Aluminum rotating target material and welding method and application thereof

Abstract

The invention provides an aluminum rotating target material and a welding method and application thereof, and the welding method comprises the following steps: adopting a vacuum electron beam to sequentially carry out positioned welding and deep penetration welding on an assembled aluminum pipe and an aluminum alloy accessory to obtain the aluminum rotating target material; during positioned welding, the focus of an electron beam is focused to the surface of a welding area, and the electron beam current is 10-20 mA; during deep penetration welding, the focus of an electron beam is focused to the interior of a welding area, and the electron beam current is 40-60 mA. According to the welding method, vacuum electron beam welding between the aluminum pipe and the aluminum alloy accessory is achieved, the quality of a welding seam in the aluminum rotating target obtained through the welding method is high, the welding speed is high, mass production of the aluminum rotating target can be achieved, and the production efficiency of the aluminum rotating target is greatly improved.

Description

Technical Field

[0001] The invention belongs to the technical field of aluminum rotating target materials, and relates to a welding method of an aluminum rotating target material, and in particular to an aluminum rotating target material, a welding method thereof and an application thereof. Background Art

[0002] With the development and progress of thin film products or component preparation technology used in TFT display technology, in order to meet the market demand for large-size panels above 8.5 generation lines, new manufacturing technologies for wiring layer aluminum metal targets have emerged. The aluminum targets required for large-size panels are divided into two categories: flat targets and rotating targets. In contrast, rotating targets are in a leading position in terms of corresponding panel size and effective utilization rate, so the development of rotating targets is of great significance for panel size and metal resource utilization. Aluminum rotating targets are combined by welding the main aluminum tube and aluminum alloy accessories. Commonly used welding methods include argon arc welding, resistance welding and friction welding. These methods can achieve the connection between pure aluminum tubular targets and aluminum alloy accessories, but due to the high temperature and high pressure during the welding process, defects such as pores and cracks may appear in the welding area, affecting the welding quality and joint performance; in addition, these methods have slow welding speeds and low production efficiency, and cannot meet the needs of large-scale production.

[0003] CN117921166A discloses an end welding method for an aluminum rotating target, the end welding method comprising: assembling the two ends of the tube body of the aluminum rotating target with flanges and tube caps respectively to obtain an aluminum rotating target tube with a welded joint; the material of the flange and the tube cap is independently an aluminum alloy with 2-4% silicon added to A6061; and performing stir friction welding on the welded joint to obtain an aluminum rotating target.

[0004] CN116921842A discloses an end welding method for an aluminum rotating target, the end welding method comprising the following steps: (1) assembling the two ends of an aluminum target tube body with a flange and a tube cap respectively to obtain an aluminum target tube having a welded joint; (2) performing a stir friction welding process on the welded joint in step (1), cooling the welded joint and then machining the welded joint to obtain the aluminum rotating target; the stir friction welding process in step (2) comprises a first weld, a second weld and a third weld performed in sequence.

[0005] CN110394603A discloses a metal rotating target material and its preparation method and application, which belongs to the technical field of integrated circuit and flat display manufacturing. The preparation method of the metal rotating target material provided in the document comprises the following steps: milling, rolling, recrystallization and turning and milling the metal plate blank in sequence to obtain a metal target blank; bending and deforming the metal target blank in sequence and butt welding the metal target blank to obtain a metal tubular target blank; binding the metal tubular target blank with a stainless steel tube to obtain a metal rotating target material.

[0006] The welding methods of aluminum rotating targets disclosed in the prior art all have certain defects, such as poor weld quality and slow welding speed, which cannot meet the needs of actual production. Therefore, it is very important to develop and design a new type of aluminum rotating target and its welding method. Summary of the invention

[0007] In view of the shortcomings of the prior art, the purpose of the present invention is to provide an aluminum rotating target material and a welding method and application thereof. The welding method provided by the present invention realizes vacuum electron beam welding between an aluminum tube and an aluminum alloy accessory. The quality of the weld in the aluminum rotating target material obtained by the welding method is high and the welding speed is fast. The mass production of the aluminum rotating target material can be realized, thereby greatly improving the production efficiency of the aluminum rotating target material.

[0008] To achieve this object, the present invention adopts the following technical solutions:

[0009] In a first aspect, the present invention provides a welding method for an aluminum rotary target, the welding method comprising:

[0010] The assembled aluminum tube and aluminum alloy fittings are sequentially tack welded and deep penetration welded by vacuum electron beam to obtain an aluminum rotating target;

[0011] During the positioning welding, the electron beam is focused on the surface of the welding area, and the electron beam current is 10-15 mA;

[0012] During deep penetration welding, the electron beam is focused to the inside of the welding area, and the electron beam is at a position with a set distance from the surface of the welding area along the incident direction of the electron beam. The electron beam current is 30-40 mA.

[0013] Vacuum electron beam welding is a welding method that uses high-energy electron beams as a heat source to partially melt the weldment and form a welded joint. Vacuum electron beam welding has the advantages of high energy density, fast welding speed, large welding depth, small welding deformation, and high welding quality. It is widely used in aerospace, nuclear energy, automobile, electronics and other industries. Aluminum alloys are widely used in the manufacture of various structural parts and mechanical parts due to their light weight, high strength, and corrosion resistance.

[0014] The welding method provided by the present invention realizes vacuum electron beam welding between an aluminum tube and an aluminum alloy fitting. The quality of the weld in the aluminum rotating target obtained by the welding method is high and the welding speed is fast. The mass production of the aluminum rotating target can be realized, thereby greatly improving the production efficiency of the aluminum rotating target.

[0015] The electron beam current during tack welding of the present invention is 10-20 mA, for example, it can be 10 mA, 10.2 mA, 10.5 mA, 11 mA, 11.5 mA, 12 mA, 12.5 mA, 13 mA, 13.5 mA, 14 mA, 14.5 mA, 15 mA, 15.5 mA, 16 mA, 16.5 mA, 17 mA, 17.5 mA, 18 mA, 18.5 mA, 19 mA, 19.5 mA or 20 mA, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0016] The electron beam current during deep penetration welding of the present invention is 40-60 mA, for example, it can be 40 mA, 42 mA, 44 mA, 46 mA, 48 mA, 50 mA, 52 mA, 54 mA, 56 mA, 58 mA or 60 mA, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0017] Preferably, the focus current during positioning welding is -2 to 2 mA, for example, it can be -2 mA, -1.5 mA, -1 mA, -0.5 mA, 0 mA, 0.5 mA, 1 mA, 1.5 mA or 2 mA, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0018] , but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0019] Preferably, the cooling period between the positioning welding and the deep penetration welding includes 15 to 20 minutes, for example, it can be 15 minutes, 15.5 minutes, 16 minutes, 16.5 minutes, 17 minutes, 17.5 minutes, 18 minutes, 18.5 minutes, 19 minutes, 19.5 minutes or 20 minutes, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0020] Preferably, the focus current during deep penetration welding is -10 to -20 mA, for example, it can be -10 mA, -10.5 mA, -11 mA, -11.5 mA, -12 mA, -12.5 mA, -13 mA, -13.5 mA, -14 mA, -14.5 mA, -15 mA, -15.5 mA, -16 mA, -16.5 mA, -17 mA, -17.5 mA, -18 mA, -18.5 mA, -19 mA, -19.5 mA or -20 mA, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] Preferably, during the deep penetration welding, the electron beam is focused to a position that is a set distance away from the surface of the welding area along the incident direction of the electron beam.

[0022] In the present invention, the electron beam focus is controlled by the focus point flow (focus current). It can be understood that the electron beam has a surface focusing state, a lower focusing state or an upper focusing state. Deep fusion welding is a lower focusing state, that is, there is a set distance from the actual focus point to the welding surface.

[0023] Preferably, the set spacing is 5 to 7 mm, for example, it can be 5mm, 5.2mm, 5.4mm, 5.6mm, 5.8mm, 6mm, 6.2mm, 6.4mm, 6.6mm, 6.8mm or 7mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0024] Preferably, the assembled aluminum tube and the aluminum alloy fitting are obtained by nesting the aluminum tube and the cylindrical aluminum alloy fitting, and the connection position between the opening of the aluminum tube and the outer wall of the cylindrical aluminum alloy fitting is the welding area.

[0025] Preferably, the difference between the inner diameter at the opening of the aluminum tube and the outer diameter of the cylindrical aluminum alloy fitting corresponding to the opening of the aluminum tube is 0.1 to 0.3 mm, for example, it can be 0.1 mm, 0.12 mm, 0.14 mm, 0.16 mm, 0.18 mm, 0.2 mm, 0.22 mm, 0.24 mm, 0.26 mm, 0.28 mm or 0.3 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0026] Preferably, before the nesting, a clean cloth with isopropyl alcohol is used to wipe the aluminum tube and the cylindrical aluminum alloy fitting respectively, so that the welding area is in a clean state after the nesting.

[0027] Preferably, during the positioning welding, the linear speed is 20 to 30 mm / s around the welding area in a circular manner, for example, it can be 20 mm / s, 20.5 mm / s, 21 mm / s, 21.5 mm / s, 22 mm / s, 22.5 mm / s, 23 mm / s, 23.5 mm / s, 24 mm / s, 24.5 mm / s, 25 mm / s, 25.5 mm / s, 26 mm / s, 26.5 mm / s, 27 mm / s, 27.5 mm / s, 28 mm / s, 28.5 mm / s, 29 mm / s, 29.5 mm / s or 30 mm / s, but it is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0028] Preferably, during the deep penetration welding, the linear speed is 10 to 20 mm / s around the welding area in a circular manner, for example, it can be 10 mm / s, 10.5 mm / s, 11 mm / s, 11.5 mm / s, 12 mm / s, 12.5 mm / s, 13 mm / s, 13.5 mm / s, 14 mm / s, 14.5 mm / s, 15 mm / s, 15.5 mm / s, 16 mm / s, 16.5 mm / s, 17 mm / s, 17.5 mm / s, 18 mm / s, 18.5 mm / s, 19 mm / s, 19.5 mm / s or 20 mm / s, but it is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0029] Preferably, the vacuum degree during the positioning welding and deep penetration welding is less than 1×10 -3 MPa, for example, it can be 9×10 - 4 MPa, 8×10 -4 MPa, 7×10 -4 MPa, 6×10 -4 MPa, 5×10 -4 MPa, 4×10 -4 MPa, 3×10 -4 MPa, 2×10 -4 MPa or 1×10 -4 MPa, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0030] In a second aspect, the present invention provides an aluminum rotating target material, which is obtained by the welding method described in the first aspect.

[0031] In a third aspect, the present invention provides an application of the aluminum rotating target material described in the second aspect, wherein the aluminum rotating target material is used for producing liquid crystal panels.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] The welding method provided by the present invention realizes vacuum electron beam welding between an aluminum tube and an aluminum alloy fitting. The quality of the weld in the aluminum rotating target obtained by the welding method is high and the welding speed is fast. The mass production of the aluminum rotating target can be realized, thereby greatly improving the production efficiency of the aluminum rotating target. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the structure of the aluminum tube and the aluminum alloy fittings after assembly in the embodiment of the present invention and the comparative example.

[0035] Among them, 1-aluminum tube; 2-cylindrical aluminum alloy accessories; 3-welding area. DETAILED DESCRIPTION

[0036] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0037] Example 1

[0038] This embodiment provides a welding method for an aluminum rotary target material, the welding method comprising:

[0039] (1) The aluminum tube 1 and the cylindrical aluminum alloy fitting 2 are nested to obtain the following Figure 1 After the assembly, the difference between the inner diameter of the opening of the aluminum tube 1 and the outer diameter of the cylindrical aluminum alloy fitting 2 corresponding to the opening of the aluminum tube 1 is 0.2 mm, and the connection position between the opening of the aluminum tube 1 and the outer wall of the cylindrical aluminum alloy fitting 2 is the welding area 3;

[0040] (2) When the vacuum degree is less than 1×10 -3 MPa, vacuum electron beam was used to perform positioning welding on the obtained assembled aluminum tube and aluminum alloy fittings, and then cooled for 18 minutes, and then deep penetration welding was performed to obtain aluminum rotating targets;

[0041] During the positioning welding, the electron beam is focused on the surface of the welding area 3, the electron beam current is 15 mA, the focus current is 0 mA, and the welding is performed in a circular manner around the welding area 3 at a linear speed of 25 mm / s;

[0042] During deep penetration welding, the electron beam is focused to a position 6 mm away from the surface of the welding area 3 along the electron beam incident direction, the electron beam current is 50 mA, the focus current is -15 mA, and a circle of circular welding is performed around the welding area 3 at a linear speed of 15 mm / s.

[0043] Example 2

[0044] This embodiment provides a welding method for an aluminum rotary target material, the welding method comprising:

[0045] (1) The aluminum tube 1 and the cylindrical aluminum alloy fitting 2 are nested to obtain the following Figure 1 After the assembly, the difference between the inner diameter of the opening of the aluminum tube 1 and the outer diameter of the cylindrical aluminum alloy fitting 2 corresponding to the opening of the aluminum tube 1 is 0.15 mm, and the connection position between the opening of the aluminum tube 1 and the outer wall of the cylindrical aluminum alloy fitting 2 is the welding area 3;

[0046] (2) When the vacuum degree is less than 1×10 -3MPa, vacuum electron beam was used to perform positioning welding on the assembled aluminum tube and aluminum alloy fittings, and then cooled for 17 minutes, and then deep penetration welding was performed to obtain aluminum rotating targets;

[0047] During the positioning welding, the electron beam is focused on the surface of the welding area 3, the electron beam current is 12 mA, the focus current is less than 0 mA, and the welding is performed in a circular manner around the welding area 3 at a linear speed of 22 mm / s;

[0048] During deep penetration welding, the electron beam is focused to a position 5.5 mm away from the surface of the welding area 3 along the electron beam incident direction, the electron beam current is 60 mA, the focus current is -12 mA, and a circle of circular welding is performed around the welding area 3 at a linear speed of 18 mm / s.

[0049] Example 3

[0050] This embodiment provides a welding method for an aluminum rotary target material, the welding method comprising:

[0051] (1) The aluminum tube 1 and the cylindrical aluminum alloy fitting 2 are nested to obtain the following Figure 1 After the assembly, the difference between the inner diameter of the opening of the aluminum tube 1 and the outer diameter of the cylindrical aluminum alloy fitting 2 corresponding to the opening of the aluminum tube 1 is 0.25 mm, and the connection position between the opening of the aluminum tube 1 and the outer wall of the cylindrical aluminum alloy fitting 2 is the welding area 3;

[0052] (2) When the vacuum degree is less than 1×10 -3 MPa, vacuum electron beam was used to perform positioning welding on the obtained assembled aluminum tube and aluminum alloy fittings, and then cooled for 19 minutes, and then deep penetration welding was performed to obtain aluminum rotating targets;

[0053] During the positioning welding, the electron beam is focused on the surface of the welding area 3, the electron beam current is 18 mA, the focus current is 0 mA, and the welding is performed in a circular manner around the welding area 3 at a linear speed of 28 mm / s;

[0054] During deep penetration welding, the electron beam is focused to a position 5 mm away from the surface of the welding area 3 along the electron beam incident direction, the electron beam current is 55 mA, the focus current is -10 mA, and a circle of circular welding is performed around the welding area 3 at a linear speed of 12 mm / s.

[0055] Example 4

[0056] This embodiment provides a welding method for an aluminum rotary target material, the welding method comprising:

[0057] (1) The aluminum tube 1 and the cylindrical aluminum alloy fitting 2 are nested to obtain the following Figure 1After the assembly, the difference between the inner diameter of the opening of the aluminum tube 1 and the outer diameter of the cylindrical aluminum alloy fitting 2 corresponding to the opening of the aluminum tube 1 is 0.1 mm, and the connection position between the opening of the aluminum tube 1 and the outer wall of the cylindrical aluminum alloy fitting 2 is the welding area 3;

[0058] (2) When the vacuum degree is less than 1×10 -3 MPa, the assembled aluminum tube and aluminum alloy fittings were tack welded by vacuum electron beam, cooled for 15 min, and then deep penetration welded to obtain aluminum rotating targets;

[0059] During the positioning welding, the electron beam is focused on the surface of the welding area 3, the electron beam current is 20 mA, the focus current is 0.05 mA, and the welding is performed in a circular manner around the welding area 3 at a linear speed of 20 mm / s;

[0060] During deep penetration welding, the electron beam is focused to a position 7 mm away from the surface of the welding area 3 along the electron beam incident direction, the electron beam current is 45 mA, the focus current is -18 mA, and a circle of circular welding is performed around the welding area 3 at a linear speed of 20 mm / s.

[0061] Example 5

[0062] This embodiment provides a welding method for an aluminum rotating target, the welding method comprising:

[0063] (1) The aluminum tube 1 and the cylindrical aluminum alloy fitting 2 are nested to obtain the following Figure 1 After the assembly, the difference between the inner diameter of the opening of the aluminum tube 1 and the outer diameter of the cylindrical aluminum alloy fitting 2 corresponding to the opening of the aluminum tube 1 is 0.3 mm, and the connection position between the opening of the aluminum tube 1 and the outer wall of the cylindrical aluminum alloy fitting 2 is the welding area 3;

[0064] (2) When the vacuum degree is less than 1×10 -3 MPa, the assembled aluminum tube and aluminum alloy fittings were tack welded by vacuum electron beam, cooled for 20 min, and then deep penetration welded to obtain aluminum rotating targets;

[0065] During the positioning welding, the electron beam is focused on the surface of the welding area 3, the electron beam current is 10 mA, the focus current is 0.03 mA, and the welding is performed in a circular manner around the welding area 3 at a linear speed of 30 mm / s;

[0066] During deep penetration welding, the electron beam is focused to a position 6.5 mm away from the surface of the welding area 3 along the electron beam incident direction, the electron beam current is 40 mA, the focus current is -20 mA, and a circle of circular welding is performed around the welding area 3 at a linear speed of 10 mm / s.

[0067] Example 6

[0068] This embodiment provides a welding method for an aluminum rotating target, which is the same as that of Embodiment 1 except that the focus current during positioning welding is -5 mA.

[0069] Example 7

[0070] This embodiment provides a welding method for an aluminum rotating target, which is the same as that of Embodiment 1 except that the focus current during positioning welding is 5 mA.

[0071] Example 8

[0072] This embodiment provides a welding method for an aluminum rotating target, which is the same as that of Embodiment 1 except that the focus current during deep penetration welding is -5 mA.

[0073] Example 9

[0074] This embodiment provides a welding method for an aluminum rotating target, which is the same as that of Embodiment 1 except that the focus current during deep penetration welding is -30 mA.

[0075] Comparative Example 1

[0076] This comparative example provides a welding method for an aluminum rotating target material, which is the same as Example 1 except that the electron beam current during positioning welding is 5 mA.

[0077] Comparative Example 2

[0078] This comparative example provides a welding method for an aluminum rotating target material, which is the same as Example 1 except that the electron beam current during positioning welding is 20 mA.

[0079] Comparative Example 3

[0080] This comparative example provides a welding method for an aluminum rotating target, which is the same as Example 1 except that the electron beam current during deep penetration welding is 20 mA.

[0081] Comparative Example 4

[0082] This comparative example provides a welding method for an aluminum rotating target material, which is the same as that of Example 1 except that the electron beam current during deep penetration welding is 50 mA.

[0083] The aluminum rotating target material prepared by the welding method provided in the above embodiment and comparative example was processed to meet the test requirements. The helium leakage detection was performed on the welding area 3: at a vacuum degree of 5×10 -10MPa or less, and blow air to the welding area 3. If there is no leakage, it is judged that the weld quality is good and the welding strength is high, and the welding quality is qualified. Otherwise, the weld quality is poor and the welding strength is low, and the welding quality is unqualified. The welding qualified rates of the aluminum rotary target materials obtained by testing are shown in Table 1.

[0084] Table 1

[0085]

[0086]

[0087] From Table 1, we can get:

[0088] (1) The aluminum rotating target obtained by the welding method of the aluminum rotating target in Examples 1 to 5 of the present invention has a high welding qualification rate and good weld quality; the welding method provided by the present invention realizes vacuum electron beam welding between the aluminum tube 1 and the aluminum alloy fitting, and the weld quality of the aluminum rotating target obtained by the welding method is high and the welding speed is fast, and the mass production of the aluminum rotating target can be realized, which greatly improves the production efficiency of the aluminum rotating target;

[0089] (2) By comparing Example 1 with Examples 6 and 7, it can be seen that the focus current during positioning welding described in the present invention will affect the weld quality of the obtained aluminum rotating target; when the focus current during positioning welding is -2 to 2 mA, the qualified rate of the obtained aluminum rotating target is higher; in Example 6, the electron beam is in a lower focusing state, the focus position is located inside the workpiece, the beam spot size when the electron beam reaches the workpiece surface is larger, the power density under the same beam input is smaller, there is no pinhole effect, the weld formation is mainly based on heat conduction, the weld cross section is flat, which will affect the effect of deep penetration welding and ultimately affect the welding qualified rate; in Example 7, the electron beam is in an upper focusing state, the focus position is located above the workpiece, the beam spot size when the beam reaches the workpiece surface is larger, the power density is smaller, the weld formation is mainly based on heat conduction, and the weld cross section is flat, which will affect the effect of deep penetration welding and ultimately affect the welding qualified rate;

[0090] (4) By comparing Example 1 with Examples 8 and 9, it can be seen that the focus current during deep penetration welding described in the present invention will affect the weld quality of the aluminum rotating target obtained; when the focus current during deep penetration welding is -10 to -20 mA, the qualified rate of the aluminum rotating target obtained is higher; the electron beam in Example 8 is generally close to the surface focusing state, the beam spot size on the workpiece surface is small, and the power density under large beam input is large. Under the bombardment of the electron beam, needle-shaped small holes are generated in the workpiece metal, forming a weld with a large depth and width, and the weld cross section is "nail-shaped", which may have the risk of welding through, affecting the welding quality; the electron beam in Example 9 is in a downward focusing state, the beam spot size on the workpiece surface is large, the power density under large beam input is small, the weld depth and width are small, the weld cross section is flat, and there may be defects such as pores, affecting the welding quality;

[0091] (5) By comparing Example 1 with Comparative Examples 1 and 2, it can be seen that the electron beam current during tack welding in the present invention affects the weld quality of the obtained aluminum rotary target; when the electron beam current during tack welding is 10-20 mA, the qualified rate of the obtained aluminum rotary target is higher; in Comparative Examples 1 and 2, the electron beam during tack welding is in an upward focusing state, and the beam spot size is larger when the low beam current reaches the workpiece surface, the power density is smaller, and the weld formation is mainly based on heat conduction. At this time, the energy of heat conduction is smaller, and most of the weld is not melted together, which affects the welding quality;

[0092] (6) By comparing Example 1 with Comparative Examples 3 and 4, it can be seen that the electron beam current during deep penetration welding in the present invention will affect the weld quality of the obtained aluminum rotating target material; when the electron beam current during deep penetration welding is 40-60 mA, the qualified rate of the obtained aluminum rotating target material is higher; in Comparative Example 3, the beam current during deep penetration welding is too small, and the beam spot energy density is not enough to fully melt the welding area of ​​a certain depth, resulting in poor weld quality; in Comparative Example 4, the beam current during deep penetration welding is too small, and the beam spot energy density is too large, which will melt through the welding area and the weld quality will also deteriorate.

[0093] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention are within the protection scope and disclosure scope of the present invention.

Claims

1. A welding method for an aluminum rotating target, characterized in that: The welding method comprises: The assembled aluminum tube and aluminum alloy fittings are sequentially tack welded and deep penetration welded by vacuum electron beam to obtain an aluminum rotating target; During the positioning welding, the electron beam is focused on the surface of the welding area, and the electron beam current is 10-15 mA; During the deep penetration welding, the electron beam is focused to the inside of the welding area, and the electron beam current is 30-40 mA.

2. The welding method according to claim 1, characterized in that: The focus current during the positioning welding is -2 to 2 mA.

3. The welding method according to claim 1 or 2, characterized in that: The tack welding and deep penetration welding also include a cooling period of 15 to 20 minutes.

4. The welding method according to any one of claims 1 to 3, characterized in that: The focus current during deep penetration welding is -10 to -20 mA.

5. The welding method according to any one of claims 1 to 4, characterized in that: During deep penetration welding, the electron beam is focused to a position that is a set distance away from the surface of the welding area along the incident direction of the electron beam.

6. The welding method according to any one of claims 1 to 5, characterized in that: The assembled aluminum tube and the aluminum alloy fitting are obtained by nesting the aluminum tube and the cylindrical aluminum alloy fitting, and the connection position between the opening of the aluminum tube and the outer wall of the cylindrical aluminum alloy fitting is the welding area; Preferably, the difference between the inner diameter of the opening of the aluminum tube and the outer diameter of the cylindrical aluminum alloy fitting corresponding to the opening of the aluminum tube is 0.1 to 0.3 mm.

7. The welding method according to claim 6, characterized in that: During the positioning welding, a circle of welding is performed around the welding area at a linear speed of 20 to 30 mm / s; Preferably, during the deep penetration welding, a circle of annular welding is performed around the welding area at a linear speed of 10 to 20 mm / s.

8. The welding method according to any one of claims 1 to 7, characterized in that: The vacuum degree during positioning welding and deep penetration welding is less than 1×10 -3 MPa.

9. An aluminum rotary target, characterized in that: The aluminum rotary target is obtained by the welding method according to any one of claims 1 to 8.

10. An application of the aluminum rotary target material according to claim 9, characterized in that: The aluminum rotary target is used for producing liquid crystal panels.

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