plurality of lifting components, and then the plurality of cooling positions are adjusted to the discharge end of the annealing component in sequence, so that a plurality of boat bodies are received, and cooling of the battery cells in a plurality of boat bodies is provided, wherein the lifting component is in the minimum lifting position when not in use to reduce the volume of the cooling component.

[0008] In some embodiments, the cooling station includes a frame and a plurality of rollers; the frame is connected to the lifting assembly to adjust the plurality of frames to correspond to the discharge ends of the annealing components in sequence; the rollers are connected to the frame in a rolling manner, and the plurality of rollers are arranged along the length direction of the frame, and the rollers are used to place the boat and reduce the friction of the boat. The beneficial effect is that the plurality of rollers in the frame form a support surface for placing the boat, and when the boat moves to the upper end of the rollers, the rollers roll in contact with the bottom end surface of the boat, reducing the friction of the boat and facilitating the movement of the boat.

[0009] In some embodiments, the lifting assembly includes several groups of electric push rods, which are connected to the chassis assembly, the frames, and several frames, and the pushing strokes of several groups of electric push rods decrease along the adjustment direction of the frames, so that the electric push rods push the frames to adjust to the discharge end of the annealing parts. The beneficial effect is that the electric push rods push several frames to move to the discharge end of the annealing parts in sequence, and then place the boats derived from the annealing parts on the rollers of the corresponding frames.

[0010] In some embodiments, the chassis assembly includes a bottom plate and a support leg; the bottom plate is arranged opposite to one side of the discharge end of the annealing component, the bottom plate penetrates and is fixedly connected to the electric push rod, so that the electric push rod is fixedly installed; the support leg is fixedly connected to the bottom end surface of the bottom plate, the bottom end of the support leg is connected to a universal wheel, and the support leg supports and forms an installation area for the fixed end of the electric push rod on the bottom end surface of the bottom plate. The beneficial effect is that the support leg at the bottom of the bottom plate supports the bottom end and forms an installation area, which is convenient for installing a group of electric push rods on the bottom plate. The bottom end of the support leg is connected to a universal wheel for easy movement.

[0011] In some embodiments, the precursor supply mechanism includes: a base component, including a substrate, the substrate is provided with through holes for circulating gas; a gas supply component, installed on the substrate, the gas supply component is used to supply precursors, the precursors include a first precursor and a second precursor; a first distribution component, which is installed on the bottom end surface of the substrate, the first distribution component is connected to the gas outlet end of the gas supply component, and the first distribution component is used to spray the first precursor; a second distribution component, which is installed on the bottom end surface of the substrate, the second distribution component is connected to the gas outlet end of the gas supply component, and the second distribution component is used to spray the second precursor; the first precursor and the second precursor are used to form a passivation deposition layer on the battery cell. The beneficial effects are as follows: the first distribution component and the second distribution component spray the first precursor and the second precursor respectively, and form the first precursor distribution area and the second precursor distribution area, control the first precursor distribution area and the second precursor distribution area, and allow the first precursor and the second precursor to form a passivation layer on the battery cell by atomic layer deposition or chemical vapor deposition, so as to realize the conversion between atomic layer deposition and chemical vapor deposition, so as to quickly form a high-quality passivation layer on the battery cell.

[0012] In some embodiments, the first distribution component and the second distribution component both include a distribution part and a plurality of injection parts; the distribution part of the first distribution component and the distribution part of the second distribution component are both connected to the gas supply component for conveying the precursor; the injection part connects the distribution part of the first distribution component and the distribution part of the second distribution component for injecting the precursor; the plurality of injection parts of the first distribution component and the plurality of injection parts of the second distribution component are arranged at intervals and arranged on the same horizontal plane. Its beneficial effect is that the first precursor and the second precursor are injected by the plurality of injection parts to form an injection distribution area of ​​the first precursor and the second precursor, and the plurality of injection parts in the first distribution component and the plurality of injection parts in the second distribution component are arranged at intervals, so that the distribution areas of the first precursor and the second precursor injected by the injection parts are distributed at intervals.

[0013] In some embodiments, the first distribution component and the second distribution component are partially opened so that the first precursor and the second precursor sprayed therefrom are not in contact, and are used to form a passivation layer on the cell by atomic layer deposition, and then the first distribution component and the second distribution component are fully opened so that the first precursor and the second precursor sprayed therefrom are in contact, and are used to form a passivation layer on the cell by chemical vapor deposition. The beneficial effect is that the conversion between the atomic layer deposition method and the chemical vapor deposition method is realized, so that the aluminum oxide layer on the cell can meet both high-precision and fast deposition, and the production efficiency is improved.

[0014] In some embodiments, the deposition component further includes a conveying component for conveying the cell; the precursor supply mechanism further includes an adjusting component; the adjusting component is used to adjust the distance between the substrate and the conveying component; the adjusting component adjusts the substrate and the conveying component to be close to each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component do not contact each other, which is used to form a passivation layer on the cell by atomic layer deposition, and the adjusting component adjusts the substrate and the conveying component to be away from each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component contact each other, which is used to form a passivation layer on the cell by chemical vapor deposition. Its beneficial effect is that: the conversion between the atomic layer deposition method and the chemical vapor deposition method is realized, so that the aluminum oxide layer on the cell can meet both high-precision and fast deposition, and the production efficiency is improved.

[0015] In some embodiments, the adjusting component is connected to the substrate and / or the conveying component to adjust the distance between the substrate and the conveying component. The beneficial effect is that the distance between the substrate and the conveying component is adjusted by different connection modes between the adjusting component and the substrate and the conveying component. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a battery cell processing device is provided for the present invention;

[0017] Figure 2 The present invention provides an overall cross-sectional structure of a battery cell processing device;

[0018] Figure 3 A schematic diagram of the three-dimensional structure of a precursor supply mechanism of a cell processing device provided by the present invention;

[0019] Figure 4 An exploded schematic diagram of a precursor supply mechanism of a cell processing device provided by the present invention;

[0020] Figure 5A schematic diagram of the three-dimensional structure of a first embodiment of a cooling component of a battery cell processing device provided by the present invention;

[0021] Figure 6 A schematic diagram of the three-dimensional structure of a second embodiment of a cooling component of a battery cell processing device is provided for the present invention. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution in the embodiment of the present application will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present application, rather than an embodiment of all parts. Based on the embodiment in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0024] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the connection between the internal parts of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0026] Currently, the battery cell processing device is unable to quickly complete the high-quality deposition processing of the battery cells. After the battery cell annealing process is completed, when the boat is exported, the common cooling components can only receive a small number of cooling positions of the boat, which is inconvenient to conveniently and efficiently receive the boat, thus reducing production efficiency.

[0027] In view of the above problems, the embodiments of the present invention provide the following technical solutions to overcome the above problems.

[0028] Figure 1 A schematic diagram of the three-dimensional structure of a battery cell processing device is provided for the present invention; Figure 2 The present invention provides an overall cross-sectional structure of a battery cell processing device; Figure 3 A schematic diagram of the three-dimensional structure of a precursor supply mechanism of a cell processing device provided by the present invention; Figure 4 An exploded schematic diagram of a precursor supply mechanism of a cell processing device provided by the present invention; Figure 5 A schematic diagram of the three-dimensional structure of a first embodiment of a cooling component of a battery cell processing device provided by the present invention; Figure 6 A schematic diagram of the three-dimensional structure of a second embodiment of a cooling component of a battery cell processing device is provided for the present invention.

[0029] like Figure 1-Figure 6 As shown, in a specific embodiment of the present invention, the battery cell processing device includes: a preheating component 1, including a preheating cavity 11, into which a boat is introduced and the battery cells in the boat are preheated; a deposition component 2, which is arranged at the discharge end of the preheating component 1, and the deposition component 2 includes a deposition cavity 21 and a precursor supply mechanism 22, the deposition component 2 is used to receive the boat, the precursor supply mechanism 22 is installed in the deposition cavity 21, and the precursor supply mechanism 22 is used to supply the precursor and form a precursor supply area, so that the precursor forms a passivation deposition layer on the battery cell; an annealing component 3, which is arranged at the discharge end of the deposition component 2, and the annealing component 3 includes an annealing chamber 31, and the annealing component 3 is used to receive the boat, and the annealing chamber 31 is used for annealing the battery cell; a cooling component 4, which is arranged at the discharge end of the annealing component 3, and the cooling component 4 includes a plurality of cooling positions, and the plurality of cooling positions can be adjusted to the discharge end of the annealing component 3 in sequence, and the cooling positions are used to place the boat and cool the battery cell.

[0030] In the present invention, the boat is introduced into the preheating chamber 11 of the preheating component 1, and the preheating chamber 11 preheats the battery cells in the boat. The boat that has completed the preheating treatment then enters the deposition chamber 21 of the deposition component 2, and the precursor supply mechanism 22 in the deposition chamber 21 supplies the precursor and forms a directional precursor supply area. By changing the precursor supply area, the battery cells in the boat are subjected to thin film deposition under different conditions, thereby quickly forming a high-quality passivation layer. After the battery cells in the boat are deposited, they are led out, and the boat and the battery cells enter the annealing chamber 31 of the annealing component 3 for annealing treatment. The annealed boat and the battery cells are led out, and at the same time, several cooling positions on the cooling component 4 are quickly and sequentially adjusted to the discharge end of the annealing component 3 to receive multiple boats and cool the battery cells in the multiple boats, thereby improving production efficiency.

[0031] In a specific embodiment of the present invention, Figure 1 , Figure 2 and Figure 5 As shown, the cooling component 4 also includes a chassis component and a lifting component; the chassis component is arranged opposite to one side of the discharge end of the annealing component 3; a plurality of cooling positions are arranged at the top of the chassis component; the lifting component is arranged between the plurality of cooling positions and between the cooling position and the chassis component, and the lifting component is used to adjust the height of the cooling position so that the plurality of cooling positions can be adjusted to the discharge end of the annealing component 3 in sequence. The chassis component is the supporting base of the cooling component 4, and the lifting component is connected to the chassis component, and the lifting component on the chassis component is connected to the cooling position, and the lifting components are connected between the plurality of cooling positions at the top of the chassis component, and the plurality of cooling positions are adjusted by a plurality of lifting components, so that the plurality of cooling positions are adjusted to the discharge end of the annealing component 3 in sequence, and a plurality of boat bodies are carried, so that the battery cells in the plurality of boat bodies are cooled. Wherein, when the lifting component is not in use, the lifting component is in the minimum lifting position to reduce the volume of the cooling component 4.

[0032] In a specific embodiment of the present invention, Figure 5 As shown, the cooling position includes a frame 421 and a plurality of rollers 422; the frame 421 is connected to the lifting assembly to adjust the plurality of frames 421 to correspond to the discharge end of the annealing component 3 in sequence; the rollers 422 are rollingly connected in the frame 421, and the plurality of rollers 422 are arranged along the length direction of the frame 421, and the rollers 422 are used to place the boat and reduce the friction force of the boat movement. The frame 421 adjusts the spatial position through the lifting assembly, so that the plurality of frames 421 correspond to the discharge end of the annealing component 3 in sequence, so that multiple boats are introduced into the frame 421 in sequence, and the plurality of rollers 422 in the frame 421 form a support surface for placing the boat, and when the boat moves to the upper end of the roller 422, the roller 422 rolls in contact with the bottom end surface of the boat, reducing the friction force of the boat movement and facilitating the movement of the boat.

[0033] In a specific embodiment of the present invention, Figure 2 and Figure 5 As shown, the lifting assembly includes several groups of electric push rods 411, and the electric push rods 411 are connected between the chassis assembly, the frame 421, and several of the frame 421. The pushing strokes of the several groups of electric push rods 411 decrease along the adjustment direction of the frame 421, so that the electric push rods 411 push the frame 421 to adjust to the discharge end of the annealing component 3. A group of electric push rods 411 is connected between the chassis assembly and the frame 421, and a group of electric push rods 411 is connected between several frame 421. The electric push rods 411 push several frame 421, so that the several frame 421 are moved to the discharge end of the annealing component 3 in sequence. The several groups of electric push rods 411 and frames 421 on the chassis assembly all occupy part of the space. The position of the discharge end of the annealing component 3 is fixed relative to the ground. The movement strokes of the several frames 421 to reach the discharge end of the annealing component 3 are different. Along the adjustment direction of the frames 421, the pushing strokes of the multiple groups of electric push rods 411 decrease, so that the several frames 421 can be adjusted to the discharge end of the annealing component 3, and are used to receive and place the multiple boats. After the several frames 421 receive the multiple boats, the distance between the multiple frames 421 can be further adjusted by the electric push rods 411, so that the distance between the multiple frames 421 is further increased, so that the cooling air can circulate quickly, and the cooling efficiency of the battery cells can be improved while ensuring that the multiple boats are received.

[0034] In a first embodiment of the present invention, Figure 1 , Figure 2 and Figure 5 As shown, the chassis assembly includes a bottom plate 401 and a support leg 402; the bottom plate 401 is arranged opposite to one side of the discharge end of the annealing component 3, and the bottom plate 401 penetrates and is fixedly connected to the electric push rod 411, so that the electric push rod 411 is fixedly installed; the support leg 402 is fixedly connected to the bottom end surface of the bottom plate 401, and the bottom end of the support leg 402 is connected to a universal wheel, and the support leg 402 supports and forms the installation area of ​​the electric push rod 411 on the bottom end surface of the bottom plate 401. The moving stroke of a group of electric push rods 411 connected to the bottom plate 401 is larger than that of other electric push rods 411. The group of electric push rods 411 on the bottom plate 401 requires a large installation space, and the support leg 402 at the bottom of the bottom plate 401 supports the bottom end and forms an installation area, and a group of electric push rods 411 on the bottom plate 401 are partially installed in the installation area. The bottom end of the support leg 402 is connected to a universal wheel for easy movement.

[0035] Further, such as Figure 5As shown, the chassis structure also includes a push handle 404, a battery 403 and a control button 405; the push handle 404 is fixedly connected to one side of the top surface of the bottom plate 401, and the top surface of the bottom plate 401 is the side away from the annealing component 3; the control button 405 is connected to the push handle 404, and the control button 405 is electrically connected to a plurality of electric push rods 411, so as to control the electric push rods 411 to push the frame 421 to adjust the height, and the battery 403 is connected to the bottom surface of the bottom plate 401, and the battery 403 is electrically connected to the control button 405 and the electric push rod 411. The push handle 404 fixedly connected to the bottom plate 401 is convenient for hand holding and pushing, and is used for the overall movement of the annealing component 3. The battery 403 on the bottom end surface of the bottom plate 401 provides a power source for multiple sets of electric push rods 411. The control button 405 is operated by hand, and the control button 405 controls the multiple sets of electric push rods 411, so that the multiple sets of electric push rods 411 push the corresponding connected frames 421 to be adjusted to the discharge end of the annealing component 3 in turn, which is used to receive multiple boat bodies, and the operation is simple.

[0036] In the second embodiment of the present invention, Figure 6 As shown, the bottom plate 401 arranges multiple frames 421 in both the vertical and horizontal directions, thereby providing more positions for placing the boats. The universal wheels at the bottom of the support legs 402 move and adjust the horizontally arranged frames 421, so that multiple frames 421 in the horizontal direction can be adjusted to the discharge end of the annealing component 3 in sequence to receive the boats, and the cooling component 4 is not limited to receiving the annealed boats. The cooling component 4 can also be used to load the feed end of the preheating component 1, and multiple boats that need to be introduced into the preheating component 1 can be adjusted to the feed end of the preheating component 1 in sequence at the same time, thereby improving the loading efficiency, having a wide range of applications, and improving production efficiency. A partition 423 is connected between the multiple frames 421, and the partition 423 is used to isolate multiple horizontally placed boats.

[0037] In a specific embodiment of the present invention, Figure 2 , Figure 3 and Figure 4As shown, the precursor supply mechanism 22 includes: a base component 2201, including a substrate 2101a, and the substrate 2101a is provided with a through hole for circulating gas; a gas supply component 2202, installed on the substrate 2101a, and the gas supply component 2202 is used to supply precursors, and the precursors include a first precursor and a second precursor; a first distribution component 2203, which is installed on the bottom end surface of the substrate 2101a, the first distribution component 2203 is connected to the gas outlet end of the gas supply component 2202, and the first distribution component 2203 is used to spray the first precursor; a second distribution component 2204, which is installed on the bottom end surface of the substrate 2101a, the second distribution component 2204 is connected to the gas outlet end of the gas supply component 2202, and the second distribution component 2204 is used to spray the second precursor; the first precursor and the second precursor are used to form a passivation deposition layer on the battery cell. The substrate 2101a in the base component 2201 provides a connection base for each component of the mechanism, the gas supply component 2202 supplies the first precursor and the second precursor, the first distribution component 2203 and the second distribution component 2204 spray the first precursor and the second precursor respectively, and form the first precursor distribution area and the second precursor distribution area, control the first precursor distribution area and the second precursor distribution area, and allow the first precursor and the second precursor to form a passivation layer on the battery cell by atomic layer deposition or chemical vapor deposition to form a passivation layer, so as to realize the atomic layer deposition method and chemical vapor deposition method. The method switches between the atmospheric deposition methods to quickly form a high-quality passivation layer on the battery cell. When the passivation layer is formed on the battery cell by atomic layer deposition, the through holes on the substrate 2101a are used to timely guide out the first precursor and the second precursor, wherein the first precursor is trimethylaluminum (TMA) carried by an inert gas, and the second precursor is water vapor carried by an inert gas, so as to avoid the first precursor and the second precursor from combining to form aluminum oxide, which affects the quality of the atomic layer deposited aluminum oxide layer on the battery cell. In the later stage of forming the aluminum oxide passivation layer on the battery cell by chemical vapor deposition, the through holes are used to guide out the remaining gas.

[0038] In a specific embodiment of the present invention, Figure 4As shown, the first distribution component 2203 and the second distribution component 2204 both include distribution parts and a plurality of injection parts; the distribution parts of the first distribution component 2203 and the distribution parts of the second distribution component 2204 are both connected to the gas supply component 2202 for conveying the precursor; the injection parts connect the distribution parts of the first distribution component 2203 and the distribution parts of the second distribution component 2204 for injecting the precursor; the plurality of injection parts of the first distribution component 2203 and the plurality of injection parts of the second distribution component 2204 are spaced apart and arranged on the same horizontal plane. The distribution parts included in the first distribution component 2203 and the second distribution component 2204 distribute the first precursor and the second precursor, and then distribute the first precursor and the second precursor in the corresponding several injection parts through the distribution component, and the first precursor and the second precursor are sprayed through the several injection parts to form the spray distribution area of ​​the first precursor and the second precursor. The several injection parts in the first distribution component 2203 and the several injection parts in the second distribution component 2204 are arranged at intervals, so that the first precursor and the second precursor sprayed by the injection parts are distributed at intervals. The several injection parts are arranged on the same plane to ensure that the spray distance of the first precursor and the second precursor is the same as that of the battery sheet at the bottom, and to ensure that the spray distribution range of the first precursor and the second precursor is the same, so as to better control the distribution range of the first precursor and the second precursor.

[0039] In a specific embodiment of the present invention (not shown), the first distribution component 2203 and the second distribution component 2204 are partially opened so that the first precursor and the second precursor sprayed therefrom are not in contact with each other, and are used to form a passivation layer on the battery cell by atomic layer deposition. Then, the first distribution component 2203 and the second distribution component 2204 are fully opened so that the first precursor and the second precursor sprayed therefrom are in contact with each other, and are used to form a passivation layer on the battery cell by chemical vapor deposition. The first distribution component 2203 and the second distribution component 2204 are partially opened, and there is a spatial gap between the distribution area of ​​the first precursor and the distribution area of ​​the second precursor. The first precursor and the second precursor are partitioned and covered on the battery cell. When the battery cell moves, the first precursor is combined with the second precursor to form a multi-layer high-precision and dense atomic layer deposited aluminum oxide layer, and then the first distribution component 2203 and the second distribution component 2204 are fully opened. The first precursor and the second precursor are in contact in the air and are quickly deposited to form a chemical vapor deposition aluminum oxide layer, and the aluminum oxide layer reaches the required thickness, realizing the conversion between the atomic layer deposition method and the chemical vapor deposition method, so that the aluminum oxide layer on the battery cell can meet both high-precision and fast deposition, thereby improving production efficiency.

[0040] In a specific embodiment of the present invention (not shown), the deposition component 2 also includes a conveying component 23 for conveying battery cells; the precursor supply mechanism 22 also includes an adjusting component; the adjusting component is used to adjust the distance between the substrate 2101a and the conveying component 23; the adjusting component adjusts the substrate 2101a and the conveying component 23 to be close to each other, so that the first precursor sprayed by the first distribution component 2203 and the second precursor sprayed by the second distribution component 2204 are not in contact, which is used to form a passivation layer on the battery cell by atomic layer deposition, and the adjusting component adjusts the substrate 2101a and the conveying component 23 to be away from each other, so that the first precursor sprayed by the first distribution component 2203 and the second precursor sprayed by the second distribution component 2204 are in contact, which is used to form a passivation layer on the battery cell by chemical vapor deposition. The adjusting component adjusts the distance between the substrate 2101a and the conveying component 23. The adjusting component adjusts the substrate 2101a and the conveying component 23 to be close to each other, so that the distribution area of ​​the first precursor is not in contact with the distribution area of ​​the second precursor, and a passivation layer of multiple atomic layers is formed on the battery cell. The adjusting component adjusts the substrate 2101a and the conveying component 23 to be away from each other, so that the first precursor and the second precursor are in contact in the end surface space of the battery cell and form aluminum oxide particles, and a passivation layer is formed on the battery cell by chemical vapor deposition, realizing the conversion between atomic layer deposition and chemical vapor deposition, so that the aluminum oxide layer on the battery cell can meet both high-precision and fast deposition, thereby improving production efficiency.

[0041] In a specific embodiment of the present invention (not shown), the adjustment component is connected to the substrate 2101a and / or the conveying component 23 to adjust the distance between the substrate 2101a and the conveying component 23. The distance between the substrate 2101a and the conveying component 23 is adjusted by different connection modes between the adjustment component and the substrate 2101a and the conveying component 23. One mode is that the substrate 2101a is mobile, the conveying component 23 is fixed, the adjustment component drives the substrate 2101a to move, and the distance between the substrate 2101a and the conveying component 23 is adjusted. Another mode is that the substrate 2101a is fixed, the conveying component 23 is mobile, the adjustment component drives the conveying component 23 to move, and the distance between the conveying component 23 and the substrate 2101a is adjusted. Among them, the adjustment component is a retractable rod-shaped object, and the adjustment component includes automatic control parts such as hydraulic telescopic rods, electric telescopic rods, and pneumatic telescopic rods, which are used to perform automatic control to adjust the distance between the base component 2201 and the conveying component 23.

[0042] Further, such as Figure 4As shown, the upper end of the substrate 2101a is connected to a top plate 2101b, and the top plate 2101b covers the through-hole distribution area on the substrate 2101a, and divides the top space of the substrate 2101a into a plurality of channels, so that the precursors can flow in the channels. The top plate 2101b installed on the upper end of the substrate 2101a divides its upper end area into a plurality of circulation channels. When the excess first precursor and the second precursor are exported, a stronger negative pressure environment is formed through the plurality of circulation channels on the top plate 2101b, so that the first precursor and the second precursor can be quickly and centrally exported through the through-holes on the substrate 2101a, thereby improving the export efficiency of the first precursor and the second precursor.

[0043] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any changes or replacements within the technical scope disclosed in the embodiment of the present application should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be based on the protection scope of the claims.

Claims

1. A battery cell processing device, characterized in that: include: A preheating component, comprising a preheating cavity, into which a boat is introduced and the battery cells in the boat are preheated; A deposition component, which is arranged at the discharge end of the preheating component, the deposition component comprises a deposition chamber and a precursor supply mechanism, the deposition component is used to receive the boat, the precursor supply mechanism is installed in the deposition chamber, the precursor supply mechanism is used to supply a precursor and form a precursor supply area, so that the precursor forms a passivation deposition layer on the battery cell; The precursor supply mechanism comprises: The base assembly includes a substrate, wherein the substrate is provided with through holes for circulating gas; A gas supply component is installed on the substrate, and the gas supply component is used to supply precursors, and the precursors include a first precursor and a second precursor; A first distribution component is installed on the bottom end surface of the substrate, the first distribution component is connected to the gas outlet end of the gas supply component, and the first distribution component is used to spray the first precursor; A second distribution component is installed on the bottom end surface of the substrate, the second distribution component is connected to the gas outlet end of the gas supply component, and the second distribution component is used to spray the second precursor; The first precursor and the second precursor are used to form a passivation deposition layer on the cell; An annealing component, which is arranged at the discharge end of the deposition component, the annealing component includes an annealing cavity, the annealing component is used to receive the boat, and the annealing cavity is used for annealing the battery cell; A cooling component is arranged at the discharge end of the annealing component, and the cooling component includes a plurality of cooling positions, which can be adjusted to the discharge end of the annealing component in sequence, and the cooling positions are used to place the boat and cool the battery cells.

2. The battery cell processing device according to claim 1, characterized in that: The cooling component also includes a chassis assembly and a lifting assembly; The chassis assembly is arranged opposite to one side of the discharge end of the annealing component; A plurality of cooling positions are arranged at the top of the chassis assembly; The lifting assembly is arranged between the cooling positions and between the cooling positions and the chassis assembly. The lifting assembly is used to adjust the height of the cooling positions so that the cooling positions can be adjusted to the discharge end of the annealing component in sequence.

3. The battery cell processing device according to claim 2, characterized in that: The cooling station includes a frame and a plurality of rollers; The frame is connected to the lifting assembly to adjust a plurality of the frame bodies to correspond to the discharge ends of the annealing components in sequence; The roller is rollingly connected to the frame, and a plurality of the rollers are arranged along the length direction of the frame. The rollers are used to place the boat and reduce the friction force of the boat moving.

4. The battery cell processing device according to claim 3, characterized in that: The lifting assembly includes several groups of electric push rods, which are connected to the chassis assembly, the frames and several of the frames. The pushing strokes of the several groups of electric push rods decrease along the adjustment direction of the frames so that the electric push rods push the frames to adjust to the discharge end of the annealing component.

5. The battery cell processing device according to claim 4, characterized in that: The chassis assembly includes a bottom plate and support legs; The bottom plate is arranged opposite to one side of the discharge end of the annealing component, and the bottom plate penetrates and is fixedly connected to the electric push rod so that the electric push rod is fixedly installed; The support leg is fixedly connected to the bottom end surface of the base plate, the bottom end of the support leg is connected to the universal wheel, and the support leg supports the bottom end surface of the base plate and forms a mounting area for the electric push rod.

6. The battery cell processing device according to claim 1, characterized in that: The first distribution assembly and the second distribution assembly each include a distribution member and a plurality of injection members; The distribution member of the first distribution assembly and the distribution member of the second distribution assembly are both connected to the gas supply assembly for conveying the precursor; The injection member connects the distribution member of the first distribution assembly and the distribution member of the second distribution assembly, and is used for injecting the precursor; The plurality of injection members of the first distribution assembly and the plurality of injection members of the second distribution assembly are arranged at intervals and on the same horizontal plane.

7. The battery cell processing device according to claim 6, characterized in that: The first distribution component and the second distribution component are partially opened so that the first precursor and the second precursor sprayed therefrom are not in contact with each other, so as to form a passivation layer on the battery cell by atomic layer deposition. The first distribution component and the second distribution component are then fully opened so that the first precursor and the second precursor sprayed therefrom are in contact with each other, so as to form a passivation layer on the battery cell by chemical vapor deposition.

8. The battery cell processing device according to claim 6, characterized in that: The deposition component also includes a conveying assembly for conveying the battery sheet; The precursor supply mechanism also includes an adjustment component; The adjusting component is used to adjust the distance between the substrate and the conveying component; The adjusting component adjusts the substrate and the conveying component to be close to each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component do not contact each other, so as to form a passivation layer on the battery cell by atomic layer deposition. The adjusting component adjusts the substrate and the conveying component to be away from each other so that the first precursor sprayed by the first distribution component and the second precursor sprayed by the second distribution component contact each other, so as to form a passivation layer on the battery cell by chemical vapor deposition.

9. The battery cell processing device according to claim 8, characterized in that: The adjusting component is connected to the substrate and / or the conveying component and is used for adjusting the distance between the substrate and the conveying component.

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