Motor, mounting table apparatus, lithographic apparatus, and article manufacturing method

Abstract

The invention relates to a motor, a stage apparatus, a lithography apparatus, and an article manufacturing method. The motor includes: a magnet assembly; a coil assembly including a plurality of coils; a first power brake circuit and a second power brake circuit that generate a brake force by short-circuiting a coil facing the magnet assembly among the plurality of coils; and a control circuit for controlling the operation of the first power brake circuit and the second power brake circuit, the control circuit activating the first power brake circuit and the second power brake circuit at different timings from each other.

Description

Technical Field

[0001] The present invention relates to a motor, a mounting table device, a photolithography device, and an article manufacturing method. Background Art

[0002] Patent Document 1 describes a stage device that uses a linear motor to move a moving object. This linear motor has multiple coils as a stator and magnets as a mover. By switching which of the multiple coils is energized, thrust is generated using the Lorentz force. In this stage device, the coil facing the magnet in a pair of coils arranged at separate positions serves as a dynamic brake coil, and the other coil serves as a current-limiting resistor.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2006-237069 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] By limiting the current flowing through the dynamic brake coil during the dynamic brake operation, damage to the coil can be prevented. However, there is a problem in that the time required to stop or decelerate the mover is prolonged.

[0008] An object of the present invention is to provide a technique that is advantageous in shortening the time required to stop or decelerate a mover while preventing coil damage.

[0009] Solutions for solving problems

[0010] A first aspect of the present invention relates to an electric motor comprising a magnet assembly and a coil assembly including a plurality of coils, the electric motor comprising: a first dynamic braking circuit and a second dynamic braking circuit for generating a braking force by short-circuiting coils of the plurality of coils facing the magnet assembly; and a control circuit for controlling the operation of the first dynamic braking circuit and the second dynamic braking circuit, the control circuit activating the first dynamic braking circuit and the second dynamic braking circuit at different timings.

[0011] A second aspect of the present invention relates to a stage device including: a stage; and the motor according to the first aspect, configured to drive the stage.

[0012] A third aspect of the present invention relates to a lithography apparatus for transferring a pattern of an original plate onto a substrate, the lithography apparatus comprising: a stage for holding the substrate or the original plate; and the motor according to the first aspect, configured to drive the stage.

[0013] A fourth aspect of the present invention relates to a method for manufacturing an article, comprising: a transfer step of transferring the pattern of the original plate to a substrate through the photolithography device involved in the third aspect; and a processing step of obtaining the article by processing the substrate to which the pattern is transferred.

[0014] Effects of the Invention

[0015] According to the present invention, there is provided a technique that is advantageous in shortening the time required to stop or decelerate a mover while preventing coil damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1A This is a diagram showing the circuit configuration of the A phase of the electric motor according to the first embodiment during normal operation.

[0017] Figure 1B This is a diagram showing a circuit configuration of the B phase of the electric motor according to the first embodiment during normal operation.

[0018] Figure 2A This is a diagram showing a circuit configuration of the A phase of the electric motor according to the first embodiment in the first stage during an emergency stop.

[0019] Figure 2B This is a diagram showing a circuit configuration of the A phase of the electric motor according to the first embodiment in the first stage during an emergency stop.

[0020] Figure 3A This is a diagram showing a circuit configuration of the A phase of the electric motor according to the first embodiment in the second stage during an emergency stop.

[0021] Figure 3B This is a diagram showing a circuit configuration of the A phase of the electric motor according to the first embodiment in the second stage during an emergency stop.

[0022] Figure 4 It is a perspective view showing the configuration of a mounting table device and a motor according to a second embodiment.

[0023] Figure 5 It is a perspective view showing the configuration of a mounting table device and a motor according to a second embodiment.

[0024] Figure 6 It is a plan view showing the configuration of a mounting table device and a motor according to a second embodiment.

[0025] Figure 7 It is a diagram showing the structure of a magnet assembly and a coil assembly of an electric motor according to a second embodiment.

[0026] Figure 8A This is a diagram showing the circuit configuration of the A phase of the electric motor according to the second embodiment during normal operation.

[0027] Figure 8B This is a diagram showing a circuit configuration of the B phase of the electric motor according to the second embodiment during normal operation.

[0028] Figure 9A This is a diagram showing a circuit configuration of the A phase of the electric motor according to the second embodiment in the first stage during an emergency stop.

[0029] Figure 9B This is a diagram showing a circuit configuration of the A phase of the electric motor according to the second embodiment in the first stage during an emergency stop.

[0030] Figure 10A This is a diagram showing a circuit configuration of the A phase of the electric motor according to the second embodiment in the second stage during an emergency stop.

[0031] Figure 10B This is a diagram showing a circuit configuration of the A phase of the electric motor according to the second embodiment in the second stage during an emergency stop.

[0032] Figure 11 It is a perspective view showing the configuration of a mounting table device and a motor according to a third embodiment.

[0033] Figure 12 It is a perspective view showing the configuration of a mounting table device and a motor according to a third embodiment.

[0034] Figure 13 It is a diagram showing the structure of a magnet assembly and a coil assembly of an electric motor according to a third embodiment.

[0035] Figure 14 It is a perspective view showing the configuration of a mounting table device and a motor according to a fourth embodiment.

[0036] Figure 15 It is a plan view showing the configuration of a mounting table device and a motor according to a fourth embodiment.

[0037] Figure 16 It is a perspective view showing the structure of a mounting table device and a motor according to a fifth embodiment.

[0038] Figure 17 It is a perspective view showing the structure of a mounting table device and a motor according to one embodiment.

[0039] Figure 18 It is a perspective view showing the structure of a mounting table device and a motor according to one embodiment.

[0040] Figure 19 yes Figure 18 A partial enlarged view of .

[0041] Figure 20It is a cross-sectional view showing the structure of a magnet assembly and a coil assembly of an electric motor according to one embodiment.

[0042] Figure 21 It is a plan view showing the structure of a mounting table device and a motor according to one embodiment.

[0043] Figure 22 It is a plan view showing the structure of a magnet assembly and a coil assembly of an electric motor according to one embodiment.

[0044] Figure 23A 1 is a diagram showing a circuit configuration of phase A of a motor according to a comparative example during normal operation.

[0045] Figure 23B 1 is a diagram showing a circuit configuration of the B phase of a motor according to a comparative example during normal operation.

[0046] Figure 24A 1 is a diagram showing a circuit configuration of phase A of a motor of a comparative example during an emergency stop.

[0047] Figure 24B 1 is a diagram showing a circuit configuration of the B phase of a motor of a comparative example during an emergency stop.

[0048] Figure 25 This is a diagram illustrating the structure of a photolithography apparatus according to one embodiment.

[0049] Figure 26A This is a diagram showing a circuit configuration of the A phase of the electric motor according to the third embodiment during an emergency stop.

[0050] Figure 26B This is a diagram showing a circuit configuration of the B phase of the electric motor according to the third embodiment during an emergency stop.

[0051] Description of Reference Numerals

[0052] 804: Magnet assembly, 505: Coil assembly, 710A, 710B: Control circuit, ST: Stage device. DETAILED DESCRIPTION

[0053] The following embodiments are described in detail with reference to the accompanying drawings. It should be noted that the following embodiments do not limit the inventions described in the claims. While various features are described in the embodiments, these features are not necessarily all essential to the inventions. Furthermore, any combination of features is possible. Furthermore, in the accompanying drawings, identical or similar structures are denoted by the same reference numerals, and duplicate descriptions are omitted.

[0054] First, refer to Figure 17 、 Figure 18 、 Figure 19 、 Figure 20 、 Figure 21 、 Figure 22 A configuration example of the stage device ST according to one embodiment will be described. Figure 17 It is a perspective view of the stage device ST.

[0055] Figure 18 It is from Figure 17 A perspective view of the stage device ST with some components removed.

[0056] Figure 19 It will Figure 18 A magnified stereogram of a portion of the image. Figure 20 It is a cross-sectional view showing a configuration example of the coil assembly (stator) 505 and the magnet assembly (motor) 504 . Figure 21 It is a top view of the stage device ST. Figure 22 1 is a plan view showing a configuration example of a coil assembly (stator) 505 and a magnet assembly (mover) 504. The coil assembly (stator) 505 and the magnet assembly (mover) 504 constitute an electric motor, and in this example, a linear motor.

[0057] The yaw guide 501 can be fixed on both sides of the base 500. The mounting platform 502 can be supported by the upper surface of the base 500 and the side surfaces of the two yaw guides 501 via a pneumatic slider (not shown) so as to be slidable. An arm 503 can be fixed on the mounting platform 502, and a magnet assembly 504 serving as a mover can be fixed to the front end of the arm 503. The magnet assembly 504 faces the coil assembly 505 in a non-contact manner in a manner of surrounding the coil assembly 505 serving as the stator. The coil assembly 505 can be fixed to the coil support structure 506. The coil support structure 506 can include a pillar 506-1 and a platform 506-2.

[0058] The magnet assembly 504 can include an upper yoke 504-1U, two spacers 504-2, an upper magnet array 504-3U, a lower magnet array 504-3L, and a lower yoke 504-1L. The upper magnet array 504-3U can include two upward-magnetized magnets 504-3VU, two downward-magnetized magnets 504-3VL, two Y+-magnetized magnets 504-3YP, and three Y--magnetized magnets 504-3YM. The upper magnet array 504-3U is fixed to the upper yoke 504-1U and can form a Halbach array magnet array that produces a substantially sinusoidal magnetic flux density distribution. The lower magnet array 504-3L is fixed to the lower yoke 504-1L and can form a Halbach array magnet array similar to the upper magnet array 504-3U. The coil assembly 505 may include 11 flat, oblong coils 505-C and a coil support member 505-S that supports them. The flat, oblong coils 505-C may be fixed to the coil support member 505-S by bonding or other methods.

[0059] If the period of the roughly sinusoidal magnetic flux density distribution is T, the distance between adjacent coils is 3 / 4T in terms of center-to-center distance, or 3 / 2π in electrical angle. The distance between the skipped coils is 3π in electrical angle, and the phases are opposite to each other. Therefore, by reversing the connection of the skipped coils relative to the winding, they can be treated as coils of the same phase. Here, the set of skipped coils 505A in a certain group constitutes the A-phase coil group, and the set of skipped coils 505B in the remaining group constitutes the B-phase coil group 505B. Furthermore, at position y of the mounting platform 502 (the driving direction, i.e., the direction in which the multiple coils are arranged), a current of Ia = I·sin(2π / T·y) flows through the A-phase coil group, and a current of Ib = I·sin(2π / T·y+3 / 2π) flows through the B-phase coil group. This generates a thrust proportional to the current amplitude I at position y. The currents Ia and Ib are not supplied to all the coils but are supplied only to the coil facing the magnet.

[0060] exist Figure 22 The middle diagram shows a state where the upper yoke 504-1U is removed to observe the magnet assembly 504 and the coil assembly 505. The coil shown in white is the coil 505A of the A-phase coil group, and the coil shown in gray is the coil 505B of the B-phase coil group.

[0061] Here, refer to Figure 23A 、 Figure 23B 、 Figure 24A 、 Figure 24B A comparative example will be described. Figure 23A In FIG, the coil 505A of the A-phase coil group is shown together with the driver 600A, the coil selector 601A, the short-circuit circuit 604A, and the stop instruction circuit 605A. Figure 23B In FIG, the coil 505B of the B-phase coil group is shown together with the driver 600B, the coil selector 601B, the short-circuit circuit 604B and the stop instruction circuit 605B. Figure 23A 、 Figure 23B The operation during normal operation is shown in FIG.

[0062] In phase A, driver 600A is connected to each coil 505A of the phase A coil group via coil selector 601A. In phase B, driver 600B is connected to each coil 505B of the phase B coil group via coil selector 601B. Moreover, coil selectors 601A and 601B control the connection between only the coils facing magnet assembly 504 and drivers 600A and 600B, while the others are disconnected from drivers 600A and 600B. In addition, one end of a switch 602G for connecting to a common ground and a switch 602S for short-circuiting each coil are connected to the terminal on the opposite side of the coil selector of the two terminals of each coil. It should be noted that the common ground is represented by an inverted triangle. The other end of switch 602S is connected to the coil selector side via external resistor 603.

[0063] The A-phase stop command circuit 605A controls the activation and inactivation of a stop command signal that turns each switch 602S of the A-phase short-circuit circuit 604A into a conductive state, that is, turns each coil 505A of the A-phase coil group into a short-circuit state. The B-phase stop command circuit 605B controls the activation and inactivation of a stop command signal that turns each switch 602S of the B-phase short-circuit circuit 604B into a conductive state, that is, turns each coil 505B of the B-phase coil group into a short-circuit state. Activation of the stop command signal causes the switch 602S to be in a conductive state, while inactivation of the stop command signal causes the switch 602S to be in a non-conductive state. An activation of the stop command signal causes the switch 602S to be in a conductive state, while an inactivation of the stop command signal causes the switch 602S to be in a non-conductive state.

[0064] During normal operation, coil selectors 601A and 601B connect drivers 600A and 600B only to the coil facing magnet assembly 504. Stop command circuits 605A and 605B maintain the stop command signal in an inactive state. Furthermore, during normal operation, all switches 602G in short-circuit circuits 604A and 604B are turned on, and all switches 602S are turned off.

[0065] exist Figure 24A 、 Figure 24B The figure shows the operation during an emergency stop. During an emergency stop, stop command circuits 605A and 605B activate the stop command signal. This state is indicated by the gray coloring of stop command circuits 605A and 605B. During an emergency stop, all coil selectors 601A and 601B are set to a non-conductive state, and all switches 602G in short-circuit circuits 604A and 604B are set to a non-conductive state.

[0066] Here, the back electromotive force of each coil 505A of the A-phase coil group is set to Ea, the back electromotive force of each coil 505B of the B-phase coil group is set to Eb, the resistance of coils 505A and 505B is set to R, and the resistance of external resistor 603 is set to Ro. A current of Iea = Ea / (R + Ro) flows through coil 505A of phase A facing magnet assembly 504, and dynamic braking functions. Furthermore, a current of Ieb = Eb / (R + Ro) flows through coil 505B of phase B facing magnet assembly 504, and dynamic braking functions. If a large acceleration is applied to platform 502 by dynamic braking, platform 502 may be damaged. Therefore, to prevent this, Ro is set to an appropriate value, and Iea and Ieb are limited to appropriate values.

[0067] Below, refer to Figure 1A 、 Figure 1B 、 Figure 2A 、 Figure 2B 、 Figure 3A as well as Figure 3B The motor of the first embodiment is described. Matters not mentioned in the first embodiment can be described in accordance with the above description. The motor of the first embodiment can be used as a motor for a mounting table device, for example. Figure 1A In FIG, the coil 505A of the A-phase coil group is shown together with the driver 600A, the coil selector 601A, the short-circuit circuit 704A, and the control circuit 710A. Figure 1B , the coil 505B of the B-phase coil group is shown together with a driver 600B, a coil selector 601B, a short-circuit circuit 604B, and a control circuit 710B.

[0068] In phase A, driver 600A is connected to each coil 505A of the phase A coil group via coil selector 601A. In phase B, driver 600B is connected to each coil 505B of the phase B coil group via coil selector 601B. Moreover, coil selectors 601A and 601B control the connection between only the coils facing magnet assembly 504 and drivers 600A and 600B, while the others are disconnected from drivers 600A and 600B. In addition, one end of each coil's two terminals, the terminal on the opposite side of the coil selector, is connected to a switch 702G for connecting to a common ground and one end of each switch 702S-1 and 702S-2 for short-circuiting each coil. The other end of each switch 702S-1 and 702S-2 is connected to the coil selector side via external resistors 703-1 and 703-2.

[0069] That is, short-circuit circuit 704A for phase A includes an external resistor (first resistor) 703-1 and a switch (first switch) 702S-1, arranged in a path connecting the two terminals of coil 505A, to serve as a first dynamic braking circuit. Furthermore, short-circuit circuit 704A for phase A includes an external resistor (second resistor) 703-2 and a switch (second switch) 702S-2, arranged in a path connecting the two terminals of coil 505A, to serve as a second dynamic braking circuit.

[0070] Similarly, the B-phase short-circuit circuit 704B includes an external resistor (first resistor) 703-1 and a switch (first switch) 702S-1, arranged in a path connecting the two terminals of the coil 505B, as a first dynamic braking circuit. Furthermore, the B-phase short-circuit circuit 704B includes an external resistor (second resistor) 703-2 and a switch (second switch) 702S-2, arranged in a path connecting the two terminals of the coil 505B, as a second dynamic braking circuit. These dynamic braking circuits generate a braking force that brakes the mounting platform 502 (or, in other viewpoints, the magnet assembly 504 serving as the mover).

[0071] The control circuit 710A of phase A controls the operation of the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2). The control circuit 710A activates the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2) at different times. The control circuit 710A may include a first generating circuit 705A that generates a first braking signal BA1 that activates the first dynamic braking circuit and a second generating circuit 706A that generates a second braking signal BA2 that activates the second dynamic braking circuit. The second generating circuit 706A may include a delay device that generates the second braking signal BA2 by delaying the first braking signal BA1. The delay device may be composed of, for example, an analog circuit including a CR integrator, or may be composed of a counter including an FPGA, etc. The delay time of the delay device may be set to, for example, several milliseconds.

[0072] Alternatively, the control circuit 710A may include a generating circuit for generating a first signal and a delay device for generating a second signal that is a delayed version of the first signal. In this case, the control circuit 710A may activate the first brake signal BA1 for activating the first dynamic brake circuit in response to activation of the first signal, and activate the second brake signal BA2 for activating the second dynamic brake circuit in response to activation of the second signal.

[0073] Similarly, the B-phase control circuit 710B controls the operation of the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2) of the B-phase. The control circuit 710B activates the first dynamic braking circuit (703-1, 702S-1) and the second dynamic braking circuit (703-2, 702S-2) at different times. The control circuit 710B may include a first generating circuit 705B that generates a first braking signal BB1 to activate the first dynamic braking circuit and a second generating circuit 706B that generates a second braking signal BB2 to activate the second dynamic braking circuit. The second generating circuit 706B may include a delay device that generates the second braking signal BB2 by delaying the first braking signal BB1.

[0074] Alternatively, the control circuit 710B may include a generating circuit for generating a first signal and a delay device for generating a second signal that is a delayed version of the first signal. In this case, the control circuit 710B may activate the first brake signal BB1 for activating the first dynamic brake circuit in response to activation of the first signal, and activate the second brake signal BB2 for activating the second dynamic brake circuit in response to activation of the second signal.

[0075] Activation of brake signals BA1 (BB1) and BA2 (BB2) causes switches 702S-1 and 702S-2 to be in a conductive state. Inactivation of brake signals BA1 (BB1) and BA2 (BB2) causes switches 702S-1 and 702S-2 to be in a non-conductive state. Activation of brake signals BA1 (BB1) and BA2 (BB2) causes switches 702S-1 and 702S-2 to be in a conductive state. Inactivation of brake signals BA1 (BB1) and BA2 (BB2) causes switches 702S-1 and 702S-2 to be in a non-conductive state.

[0076] The electric motor of this embodiment may also include a power supply source, such as an emergency power supply or capacitor, for supplying power to the circuits (control circuit 710A, control circuit 710B, short-circuit circuit 704A, short-circuit circuit 704B, etc.) to activate dynamic braking in the event of a power failure. In the event of a power failure, power from this power supply source allows the circuits to operate, thereby activating dynamic braking.

[0077] exist Figure 1A 、 Figure 1B, schematically illustrates the state of the motor during normal operation, in other words, the operation of driving the mounting table 502 (magnet assembly 504) via the motor (linear motor). During normal operation, the drivers 600A and 600B are connected only to the coil facing the magnet assembly 504 via coil selectors 601A and 601B. Furthermore, the control circuits 710A and 710B maintain the brake signals BA1, BA2, BB1, and BB2 in an inactive state. Furthermore, during normal operation, in the short-circuit circuits 704A and 704B, all switches 702G are turned on, and all switches 702S-1 and 702S-2 are turned off.

[0078] exist Figure 2A 、 Figure 2B FIG2 schematically illustrates the state of the motor in the first stage of an emergency stop, in other words, an emergency stop of the mounting table 502 (magnet assembly 504) driven by the motor (linear motor). In the first stage, all coil selectors 601A and 601B are set to a non-conductive state, and all switches 702G in the short-circuit circuits 704A and 704B are set to a non-conductive state.

[0079] Furthermore, in the first phase, the first brake signals BA1 and BB1 are activated by control circuits 710A and 710B, while the second brake signals BA2 and BB2 remain inactive. Consequently, in short-circuit circuits 704A and 704B, switch 702G remains non-conductive, switch 702S-1 transitions to and remains conductive, and switch 702S-2 remains non-conductive.

[0080] Here, let the back electromotive force of each coil 505A of the A-phase coil group be Ea, the back electromotive force of each coil 505B of the B-phase coil group be Eb, the resistance of coils 505A and 505B be R, and the resistance of external resistor 703-1 be Ro1. In the first stage, the current Iea flowing through coil 505A of the A-phase facing magnet assembly 504 and the current Ieb flowing through coil 505B of the B-phase facing magnet assembly 504 are given by equations (1) and (2). The dynamic braking action based on these currents Iea and Ieb acts on stage 502, and the braking force acts on stage 502.

[0081] Iea=Ea / (R+Ro1)…(1)

[0082] Ieb=Eb / (R+Ro1)…(2)

[0083] exist Figure 3A 、 Figure 3BThe figure schematically illustrates the state of the motor in the second stage during an emergency stop. The transition from the first stage to the second stage occurs when the second brake signals BB1 and BB2 are activated after a predetermined delay time has elapsed from the activation of the first brake signals BA1 and BA2. In the second stage, all coil selectors 601A and 601B remain in a non-conductive state, and all switches 702G in the short-circuit circuits 704A and 704B remain in a non-conductive state.

[0084] Furthermore, in the second phase, control circuits 710A and 710B maintain the activation of first brake signals BA1 and BB1, while second brake signals BA2 and BB2 are activated. Consequently, in short-circuit circuits 704A and 704B, switch 702G remains non-conductive, switch 702S-1 remains conductive, and switch 702S-2 transitions to and remains conductive.

[0085] Here, the resistance of external resistor 703-2 is set to Ro2. In the second stage, the current Iea' flowing through coil 505A of phase A facing magnet assembly 504 and the current Ieb' flowing through coil 505B of phase B facing magnet assembly 504 are given by equations (1') and (2'). The dynamic braking action based on these currents Iea' and Ieb' acts on stage 502, and the braking force acts on stage 502.

[0086] Iea'=Ea / (R+1 / (1 / Ro2+1 / Ro1))…(1')

[0087] Ieb'=Eb / (R+1 / (1 / Ro2+1 / Ro1))…(2')

[0088] Since 1 / (1 / Ro2+1 / Ro1) in equations (1') and (2') is smaller than Ro1 in equations (1) and (2), the current value increases, and a large braking force acts on the carrier 502. That is, in the first stage, the power braking is applied to the carrier 502 with a relatively weak braking force to prevent damage to the carrier 502. Thereafter, in the second stage after a predetermined delay time, the power braking is applied to the carrier 502 with a relatively strong braking force to shorten the braking distance of the carrier 502. However, depending on the application and purpose, the opposite may be true, and the power braking may be applied to the carrier 502 with a relatively strong braking force, and then applied to the carrier 502 with a relatively weak braking force after a predetermined delay time.

[0089] Reference Figure 4 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 8A 、 Figure 8B 、 Figure 9A 、 Figure 9B 、 Figure 10A 、 Figure 10B The mounting table device and the motor according to the second embodiment will be described. Matters not mentioned in the second embodiment can be handled in accordance with the above description. Figure 4 It is a perspective view of the stage device ST. Figure 5 It is from Figure 4 A perspective view of the stage device ST with some components removed. Figure 6 804. The coil assembly (stator) 805 and the magnet assembly (motor) 804 constitute an electric motor, and in this example, a linear motor.

[0090] In the second embodiment, the magnet assembly 804 is divided into two magnet assemblies 8041 and 8042. The magnet assemblies 8041 and 8042 can have the same Figures 17 to 22 The magnet assembly 504 shown in FIG. The magnet assemblies 5041 and 5042 can be coupled to the mounting platform 502 via the arm 503. In the second embodiment, a braking force is applied to the magnet assembly 8041 in response to activation of the first braking signal, and a braking force is applied to the magnet assembly 8042 in response to activation of the second braking signal after a predetermined delay time has elapsed from activation of the first braking signal.

[0091] The yaw guide 501 can be fixed on both sides of the base 500. The mounting platform 502 can be supported by the upper surface of the base 500 and the side surfaces of the two yaw guides 501 via a pneumatic slider not shown in the figure so as to be able to slide freely. Two arms 503 are fixed to the mounting platform 502, and magnet assemblies 8041 and 8402 constituting the mover are fixed to the front ends of the two arms 503. The magnet assemblies 8041 and 8042 face the coil assembly 805 in a non-contact manner in such a manner as to surround the coil assembly 805 serving as the stator. The coil assembly 805 can be fixed to the coil support structure 506. The coil support structure 506 can include a pillar 506-1 and a platform 506-2.

[0092] The magnet assembly 8041 can include an upper yoke 8041-1U, two spacers 8041-2, an upper magnet array 8041-3U, a lower magnet array 8041-3L (not shown), and a lower yoke 8041-1L. Figure 20Similarly to the structure of , it can include two upward-magnetizing magnets 504-3VU, two downward-magnetizing magnets 504-3VL, two Y+-magnetizing magnets 504-3YP, and three Y--magnetizing magnets 504-3YM. The upper magnet array 8041-3U is fixed to the upper yoke 8041-1U and can form a Halbach array magnet array that produces a substantially sinusoidal magnetic flux density distribution. The lower magnet array 8041-3L is fixed to the lower yoke 8041-1L and can form a Halbach array magnet array similar to the upper magnet array 8041-3U. The upper magnet array 8041-3U can be understood as the first magnet array that generates thrust based on the magnetic field generated by the first coil selected from the plurality of first coils 505A-1. The lower magnet array 8041-3L can be understood as the third magnet array that generates thrust based on the magnetic field generated by the first coil selected from the plurality of first coils 505A-1.

[0093] Magnet assembly 8042 can have the same structure as magnet assembly 8041. Magnet assembly 8042 can include an upper yoke 8042-1U, two spacers 8042-2, an upper magnet array 8042-3U, a lower magnet array 8042-3L (not shown), and a lower yoke 8042-1L. Upper magnet array 8042-3U can be understood as a second magnet array that generates thrust based on the magnetic field generated by a second coil selected from the plurality of second coils 505A-2. Lower magnet array 8042-3L can be understood as a fourth magnet array that generates thrust based on the magnetic field generated by a second coil selected from the plurality of second coils 505A-2.

[0094] The coil assembly 505 can include 11 flat, oblong coils 505-C and a coil support member 505-S that supports them. The flat, oblong coils 505-C can be secured to the coil support member 505-S by adhesive or other methods. In layer A, it can be understood that the plurality of first coils 505A-1 are arranged between the first end (the end in the -Y direction) and the second end (the end in the +Y direction) of the coil assembly, and the plurality of second coils 505A-2 are arranged between the plurality of first coils and the second end. Similarly, in layer B, it can be understood that the plurality of first coils 505B-1 are arranged between the first end (the end in the -Y direction) and the second end (the end in the +Y direction) of the coil assembly, and the plurality of second coils 505B-2 are arranged between the plurality of first coils and the second end. The upper magnet array 8041-3U (first magnet array) and the lower magnet array 8041-3L (third magnet array) are arranged so as to face each other across the coil assembly 505. Alternatively, the upper magnet array 8042 - 3U (second magnet array) and the lower magnet array 8042 - 3L (fourth magnet array) may be arranged to face each other with the coil assembly 505 interposed therebetween.

[0095] exist Figure 78041-1U, 8042-1U are removed to show the magnet assemblies 8041, 8042 and the coil assembly 505. The coil shown in white is the coil 505A of the A-phase coil group, and the coil shown in gray is the coil 505B of the B-phase coil group.

[0096] exist Figure 8A In the figure, coil 505A of the A-phase coil group is shown together with drivers 800A-1 and 800A-2, coil selectors 801A-1 and 801A-2, short-circuit circuits 804A-1 and 804A-2, and control circuits 810A-1 and 805A-2. Here, the plurality of coils 505A constituting the A-phase coil group includes a plurality of first coils 505A-1 and a plurality of second coils 505A-2. Driver 800A-1, coil selector 801A-1, short-circuit circuit 804A-1, and control circuit 810A-1 constitute the first system of the A-phase associated with the plurality of first coils 505A-1. Driver 800A-2, coil selector 801A-2, short-circuit circuit 804A-2, and control circuit 810A-2 constitute the second system of the A-phase associated with the plurality of first coils 505A-2.

[0097] exist Figure 8B In the figure, coil 505B of the B-phase coil group is shown together with drivers 800B-1 and 800B-2, coil selectors 801B-1 and 801B-2, short-circuit circuits 804B-1 and 804B-2, and control circuits 605B-1 and 605B-2. Here, the plurality of coils 505B that constitute the B-phase coil group include a plurality of second coils 505B-1 and a plurality of second coils 505B-2. Driver 800B-1, coil selector 801B-1, short-circuit circuit 804B-1, and control circuit 810B-1 constitute the first B-phase system associated with the plurality of first coils 505B-1. Driver 800B-2, coil selector 801B-2, short-circuit circuit 804B-2, and control circuit 810B-2 constitute the second B-phase system associated with the plurality of first coils 505B-2.

[0098] In the first system of phase A, the driver 800A-1 is connected to each coil 505A-1 of the coil group of the first system of phase A via the coil selector 801A-1. In the second system of phase A, the driver 800A-2 is connected to each coil 505A-2 of the coil group of the second system of phase A via the coil selector 801A-2. The coil selectors 801A-1 and 801A-2 control the connection between only the coils facing the magnet assemblies 8041 and 8042 and the drivers 800A-1 and 800A-2, while the other coils are disconnected from the drivers 800A-1 and 800A-2. Of the two terminals of each coil 505A-1 of the first system, the terminal on the opposite side of the coil selector 801A-1 is connected to one end of a switch 802G-1 for connecting to a common ground and a switch 802S-1 for short-circuiting each coil 505A-1. The other end of switch 802S-1 is connected to coil selector 801A-1 via external resistor 803-1. Similarly, of the two terminals of each coil 505A-2 in the second system, the terminal opposite to coil selector 801A-2 is connected to a switch 802G-2 for connecting to a common ground and one end of a switch 802S-2 for short-circuiting each coil 505A-2. The other end of switch 802S-2 is connected to coil selector 801A-2 via external resistor 803-2.

[0099] Specifically, the first short-circuit circuit 804A-1 of the A-phase system includes an external resistor (first resistor) 803-1 and a switch (first switch) 802S-1, arranged in a path connecting the two terminals of the coil 505A-1, serving as a first dynamic braking circuit. Furthermore, the second short-circuit circuit 804A of the A-phase system includes an external resistor (second resistor) 803-2 and a switch (second switch) 802S-2, arranged in a path connecting the two terminals of the coil 505A-2, serving as a second dynamic braking circuit. These dynamic braking circuits generate a braking force for braking the mounting platform 502 (or, in another view, the magnet assembly 504 serving as the mover).

[0100] The structure of the B phase is the same. In the first system of the B phase, the driver 800B-1 is connected to each coil 505B-1 of the coil group of the first system of the B phase via the coil selector 801B-1. In the second system of the B phase, the driver 800B-2 is connected to each coil 505B-2 of the coil group of the second system of the B phase via the coil selector 801B-2. The coil selectors 801B-1 and 801B-2 control so that only the coils facing the magnet assemblies 8041 and 8042 are connected to the drivers 800B-1 and 800B-2, and the other coils are disconnected from the drivers 800B-1 and 800B-2. Of the two terminals of each coil 505B-1 of the first system, the terminal on the opposite side of the coil selector 801B-1 is connected to a switch 802G-1 for connecting to a common ground and one end of a switch 802S-1 for short-circuiting each coil 505B-1. The other end of switch 802S-1 is connected to coil selector 801B-1 via external resistor 803-1. Similarly, of the two terminals of each coil 505B-2 in the second system, the terminal opposite to coil selector 801B-2 is connected to a switch 802G-2 for connecting to a common ground and one end of a switch 802S-2 for short-circuiting each coil 505B-2. The other end of switch 802S-2 is connected to coil selector 801B-2 via external resistor 803-2.

[0101] That is, the first short-circuit circuit 804B-1 of the B-phase system includes an external resistor (first resistor) 803-1 and a switch (first switch) 802S-1, arranged in a path connecting the two terminals of coil 505B-1, as a first dynamic braking circuit. Furthermore, the second short-circuit circuit 804B of the B-phase system includes an external resistor (second resistor) 803-2 and a switch (second switch) 802S-2, arranged in a path connecting the two terminals of coil 505B-2, as a second dynamic braking circuit. These dynamic braking circuits generate a braking force for braking the mounting platform 502 (or, in another view, the magnet assembly 504 serving as the mover).

[0102] The control circuit 810A of phase A controls the operation of the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2). The control circuit 810A activates the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2) at different times. The control circuit 810A may include a first generating circuit 805A that generates a first braking signal BA1 that activates the first dynamic braking circuit and a second generating circuit 806A that generates a second braking signal BA2 that activates the second dynamic braking circuit. The second generating circuit 806A may include a delay device that generates the second braking signal BA2 by delaying the first braking signal BA1. The delay device may be composed of, for example, an analog circuit including a CR integrator, or may be composed of a counter including an FPGA or the like. The delay time of the delay device may be set to, for example, several milliseconds.

[0103] Alternatively, the control circuit 810A may include a generating circuit for generating a first signal and a delay device for generating a second signal that is a delayed version of the first signal. In this case, the control circuit 810A may activate the first brake signal BA1 for activating the first dynamic brake circuit in response to activation of the first signal, and activate the second brake signal BA2 for activating the second dynamic brake circuit in response to activation of the second signal.

[0104] The control circuit 810B of the B phase controls the operation of the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2). The control circuit 810B activates the first dynamic braking circuit (803-1, 802S-1) and the second dynamic braking circuit (803-2, 802S-2) at different times. The control circuit 810B may include a first generating circuit 805B that generates a first braking signal BB1 that activates the first dynamic braking circuit and a second generating circuit 806B that generates a second braking signal BB2 that activates the second dynamic braking circuit. The second generating circuit 806B may include a delay device that generates the second braking signal BB2 by delaying the first braking signal BB1. The delay device may be composed of an analog circuit including a CR integrator, or may be composed of a counter including an FPGA, etc. The delay time of the delay device may be set to, for example, several milliseconds.

[0105] Alternatively, the control circuit 810B may include a generating circuit for generating a first signal and a delay device for generating a second signal that is a delayed version of the first signal. In this case, the control circuit 810B may activate the first brake signal BB1 for activating the first dynamic brake circuit in response to activation of the first signal, and activate the second brake signal BB2 for activating the second dynamic brake circuit in response to activation of the second signal.

[0106] exist Figure 8A 、 Figure 8B Schematically illustrates the state of the motor during normal operation, in other words, the operation of driving the mounting table 502 (magnet assemblies 8041 and 8042) by the motor (linear motor). During normal operation, the drivers 800A-1, 800A-2, 800B-1, and 800B-2 are connected only to the coils facing the magnet assemblies 8041 and 8042 via the coil selectors 801A-1, 801A-2, 801B-1, and 801B-2. Furthermore, the control circuits 810A and 810B maintain the brake signals BA1, BA2, BB1, and BB2 in an inactive state. Furthermore, during normal operation, in the short-circuit circuits 804A-1, 804A-2, 804B-1, and 804B-2, all switches 802G-1 and 802G-2 are set to an on state, and all switches 802S-1 and 802S-2 are set to a non-conductive state.

[0107] exist Figure 9A 、 Figure 9B The figure schematically illustrates the state of the motor in the first stage of an emergency stop, in other words, the operation of urgently stopping the mounting table 502 (magnet assemblies 8041 and 8042) driven by the motor (linear motor). In the first stage, all coil selectors 801A-1, 801A-2, 801B-1, and 801B-2 are set to a non-conductive state. Furthermore, in the first stage, all switches 802G-1 and 802G-2 in the short-circuit circuits 804A-1, 804A-2, 804B-1, and 804B-2 are set to a non-conductive state.

[0108] Furthermore, during the first phase, control circuits 810A and 810B activate first brake signals BA1 and BB1, while second brake signals BA2 and BB2 remain inactive. Consequently, in short-circuit circuits 804A-1 and 804B-1, switch 802G-1 remains non-conductive, switch 802S-1 transitions to and remains conductive, and switch 802S-2 remains non-conductive. Consequently, dynamic braking force is applied to stage 502 using first-system coil 505A-1 for phase A and first-system coil 505B-1 for phase B.

[0109] exist Figure 10A 、 Figure 10BThe figure schematically illustrates the state of the motor in the second stage during an emergency stop. The transition from the first stage to the second stage is caused by the activation of the second brake signals BB1 and BB2 after a predetermined delay time has elapsed from the activation of the first brake signals BA1 and BA2. In the second stage, all coil selectors 801A-1, 801A-2, 801B-1, and 801B-2 remain in a non-conductive state. Furthermore, in the second stage, all switches 802G-1 and 802G-2 in the short-circuit circuits 804A-1, 804A-2, 804B-1, and 804B-2 remain in a non-conductive state.

[0110] Furthermore, in the second phase, control circuits 810A and 810B maintain the activation of first brake signals BA1 and BB1, while first brake signals BA2 and BB2 are activated. Consequently, in short-circuit circuits 804A-1, 804A-2, 804B-1, and 804B-2, switches 802G-1 and 802G-2 remain non-conductive, switch 802S-1 remains conductive, and switch 802S-2 transitions to and remains conductive.

[0111] In the second embodiment, the first system applies a power brake with a relatively weak braking force to the mounting platform 502 to prevent damage to the mounting platform 502. Thereafter, after a predetermined delay time, the first and second systems apply a power brake with a relatively strong braking force to the mounting platform 502 to shorten the braking distance of the mounting platform 502.

[0112] Reference Figure 11 、 Figure 12 、 Figure 13 、 Figure 26A 、 Figure 26B The mounting table device and the motor according to the third embodiment will be described. Matters not mentioned in the third embodiment can be handled in accordance with the above description. Figure 11 It is a perspective view of the stage device ST. Figure 12 It is from Figure 11 A perspective view of the stage device ST with some components removed. Figure 13 905 is a cross-sectional view showing a configuration example of a coil assembly (stator) 905 and a magnet assembly (mover) 904. The coil assembly (stator) 905 and the magnet assembly (mover) 904 constitute an electric motor, and in this example, constitute a linear motor.

[0113] In the third embodiment, the two magnet assemblies 8041 and 8042 in the motor of the second embodiment are combined to form a single magnet assembly 904. Therefore, the motor of the third embodiment is advantageous in reducing the size and mass of the mover and increasing the stroke.

[0114] The magnet assembly 904 includes an upper magnet array 904-3U and a lower magnet array 904-3L. The upper magnet array 904-3U can include four downward magnetized magnets 904-3VL, four Y+ magnetized magnets 904-3YP, and four Y- magnetized magnets 904-3YM. The upper magnet array 904-3U is fixed to the upper magnetic yoke 904-1U and can form a Halbach array magnet array that produces a substantially sinusoidal magnetic flux density distribution. The lower magnet array 904-3L is fixed to the lower magnetic yoke 904-1L and can form a Halbach array magnet array similar to the upper magnet array 904-3U.

[0115] The A-phase coil group includes a first-system coil group (multiple coils 801A-1) and a second-system coil group (multiple coils 801A-2), which can be arranged overlapping each other. The B-phase coil group includes a first-system coil group (multiple coils 801B-1) and a second-system coil group (multiple coils 801B-2), which can be arranged overlapping each other. When the coils 801A-1, 801B-1, 801A-2, 801B-2, etc. are repeatedly arranged in the order of coils 801A-1, 801B-1, 801A-2, 801B-2, etc., the distance between the three skipped coils is 6π in electrical angle, and the phases are the same. Therefore, the connections of the three skipped coils relative to the windings can be made the same. First, the dynamic braking circuits (first dynamic braking circuits) corresponding to the first-system of the A-phase (multiple coils 801A-1) and the first-system of the B-phase (multiple coils 801B-1) are activated. The dynamic braking circuits (second dynamic braking circuits) corresponding to the second system of phase A (coils 801A-2) and the second system of phase B (coils 801B-2) are then activated at different times. In other words, the control circuit activates the first and second dynamic braking circuits at different times.

[0116] The motor of the third embodiment includes a driver 800A, coil selectors 801A-1 and 801A-2, short-circuit circuits 804A-1 and 804A-2, and control circuits 810A-1 and 810A-2 for phase A. Furthermore, the motor of the third embodiment includes a driver 800B, coil selectors 801B-1 and 801B-2, short-circuit circuits 804B-1 and 804B-2, and control circuits 810B-1 and 810B-2 for phase B.

[0117] Reference Figure 14 and Figure 15 The fourth embodiment will be described. Matters not mentioned in the fourth embodiment can be followed in accordance with the second embodiment. Figure 14 It is a perspective view of the stage device ST. Figure 15 It is a top view of the stage device ST.

[0118] In the fourth embodiment, two sets of electric motors (linear motors) are provided. The first set of electric motors includes a first movable assembly 1004-1 and a first coil assembly 1005-1. The second set of electric motors includes a second movable assembly 1004-2 and a second coil assembly 1005-2. The first coil assembly 1005-1 can include a plurality of coils of the first system for the A phase and a plurality of coils of the first system for the B phase, and the second coil assembly 1005-2 can include a plurality of coils of the second system for the A phase and a plurality of coils of the second system for the B phase.

[0119] Although not shown, the motor of the fourth embodiment, like the second embodiment, includes drivers 800A-1 and 800A-2, coil selectors 801A-1 and 801A-2, short-circuit circuits 804A-1 and 804A-2, and control circuits 810A-1 and 805A-2 for phase A. Furthermore, the motor of the third embodiment, like the second embodiment, includes drivers 800B-1 and 800B-2, coil selectors 801B-1 and 801B-2, short-circuit circuits 804B-1 and 804B-2, and control circuits 810B-1 and 805B-2 for phase B.

[0120] Reference Figure 16 The fifth embodiment will be described. Matters not mentioned in the fifth embodiment can be handled in accordance with the second embodiment. In the fifth embodiment, the coil assembly comprises an upper coil assembly 1105-CU and a lower coil assembly 1105-CL, having a two-layer structure. One of the upper coil assembly 1105-CU and the lower coil assembly 1105-CL can include multiple coils of the first system for the A phase and multiple coils of the first system for the B phase, while the other can include multiple coils of the second system for the A phase and multiple coils of the second system for the B phase.

[0121] Although not shown, the motor of the fourth embodiment, like the second embodiment, includes drivers 800A-1 and 800A-2, coil selectors 801A-1 and 801A-2, short-circuit circuits 804A-1 and 804A-2, and control circuits 810A-1 and 805A-2 for phase A. Furthermore, the motor of the third embodiment, like the second embodiment, includes drivers 800B-1 and 800B-2, coil selectors 801B-1 and 801B-2, short-circuit circuits 804B-1 and 804B-2, and control circuits 810B-1 and 805B-2 for phase B.

[0122] The above-mentioned multiple embodiments can also be implemented by combining two or more of them. In the above example, the linear motor has a flat oblong coil, but the linear motor can also be constructed as a cylindrical linear motor with an annular coil arranged on the same axis. The electric motor is not limited to 2 phases, and can also be 3 phases or more. It should be noted that, in the case of 3 phases, the distance between the coils that are skipped 5 is 9π in electrical angle, and the phases are opposite to each other. Therefore, by making the connections of the coils that are skipped 5 relative to the winding opposite to each other, they can be treated as coils of the same phase in appearance. The first and second brake signals can also be changed to three or more brake signals with different activation timings. The electric motor can also be a rotary type.

[0123] Hereinafter, an embodiment of a photolithography apparatus will be described as an application example of the above-described motor or stage device. Figure 25 The structure of an exposure apparatus EXP, which is one embodiment of a lithography apparatus for transferring a pattern of a master plate R onto a substrate S, is shown. The exposure apparatus EXP can include a stage for holding the substrate S or the master plate, and the aforementioned motor configured to drive the stage. Alternatively, the exposure apparatus EXP can include the aforementioned stage device configured to hold and drive the substrate S or the master plate.

[0124] The exposure apparatus EXP can include, for example, an illumination optical system 10 for illuminating the original plate R and a projection optical system PO for projecting a pattern on the original plate R onto a substrate S. Furthermore, the exposure apparatus EXP can include a plate stage RS for holding the original plate R, a motor MR for driving the plate stage RS, a substrate stage SS for holding the substrate S, and a motor MS for driving the substrate stage SS. The plate stage RS and the motor MR can constitute a plate stage device for driving the original plate RS. The substrate stage SS and the motor MS can constitute a substrate stage device for driving the substrate S.

[0125] The article manufacturing method according to one embodiment may include a transfer step in which the pattern of the original plate R is transferred to a substrate S using the aforementioned photolithography apparatus; and a processing step in which the substrate S to which the pattern has been transferred is processed to obtain an article. Processing the substrate S may include etching the substrate S, for example.

[0126] The present invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the appended claims are intended to disclose the scope of the invention.

Claims

1. An electric motor, characterized in that: The electric motor comprises a magnet assembly and a coil assembly including a plurality of coils, wherein the electric motor comprises: a first dynamic brake circuit and a second dynamic brake circuit that generate a braking force by short-circuiting coils facing the magnet assembly among the plurality of coils; and a control circuit for controlling the operation of the first dynamic brake circuit and the second dynamic brake circuit, The control circuit activates the first dynamic brake circuit and the second dynamic brake circuit at different timings.

2. The electric motor according to claim 1, characterized in that The control circuit activates the second dynamic brake circuit at a timing delayed from activation of the first dynamic brake circuit.

3. The electric motor according to claim 1, characterized in that The first dynamic brake circuit includes a first resistor and a first switch disposed in a path connecting two terminals of one coil among the plurality of coils to each other. The second dynamic brake circuit includes a second resistor and a second switch which are arranged in a path connecting the two terminals to each other.

4. The electric motor according to claim 1, characterized in that The plurality of coils include a first coil and a second coil, The first dynamic brake circuit includes a first resistor and a first switch disposed in a path connecting two terminals of the first coil to each other. The second dynamic brake circuit includes a second resistor and a second switch which are arranged in a path connecting two terminals of the second coil to each other.

5. The electric motor according to claim 1, characterized in that The control circuit includes a first generating circuit for generating a first braking signal for activating the first dynamic braking circuit and a second generating circuit for generating a second braking signal for activating the second dynamic braking circuit. The second generating circuit includes a delay device that generates the second brake signal by delaying the first brake signal.

6. The electric motor according to claim 1, characterized in that The control circuit includes a generating circuit for generating a first signal and a delay device for generating a second signal obtained by delaying the first signal. The control circuit activates a first brake signal for activating the first dynamic brake circuit in response to activation of the first signal, and activates a second brake signal for activating the second dynamic brake circuit in response to activation of the second signal.

7. The electric motor according to claim 1, characterized in that The plurality of coils include a plurality of first coils and a plurality of second coils, The first dynamic brake circuit includes, for each of the plurality of first coils, a first resistor and a first switch disposed in a path connecting two terminals of the first coil to each other. The second dynamic brake circuit includes, for each of the plurality of second coils, a second resistor and a second switch disposed in a path connecting two terminals of the second coil to each other.

8. The electric motor according to claim 7, characterized in that The magnet assembly includes: a first magnet array generating thrust based on a magnetic field generated by a first coil selected from the plurality of first coils; and a second magnet array generating thrust based on a magnetic field generated by a second coil selected from the plurality of second coils.

9. The electric motor according to claim 8, characterized in that The plurality of first coils are arranged between a first end and a second end of the coil assembly, and the plurality of second coils are arranged between the plurality of first coils and the second end.

10. The electric motor according to claim 8, characterized in that The plurality of first coils and the plurality of second coils are arranged to overlap each other.

11. The electric motor according to claim 10, characterized in that The first magnet column and the second magnet column form a Halbach array.

12. The electric motor according to claim 11, characterized in that The magnet assembly includes: a third magnet column that generates a thrust based on a magnetic field generated by a first coil selected from the plurality of first coils; and a fourth magnet column that generates a thrust based on a magnetic field generated by a second coil selected from the plurality of second coils. The first magnet array and the third magnet array are arranged to face each other with the coil assembly interposed therebetween, and the second magnet array and the fourth magnet array are arranged to face each other with the coil assembly interposed therebetween.

13. A mounting table device, characterized in that: The mounting platform device comprises: a mounting platform; and The electric motor according to any one of claims 1 to 12 is configured to drive the mounting table.

14. A photolithography apparatus, characterized in that: The pattern of the original plate is transferred to the substrate, wherein the photolithography apparatus comprises: a mounting table for holding the substrate or the original plate; and The electric motor according to any one of claims 1 to 12 is configured to drive the mounting table.

15. A method for manufacturing an article, characterized in that: The method for manufacturing the item includes: a transfer step of transferring the pattern of the original plate to the substrate by using the photolithography apparatus according to claim 14; and The processing step is to obtain an article by processing the substrate to which the pattern is transferred.

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