Tool for detecting sealing performance of chip packaging

Abstract

The utility model belongs to the technical field of chip detection, and particularly relates to a tool for detecting the sealing performance of chip packaging, which comprises a workbench and a chip to be detected, a tool seat is fixed on the upper surface of the workbench, the upper surface of the tool seat is sunken downwards, the chip to be detected is arranged on the inner side of the tool seat, an internal threaded hole is arranged at one corner of the surface of the chip to be detected, and the internal threaded hole is communicated with the internal threaded hole. A gas collecting groove is transversely formed in the lower portion of the inner wall of the tool base, gas outlet holes are evenly formed in the inner wall of the gas collecting groove, grooves are evenly formed in the outer side of the upper surface of the tool base, the gas outlet holes correspond to the grooves in a one-to-one mode, and chips to be detected are arranged in the grooves of the tool base and are pressed and fixed through pressing rods on the two sides. According to the utility model, the structure is simple, the chip is prevented from dislocation in the testing process, the detection accuracy is ensured, meanwhile, the light thin film strips are uniformly adhered to the outer side surface of the tool seat, and when the chip leaks air, the air leakage position can be accurately judged by observing the change of the thin film at different positions.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip detection, and in particular relates to a tool for detecting the sealing performance of chip packaging. Background Art

[0002] Chip: An integrated circuit whose circuit is manufactured on the surface of a semiconductor chip is also called a thin film integrated circuit. Another type of thick film integrated circuit is a miniaturized circuit consisting of independent semiconductor devices and passive components integrated into a substrate or circuit board. Packaging is a process for chip processing, and after the chip is packaged, it needs to be tested for sealing.

[0003] The prior art discloses a sealing detection device for chip packaging (patent announcement number: CN 219675376U). The gas cylinder is used to inflate high-pressure gas into the inside of the chip. If the packaged chip leaks due to insufficient sealing, the leaked gas blows the paper hanging around it, and then the sealing of the packaged chip is judged by the change of the paper. However, it was found that there were some shortcomings during use: 1. The chip was not fixed. After docking with the gas cylinder, the chip would shift due to the change of airflow, causing the chip to shift to one side of the device, and the distance between the chip and the other side of the paper would increase. At this time, the change of the paper affected by the leakage was not obvious enough. 2. The paper size is increased, and when a leak occurs on one side, the location of the leak cannot be accurately located. Utility Model Content

[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide a tool for chip packaging sealing detection, which can effectively fix the chip during testing, prevent the chip from being misplaced, ensure that it is placed in the center of the equipment, and can also accurately locate the position of the leak.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A tool for detecting the sealing performance of chip packaging comprises a workbench and a chip to be tested, wherein a tool seat is fixed on the upper surface of the workbench, the upper surface of the tool seat is recessed downward, the chip to be tested is placed on the inner side of the tool seat, an internal threaded hole is provided at one corner of the surface of the chip to be tested, an air collecting groove is provided laterally below the inner wall of the tool seat, air outlet holes are evenly provided on the inner wall of the air collecting groove, grooves are evenly provided on the outer side of the upper surface of the tool seat, the air outlet holes correspond to the grooves one by one, and two ends of the air outlet holes are respectively connected with the air collecting groove and the groove, a light film strip is adhered to the upper inner side of the groove, the light film strip vertically covers the outer side of the air outlet hole, threaded columns are symmetrically and vertically provided on both sides of the upper surface of the tool seat, a movable plate is slidably installed on the surface of the threaded column, the movable plate extends inwardly, and a rotating rod is rotatably installed below one end of the movable plate away from the threaded column.

[0007] Furthermore, the rotating rod is suspended inside the tooling seat, a pressure rod is transversely fixed to the bottom of the rotating rod, and two pressure rods are respectively placed above both sides of the chip to be tested.

[0008] Furthermore, a spring is sleeved on the surface of the threaded column, the bottom of the spring is in contact with the upper surface of the tooling seat, and the top of the spring is in contact with the lower surface of the movable plate.

[0009] Furthermore, a locking nut is screwed onto the surface of the threaded column, and the locking nut is in contact with the upper surface of the movable plate.

[0010] Furthermore, a column is vertically arranged on the rear side of the upper surface of the workbench, and a suspended plate is extended forward from the top of the column.

[0011] Furthermore, a support frame is fixed on the upper surface of the suspended plate, a cylinder is installed on the inner side of the support frame, and the output end of the cylinder is connected to a connecting hose.

[0012] Furthermore, one end of the docking hose facing away from the cylinder is connected to the internal threaded hole on the surface of the chip to be tested.

[0013] Compared with the prior art, the beneficial effect of the utility model is that the chip to be tested is placed in the groove of the work seat and is pressed down and fixed by the pressure rods on both sides to prevent the chip from being misplaced during the test and ensure the accuracy of the detection. At the same time, a lightweight film strip is evenly adhered to the outer surface of the work seat. When the chip leaks, the location of the leak can be accurately determined by observing the changes in the film at different positions, so as to facilitate the debugging of subsequent packaging processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0015] Figure 2 This is a schematic diagram of the three-dimensional structure of the working seat of the utility model;

[0016] Figure 3 This is a schematic diagram of the cross-sectional structure of the air outlet of the utility model;

[0017] Figure 4 It is a schematic diagram of the three-dimensional structure of the pressure rod installation of the utility model.

[0018] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0019] 1. Workbench; 2. Column; 3. Suspension plate; 4. Support frame; 5. Cylinder; 6. Docking hose; 7. Fixture seat; 8. Chip to be tested; 9. Gas collecting groove; 10. Air outlet; 11. Groove; 12. Light film strip; 13. Threaded column; 14. Spring; 15. Movable plate; 16. Locking nut; 17. Rotating rod; 18. Press rod. DETAILED DESCRIPTION

[0020] In order to make the purpose and advantages of the utility model more clear, the utility model is specifically described in combination with the following embodiments. It should be understood that the following text is only used to describe one or several specific implementations of the utility model, and does not strictly limit the protection scope of the specific request of the utility model.

[0021] Please refer to Figure 1-Figure 3 As shown, a tool for detecting the sealing property of chip packaging comprises a workbench 1 and a chip 8 to be tested. A tool seat 7 is fixed on the upper surface of the workbench 1, and the upper surface of the tool seat 7 is recessed downward. The chip 8 to be tested is placed on the inner side of the tool seat 7. The inner space of the tool seat 7 is slightly larger than the size of the chip 8 to be tested. An internal threaded hole is provided at one corner of the surface of the chip 8 to be tested, and an air collecting groove 9 is horizontally provided below the inner wall of the tool seat 7. The air collecting groove 9 corresponds to the four side surfaces of the chip 8 to be tested respectively. Air outlet holes 10 are evenly provided on the inner wall of the air collecting groove 9. A groove 11 is evenly provided on the outer side of the upper surface of the tool seat 7. The air outlet holes 10 correspond to the groove 11 one by one, and the two ends of the air outlet hole 10 are respectively connected with the air collecting groove 9 and the groove 11. A light film strip 12 is adhered to the upper inner side of the groove 11, and the light film strip 12 vertically covers the outer side of the air outlet hole 10. When the chip 8 to be tested leaks, the light film strip 12 at the corresponding position will be blown up, so that the staff can observe and accurately locate the leaking position.

[0022] Please refer to Figure 2-Figure 4 As shown, there are threaded columns 13 symmetrically and vertically on both sides of the upper surface of the tooling seat 7, and a movable plate 15 is slidably installed on the surface of the threaded column 13. The movable plate 15 can slide vertically along the surface of the threaded column 13, and the movable plate 15 extends inwardly. A rotating rod 17 is rotatably installed below one end of the movable plate 15 away from the threaded column 13. The rotating rod 17 is suspended on the inner side of the tooling seat 7, and a pressure rod 18 is laterally fixed at the bottom of the rotating rod 17. Rotating the rotating rod 17 can control the angle of the pressure rod 18. When installing or removing the chip 8 to be tested, the pressure rod 18 can be rotated to one side to prevent obstruction. Conversely, after being installed in place, the pressure rod 18 is rotated to the upper surface of the chip 8 to be tested, and the two pressure rods 18 are respectively placed above the two sides of the chip 8 to be tested.

[0023] Among them, a spring 14 is sleeved on the surface of the threaded column 13, the bottom of the spring 14 contacts the upper surface of the tooling seat 7, and the top of the spring 14 contacts the lower surface of the movable plate 15. A locking nut 16 is screwed on the surface of the threaded column 13, and the locking nut 16 contacts the upper surface of the movable plate 15. Screwing the locking nut 16 can press the movable plate 15 downward, and then drive the pressure rod 18 to press downward to fix the chip 8 to be tested, and the upward elastic force of the spring 14 can make the movable plate 15 move upward when the locking nut 16 is screwed upward.

[0024] Please refer to Figure 1As shown, a column 2 is vertically arranged on the rear side of the upper surface of the workbench 1, a suspended plate 3 is extended forward from the top of the column 2, a support frame 4 is fixed to the upper surface of the suspended plate 3, a cylinder 5 is installed on the inner side of the support frame 4, and the output end of the cylinder 5 is connected to a docking hose 6, and the end of the docking hose 6 facing away from the cylinder 5 is connected to the internal threaded hole on the surface of the chip to be tested 8, so as to inflate the interior of the packaged chip and observe its sealing performance.

[0025] The working principle of the utility model is as follows: first, the chip to be tested 8 is placed at the center position inside the tooling seat 7, and then the rotating rod 17 is rotated so that the pressure rod 18 can be placed on the upper surface of the chip to be tested 8, and the locking nut 16 is rotated to press down the movable plate 15, and then the pressure rod 18 presses down and fixes the chip to be tested 8 to ensure the stability of the chip to be tested 8, and then the docking joint at the end of the docking hose 6 is screwed into the threaded hole on the surface of the chip to be tested 8, and gas is rushed into the inside of the chip to be tested 8 through the cylinder 5. If the sealing of the chip to be tested 8 is insufficient, leakage will occur. When leakage occurs on one side, the gas flows into the gas collecting groove 9 and is blown outward through the air outlet 10, and then the lightweight film strip 12 at the corresponding position is blown up, so as to achieve the detection purpose, and at the same time, the position of the leakage can be accurately located according to the situation.

[0026] The above is only a preferred embodiment of the present invention. It should be noted that, for ordinary technicians in the technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the field unless otherwise specified and limited.

Claims

1. A tool for testing the sealing performance of chip packaging, comprising a workbench (1) and a chip to be tested (8), Features: A tooling seat (7) is fixed on the upper surface of the workbench (1), the upper surface of the tooling seat (7) is concave downward, the chip to be tested (8) is placed on the inner side of the tooling seat (7), an internal threaded hole is provided at one corner of the surface of the chip to be tested (8), an air collecting groove (9) is provided horizontally below the inner wall of the tooling seat (7), air outlet holes (10) are evenly provided on the inner wall of the air collecting groove (9), grooves (11) are evenly provided on the outer side of the upper surface of the tooling seat (7), the air outlet holes (10) correspond to the grooves (11) one by one, and the air outlet holes (10) are arranged on the inner wall of the air collecting groove (9). The two ends of the hole (10) are respectively connected with the air collecting groove (9) and the groove (11); a light film strip (12) is adhered to the upper inner side of the groove (11); the light film strip (12) vertically covers the outer side of the air outlet hole (10); threaded columns (13) are symmetrically and vertically arranged on both sides of the upper surface of the tooling seat (7); a movable plate (15) is slidably installed on the surface of the threaded column (13); the movable plate (15) extends inwardly; a rotating rod (17) is rotatably installed below one end of the movable plate (15) away from the threaded column (13).

2. A chip packaging sealing detection tool according to claim 1, Features: The rotating rod (17) is suspended inside the tooling seat (7), a pressure rod (18) is transversely fixed to the bottom of the rotating rod (17), and the two pressure rods (18) are respectively placed above the two sides of the chip to be tested (8).

3. A chip packaging sealing detection tool according to claim 2, Features: A spring (14) is sleeved on the surface of the threaded column (13), the bottom of the spring (14) contacts the upper surface of the tooling seat (7), and the top of the spring (14) contacts the lower surface of the movable plate (15).

4. A chip packaging sealing detection tool according to claim 3, Features: A locking nut (16) is screwed onto the surface of the threaded column (13), and the locking nut (16) is in contact with the upper surface of the movable plate (15).

5. A chip packaging sealing detection tool according to claim 1, Features: A column (2) is vertically arranged on the rear side of the upper surface of the workbench (1), and a suspended plate (3) extends forward from the top of the column (2).

6. A chip packaging sealing detection tool according to claim 5, Features: A support frame (4) is fixed on the upper surface of the suspended plate (3), a cylinder (5) is installed inside the support frame (4), and an output end of the cylinder (5) is connected to a hose (6).

7. A chip packaging sealing detection tool according to claim 6, Features: One end of the docking hose (6) facing away from the cylinder (5) is connected to the internal threaded hole on the surface of the chip (8) to be tested.

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