Laboratory SEM manual shooting leveling mechanism

Abstract

The invention discloses a laboratory SEM manual shooting leveling mechanism which comprises a bottom plate, an objective table, adjusting cylinders and supporting feet, the objective table is arranged on one side of the top of the bottom plate, an SEM body is arranged on the portion, on one side above the objective table, of the bottom plate, the adjusting cylinders are arranged on the two sides of the bottom of the objective table, and the supporting feet are arranged on the adjusting cylinders. A screw rod is arranged in the center of the interior of each adjusting cylinder, each screw rod is sleeved with a lifting sleeve, two sets of supporting legs are arranged at the bottom end of each lifting sleeve through a support, a handle is arranged on one side of each adjusting cylinder, and a driving gear is arranged at the end, close to the corresponding adjusting cylinder, of each handle. By installing the objective table, the adjusting cylinder, the supporting legs, the handles, the driving gear, the driven gear, the lead screw, the lifting sleeve and the tilt angle sensor, the operation process is simpler and more convenient, so that the adjusting time is saved, the working efficiency is improved, and the handles are arranged on the two sides to facilitate operation of workers.

Description

Technical Field

[0001] The invention relates to the technical field of laboratory SEM leveling, in particular to a laboratory SEM manual shooting leveling mechanism. Background Art

[0002] Laboratory SEM, or scanning electron microscope, is a commonly used microscopic analysis instrument that uses various physical signals excited by a finely focused electron beam scanning across the sample surface to modulate imaging.

[0003] When the laboratory SEM is working, the sample needs to be placed on the stage first. If the stage is not level, the electron beam may not be able to scan and shoot evenly on the sample surface, which may cause distortion, stretching and other distortions in the image. Therefore, a leveling device is needed to level the stage. When leveling, it is generally necessary to turn the adjustment screws at the four feet to make one side of the stage rise or fall, and at the same time observe the bubble position of the spirit level, and then observe the horizontal state of the stage. According to the observation results, continue to adjust other adjustment screws until the stage reaches a horizontal state. The operation is more troublesome. Summary of the invention

[0004] The object of the present invention is to provide a laboratory SEM manual photography leveling mechanism to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a laboratory SEM manual shooting leveling mechanism, comprising a base plate, a stage, an adjustment cylinder and supporting feet, wherein a stage is arranged on one side of the top of the base plate, a SEM body is arranged on the base plate on one side above the stage, adjustment cylinders are arranged on both sides of the bottom of the stage, and a screw rod is arranged at the central position inside the adjustment cylinder, a lifting sleeve is sleeved on the screw rod, and two groups of supporting feet are arranged at the bottom end of the lifting sleeve through a bracket, a handle is arranged on one side of the adjustment cylinder, and a driving gear is arranged on the end of the handle close to the adjustment cylinder, a driven gear meshing with the driving gear is arranged on the top of the screw rod, and an inclination sensor is arranged on one side of the stage.

[0006] A placement plate is provided on the top of the loading platform, and a handle is provided on one side of the placement plate; slide grooves are provided on both sides of the top of the loading platform, and slide rails matching the slide grooves are provided on both sides of the bottom of the placement plate.

[0007] Preferably, guide grooves are provided on both sides of the interior of the adjusting cylinder, and guide blocks are provided on both sides of the lifting sleeve.

[0008] Preferably, the supporting feet are all of trapezoidal structure, and the bottom ends of the supporting feet are provided with anti-slip silicone pads.

[0009] Preferably, mounting parts are provided at both ends of the bottom of the bracket, and the tops of the legs are connected to the mounting parts via mounting blocks.

[0010] Preferably, screws are passed through both sides of the mounting portion, and a clamping block is provided at one end of the screw, and clamping grooves matching the clamping block are provided on both sides of the mounting block.

[0011] Preferably, storage grooves are provided on both sides of the interior of the mounting portion, and the storage grooves are located on the same horizontal line as the clamping block.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: the laboratory SEM manual shooting leveling mechanism is equipped with a stage, an adjustment cylinder, a support foot, a handle, a driving gear, a driven gear, a screw, a lifting sleeve and an inclination sensor. By turning the handle, the driving gear can be driven to rotate, so that the driven gear and the screw are rotated, thereby driving the lifting sleeve to rise or fall along the screw, and then driving the two groups of support feet to adjust the height. Only by rotating one group of handles can one side of the stage rise or fall. The operation process is simpler, thereby saving adjustment time and improving work efficiency. The handles are arranged on both sides for the convenience of staff operation. At the same time, an inclination sensor is arranged on the stage. During the leveling process, the inclination sensor can monitor the inclination angle of the stage in real time, and display the current status through a display screen or other indicators for the convenience of staff viewing. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0014] Figure 1 It is a front view structural schematic diagram of the present invention.

[0015] Figure 2 It is a schematic diagram of the cross-sectional structure of the regulating cylinder of the present invention.

[0016] Figure 3 It is a schematic diagram of the cross-sectional structure of the mounting portion of the present invention.

[0017] Figure 4 It is a schematic diagram of the top view of the structure of the adjustment tube of the present invention.

[0018] Figure 5 It is a schematic diagram of the top view of the structure of the object carrier of the present invention.

[0019] In the figure: 1. bottom plate; 2. SEM body; 3. stage; 4. placement plate; 5. inclination sensor; 6. adjustment cylinder; 7. support foot; 8. driving gear; 9. driven gear; 10. screw rod; 11. lifting sleeve; 12. mounting part; 13. handle; 14. screw rod; 15. slot; 16. block; 17. storage slot; 18. mounting block; 19. bracket; 20. slide slot. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-5 An embodiment of the present invention is: a laboratory SEM manual shooting leveling mechanism, including a base plate 1, a stage 3, an adjustment cylinder 6 and a support leg 7, the base plate 1 is provided with a stage 3 on one side of the top, and a SEM body 2 is provided on the base plate 1 on one side above the stage 3; adjustment cylinders 6 are provided on both sides of the bottom of the stage 3, and a screw rod 10 is provided at the central position inside the adjustment cylinder 6, a lifting sleeve 11 is sleeved on the screw rod 10, and two groups of support legs 7 are provided at the bottom end of the lifting sleeve 11 through a bracket 19.

[0022] A handle 13 is provided on one side of the adjusting cylinder 6, and a driving gear 8 is provided on the end of the handle 13 close to the adjusting cylinder 6, and a driven gear 9 meshing with the driving gear 8 is provided on the top of the screw rod 10; first, the stage 3 is leveled, and when leveling, the driving gear 8 can be driven to rotate by rotating the handle 13, so that the driven gear 9 and the screw rod 10 rotate, thereby driving the lifting sleeve 11 to rise or fall along the screw rod 10, and then driving the two sets of supporting feet 7 to adjust the height.

[0023] One side of the stage 3 can be raised or lowered by simply rotating a set of handles 13, which makes the operation process simpler, thereby saving adjustment time and improving work efficiency. The handles 13 are arranged on both sides to facilitate operation by the staff.

[0024] Guide grooves are provided on both sides of the adjusting cylinder 6, and guide blocks are provided on both sides of the lifting sleeve 11 to guide and limit the lifting sleeve 11 when it rises or falls; an inclination sensor 5 is provided on one side of the loading platform 3. During the leveling process, the inclination sensor 5 can monitor the inclination angle of the loading platform 3 in real time, and display the current status through a display screen or other indicators for easy viewing by the staff.

[0025] A placement plate 4 is provided on the top of the stage 3, and a handle is provided on one side of the placement plate 4. Slide grooves 20 are provided on both sides of the top of the stage 3, and slide rails matching the slide grooves 20 are provided on both sides of the bottom of the placement plate 4. After leveling the stage 3, the placement plate 4 is pulled out, and the sample is placed on the placement plate 4 and then pushed back to the bottom of the SEM body 2 for shooting and scanning. Through the leveling operation, the electron beam of the SEM body 2 can be evenly scanned on the sample surface, thereby avoiding distortion and improving the accuracy of the image.

[0026] The legs 7 are all trapezoidal structures, and the bottom ends of the legs 7 are all provided with anti-skid silicone pads to increase the stability of the stage 3; the two ends of the bottom of the bracket 19 are provided with mounting parts 12, and the tops of the legs 7 are connected to the mounting parts 12 through mounting blocks 18. Screws 14 pass through both sides of the mounting parts 12, and blocks 16 are provided at one end of the screws 14, and slots 15 matching the blocks 16 are provided on both sides of the mounting blocks 18; storage slots 17 are provided on both sides of the mounting parts 12, and the storage slots 17 are located on the same horizontal line as the blocks 16.

[0027] During the use of the loading platform 3, the support leg 7 will bear a certain weight and stress. Over time, the support leg 7 may become uneven due to wear or aging, thereby affecting the levelness of the loading platform 3. At this time, the screws 14 on both sides of the rotatable mounting portion 12 can separate the block 16 from the slot 15 and retract it into the storage slot 17. After that, the support leg 7 can be separated from the mounting portion 12, which is convenient for the removal and replacement of the support leg 7. The specific model and specifications of the inclination sensor 5 need to be determined according to the selection calculation such as the specification parameters of the device. The selection calculation method is a prior art, so it will not be described in detail.

[0028] Working principle: first level the loading platform 3. During leveling, the driving gear 8 can be driven to rotate by turning the handle 13, so that the driven gear 9 and the screw rod 10 can rotate, thereby driving the lifting sleeve 11 to rise or fall along the screw rod 10, and then driving the two sets of supporting feet 7 to adjust the height. Only by rotating one set of handles 13, one side of the loading platform 3 can be raised or lowered. The operation process is simpler, thereby saving adjustment time and improving work efficiency.

[0029] Handles 13 are arranged on both sides for the convenience of operation by the staff. At the same time, an inclination sensor 5 is arranged on the stage 3. During the leveling process, the inclination sensor 5 can monitor the inclination angle of the stage 3 in real time, and display the current status through a display screen or other indicators, so that the staff can check it conveniently. After leveling the stage 3, the placement plate 4 is pulled out, and the sample is placed on the placement plate 4 and then pushed back to the bottom of the SEM body 2 for shooting and scanning. Through the leveling operation, the electron beam of the SEM body 2 can be scanned evenly on the sample surface, thereby avoiding distortion and improving the accuracy of the image.

[0030] In addition, when the worktable 3 is in use, the support leg 7 will bear a certain weight and stress. Over time, the support leg 7 may become uneven due to wear or aging, thereby affecting the levelness of the worktable 3. At this time, the screws 14 on both sides of the rotatable mounting portion 12 can separate the block 16 from the slot 15 and retract it into the storage slot 17. After that, the support leg 7 can be separated from the mounting portion 12, which is convenient for the removal and replacement of the support leg 7.

Claims

1. A laboratory SEM manual photography leveling mechanism, characterized in that: The device comprises a base plate (1), a stage (3), an adjustment cylinder (6) and a support leg (7), wherein the stage (3) is arranged on one side of the top of the base plate (1), a SEM body (2) is arranged on the base plate (1) on one side above the stage (3), adjustment cylinders (6) are arranged on both sides of the bottom of the stage (3), and a lead screw (10) is arranged at a central position inside the adjustment cylinder (6), a lifting sleeve (11) is sleeved on the lead screw (10), and two sets of support legs (7) are arranged at the bottom end of the lifting sleeve (11) via a bracket (19), and the adjustment cylinder (6) A handle (13) is provided on one side of the sample carrier (3), and a driving gear (8) is provided on one end of the handle (13) close to the adjusting cylinder (6); a driven gear (9) meshing with the driving gear (8) is provided on the top of the screw rod (10); an inclination sensor (5) is provided on one side of the sample carrier (3); a placement plate (4) is provided on the top of the sample carrier (3), and a handle is provided on one side of the placement plate (4); slide grooves (20) are provided on both sides of the top of the sample carrier (3), and slide rails matching the slide grooves (20) are provided on both sides of the bottom of the placement plate (4).

2. A laboratory SEM manual photography and leveling mechanism according to claim 1, characterized in that: Guide grooves are provided on both sides of the adjusting cylinder (6), and guide blocks are provided on both sides of the lifting sleeve (11).

3. A laboratory SEM manual photography and leveling mechanism according to claim 1, characterized in that: The supporting feet (7) are all of trapezoidal structure, and the bottom ends of the supporting feet (7) are all provided with anti-slip silicone pads.

4. A laboratory SEM manual photography and leveling mechanism according to claim 1, characterized in that: Both ends of the bottom of the bracket (19) are provided with mounting portions (12), and the tops of the supporting legs (7) are connected to the mounting portions (12) via mounting blocks (18).

5. A laboratory SEM manual photography and leveling mechanism according to claim 4, characterized in that: Screw rods (14) pass through both sides of the mounting portion (12), and a clamping block (16) is provided at one end of each screw rod (14), and clamping grooves (15) matching the clamping block (16) are provided on both sides of the mounting block (18).

6. A laboratory SEM manual photography and leveling mechanism according to claim 5, characterized in that: Receiving grooves (17) are provided on both sides of the interior of the mounting portion (12), and the receiving grooves (17) are located on the same horizontal line as the clamping block (16).

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