Luminous decay resistant furnace
By adopting dual temperature control of temperature control components and condenser in the anti-optical decay furnace, the problem of difficult balance between light source intensity and cooling temperature is solved, and the anti-optical decay effect of the silicon wafer is significantly improved.
Patent Information
- Application Number
- CN202420889195.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-26
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-04-26
AI Technical Summary
Today, the photodecay treatment of photovoltaics is difficult to achieve a good balance between the light source intensity and cooling temperature, which affects the anti-light decay effect of the silicon wafer.
An anti-optical decay furnace is designed, using a cooling mechanism including a temperature control component and a condenser. The airflow is controlled in the first stage through the temperature control component, and the second stage of temperature control is performed in the condenser to ensure the cooling airflow of the battery. The temperature difference is within 1 ℃, which achieves a good balance between the light source intensity and the cooling temperature.
Through dual temperature control, the anti-light decay effect of the battery is significantly improved, ensuring the optimal balance of light source intensity and cooling temperature, and improving the anti-light decay ability of the silicon wafer.
Smart Images
Figure CN222168419U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of solar silicon wafer equipment, and in particular relates to an anti-light decay furnace. Background Art
[0002] As we all know, in the production of crystalline silicon solar cell wafers, after the silicon wafers are printed, the silicon wafers with slurry need to be dried and sintered in a sintering furnace, and then activated by an anti-light decay furnace to prevent the light decay ability of the silicon wafers. Photovoltaic anti-light decay treatment simulates strong sunlight to achieve a good passivation effect on the surface of the silicon wafer. The anti-light decay furnace usually includes a light source box, a conveyor and a cooling mechanism. The light source box irradiates the cell, and the cooling mechanism cools the irradiated cell. However, it is difficult to achieve a good balance between the light source intensity and the cooling temperature for photovoltaic light decay treatment today. Utility Model Content
[0003] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide an anti-light decay furnace, in which the cooling mechanism for cooling the battery cells can accurately control the cooling temperature, so as to overcome the current technical problem that it is difficult to achieve a good balance between the light source intensity and the cooling temperature in photovoltaic light decay treatment.
[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is: an anti-light decay furnace, including an upper module and a lower module, the upper module and the lower module are interlocked to form a channel for transmission by a transmission device, a cooling mechanism is arranged below the transmission device, the cooling mechanism includes a condenser and a temperature control component arranged below the condenser, the airflow for cooling the battery cell first passes through the temperature control component and then enters the condenser for condensation, and the temperature control component can heat or cool the airflow to a preset temperature before entering the condenser. Through the setting of the temperature control component and the condenser in the cooling mechanism, the temperature difference of the gas temperature for cooling the battery cell can be controlled within 1°C, and the preset temperature can be set according to the demand, so that a good balance can be achieved in the intensity of the light source and the cooling temperature of the battery cell, thereby improving the anti-light decay effect of the battery cell.
[0005] Furthermore, the temperature control component includes a temperature control component and a temperature measuring component, the temperature measuring component is used to test the temperature of the gas, and the temperature control component heats or cools the gas according to the temperature tested by the temperature measuring component.
[0006] Furthermore, the temperature measuring component is a thermocouple 1, and the temperature controlling component is a heating ring.
[0007] Furthermore, the cooling mechanism includes an isolation cover, which is arranged in the slot body of the lower module, the temperature control component is arranged in the inner chamber of the isolation cover, and the condenser is arranged above the isolation cover. The airflow first passes through the inner chamber and then enters the condenser for condensation.
[0008] Furthermore, the cooling mechanism also includes a fan, which includes a driving member arranged below the bottom wall of the trough body, and a driving shaft of the driving member passes through the bottom wall of the trough body and the bottom wall of the isolation cover, extends into the inner chamber, and is connected to the fan blades located in the inner chamber, and the driving member can drive the fan blades to rotate.
[0009] Furthermore, a cover plate is fixedly arranged just above the fan blades, and the cover plate is arranged in the inner chamber and is arranged horizontally close to the fan blades. Through the arrangement of the cover plate, the fan blades drive the airflow to diffuse to the surroundings of the inner chamber along the lower surface of the cover plate, thereby generating negative pressure at the lower end of the fan blades and no thrust at the upper end, so that the flow rate of the airflow can be controlled according to the pressure at the upper and lower ends of the condenser. And in the process of the airflow diffusing to the surroundings, it passes through the heating rings arranged around the fan blades, and the heating rings heat the airflow, thereby improving the heating effect of the heating rings on the airflow.
[0010] Furthermore, a mesh plate is provided between the condenser and the isolation cover, and upper and lower sides of the mesh plate are respectively in contact with the condenser and the isolation cover.
[0011] Furthermore, a gap is left between the bottom wall of the isolation cover and the bottom wall of the trough body to form a buffer chamber for air flow to pass through; a gas inlet is provided on the bottom wall of the trough body, the gas inlet is communicated with the buffer chamber, and the gas enters the buffer chamber after passing through the gas inlet; a connecting hole is provided at the bottom of the isolation cover, connecting the buffer chamber and the inner chamber, and the gas in the buffer chamber can enter the inner chamber through the connecting hole.
[0012] Furthermore, a gap is left between the side wall of the isolation cover and the side wall of the trough body to form a reflux channel for airflow to pass through, and the reflux channel is communicated with the buffer chamber, so that the airflow in the reflux channel can enter the buffer chamber.
[0013] Furthermore, the cooling mechanism also includes a gas outflow pipe, which runs through the inner chamber and the tank body, and the gas in the inner chamber can flow to the outside of the tank body through the gas outflow pipe.
[0014] Furthermore, the cooling mechanism is provided in multiple groups, and the multiple groups of cooling mechanisms are arranged side by side below the transmission device, and the side-by-side arrangement is in a line consistent with the transmission direction of the transmission device.
[0015] The beneficial effects of the utility model are as follows: through the arrangement of the temperature control component and the condenser in the cooling mechanism, the temperature control component is used to perform primary temperature control on the airflow for cooling the battery cell, the airflow after the primary temperature control by the temperature control component enters the condenser for condensation, and the condenser then performs secondary temperature control on the airflow, and by performing dual control on the temperature of the airflow (primary temperature control and secondary temperature control), the temperature control accuracy of the airflow for cooling the battery cell is ensured to be higher, the temperature difference of the gas temperature for cooling the battery cell can be controlled within 1°C, a good balance can be achieved in the light source intensity and the cooling temperature of the battery cell, and the anti-light decay effect of the battery cell can be improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and the description thereof are used to explain the present invention and do not constitute an improper limitation on the present invention.
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0018] Figure 1 A three-dimensional diagram of an anti-light decay furnace according to an embodiment of the utility model;
[0019] Figure 2 A cross-sectional view of an anti-light decay furnace according to an embodiment of the utility model;
[0020] Figure 3 A cross-sectional view of a cooling mechanism according to an embodiment of the present invention;
[0021] Figure 4 for Figure 3 A partial enlarged view of .
[0022] In the figure: 1. frame; 11. upper module; 111. special gas inlet; 12. lower module; 121. tank body; 2. transmission device; 21. feed end; 22. discharge end; 23. drive shaft one; 3. preheating module; 4. light injection module; 41. power supply; 5. water cooling device; 6. lifting mechanism; 7. air cooling mechanism; 8. cooling mechanism; 81. isolation cover; 811. inner chamber; 812. gas outflow pipe; 82. buffer chamber; 821. gas inlet; 83. fan; 831. drive member; 8311. drive shaft two; 832. fan blade; 833. cover plate; 84. heating ring; 85. mesh plate; 86. condenser; 87. reflux channel. DETAILED DESCRIPTION
[0023] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.
[0024] See attached Figure 1 and attached Figure 2 As shown, an anti-light decay furnace in this embodiment includes an upper module 11, a lower module 12 and a frame 1, and the lower module 12 is fixed on the frame 1. The upper module 11 is arranged above the lower module 12, and the upper module 11 is connected to the frame 1 through a lifting mechanism 6. The lifting mechanism 6 can change the vertical height of the upper module 11, and then change the distance between the upper module 11 and the lower module 12. The upper module 11 and the lower module 12 are mutually buckled to form a channel for transmission by the transmission device 2, and the transmission device 2 is used to transmit the battery sheet.
[0025] In some embodiments, the lifting mechanism 6 includes a driving cylinder and a telescopic rod, the driving cylinder is fixedly connected to the frame 1, the telescopic rod is connected to the upper mold group 11, and the driving cylinder can move the upper mold group 11 in the vertical direction through the telescopic rod to change the distance between the upper mold group 11 and the lower mold group 12. The present application does not limit the specific structure of the lifting mechanism 6, and any structure that can drive the upper mold group 11 to change the distance between the upper mold group 11 and the lower mold group 12 is applicable to the present application.
[0026] In some embodiments, the transmission device 2 includes a driving shaft 23 and a transmission chain. The driving shaft 23 is provided with multiple shafts, and the multiple driving shafts 23 are respectively provided at the feed end 21 and the discharge end 22. The transmission chain is sleeved on the driving shaft 23, and the driving shaft 23 drives the transmission chain to rotate, driving the battery cell located above the transmission chain to be transmitted from the feed end 21 to the discharge end 22. During the process of the battery cell from the feed end 21 to the discharge end 22, the anti-light decay process such as battery cell preheating, light annealing, and cooling is completed.
[0027] In some embodiments, a preheating module 3 is provided at the feed end 21 of the transmission device 2 for preheating the battery cells. The battery cells are preheated during the process of passing through the transmission device 2 and the preheating module 3 .
[0028] In some embodiments, on the side of the preheating module 3 close to the discharge end 22, a light injection module 4 is provided on the upper module 11 for illuminating the battery cell. After the battery cell is preheated by the preheating module 3, the light injection module 4 illuminates it. The light injection module 4 includes a light source for illuminating the battery cell, and an adjustment component is provided between the light source and the upper module, and the adjustment component can appropriately adjust the irradiation distance between the light source and the transmission device. The light injection module 4 also includes a reflective cup arranged below the light source, and the reflective cup is used to enhance the irradiation intensity of the light source on the surface of the silicon wafer, which can reach up to 100 sun. The reflective cup arranged below the light source can also be replaced by a light-transmitting mirror, which is not limited in this application, as long as the irradiation intensity of the light source on the surface of the silicon wafer can be enhanced. The light injection module 4 also includes a power supply 41, which is fixedly connected to the rack 1. The power supply 41 is connected to the light source, and the power supply 41 provides power to the light source.
[0029] In some embodiments, a water cooling device 5 is provided above the light source to cool the light source. The smaller the distance between the water cooling device 5 and the light source, the better the cooling effect of the water cooling device 5 on the light source. In the present application, the distance between the light source and the water cooling device 5 is 0-2 mm.
[0030] In some embodiments, the water cooling device 5 includes a water tank, and a water inlet and a water outlet are provided on the water tank. The water inlet, the water outlet and a cooling device such as a heat exchanger located outside the anti-light decay furnace are connected to cool the condensate in the water tank, thereby improving the cooling effect of the water cooling device 5 on the light source.
[0031] In some embodiments, the side wall of the upper module 11 is further provided with a special gas inlet 111. Depending on the process, the special gas is oxygen or nitrogen, etc. By filling the area around the battery cell with the special gas, the anti-light decay effect of the battery cell is improved.
[0032] In some embodiments, an air cooling mechanism 7 is provided at the discharge end 22 . By providing the air cooling mechanism 7 at the discharge end 22 , the battery cell passing through the light injection module 4 is cooled to complete the anti-light decay process of the battery cell.
[0033] In some embodiments, see Appendix Figure 3 and attached Figure 4 As shown, a cooling mechanism 8 is provided on the lower module 12, and the cooling mechanism 8 is provided below the battery cell to cool the battery cell. The temperature output by the cooling mechanism 8 is controllable. There are multiple groups of cooling mechanisms 8, which are arranged side by side below the transmission device 2, and the side-by-side arrangement is in a row in the same direction as the transmission direction of the transmission device 2. During the transportation of the battery cell, multiple groups of cooling mechanisms 8 cool the battery cell in turn, and the cooling effect is good.
[0034] In some embodiments, the lower mold 12 is provided with a trough body 121, and the cooling mechanism 8 includes an isolation cover 81, which is provided in the trough body 121. The isolation cover 81 is connected to the bottom wall of the trough body 121 through a support rod, and the bottom wall of the trough body 121 supports and fixes the isolation cover 81. A gap is left between the bottom wall of the isolation cover 81 and the bottom wall of the trough body 121 to form a buffer chamber 82 for airflow to pass through. A gap is also left between the side wall of the isolation cover 81 and the side wall of the trough body 121 to form a reflux channel 87 for airflow to pass through, and the reflux channel 87 is connected to the buffer chamber 82.
[0035] In some embodiments, a gas inlet 821 is provided on the bottom wall of the tank body 121, and the gas inlet 821 is connected to the buffer chamber 82, and the gas enters the buffer chamber 82 after passing through the gas inlet 821. A connecting hole is provided at the bottom of the isolation cover 81, connecting the buffer chamber 82 and the inner chamber 811 of the isolation cover 81, and the gas in the buffer chamber 82 can enter the inner chamber 811 through the connecting hole.
[0036] In some embodiments, the cooling mechanism 8 also includes a fan 83, and the fan 83 includes a driving member 831 disposed below the bottom wall of the trough body. The driving shaft 8311 of the driving member 831 passes through the bottom wall of the trough body 121 and the bottom wall of the isolation cover 81, extends into the inner chamber 811, and is connected to the fan blade 832 located in the inner chamber 811, and the fan blade 832 is located directly above the connecting hole, and the driving member 831 can drive the fan blade 832 to rotate. During the rotation of the fan blade 832, a negative pressure is formed at the lower part of the fan blade 832, so that the gas in the buffer chamber 82 can enter the inner chamber 811 through the connecting hole. The fan blade 832 can fully disperse the gas, so that the gas can diffuse to the surroundings and diffuse in the inner chamber 811 of the entire isolation cover 81, so that the pressure on the lower surface of the condenser is more uniform, thereby improving the condensation effect of the condenser on the airflow.
[0037] In some embodiments, a condenser 86 is provided above the isolation cover 81. The gas in the inner chamber 811 slowly overflows upward under the action of the fan 83. When passing through the condenser 86, the condenser 86 condenses and cools the gas. The cooled gas continues to move upward. Part of the gas directly contacts the silicon wafer and condenses the silicon wafer, and the other part flows out from the gap between the silicon wafers, and the cooling light is injected into the chamber. In this process, the gas diffuses from the middle chamber to the surrounding areas, and returns to the buffer chamber through the reflux channel, and continues to cycle the above actions.
[0038] In some embodiments, a mesh plate 85 is provided between the condenser 86 and the isolation cover 81. The mesh plate 85 can support the condenser 86 on the one hand, and disperse the air in the inner chamber 811 on the other hand. When the airflow overflows to the vicinity of the condenser 86, the contact area between the airflow and the condenser 86 is increased, thereby improving the condensation effect of the condenser 86 on the airflow.
[0039] In some embodiments, the cooling medium in the condenser 86 flows in a horizontal direction and is arranged perpendicular to the gas moving in a vertical direction, which can further enhance the condensation effect of the condenser 86 on the gas.
[0040] In some embodiments, a temperature control component is further provided in the inner chamber 811 of the isolation cover 81. The airflow for cooling the battery cells first passes through the temperature control component and then enters the condenser 86 for condensation. The temperature control component can heat or cool the airflow to a preset temperature before entering the condenser 86. The temperature control component includes a temperature control component and a temperature measuring component. The temperature measuring component is used to test the temperature of the gas. The temperature control component heats or cools the gas according to the temperature tested by the temperature measuring component.
[0041] In some embodiments, the temperature measuring component is a thermocouple 1, and the temperature controlling component is a heating ring 84. Thermocouple 1 is used to test the temperature of the gas in the inner chamber 811. When thermocouple 1 detects that the temperature in the inner chamber 811 is lower than the preset temperature, the heating ring 84 starts to heat the gas in the inner chamber 811 to supplement the insufficient temperature of the inner chamber 811, so that the temperature of the inner chamber 811 reaches a predetermined value, thereby accurately controlling the temperature in the inner chamber 811.
[0042] In some embodiments, a heating ring 84 is disposed around the fan blades 832, and the heating ring 84 is used to raise the temperature of the gas to prevent the temperature of the gas from being too low after passing through the condenser 86 and not meeting the process temperature required for anti-light decay. There are multiple groups of heating rings 84, which are arranged in sequence in the vertical direction to enhance the heating effect on the gas.
[0043] In some embodiments, a cover plate 833 is fixedly disposed directly above the fan blade 832 . The cover plate 833 is disposed in the inner chamber 811 and is disposed close to the fan blade 832 .
[0044] When the fan blade 832 rotates, negative pressure is generated in the fan blade 832, and the gas entering the buffer chamber 82 from the gas inlet 821 and the gas flowing back to the buffer chamber 82 through the reflux channel 87 are drawn into the inner chamber 811. At this time, due to the obstruction of the cover plate 833, the gas passively diffuses to the surroundings. In this process, the gas continuously rotates around the fan blade 832, and the heating ring 84 continuously controls the temperature of the gas in the inner chamber 811. As the fan blade 832 continuously draws gas, the gas pressure in the inner chamber 811 continuously increases. When the pressure reaches a preset value or the gas flow rate reaches a preset value, the one-way valve opens, and the excess gas in the inner chamber 811 is discharged from the outlet. At this time, by opening or closing the one-way valve set at the gas outlet, the pressure at the upper and lower ends of the condenser 86 can be changed, and then the flow rate of the gas overflow can be regulated, so as to achieve the optimal process temperature for the silicon wafers on the production line.
[0045] In some embodiments, the inner chamber 811 is provided with a gas outlet and a gas outflow pipe 812, and the gas outflow pipe 812 runs through the inner chamber 811 and the tank body 121, and the gas in the inner chamber 811 can flow to the outside of the tank body 121 through the gas outflow pipe 812. When the gas pressure in the inner chamber 811 is relatively large and greater than a preset value, the gas outlet is opened, and part of the gas flows out from the gas outflow pipe 812 to balance the gas pressure in the inner chamber 811.
[0046] In some embodiments, a one-way valve is provided at the gas outlet, and when the gas pressure in the inner chamber is higher than a preset value, the one-way valve automatically opens and the gas flows out. When the gas pressure in the inner chamber is lower than or equal to the preset value, the one-way valve automatically closes and the gas stops flowing out.
[0047] Working process of cooling mechanism: gas enters buffer chamber 82 through gas inlet 821. Under the action of fan 83, gas enters inner chamber 811 from buffer chamber 82. In inner chamber 811, gas is dispersed by fan blade 832. The temperature of inner chamber 811 is detected by thermocouple 1. When thermocouple 1 detects that the temperature in inner chamber 811 is lower than the preset temperature, heating ring 84 starts to heat gas in inner chamber 811 to make the temperature of inner chamber 811 reach the preset value. If thermocouple 1 detects that the temperature of inner chamber 811 is not lower than the preset value, heating ring 84 is not started. The temperature of airflow in inner chamber 811 is controlled by thermocouple 1 and heating ring. After passing through the inner chamber 811, the airflow continues to flow upward, and passes through the condenser 86 to condense the airflow. A second thermocouple is set on the condenser to detect the temperature of the airflow passing through the condenser 86, and then adjust the condensation temperature of the condenser 86, the flow rate of the condensate and other parameters, and adjust the condensation effect of the condenser 86, so that the temperature passing through the condenser 86 reaches the preset value. The airflow passing through the condenser is subjected to secondary temperature control by the condenser 86 and the second thermocouple. By performing dual control of the temperature of the airflow (primary temperature control and secondary temperature control), the temperature control accuracy of the airflow for cooling the battery cell is ensured to be higher, and the temperature difference of the gas temperature for cooling the battery cell can be controlled within 1°C. A good balance can be achieved in the light source intensity and the cooling temperature of the battery cell, thereby improving the anti-light decay effect of the battery cell. After the airflow cools the battery cell, it enters the inner chamber 811 again through the buffer chamber 82 from the reflux channel 87, and circulates in sequence.
[0048] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0049] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. An anti-light decay furnace, comprising an upper mold group (11) and a lower mold group (12), wherein the upper mold group (11) and the lower mold group (12) are mutually engaged to form a channel for transmission by a transmission device (2), characterized in that: A cooling mechanism (8) is arranged below the transmission device (2), and the cooling mechanism (8) comprises a condenser (86) and a temperature control component arranged below the condenser (86). The airflow for cooling the battery cells first passes through the temperature control component and then enters the condenser (86) for condensation. The temperature control component can heat or cool the airflow to a preset temperature before entering the condenser (86).
2. The anti-light decay furnace according to claim 1, characterized in that: The temperature control component includes a temperature control component and a temperature measuring component. The temperature measuring component is used to test the temperature of the gas, and the temperature control component heats or cools the gas according to the temperature tested by the temperature measuring component.
3. The anti-light decay furnace according to claim 2, characterized in that: The temperature measuring component is a thermocouple 1, and the temperature controlling component is a heating ring (84).
4. The anti-light decay furnace according to claim 1, characterized in that: The cooling mechanism (8) comprises an isolation cover (81), the isolation cover (81) is arranged in the groove body (121) of the lower module (12), the temperature control component is arranged in the inner chamber (811) of the isolation cover (81), and the condenser (86) is arranged above the isolation cover (81), and the airflow first passes through the inner chamber (811) and then enters the condenser (86) for condensation.
5. The anti-light decay furnace according to claim 4, characterized in that: The cooling mechanism (8) also includes a fan (83), and the fan (83) includes a driving member (831) arranged below the bottom wall of the trough body (121). The driving shaft 2 (8311) of the driving member (831) passes through the bottom wall of the trough body (121) and the bottom wall of the isolation cover (81), extends into the inner chamber (811), and is connected to the fan blades (832) located in the inner chamber (811). The driving member (831) can drive the fan blades (832) to rotate.
6. The anti-light decay furnace according to claim 5, characterized in that: A cover plate (833) is fixedly arranged directly above the fan blade (832); the cover plate (833) is arranged in the inner chamber (811) and is arranged close to the fan blade (832).
7. The anti-light decay furnace according to claim 4, characterized in that: A mesh plate (85) is provided between the condenser (86) and the isolation cover (81), and upper and lower side surfaces of the mesh plate (85) are respectively in contact with the condenser (86) and the isolation cover (81).
8. The anti-light decay furnace according to claim 4, characterized in that: A gap is left between the bottom wall of the isolation cover (81) and the bottom wall of the trough body (121) to form a buffer chamber (82) for air flow to pass through; a gas inlet (821) is provided on the bottom wall of the trough body (121), the gas inlet (821) and the buffer chamber (82) are in communication, and gas enters the buffer chamber (82) after passing through the gas inlet (821); a connecting hole is provided at the bottom of the isolation cover (81) to connect the buffer chamber (82) and the inner chamber (811), and gas in the buffer chamber (82) can enter the inner chamber (811) through the connecting hole.
9. The anti-light decay furnace according to claim 8, characterized in that: A gap is left between the side wall of the isolation cover (81) and the side wall of the groove body (121) to form a reflux channel (87) for airflow to pass through, and the reflux channel (87) is communicated with the buffer chamber (82), so that the airflow in the reflux channel (87) can enter the buffer chamber (82).
10. The anti-light decay furnace according to claim 4, characterized in that: The cooling mechanism (8) further comprises a gas outflow pipe (812), wherein the gas outflow pipe (812) runs through the inner chamber (811) and the tank body (121), and the gas in the inner chamber (811) can flow to the outside of the tank body (121) through the gas outflow pipe (812).