Linkage type multi-shaft crystal growth furnace

Abstract

The invention relates to the technical field of semiconductor crystals, and particularly discloses a linkage type multi-axis crystal growth furnace which is characterized in that a plurality of growth cavities are arranged in a crucible, a seed crystal axis system is arranged at the top of a vacuum cavity, and the seed crystal axis system comprises a plurality of seed crystal axes penetrating through the top of the vacuum cavity; according to the technical scheme, each seed crystal shaft corresponds to one growth chamber, all the seed crystal shafts share one transmission mechanism, and the transmission mechanism can drive all the seed crystal shafts to synchronously rotate, lift and crystallize in the growth chambers, so that the production efficiency can be greatly improved by arranging the plurality of seed crystal shafts and arranging the plurality of growth chambers in the crucible.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor crystals, and in particular to a linkage type multi-axis crystal growth furnace. Background Art

[0002] In existing crystal growing furnaces, when producing crystals, the raw materials are melted into a solution in a crucible by heating, and then a seed crystal shaft with a seed crystal attached to the head is inserted into the solution for rotation and pulling, thereby growing the crystal. However, in existing equipment, only a single seed crystal shaft corresponds to one crucible for crystal growth production, so the production efficiency of the entire equipment is low and high-efficiency production cannot be achieved.

[0003] The technical problem to be solved by this application is: to design a linkage multi-axis crystal growth furnace that can improve production efficiency. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, an object of the present invention is to provide a linkage type multi-axis crystal growth furnace capable of improving production efficiency.

[0005] The technical solution adopted by the present invention is: a linked multi-axis crystal growth furnace, including a vacuum chamber and a crucible system, the crucible system is located inside the vacuum chamber, the crucible system includes a crucible and a plurality of growth chambers located inside the crucible, the top of the vacuum chamber is provided with a seed crystal axis system running through the top of the vacuum chamber, the seed crystal axis system is provided with a transmission mechanism connected thereto, the seed crystal axis system includes a plurality of seed crystal axes, each seed crystal axis corresponds to a growth chamber.

[0006] In some embodiments, a lifting mechanism is provided at the bottom of the crucible in transmission connection therewith, the lifting mechanism comprises a lifting shaft and a lifting motor in transmission connection with the lifting shaft, and the top of the lifting shaft is connected to the bottom of the crucible.

[0007] In some embodiments, a plurality of flow stabilizing rings are disposed in the crucible. The flow stabilizing rings are in the shape of hollow cylinders, and a growth chamber is formed inside the flow stabilizing rings.

[0008] In some embodiments, a heating coil and a heat-insulating carbon felt are disposed in the side wall of the crucible.

[0009] In some embodiments, the transmission mechanism includes a support frame arranged on the top of the vacuum chamber, a lifting screw rod rotatably connected to the support frame, the lifting screw rod is provided with a connecting block threadedly transmitted therewith, and the connecting block and the lifting screw rod are threadedly connected.

[0010] In some embodiments, the transmission mechanism also includes a driving motor disposed at the top of the vacuum chamber, the driving motor is provided with a main transmission rod transmission-connected thereto, both ends of the main transmission rod are provided with a first transmission gear fixedly connected thereto, and the top of each seed crystal shaft is provided with a driven gear fixedly connected thereto.

[0011] In some embodiments, the transmission mechanism also includes a first gear ring and a second gear ring arranged on the top of the vacuum chamber, the inner side of the first gear ring is meshed with the first transmission gear at one end of the main transmission rod, the seed crystal shaft system includes a central seed crystal shaft and an outer ring seed crystal shaft group composed of a plurality of seed crystal shafts distributed in a ring shape, the outer side of the first gear ring is meshed with the driven gear of the outer ring seed crystal shaft group, and the driven gear of the central seed crystal shaft is meshed with the first transmission gear at the other end of the main transmission rod.

[0012] In some embodiments, the support frame includes a central support frame and an outer ring support frame. The lifting screw in the central support frame is provided with a first slave transmission rod connected to it, and the other end of the first slave transmission rod is provided with a second transmission gear connected to it. The second transmission gear is meshed with the inner side of the second gear ring for transmission.

[0013] In some embodiments, the lifting screw in the outer ring support frame is provided with a second slave transmission rod transmission-connected thereto, one end of the second slave transmission rod is provided with a third transmission gear connected thereto, and the third transmission gear is meshed with the inner side of the second gear ring for transmission.

[0014] In some embodiments, a planetary gear set is provided between the first slave transmission rod and the lifting screw in the central support frame, and the first slave transmission rod and the central support frame are transmission-connected via the planetary gear set.

[0015] The present invention has the following technical effects: a plurality of growth chambers are provided in the crucible, and a seed crystal axis system is provided on the top of the vacuum chamber, wherein the seed crystal axis system includes a plurality of seed crystal axes running through the top of the vacuum chamber, each seed crystal axis corresponds to a growth chamber, and all the seed crystal axes share a transmission mechanism, which can drive all the seed crystal axes to rotate synchronously in the growth chamber to pull and grow crystals, so by providing multiple seed crystal axes and multiple growth chambers in the crucible, the production efficiency can be greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the linkage multi-axis crystal growth furnace of the present invention;

[0017] Figure 2 It is a schematic diagram of the transmission mechanism structure of the linkage multi-axis crystal growth furnace of the present invention;

[0018] Figure 3 It is a schematic diagram of the structure of the crucible system of the linked multi-axis crystal growth furnace of the present invention.

[0019] The numbers and names in the figure correspond to each other as follows: 1. vacuum chamber; 2. crucible system; 20. crucible; 21. growth chamber; 3. transmission mechanism; 4. seed crystal shaft; 5. lifting shaft; 22. steady flow ring; 30. driving motor; 31. main transmission rod; 32. first transmission gear; 33. driven gear; 34. first gear ring; 35. second gear ring; 40. central seed crystal shaft; 41. outer ring seed crystal shaft group; 6. central support frame; 7. outer ring support frame; 36. first slave transmission rod; 37. second transmission gear; 38. second slave transmission rod; 39. third transmission gear. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-3 The present invention provides a technical solution: a linkage multi-axis crystal growth furnace, comprising a vacuum chamber 1 and a crucible 20 system 2, wherein the crucible 20 system 2 is located inside the vacuum chamber 1, the crucible 20 system 2 comprises a crucible 20 and a plurality of growth chambers 21 located inside the crucible 20, a plurality of flow stabilizing rings 22 are arranged inside the crucible 20, the flow stabilizing rings 22 are hollow cylindrical, so a single growth chamber 21 is formed inside the flow stabilizing rings 22, a lifting mechanism is arranged at the bottom of the crucible 20 in transmission connection therewith, the lifting mechanism comprises a lifting shaft 5 and a shaft 6 connected to the crucible 20, The lifting shaft 5 is connected to the lifting motor, and the top of the lifting shaft 5 is connected to the bottom of the crucible 20. A heating coil and a heat-insulating carbon felt are provided in the side wall of the crucible 20. When crystal growth is required, the crystal raw material is first placed in the crucible 20, and then the crucible 20 is heated by the heating coil to melt the raw material in the crucible 20. Since the bottom of the flow-stabilizing ring 22 is not in sealed contact with the inner bottom of the crucible 20, the molten raw material will flow into each growth chamber 21, and the liquid level of the liquid raw material in each growth chamber 21 is consistent.

[0022] A seed crystal shaft system is also provided on the top of the vacuum chamber 1 and passes through the top of the vacuum chamber 1, wherein the seed crystal shaft system includes several seed crystal shafts 4 passing through the top of the vacuum chamber 1, and the seed crystal shaft system is provided with a transmission mechanism 3 which is connected thereto, and the transmission mechanism 3 can drive all the seed crystal shafts 4 to rotate and pull synchronously, and the transmission mechanism 3 includes a support frame provided on the top of the vacuum chamber 1, and each support frame is provided with a lifting screw which is rotatably connected thereto, and a connecting block which is threadedly connected thereto is provided on the lifting screw, wherein the connecting block is threadedly connected to the lifting screw, and the transmission mechanism 3 also includes a driving motor 30 provided on the top of the vacuum chamber 1, wherein the driving motor 30 is provided with a main transmission rod 31 which is connected thereto, and both ends of the main transmission rod 31 are provided with A first transmission gear 32 is fixedly connected thereto, and a driven gear 33 is fixedly connected thereto at the top of each seed crystal shaft 4, wherein the transmission mechanism 3 also includes a first gear ring 34 and a second gear ring 35 arranged at the top of the vacuum chamber 1, wherein the inner side of the first gear ring 34 is meshed with the first transmission gear 32 at one end of the main transmission rod 31 for transmission, and the seed crystal shaft system includes a central seed crystal shaft 40 arranged at the top of the vacuum chamber 1, and an outer ring seed crystal shaft group 41 composed of a plurality of seed crystal shafts 4 distributed in a ring shape, wherein the outer ring seed crystal shaft group 41 is equivalent to a plurality of seed crystal shafts 4 distributed in a ring shape around the central seed crystal shaft 40, and no matter it is the central seed crystal shaft 40 or the seed crystal shaft 4 in the outer ring seed crystal shaft group 41, wherein the top of each seed crystal shaft 4 is provided with a driven gear 33, The outer side of the first gear ring 34 is meshed with the driven gear 33 on the outer ring seed crystal shaft group 41 for transmission, and the driven gear 33 of the central seed crystal shaft 40 is meshed with the first transmission gear 32 at the other end of the main transmission rod 31 for transmission, wherein the support frame includes a central support frame 6 and an outer ring support frame 7, the central support frame 6 is connected to the central seed crystal shaft 40, the outer ring support frame 7 is connected to the seed crystal shaft 4 in the outer ring seed crystal shaft group 41, the outer ring support frame 7 is provided with a plurality of, a first slave transmission rod 36 is provided on the lifting screw rod in the central support frame 6 for transmission connection therewith, the other end of the first slave transmission rod 36 is provided with a second transmission gear 37 connected thereto, the second transmission gear 37 is meshed with the inner side of the second gear ring 35 for transmission, and the lifting screw rod in the outer ring support frame 7 The screw rod is provided with a second slave transmission rod 38 which is transmission-connected thereto, and one end of the second slave transmission rod 38 is provided with a third transmission gear 39 which is connected thereto, and the third transmission gear 39 is meshed with the inner side of the second gear ring 35 for transmission, and a planetary gear set is provided between the first slave transmission rod 36 and the lifting screw rod in the central support frame 6, and the first slave transmission rod 36 and the central support frame 6 are transmission-connected through the planetary gear set, and the second slave transmission rod 38 and the lifting screw rod in the outer ring support frame 7 are also transmission-connected through the planetary gear set. When crystal growth is required, the raw materials are first placed in the crucible 20 for hot melting, and then the crucible 20 is lifted by the lifting mechanism so that each seed crystal shaft 4 extends into the growth chamber 21, and passes through the growth chamber 21 formed by the steady flow ring 22.During crystal growth, it is possible to ensure that the liquid level in each chamber is not disturbed, so that independent crystal growth can be achieved in each growth chamber 21. After hot melting, the main transmission rod 31 is driven to rotate by the driving motor 30, thereby driving the first transmission gears 32 at both ends of the main transmission rod 31 to rotate respectively. Since one first transmission gear 32 is meshed with the inner side of the first gear ring 34 for transmission, and the other first transmission gear 32 is meshed with the driven gear 33 on the central seed crystal shaft 40 for transmission, when the main transmission rod 31 rotates, the first gear ring 34 and the driven gear 33 on the central seed crystal shaft 40 can be driven respectively. The driven gear 33 on the outer ring 34 rotates, thereby driving the central seed crystal shaft 40 to rotate. Since the outer sides of the first gear ring 34 are respectively meshed with the driven gears 33 on the outer ring seed crystal shaft group 41, the rotation of the first gear ring 34 can drive the seed crystal shafts 4 in all the outer ring seed crystal shaft groups 41 to rotate, thereby realizing the rotation of all the seed crystal shafts 4 to grow crystals. Since the central seed crystal shaft 40 is provided with a connecting block connected to it by threaded transmission, the central seed crystal shaft 40 will drive the connecting block connected to it to move up and down when it rotates, and the connecting block is also connected to the lifting and lowering mechanism in the central support frame 6. The screw rods are threadedly matched, so the connecting block will drive the lifting screw rod in the center support frame 6 to rotate when it moves up and down. Therefore, when the lifting screw rod in the center support frame 6 rotates, it will give a transmission force to the connecting block with the threaded transmission, and at the same time, the connecting block can also drive the lifting screw rod to move up and down, so that the center seed crystal shaft 40 can be pulled and grown. When the lifting screw rod in the center support frame 6 rotates, it will drive the first slave transmission rod 36 to rotate, thereby driving the second transmission gear 37 to rotate. Since the second transmission gear 37 is connected to the second gear ring 35 The outer sides of the second transmission gear 37 are meshed with each other, so when the second transmission gear 37 rotates, it will drive the second gear ring 35 to rotate. Since the inner side of the second gear ring 35 is meshed with the third transmission gear 39, the second gear ring 35 will drive all the second slave transmissions to rotate synchronously, thereby driving all the lifting screws in the outer ring support frame 7 to rotate. Since each lifting screw is provided with a connecting block threadedly connected to it, it can drive all the seed crystal shafts 4 in the outer ring seed crystal shaft group 41 to rise and fall synchronously, thereby achieving the pulling and growth of all the seed crystal shafts 4.

[0023] The working principle of the present invention is as follows: a plurality of growth chambers 21 are provided in the crucible 20, and a seed crystal axis system is provided on the top of the vacuum chamber 1, wherein the seed crystal axis system includes a plurality of seed crystal axes 4 passing through the top of the vacuum chamber 1, each seed crystal axis 4 corresponds to a growth chamber 21, and all the seed crystal axes 4 share a transmission mechanism 3, which can drive all the seed crystal axes 4 to rotate synchronously in the growth chamber 21 to pull and grow crystals, so by providing a plurality of seed crystal axes 4 and a plurality of growth chambers 21 in the crucible 20, the production efficiency can be greatly improved.

[0024] Finally, it should be noted that the above description is only a preferred example of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A linkage multi-axis crystal growth furnace, comprising a vacuum chamber and a crucible system, wherein the crucible system is located inside the vacuum chamber, characterized in that: The crucible system includes a crucible and a plurality of growth chambers located inside the crucible. The top of the vacuum cavity is provided with a seed crystal axis system that runs through the top of the vacuum cavity. The seed crystal axis system is provided with a transmission mechanism that is transmission-connected thereto. The seed crystal axis system includes a plurality of seed crystal axes, and each of the seed crystal axes corresponds to a growth chamber.

2. The linkage multi-axis crystal growth furnace according to claim 1, characterized in that: The bottom of the crucible is provided with a lifting mechanism which is transmission-connected thereto. The lifting mechanism comprises a lifting shaft and a lifting motor which is transmission-connected to the lifting shaft. The top of the lifting shaft is connected to the bottom of the crucible.

3. The linkage multi-axis crystal growth furnace according to claim 1, characterized in that: A plurality of flow stabilizing rings are arranged in the crucible. The flow stabilizing rings are in the shape of hollow cylinders, and a growth chamber is formed inside the flow stabilizing rings.

4. The linkage multi-axis crystal growth furnace according to claim 1, characterized in that: A heating coil and heat-insulating carbon felt are arranged inside the side wall of the crucible.

5. The linkage multi-axis crystal growth furnace according to claim 1, characterized in that: The transmission mechanism comprises a support frame arranged on the top of the vacuum chamber, and a lifting screw rod rotatably connected to the support frame. The lifting screw rod is provided with a connecting block threadedly transmitted therewith, and the connecting block is threadedly connected to the lifting screw rod.

6. The linkage multi-axis crystal growth furnace according to claim 5, characterized in that: The transmission mechanism also includes a driving motor arranged at the top of the vacuum chamber, the driving motor is provided with a main transmission rod transmission-connected thereto, both ends of the main transmission rod are provided with a first transmission gear fixedly connected thereto, and the top of each seed crystal shaft is provided with a driven gear fixedly connected thereto.

7. The linkage multi-axis crystal growth furnace according to claim 6, characterized in that: The transmission mechanism also includes a first gear ring and a second gear ring arranged on the top of the vacuum chamber, the inner side of the first gear ring is meshed with the first transmission gear at one end of the main transmission rod, the seed crystal shaft system includes a central seed crystal shaft and an outer ring seed crystal shaft group composed of a plurality of seed crystal shafts distributed in a ring shape, the outer side of the first gear ring is meshed with the driven gear of the outer ring seed crystal shaft group, and the driven gear of the central seed crystal shaft is meshed with the first transmission gear at the other end of the main transmission rod.

8. The linkage multi-axis crystal growth furnace according to claim 7, characterized in that: The support frame includes a central support frame and an outer ring support frame. The lifting screw in the central support frame is provided with a first slave transmission rod which is transmission-connected thereto. The other end of the first slave transmission rod is provided with a second transmission gear which is connected thereto. The second transmission gear is meshed with the inner side of the second gear ring for transmission.

9. The linkage multi-axis crystal growth furnace according to claim 8, characterized in that: The lifting screw in the outer ring support frame is provided with a second slave transmission rod which is transmission-connected thereto, and one end of the second slave transmission rod is provided with a third transmission gear which is connected thereto, and the third transmission gear is meshed with the inner side of the second gear ring for transmission.

10. The linkage multi-axis crystal growth furnace according to claim 8, characterized in that: A planetary gear set is provided between the first slave transmission rod and the lifting screw rod in the central support frame, and the first slave transmission rod and the central support frame are connected to each other through the planetary gear set.

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