Thermoelectric ion sputtering device convenient to plug and unplug

Abstract

The utility model discloses a thermoelectric ion sputtering device convenient to plug and pull, and relates to the technical field of ion sputtering equipment. The outer wall of the shell is fixedly connected to the top end of the ion gun seat; the acceleration pole is positioned in the shell; according to the utility model, the generation end is arranged, the filament is ionized and decomposed into charge ions after being heated, the current of the connector is adjusted, so that the heat of the filament is adjusted, the quantity of decomposed charges is controlled, and the charges move towards the upper end of the anode strip under the action of anode voltage and a magnetic field; evolved ions are made to rotate at a high speed under the action of a magnetic field through the magnetic column, the ions rapidly impact upwards under the action of accelerating the movement speed of the ions through the accelerating pole and the high negative voltage of the first grid, then pass through the second grid and are rapidly ejected out of holes of the second grid to etch the metal surface, the reactive sputtering deposition process is stable, and the deposition efficiency is high. And the ion transmission efficiency is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of ion sputtering equipment, in particular to a thermoelectric ion sputtering device which is easy to plug and unplug. Background Art

[0002] Ion sputtering is a method of physical vapor deposition. Inert gas (such as argon) is introduced into the vacuum chamber to make it glow discharge under high voltage. The gas ions bombard the cathode target made of the film material under the action of the strong electric field, so that the atoms on the surface are sputtered out and deposited on the substrate to form a film. The ion sputtering coating method is a new method to enhance the interphase contrast display structure by forming an interference film by ion sputtering.

[0003] However, in the prior art, existing thermoelectric ion sputtering devices mostly adopt fixed settings with complex structures, cannot be quickly disassembled for maintenance, and cannot be adjusted. In addition, the uneven etching rate of the entire target surface causes the deposition rate to drift, which is particularly serious in reactive sputtering, resulting in instability in the reactive sputtering deposition process, low coating efficiency, and poor production efficiency. Utility Model Content

[0004] In view of the deficiencies in the prior art, the technical solution adopted by the utility model to solve the technical problems is: a thermoelectric ion sputtering device that is easy to plug and unplug, comprising: an ion gun seat; an outer shell, the outer wall of which is fixedly connected to the top of the ion gun seat; an accelerating electrode, which is located inside the shell; an emitting end, the bottom end of which is fixedly connected to the top of the shell; a generating end, which is located at the bottom end of the ion gun seat; the emitting end comprises a first grid, the two ends of the first grid are symmetrically fixedly connected with ceramic partitions, the top of the ceramic partition is fixedly connected with a second grid, and the bottom end of the first grid is fixedly connected to the top of the shell.

[0005] Preferably, the accelerating electrode is symmetrically fixedly connected to the top of the ion gun seat, and the emitting end is arranged at the top of the accelerating electrode. The positively charged argon ions are repelled by the high voltage positive charge of the anode plate and attracted by the negatively charged accelerating electrode, so that the ions keep moving in a straight line and avoid collision.

[0006] Preferably, the inner wall of the ion gun seat is symmetrically fixedly connected with an upper magnetic column fixing bar, the outer wall of the bottom end of the upper magnetic column fixing bar is fixedly connected with a magnetic column, and the bottom end of the magnetic column is fixedly connected with a lower magnetic column fixing bar. When ions pass through the magnetic column between the upper magnetic column fixing bar and the lower magnetic column fixing bar, the ions are caused to rotate at high speed under the action of the magnetic field.

[0007] Preferably, the inner wall of the ion gun seat is symmetrically fixedly connected with an anode sheet, the top of the anode sheet is fixedly connected with a square magnet, and the anode sheet is arranged at the bottom end of the lower magnetic column fixing bar. After the anode sheet is connected to the positive voltage, through the square magnet at the top thereof, under the action of the anode voltage and the magnetic field, the electric charge moves to the upper end of the anode sheet and repels the positively charged argon ions.

[0008] Preferably, the generating end includes a filament holder, the inner wall of the filament holder is fixedly connected with a connector, the outer wall of the connector is fixedly connected with a vacuum tube, and the outer wall of the connector is fixedly connected with a filament. The filament is arranged inside the vacuum tube, and the top outer wall of the filament holder is fixedly connected with the bottom outer wall of the ion gun holder. The filament is a cathode filament, and by connecting the connector with current, the temperature of the filament is increased to generate a large number of thermal electrons, and by injecting argon gas into the vacuum tube, the filament is ionized and decomposed into positively charged argon ions and a large number of negatively charged electrons after heating.

[0009] The beneficial effects of the utility model are as follows:

[0010] The utility model sets a generating end, and the filament is ionized and decomposed into charged ions after being heated. The heat of the filament is adjusted by adjusting the current of the connector, and the amount of decomposed charges is controlled. The charges are made to move to the upper end of the anode sheet under the action of the anode voltage and the magnetic field, and the evolved ions are made to rotate at a high speed under the action of the magnetic field through the magnetic column. The speed of ion movement is accelerated at the accelerating pole. Under the action of the high negative voltage of the first grid, the ions quickly impact upward, and then pass through the second grid and are quickly ejected from the second grid holes to etch the metal surface. The reactive sputtering deposition process is stable, the transmission efficiency of the ions is guaranteed, and the overall structure is simple. They are all installed in the ion gun seat, which is convenient for disassembly and maintenance. The filament seat is embedded in the interior of the ion gun seat, which is convenient for plugging and removing the generating end. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is the front view of the utility model;

[0012] Figure 2 It is a cross-sectional view of the utility model;

[0013] Figure 3 It is a structural schematic diagram of the transmitting end of the utility model;

[0014] Figure 4 It is a structural schematic diagram of the anode sheet of the utility model;

[0015] Figure 5 It is a structural schematic diagram of the generating end of the utility model.

[0016] In the figure: 1. ion gun holder; 2. outer shell; 3. accelerating electrode; 4. emitting end; 41. first grid; 42. ceramic partition; 43. second grid; 5. generating end; 501. filament holder; 502. connector; 503. vacuum lamp tube; 504. filament; 6. anode plate; 7. square magnet; 8. upper magnetic column fixing strip; 9. lower magnetic column fixing strip; 10. magnetic column. DETAILED DESCRIPTION

[0017] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific purposes.

[0018] Example:

[0019] See also Figure 1 - Figure 5 The utility model provides a technical solution: a pluggable thermoelectric ion sputtering device, comprising: an ion gun seat 1; a shell 2, the outer wall of the shell 2 is fixedly connected to the top of the ion gun seat 1; an accelerating electrode 3, the accelerating electrode 3 is located inside the shell 2; an emitting end 4, the bottom end of the emitting end 4 is fixedly connected to the top of the shell 2; a generating end 5, the generating end 5 is located at the bottom end of the ion gun seat 1; the emitting end 4 comprises a first grid 41, the two ends of the first grid 41 are symmetrically fixedly connected with ceramic partitions 42, the top of the ceramic partition 42 is fixedly connected with a second grid 43, and the bottom end of the first grid 41 is fixedly connected to the top of the shell 2.

[0020] The accelerating electrode 3 is symmetrically fixedly connected to the top of the ion gun holder 1, and the emission end 4 is arranged at the top of the accelerating electrode 3. The positively charged argon ions are repelled by the high voltage positive charge of the anode plate 6 and attracted by the negatively charged accelerating electrode 3, and the speed of the ions moving is accelerated under the action of the accelerating electrode 3, so that the ions keep moving in a straight line and avoid collision.

[0021] The inner wall of the ion gun seat 1 is symmetrically fixedly connected with an upper magnetic column fixing bar 8, the outer wall of the bottom end of the upper magnetic column fixing bar 8 is fixedly connected with a magnetic column 10, and the bottom end of the magnetic column 10 is fixedly connected with a lower magnetic column fixing bar 9. When ions pass through the magnetic column 10 between the upper magnetic column fixing bar 8 and the lower magnetic column fixing bar 9 fixedly connected at both ends of the ion gun seat 1, the ions are caused to rotate at high speed under the action of the magnetic field.

[0022] The inner wall of the ion gun seat 1 is symmetrically fixedly connected with an anode sheet 6, and the top of the anode sheet 6 is fixedly connected with a square magnet 7, and the anode sheet 6 is arranged at the bottom end of the lower magnetic column fixing bar 9. After the anode sheet 6 is connected to the positive voltage, through the square magnet 7 fixedly connected to the top of the anode sheet 6, under the action of the anode voltage and magnetic field, the electric charge moves to the upper end of the anode sheet 6 and repels the positively charged argon ions.

[0023] The generating end 5 includes a filament holder 501, the inner wall of the filament holder 501 is fixedly connected with a connector 502, the outer wall of the connector 502 is fixedly connected with a vacuum tube 503, and the outer wall of the connector 502 is fixedly connected with a filament 504. The filament 504 is arranged inside the vacuum tube 503, and the top outer wall of the filament holder 501 is fixedly connected with the bottom outer wall of the ion gun holder 1. The connector 502 fixedly connected to the filament holder 501 is connected to a power source, so that the temperature of the filament 504 fixedly connected to the connector 502 is increased, and argon gas is injected into the vacuum tube 503, and the filament 504 is ionized and decomposed into charged ions after being heated in the vacuum tube 503.

[0024] Working principle:

[0025] When in use, the connector 502 on the filament holder 501 is connected to a power source through the generating end 5, thereby increasing the temperature of the filament 504 and injecting argon gas into the vacuum tube 503. After being heated, the filament 504 is ionized and decomposed into Ar+ and Ar- charged ions. The current of the connector 502 is properly adjusted to adjust the heat of the filament 504 and control the amount of decomposed charges. At this time, the anode plate 6 installed inside the ion gun holder 1 is connected to the positive voltage, and through the square magnet 7 at the top thereof, under the action of the anode voltage and the magnetic field, the Ar- charges move to the upper end of the anode plate 6, and the magnetic column 10 between the upper magnetic column fixing bar 8 and the lower magnetic column fixing bar 9 makes the evolved Ar+ ions rotate at a high speed under the action of the magnetic field, and the speed of ion movement is accelerated under the action of the accelerating pole 3, so that the ions maintain a straight line motion, and through the emission end 4 at the top of the shell 2, under the action of the high negative voltage of the first grid 41, the Ar+ ions quickly impact upward, and then through the second grid 43 connected to the ceramic partition 42, they are quickly ejected from the holes of the second grid 43 to etch the metal surface; the filament holder 501 is embedded in the interior of the ion gun holder 1, which is convenient for plugging and removing the generating end 5.

[0026] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. A thermoelectric ion sputtering device that is easy to plug and unplug, characterized in that: include: Ion gun mount (1); A shell (2), the outer wall of which is fixedly connected to the top of the ion gun seat (1); An accelerating electrode (3), wherein the accelerating electrode (3) is located inside the housing (2); A transmitting end (4), the bottom end of the transmitting end (4) being fixedly connected to the top end of the housing (2); A generating end (5), wherein the generating end (5) is located at the bottom end of the ion gun seat (1); The transmitting end (4) comprises a first grid (41), the two ends of the first grid (41) are symmetrically fixedly connected to ceramic partitions (42), the top end of the ceramic partition (42) is fixedly connected to a second grid (43), and the bottom end of the first grid (41) is fixedly connected to the top end of the housing (2).

2. The pluggable thermoelectric ion sputtering device according to claim 1, characterized in that: The accelerating electrode (3) is symmetrically fixedly connected to the top of the ion gun seat (1), and the emitting end (4) is arranged at the top of the accelerating electrode (3).

3. The pluggable thermoelectric ion sputtering device according to claim 2, characterized in that: An upper magnetic column fixing strip (8) is symmetrically fixedly connected to the inner wall of the ion gun seat (1), a magnetic column (10) is fixedly connected to the outer wall of the bottom end of the upper magnetic column fixing strip (8), and a lower magnetic column fixing strip (9) is fixedly connected to the bottom end of the magnetic column (10).

4. The pluggable thermoelectric ion sputtering device according to claim 3, characterized in that: An anode sheet (6) is symmetrically fixedly connected to the inner wall of the ion gun seat (1), a square magnet (7) is fixedly connected to the top of the anode sheet (6), and the anode sheet (6) is arranged at the bottom end of the lower magnetic column fixing bar (9).

5. The pluggable thermoelectric ion sputtering device according to claim 1, characterized in that: The generating end (5) comprises a filament holder (501), the inner wall of the filament holder (501) is fixedly connected to a connector (502), the outer wall of the connector (502) is fixedly connected to a vacuum lamp tube (503), and the outer wall of the connector (502) is fixedly connected to a filament (504).

6. The pluggable thermoelectric ion sputtering device according to claim 5, characterized in that: The filament (504) is arranged inside the vacuum lamp tube (503), and the top outer wall of the filament holder (501) is fixedly connected to the bottom outer wall of the ion gun holder (1).

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