Exposure machine with anti-vibration mechanism

Abstract

The invention relates to the field of exposure machines, in particular to an exposure machine with an anti-vibration mechanism. In the operation process of the exposure machine, vibration of a certain degree is inevitably generated due to complex operations such as rapid movement of internal precision mechanical parts, high-speed rotation of a motor and high-precision positioning of a workbench. Comprising an exposure host, the bottom surface of the exposure host is provided with a placing plate, the bottom surface of the placing plate is fixedly connected with a bottom plate, the bottom surface of the bottom plate is provided with an air pressure anti-vibration mechanism, the side surface of the air pressure anti-vibration mechanism is provided with a spring anti-vibration mechanism, the bottom surface is provided with a locking mechanism, and the locking mechanism comprises a transmission gear. One end of the lower anti-vibration connecting rod is rotationally connected to the outer side face of the lower connecting shaft, the other end of the lower anti-vibration connecting rod is rotationally connected to one end of the spring connecting block through a shaft, the upper anti-vibration connecting rod drives the lower anti-vibration connecting rod through the shaft to push the anti-vibration spring, and the anti-vibration spring generates elastic force due to extrusion and compression so as to offset downward force to buffer vibration generated by the exposure host.

Description

Technical Field

[0001] This invention relates to the field of exposure machines, and more particularly to an exposure machine with a vibration damping mechanism. Background Technology

[0002] An exposure machine is a device that uses a photochemical reaction to transfer images or create printing plates. It transfers image information from film or other transparent materials to a surface coated with a photosensitive material using light sources such as ultraviolet light or lasers. This equipment is widely used in semiconductors, microelectronics, bio-devices, and nanotechnology, and is also commonly used to make offset printing plates, screen printing plates, and other printing plates. The exposure machine supports constant light intensity or constant power modes and has advantages such as high precision, high stability, and long service life. With the continuous development of technology, exposure machines are also constantly being upgraded and improved to meet the needs of different fields and industries.

[0003] During operation, the exposure machine inevitably generates a certain degree of vibration due to the rapid movement of internal precision mechanical parts, the high-speed rotation of the motor, and the high-precision positioning of the worktable. When the exposure machine is transferring patterns, it needs to precisely align the photomask with the substrate. Vibration may cause slight deviations in the alignment system, thus affecting the alignment accuracy of the final pattern. Vibration can also cause the projection of the exposure light source onto the substrate to jitter, making the edges of the exposed pattern blurry and reducing the image quality. Summary of the Invention

[0004] In order to overcome the shortcomings of the exposure machine, which is prone to vibration interference during operation, thus affecting the accuracy of the exposure process, impacting image quality, and causing a decline in equipment performance, the present invention aims to provide an exposure machine with an anti-vibration mechanism.

[0005] To solve the above-mentioned technical problems, the present invention provides an exposure machine with a vibration damping mechanism, including an exposure host, a placement plate on the bottom surface of the exposure host, a base plate fixedly connected to the bottom surface of the placement plate, a pneumatic vibration damping mechanism on the bottom surface of the base plate, a spring vibration damping mechanism on the side of the pneumatic vibration damping mechanism, a locking mechanism inside the base plate, the locking mechanism including a transmission gear, a fixed shaft fixedly connected to the middle of the transmission gear, the fixed shaft passing through the transmission gear, one end of the fixed shaft being rotatably connected to the base plate, and a locking disc fixedly connected to the other end of the fixed shaft, with the locking disc below... Four L-shaped transmission rods are symmetrically connected to the surface via a rotating shaft. A T-shaped block is rotatably connected to the upper surface of the other end of each L-shaped transmission rod via a rotating shaft. A locking strip is fixedly connected to the upper surface of the T-shaped block. A transmission rack is meshed with the side of the transmission gear. A return spring is fixedly connected to one end of the transmission rack. The other end of the return spring is fixedly connected to the base plate via a fixing block. A sliding rod is rotatably connected to the other end of the transmission rack. The other end of the sliding rod passes through the side of the base plate and is fixedly connected to a handle. A locking block is fixedly connected to the outside of the sliding rod and between the handle and the transmission rack.

[0006] Preferably, the locking mechanism further includes a locking frame, which is fixedly connected to the outer side of the base plate. Sliding strips are symmetrically fixedly connected to two opposite inner sides of the locking frame. A sliding block is slidably connected inside the locking frame through the sliding strips. A groove is provided at the lower part of the sliding block, and the size of the groove matches the size of the locking block. A locking post is fixedly connected to the upper surface of the sliding block. The locking post is L-shaped and passes through the locking frame. A push spring is sleeved on the outside of the locking frame and inside the locking frame.

[0007] Preferably, the placement plate has a cross-shaped groove, the T-shaped block is slidably connected in the cross-shaped groove of the placement plate, and a rectangular groove is provided on the side of the bottom plate at the position through which the sliding rod passes, the size of the rectangular groove being the same as the size of the locking block.

[0008] Preferably, the pneumatic vibration damping mechanism includes a support plate, which is fixedly connected to the bottom surface of the base plate. A pneumatic rod is fixedly connected to the bottom surface of the support plate. A pneumatic cylinder is slidably connected to the end of the pneumatic rod away from the support plate. Two rectangular grooves are formed in the middle of the end of the pneumatic rod away from the support plate. Two grooves are symmetrically formed on opposite inner sides of the rectangular grooves. A buffer block is slidably connected in each groove. A buffer spring is fixedly connected between the buffer block and the groove. Two deceleration blocks are fixedly connected to the bottom surface inside the pneumatic cylinder. An inclined surface is formed at one end of the buffer block, and an inclined surface that cooperates with the buffer block is formed at the upper end of the deceleration block.

[0009] Preferably, the pneumatic cylinder has two air chambers symmetrically opened on its inner side, and each air chamber has three sliding grooves on its side. The sliding grooves connect the air chambers to the inside of the pneumatic cylinder. Multiple extrusion pins are slidably connected in each sliding groove. Limiting grooves are symmetrically opened on the inner wall of each sliding groove inside the pneumatic cylinder. Limiting sliders are symmetrically fixedly connected to the upper and lower sides of the extrusion pins. Limiting springs are fixedly connected to the two limiting sliders and the inner wall of the limiting groove.

[0010] Preferably, the end of the extrusion pin near the air chamber is fixedly connected to an extrusion connecting plate, and the other end of the extrusion pin is hemispherical.

[0011] Preferably, a pneumatic connecting block is fixedly connected to the end of the pneumatic cylinder away from the pneumatic rod, and a base is fixedly connected to the end of the pneumatic connecting block away from the pneumatic cylinder.

[0012] Preferably, the spring anti-vibration mechanism is symmetrically arranged on both sides of the pneumatic cylinder. The spring anti-vibration mechanism includes a lower connecting rod connecting block. Two lower connecting rod connecting blocks are symmetrically arranged on the upper surface of the base and on both sides of the pneumatic connecting block. The two lower connecting rod connecting blocks are fixedly connected to a lower connecting shaft on opposite sides. Two lower anti-vibration connecting rods are symmetrically rotatably connected to the outer side of the lower connecting shaft. One end of the lower anti-vibration connecting rod is rotatably connected to a spring connecting block via a rotating shaft. Two upper connecting rod connecting blocks are symmetrically arranged on the lower side of the support plate. An upper connecting shaft is fixedly connected to the opposite side of the upper connecting rod connecting blocks. An upper anti-vibration connecting rod is symmetrically rotatably connected to the outer side of the upper connecting shaft. The other end of the upper anti-vibration connecting rod is rotatably connected to the side of the spring connecting block via a rotating shaft.

[0013] Preferably, two anti-vibration brackets are symmetrically fixedly connected to the two sides of the pneumatic cylinder. A spring support is fixedly connected to the inner side of the anti-vibration bracket. The middle part of the spring connecting block is slidably connected to the outer side of the spring support. A spring limiting block is fixedly connected to the other end of the spring support. An anti-vibration spring is fixedly connected to the inner side of the anti-vibration bracket at the end of the spring connecting block away from the spring limiting block.

[0014] Preferably, each of the four base surfaces is provided with a rubber pad.

[0015] Compared with the prior art, the present invention has the following advantages: 1. By setting a locking mechanism to clamp the exposure host onto the base plate, displacement of the exposure host due to its own vibration during operation can be effectively prevented, thereby ensuring the exposure efficiency of the exposure host. 2. Through the spring anti-vibration mechanism, the support plate drives the upper connecting shaft to move downward through the upper connecting rod connecting block. The upper connecting shaft pushes the spring connecting block to slide through the upper anti-vibration connecting rod. One end of the lower anti-vibration connecting rod is rotatably connected to the outer side of the lower connecting shaft, and the other end is rotatably connected to one end of the spring connecting block through the shaft. The upper anti-vibration connecting rod drives the lower anti-vibration connecting rod to push the anti-vibration spring through the shaft. The anti-vibration spring generates elastic force due to being squeezed and compressed, thereby offsetting the downward force and buffering the vibration generated by the exposure host. 3. Through the pneumatic vibration damping mechanism, the support plate pushes the pneumatic rod to slide continuously downward in the pneumatic cylinder until it pushes the extrusion pin to slide into the air chamber. The extrusion pin drives the limit slider to slide and compress the limit spring. At this time, the gas in the air chamber is squeezed and generates pressure to push the extrusion pin outward. The extrusion pin is pushed outward by the gas in the air chamber, so that the air pressure in the pneumatic cylinder remains constant, thereby lifting the pneumatic rod. When the exposure host vibrates too much, the upper extrusion pin is pushed into the air chamber by the pneumatic rod. At this time, the pneumatic rod continues to slide downward and pushes the middle extrusion pin into the air chamber. The pneumatic rod continues to slide downward and contacts the lower extrusion pin, thereby further offsetting the vibration of the exposure host. Attached Figure Description

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the placement plate mechanism of the present invention; Figure 3 This is a schematic diagram of the overall structure of the locking mechanism of the present invention; Figure 4 This is a partial structural diagram of the locking mechanism of the present invention; Figure 5 This is a schematic diagram of the spring vibration damping mechanism of the present invention; Figure 6 This is a partial structural diagram of the spring vibration damping mechanism of the present invention; Figure 7 This is a schematic diagram of the overall structure of the pneumatic vibration damping mechanism of the present invention; Figure 8 This is a cross-sectional view of the pneumatic rod of the present invention; Figure 9 This is a cross-sectional view of the pneumatic cylinder of the present invention; Figure 10 For the present invention Figure 9 Enlarged view of point A in the middle.

[0017] The labels in the attached diagram are as follows: 1-Exposure host, 2-Spring vibration damping mechanism, 201-Vibration damping bracket, 202-Vibration damping spring, 203-Spring connecting block, 204-Spring support column, 205-Spring limiting block, 206-Upper connecting shaft, 207-Upper connecting rod connecting block, 208-Upper vibration damping connecting rod, 209-Lower vibration damping connecting rod, 210-Lower connecting rod connecting block, 211-Lower connecting shaft, 3-Pneumatic vibration damping mechanism, 301-Support plate, 302-Pneumatic rod, 303-Pneumatic cylinder, 304-Pneumatic connecting block, 305-Base, 306-Rubber pad, 307 - Buffer spring, 308-Buffer block, 309-Deceleration block, 310-Extrusion pin, 311-Limit slider, 312-Limit spring, 313-Extrusion connecting plate, 4-Base plate, 5-Placement plate, 6-Locking mechanism, 601-Locking strip, 602-L-shaped transmission rod, 603-Transmission rack, 604-Sliding rod, 605-Transmission gear, 606-Reset spring, 607-Handle, 608-Locking frame, 609-Locking block, 610-Sliding block, 611-Locking post, 612-Fixed shaft, 613-Locking disc, 614-T-shaped block. Detailed Implementation

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] Example 1: An exposure machine with a vibration damping mechanism, such as Figure 1-Figure 4As shown, the device includes an exposure host 1. A placement plate 5 is provided on the bottom surface of the exposure host 1. The placement plate 5 is concave to prevent the exposure host 1 from being damaged. A base plate 4 is fixedly connected to the bottom surface of the placement plate 5. The base plate 4 is also concave. A pneumatic vibration damping mechanism 3 is provided on the bottom surface of the base plate 4. A spring vibration damping mechanism 2 is provided on the side of the pneumatic vibration damping mechanism 3. A locking mechanism 6 is provided inside the concave shape of the base plate 4. The locking mechanism 6 includes a transmission gear 605. A fixed shaft 612 is fixedly connected to the middle of the transmission gear 605. The fixed shaft 612 passes through the transmission gear 605. One end of the fixed shaft 612 is rotatably connected to the base plate 4, and the other end of the fixed shaft 612 is fixedly connected to a locking disc 613. Four L-shaped transmission rods 602 are symmetrically rotatably connected to the lower surface of the locking disc 613 via a rotating shaft. The upper surface of the other end of the L-shaped transmission rods 602 is open to the ground. A T-shaped block 614 is rotatably connected via a pivot. A locking strip 601 is fixedly connected to the upper surface of the T-shaped block 614. Anti-slip pads are provided on the sides of the four locking strips 601 to better clamp the exposure host 1. A transmission rack 603 is meshed with the side of the transmission gear 605. A return spring 606 is fixedly connected to one end of the transmission rack 603. The other end of the return spring 606 is fixedly connected to the base plate 4 via a fixing block. A limit groove is opened at the other end of the transmission rack 603. A sliding rod 604 is rotatably connected in the limit groove. The other end of the sliding rod 604 passes through the side of the base plate 4 and a handle 607 is fixedly connected to the end. A locking block 609 is fixedly connected to the outside of the sliding rod 604 and between the handle 607 and the transmission rack 603. The locking block 609 is rectangular.

[0020] like Figure 4 As shown, the locking mechanism 6 also includes a locking frame 608, which is fixedly connected to the outer side of the base plate 4. Sliding strips are symmetrically fixedly connected to two opposite inner sides of the locking frame 608. A sliding block 610 is slidably connected inside the locking frame 608 through the sliding strips. A groove is provided at the lower part of the sliding block 610. The size of the groove matches the size of the locking block 609. When the locking block 609 is rotated to the vertical position, the upper plate of the locking block 609 can slide into the groove at the lower part of the sliding block 610. A locking post 611 is fixedly connected to the upper surface of the sliding block 610. The locking post 611 is L-shaped and passes through the locking frame 608. A push spring is sleeved on the outside of the locking frame 608 and inside the locking frame 608.

[0021] like Figure 2 As shown, a cross-shaped groove is provided on the placement plate 5, and the T-shaped block 614 is slidably connected in the cross-shaped groove provided on the placement plate 5. A rectangular groove is provided at the position through which the sliding rod 604 passes on the side of the base plate 4. The size of the rectangular groove is the same as the size of the locking block 609. When the locking block 609 slides laterally, it can slide out from the rectangular groove on the side of the base plate 4.

[0022] like Figure 7-10As shown, the pneumatic vibration damping mechanism 3 includes a support plate 301, which is fixedly connected to the bottom surface of the base plate 4. A pneumatic rod 302 is fixedly connected to the bottom surface of the support plate 301. A pneumatic cylinder 303 is slidably connected to the end of the pneumatic rod 302 away from the support plate 301. Two rectangular grooves are opened in the middle of the end of the pneumatic rod 302 away from the support plate 301. Two grooves are symmetrically opened on the inner side of the rectangular grooves. A buffer block 308 is slidably connected in each groove. A buffer spring 307 is fixedly connected between the buffer block 308 and the groove. Two deceleration blocks 309 are fixedly connected to the bottom surface inside the pneumatic cylinder 303. A slope is opened at one end of the buffer block 308. A slope that cooperates with the buffer block 308 is opened at the upper end of the deceleration block 309.

[0023] The pneumatic cylinder 303 has two air chambers symmetrically opened on its inner side. Each air chamber has three sliding grooves on its side, which connect the air chambers to the inside of the pneumatic cylinder 303. Multiple extrusion pins 310 are slidably connected in each sliding groove. Limiting grooves are symmetrically opened on the inner wall of each sliding groove inside the pneumatic cylinder 303. Limiting sliders 311 are symmetrically fixedly connected to the upper and lower sides of the extrusion pins 310. Limiting springs 312 are fixedly connected to the two limiting sliders 311 and the inner wall of the limiting groove.

[0024] The end of the extrusion pin 310 near the air chamber is fixedly connected to an extrusion connecting plate 313. The other end of the extrusion pin 310 is hemispherical. The end of the pneumatic cylinder 303 away from the pneumatic rod 302 is fixedly connected to a pneumatic connecting block 304. The end of the pneumatic connecting block 304 away from the pneumatic cylinder 303 is fixedly connected to a base 305.

[0025] like Figure 5 , Figure 6 As shown, spring anti-vibration mechanisms 2 are symmetrically arranged on both sides of the pneumatic cylinder 303. The spring anti-vibration mechanism 2 includes a lower connecting rod connecting block 210. Two lower connecting rod connecting blocks 210 are symmetrically arranged on the upper surface of the base 305 and on both sides of the pneumatic connecting block 304. The two lower connecting rod connecting blocks 210 are fixedly connected to the opposite sides of the lower connecting shaft 211. Two lower anti-vibration connecting rods 209 are symmetrically rotatably connected to the outer side of the lower connecting shaft 211. One end of the lower anti-vibration connecting rod 209 is rotatably connected to the spring connecting block 203 through a rotating shaft. Two upper connecting rod connecting blocks 207 are symmetrically arranged on the lower side of the support plate 301. The upper connecting rod connecting blocks 207 are fixedly connected to the opposite sides of the upper connecting shaft 206. The outer side of the upper connecting shaft 206 is symmetrically rotatably connected to the upper anti-vibration connecting rod 208. The other end of the upper anti-vibration connecting rod 208 is rotatably connected to the side of the spring connecting block 203 through a rotating shaft.

[0026] Two anti-vibration brackets 201 are symmetrically fixedly connected to the two sides of the pneumatic cylinder 303. A spring support column 204 is fixedly connected to the inner side of the anti-vibration bracket 201. The middle part of the spring connecting block 203 is slidably connected to the outer side of the spring support column 204. A spring limiting block 205 is fixedly connected to the other end of the spring support column 204. An anti-vibration spring 202 is fixedly connected to the inner side of the anti-vibration bracket 201 at the end of the spring connecting block 203 away from the spring limiting block 205.

[0027] Rubber pads 306 are provided on the bottom surface of all four bases 305.

[0028] Working principle: The exposure host 1 is placed on the base plate 4 and locked by the locking mechanism 6 to prevent the exposure host 1 from shifting due to its own vibration during operation, thereby affecting the exposure accuracy of the exposure host 1.

[0029] When locking the exposure host 1, first pull the handle 607 outward. The handle 607 drives the sliding rod 604 to move outward to the base plate 4. The movement of the sliding rod 604 drives the transmission rack 603 to move outward. At the same time, the transmission rack 603 stretches the reset spring 606. The movement of the transmission rack 603 causes the transmission gear 605 to rotate clockwise. The clockwise rotation of the transmission gear 605 drives the locking disc 613 to rotate clockwise through the fixed shaft 612. The clockwise rotation of the locking disc 613 drives one end of the four L-shaped transmission rods 602 to rotate clockwise. The other end of the four L-shaped transmission rods 602 drives the T-shaped block 614 to slide towards the center position in the cross-shaped groove opened in the placement plate 5. The sliding of the T-shaped block 614 drives the four locking bars 601 to slide synchronously towards each other, thereby clamping the exposure host 1.

[0030] When the sliding rod 604 moves outward from the base plate 4, it drives the locking block 609 through the rectangular groove on the outer side of the base plate 4. After the locking block 609 passes through the rectangular groove on the outer side of the base plate 4, it rotates the handle 607 ninety degrees. During the rotation of the handle 607, it pushes the sliding block 610 upward. The sliding block 610 slides upward in the locking frame 608 and compresses the push spring. After the sliding block 610 rotates ninety degrees, the sliding block 610 is locked into the groove at the bottom of the sliding block 610, thereby limiting the sliding block 610 and preventing it from rotating.

[0031] When it is necessary to release the exposure host 1 from the clamp, pull the locking pin 611 upward. The locking pin 611 drives the sliding block 610 to slide upward inside the locking frame 608 and compress the push spring, so that the sliding block 610 releases the locking block 609. In the opposite direction, rotate the handle 607 ninety degrees and push the handle 607 inward. Under the synchronous action of the reset spring 606, the transmission rack 603 slides into the base plate 4, and at the same time drives the transmission gear 605 to rotate counterclockwise. The counterclockwise rotation of the transmission gear 605 drives the locking plate 613 to rotate counterclockwise through the fixed shaft 612. The counterclockwise rotation of the locking plate 613 causes one end of the L-shaped transmission rod 602 to unfold outward of the locking plate 613. The other end of the L-shaped transmission rod 602 drives the four locking bars 601 to move outward through the T-shaped block 614, so that the locking mechanism 6 releases the clamp on the exposure host 1.

[0032] When the exposure host 1 vibrates during operation, the vibration is first buffered by the spring anti-vibration mechanism 2. The vibration generated by the exposure host 1 is transmitted to the support plate 301. Due to the pressure generated by the vibration of the exposure host 1, the support plate 301 moves downward. The support plate 301 drives the upper connecting rod connecting block 207 to move downward. The upper connecting rod connecting block 207 drives the upper connecting shaft 206 to move downward. One end of the upper anti-vibration connecting rod 208 is rotatably connected to the outer side of the upper connecting shaft 206. The upper connecting shaft 206 pushes the upper anti-vibration connecting rod 208 to move. The other end of 208 is rotatably connected to the side of the spring connecting block 203 via a shaft. The upper anti-vibration link 208 pushes the spring connecting block 203 to slide on the outer side of the spring support 204. One end of the lower anti-vibration link 209 is rotatably connected to the outer side of the lower connecting shaft 211, and the other end is rotatably connected to one end of the spring connecting block 203 via a shaft. The upper anti-vibration link 208 drives the lower anti-vibration link 209 to push the anti-vibration spring 202 via a rotating shaft. The anti-vibration spring 202 generates elastic force due to being squeezed and compressed, thereby offsetting the downward force and buffering the vibration generated by the exposure host 1.

[0033] The spring-loaded vibration damping mechanism 2 buffers vibrations while the pneumatic vibration damping mechanism 3 also buffers vibrations. Vibrations generated during the operation of the exposure host 1 are transmitted to the support plate 301, causing it to move downwards under pressure. The support plate 301 pushes the pneumatic rod 302 to slide downwards within the pneumatic cylinder 303 until it contacts the upper extrusion pin 310. At this point, the pneumatic rod 302 continues to slide downwards within the pneumatic cylinder 303, thus pushing the extrusion pin 310 into the air chamber. Limiting sliders 311 are symmetrically fixed to both sides of the extrusion pin 310, and a limiting spring 312 is fixedly connected to one end of each limiting slider 311. The extrusion pin 310 drives the limiting slider 311 to slide and compress the limiting spring 312. At this time, the gas in the air chamber is compressed, generating pressure that pushes the extrusion pin 310 outwards. The outward thrust of the gas in the air chamber keeps the air pressure in the pneumatic cylinder 303 constant, thus lifting the pneumatic rod 302 to achieve the effect of buffering vibration. When the exposure host 1 vibrates too much, the upper extrusion pin 310 is pushed into the air chamber by the pneumatic rod 302. If the vibration is not completely buffered at this time, it enters the secondary buffer. At this time, the pneumatic rod 302 continues to slide downward due to excessive vibration until it contacts the middle extrusion pin 310. The pneumatic rod 302 pushes the middle extrusion pin 310 to slide into the air chamber. The extrusion pin 310 buffers the downward sliding of the pneumatic rod 302 due to the air pressure. When the pneumatic rod 302 pushes the middle extrusion pin 310 into the air chamber but the vibration has not been eliminated, it enters the tertiary buffer. The pneumatic rod 302 continues to slide downward to contact the lower extrusion pin 310.

[0034] When the exposure host 1 vibrates violently, the pneumatic rod 302 moves downward continuously, pushing all the extrusion pins 310 into the air chamber. When the pneumatic rod 302 is about to reach the bottom of the pneumatic cylinder 303, the deceleration block 309 at the bottom of the pneumatic cylinder 303 inserts into the groove at the bottom of the pneumatic rod 302. The inclined surface at the upper end of the deceleration block 309 cooperates with the inclined surface on the side of the buffer block 308. The deceleration block 309 pushes the buffer block 308 to slide into the grooves on both sides. The buffer block 308 compresses the buffer spring 307. The compressed buffer spring 307 generates an outward elastic force to prevent the buffer block 308 from sliding inward. Thus, the cooperation between the buffer block 308 and the deceleration block 309 buffers the downward sliding of the pneumatic rod 302 in the pneumatic cylinder 303, thereby achieving the effect of vibration damping. After the vibration is eliminated, the support plate 301... When the exposure host 1 loses the downward pressure generated by vibration, the pneumatic rod 302 loses the downward pressure from the support plate 301. At this time, the pneumatic rod 302 is pushed upward by the air pressure in the pneumatic cylinder 303 and slides upward in the pneumatic cylinder 303. At this time, the deceleration block 309 and the buffer block 308 disengage and the deceleration block 309 disengages from the slide groove. The buffer spring 307 returns to its shape and pushes the buffer block 308 to slide in the slide groove until it returns to its original state. The pneumatic rod 302 continues to move upward to no longer contact the extrusion pin 310. At this time, the extrusion pin 310, which was pushed into the air chamber by the pneumatic rod 302, is reset by the pressure of the gas in the air chamber. The limiting slider 311 is fixedly connected to the side of the extrusion pin 310, and the limiting slider 311 is subjected to the elastic force generated by the compression of the limiting spring 312. The limiting slider 311 drives the extrusion pin 310 to reset.

[0035] The embodiments described above are merely preferred embodiments of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications, improvements, and substitutions without departing from the concept of the present invention, and these all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. An exposure machine with an anti-vibration mechanism, characterized in that: The invention comprises an exposure main machine (1), wherein a placement plate (5) is arranged on the bottom surface of the exposure main machine (1), wherein the bottom surface of the placement plate (5) is fixedly connected to a bottom plate (4), wherein a pneumatic anti-vibration mechanism (3) is arranged on the bottom surface of the bottom plate (4), wherein a spring anti-vibration mechanism (2) is arranged on the side of the pneumatic anti-vibration mechanism (3), wherein a locking mechanism (6) is arranged inside the bottom plate (4), wherein the locking mechanism (6) comprises a transmission gear (605), wherein a fixed shaft (612) is fixedly connected to the middle of the transmission gear (605), wherein the fixed shaft (612) passes through the transmission gear (605), wherein one end of the fixed shaft (612) is rotationally connected to the bottom plate (4), wherein the other end of the fixed shaft (612) is fixedly connected to a locking disk (613), wherein the lower surface of the locking disk (613) is symmetrically rotationally connected to four L-shaped transmission rods (605) via a rotation axis. 2), the upper surface of the other end of the L-shaped transmission rod (602) is rotatably connected to a T-shaped block (614) via a rotating shaft, the upper surface of the T-shaped block (614) is fixedly connected to a locking strip (601), the side of the transmission gear (605) is meshingly connected to a transmission rack (603), one end of the transmission rack (603) is fixedly connected to a return spring (606), the other end of the return spring (606) is fixedly connected to the bottom plate (4) via a fixed block, the other end of the transmission rack (603) is rotatably connected to a sliding rod (604), the other end of the sliding rod (604) passes through the side of the bottom plate (4) and the end thereof is fixedly connected to a handle (607), and a locking block (609) is fixedly connected to the outside of the sliding rod (604) and located between the handle (607) and the transmission rack (603).

2. The exposure machine with an anti-vibration mechanism according to claim 1, characterized in that: The locking mechanism (6) also includes a locking frame (608), the locking frame (608) is fixedly connected to the outer side surface of the base plate (4), and two opposite inner side surfaces of the locking frame (608) are symmetrically fixedly connected with sliding bars. A sliding block (610) is slidably connected to the inside of the locking frame (608) through the sliding bar. A sliding groove is opened at the lower part of the sliding block (610), and the size of the sliding groove matches the size of the locking block (609). A locking column (611) is fixedly connected to the upper surface of the sliding block (610), and the locking column (611) is L-shaped. The locking column (611) passes through the locking frame (608), and a push spring is sleeved on the outside of the locking frame (608) and located inside the locking frame (608).

3. The exposure machine with an anti-vibration mechanism according to claim 2, characterized in that: The placement plate (5) is provided with a cross-shaped slide groove, and the T-shaped block (614) is slidably connected in the cross-shaped slide groove provided in the placement plate (5). The side of the bottom plate (4) is provided with a rectangular slide groove at the position where the sliding rod (604) passes through, and the size of the rectangular slide groove is consistent with the size of the locking block (609).

4. The exposure machine with an anti-vibration mechanism according to claim 3, characterized in that: The pneumatic anti-vibration mechanism (3) comprises a support plate (301), the support plate (301) is fixedly connected to the bottom surface of the base plate (4), the bottom surface of the support plate (301) is fixedly connected to a pneumatic rod (302), one end of the pneumatic rod (302) away from the support plate (301) is sealingly and slidably connected to a pneumatic cylinder (303), two rectangular slide grooves are provided in the middle of one end of the pneumatic rod (302) away from the support plate (301), two slide grooves are symmetrically provided on the inner side of the rectangular slide groove, and buffer blocks (308) are slidably connected in the slide grooves, a buffer spring (307) is fixedly connected between the buffer block (308) and the slide groove, and two speed reduction blocks (309) are fixedly connected to the bottom surface of the inside of the pneumatic cylinder (303), one end of the buffer block (308) is provided with an inclined surface, and the upper end of the speed reduction block (309) is provided with an inclined surface matching the buffer block (308).

5. The exposure machine with an anti-vibration mechanism according to claim 4, characterized in that: Two air chambers are symmetrically provided on the inner side of the pneumatic cylinder (303), and three slide grooves are provided on the inner side of each air chamber. The slide grooves connect the air chambers and the inside of the pneumatic cylinder (303), and a plurality of extrusion pins (310) are slidably connected in the slide grooves. The inner walls of the slide grooves provided in the pneumatic cylinder (303) are symmetrically provided with limit grooves, and the upper and lower sides of the extrusion pins (310) are symmetrically fixedly connected to limit sliders (311), and the two limit sliders (311) and the inner side walls of the limit grooves are fixedly connected to limit springs (312).

6. The exposure machine with an anti-vibration mechanism according to claim 5, characterized in that: An extrusion connection plate (313) is fixedly connected to one end of the extrusion pin (310) close to the air chamber, and the other end of the extrusion pin (310) is hemispherical.

7. The exposure machine with an anti-vibration mechanism according to claim 6, characterized in that: One end of the pneumatic cylinder (303) away from the pneumatic rod (302) is fixedly connected to a pneumatic connection block (304), and one end of the pneumatic connection block (304) away from the pneumatic cylinder (303) is fixedly connected to a base (305).

8. The exposure machine with an anti-vibration mechanism according to claim 7, characterized in that: The spring anti-vibration mechanism (2) is symmetrically arranged on both sides of the pneumatic cylinder (303), and the spring anti-vibration mechanism (2) includes a lower connecting rod connection block (210). Two lower connecting rod connection blocks (210) are symmetrically arranged on the upper surface of the base (305) and located on both sides of the pneumatic connection block (304). The two lower connecting rod connection blocks (210) are fixedly connected to the opposite sides with lower connecting shafts (211), and the outer side of the lower connecting shaft (211) is symmetrically rotatably connected to two lower anti-vibration connecting rods (209). ), one end of the lower anti-vibration connecting rod (209) is rotatably connected to a spring connecting block (203) via a rotating shaft, two upper connecting rod connecting blocks (207) are symmetrically arranged on the lower side surface of the support plate (301), the upper connecting shaft (206) is fixedly connected to the opposite side surface of the upper connecting rod connecting block (207), the outer side surface of the upper connecting shaft (206) is symmetrically rotatably connected to an upper anti-vibration connecting rod (208), and the other end of the upper anti-vibration connecting rod (208) is rotatably connected to the side surface of the spring connecting block (203) via a rotating shaft.

9. The exposure machine with an anti-vibration mechanism according to claim 8, characterized in that: Two anti-vibration brackets (201) are symmetrically fixedly connected to two side surfaces of the pneumatic cylinder (303); a spring support (204) is fixedly connected to the inner side of the anti-vibration bracket (201); a middle portion of the spring connecting block (203) is slidably connected to the outer side surface of the spring support (204); a spring limiting block (205) is fixedly connected to the other end of the spring support (204); and an anti-vibration spring (202) is fixedly connected to the inner side of the anti-vibration bracket (201) at one end of the spring connecting block (203) away from the spring limiting block (205).

10. The exposure machine with an anti-vibration mechanism according to claim 9, characterized in that: The bottom surfaces of the four bases (305) are all provided with rubber pads (306).

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