Graphite crucible for SiC crystal growth production through PVT method

Abstract

The utility model relates to the technical field of graphite crucibles, in particular to a graphite crucible for SiC crystal growth production through a PVT method, which comprises a main body mechanism, a fixing mechanism and an auxiliary mechanism, the fixing mechanism is fixedly arranged on the main body mechanism, and the auxiliary mechanism is fixedly arranged on one side of the main body mechanism. The main body mechanism comprises a shell, an electromagnetic induction heating coil, a crucible, a top cover, a movable block, a connecting column, a circular ring, a placing ring and a rotating column. According to the graphite crucible for SiC long crystal production through the PVT method, firstly, raw materials are placed in the crucible, then seed crystals are placed on the placing ring, the rotating handle is rotated, the movable block is rotated into the top cover under the combined action of the rotating handle and the rotating column, the controller controls the electromagnetic induction heating coil to enable the raw materials in the graphite crucible to react to prepare the SiC long crystal, and the SiC long crystal is prepared. And after the preparation is finished, the placing ring is taken out by rotating the rotating handle, so that the device is more convenient to place the seed crystal and collect the SiC long crystal.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite crucibles, in particular to a graphite crucible for SiC crystal growth production using a PVT method. Background Art

[0002] At present, most of the substrates used by domestic SiC power device manufacturers are imported. In order to accelerate the development of the domestic SiC industry and get rid of the situation of being controlled by others, we need to produce our own SiC substrates at a low cost. However, based on the current domestic crystal growth technology, the length of the product rod is limited. In order to reduce costs and increase production, it is necessary to grow a crystal rod of sufficient length, which poses a challenge to the technology of long product.

[0003] The Chinese utility model patent application disclosure CN219689937U discloses a graphite crucible for growing SiC crystal rods by PVT method, including a graphite crucible assembly and a carbon steel barrel, the graphite crucible assembly includes a crucible, an upper cover, a crystal seat, a base and a shelf; the base is installed on the bottom surface of the crucible, the shelf is installed on the base, wherein the top surface of the shelf is convex, and a plurality of heating rods are evenly arranged on the top of the shelf along the circumference, the top cover of the crucible is equipped with an upper cover, the seed crystal is pasted on the bottom of the upper cover in the crucible, the upper cover is connected to the crystal seat by a thread, the SiC raw material sublimates to the crystal seat to form nuclei and grow into a crystal rod, and the crystal seat controls the expansion of the crystal rod. The carbon steel barrel is arranged on the outside of the graphite crucible assembly, and the inner wall and the outer side of the carbon steel barrel are wrapped with graphite carbon felt. This application is beneficial to ensure smooth transmission channels, prevent recrystallization of raw materials, improve sublimation rate and growth length and quality of crystal rods, but the device is troublesome to place seed crystals, and it is troublesome to collect SiC grown crystals. For this reason, we propose a graphite crucible for SiC crystal growth production by PVT method. Utility Model Content

[0004] The utility model aims to provide a graphite crucible for SiC crystal growth production by PVT method, so as to solve the problems raised in the above-mentioned background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A graphite crucible for SiC crystal growth production by a PVT method comprises a main body mechanism, a fixing mechanism and an auxiliary mechanism, wherein the fixing mechanism is fixedly arranged on the main body mechanism, and the auxiliary mechanism is fixedly arranged on one side of the main body mechanism; the main body mechanism comprises an outer shell, an electromagnetic induction heating coil, a crucible, a top cover, a movable block, a connecting column, a circular ring, a placing ring and a rotating column, wherein the electromagnetic induction heating coil is fixedly arranged inside the outer shell, the crucible is fixedly arranged inside the electromagnetic induction heating coil, the top cover is fixedly arranged on the top of the crucible, the movable block is fixedly arranged on the top of the top cover, the connecting column is fixedly arranged on the bottom of the movable block, the circular ring is fixedly arranged on the bottom of the connecting column, the placing ring is fixedly arranged on the bottom of the circular ring, and the rotating column is fixedly arranged on the top of the top cover.

[0007] Preferably, the fixing mechanism comprises a fixing hole, a fixing bolt, a rotating handle, a friction pattern, a threaded ring and a threaded groove, and the fixing hole is opened at the top of the top cover.

[0008] With the above solution, the fixing holes are provided so that the fixing bolts can more firmly fix the crucible and the top cover.

[0009] Preferably, the fixing bolt is movably arranged inside the fixing hole, and the rotating handle is fixedly arranged on the top of the rotating column.

[0010] Through the above solution, the rotating column can be rotated more conveniently by providing the rotating handle.

[0011] Preferably, the friction pattern is fixedly arranged on the rotating handle, the threaded ring is fixedly arranged on the periphery of the movable block, and the threaded groove is opened on the top of the top cover.

[0012] Through the above solution, the friction pattern is provided so that the rotating handle is not easy to slip when the rotating column is used.

[0013] Preferably, the auxiliary mechanism includes a controller, a display screen, an adjustment knob, a control button and a power interface, and the controller is fixedly arranged on one side of the housing.

[0014] Through the above scheme, a controller is provided to control the electromagnetic induction heating coil to perform energized heating.

[0015] Preferably, the display screen is fixedly arranged on the controller, and the adjustment knob is fixedly arranged on the display screen.

[0016] Through the above scheme, the temperature of heating is adjusted by setting the adjustment knob.

[0017] Preferably, the control button is fixedly arranged on the controller, and the power interface is opened on one side of the housing.

[0018] According to the above solution, a power interface is provided for connecting electricity.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] 1. A graphite crucible for SiC crystal growth production by the PVT method. First, the raw materials are placed in the crucible, and then the seed crystal is placed on the placement ring. The rotating handle is turned. Under the combined action of the rotating handle and the rotating column, the movable block rotates into the top cover. The electromagnetic induction heating coil is controlled by a controller to make the raw materials in the graphite crucible react to prepare SiC crystals. After the preparation is completed, the placement ring can be taken out by rotating the rotating handle. The above design makes it more convenient to place seed crystals and collect SiC crystals.

[0021] 2. The graphite crucible for SiC crystal growth production by the PVT method is provided with fixing holes so that the fixing bolts can more firmly fix the crucible and the top cover, and the rotating handle is provided so that the rotating column can be rotated more conveniently. The above design improves the practicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 It is a schematic diagram of the electromagnetic induction heating coil and crucible of the utility model;

[0024] Figure 3 It is a schematic diagram of the thread ring and thread groove of the utility model;

[0025] Figure 4 For this utility model Figure 3 A magnified schematic diagram of center A.

[0026] In the figure: 1. Main body; 101. Shell; 102. Electromagnetic induction heating coil; 103. Crucible; 104. Top cover; 105. Movable block; 106. Connecting column; 107. Ring; 108. Placement ring; 109. Rotating column; 2. Fixing mechanism; 201. Fixing hole; 202. Fixing bolt; 203. Rotating handle; 204. Friction pattern; 205. Threaded ring; 206. Threaded groove; 3. Auxiliary mechanism; 301. Controller; 302. Display screen; 303. Adjustment knob; 304. Control button; 305. Power interface. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1 - Figure 4 As shown, a technical solution provided by the utility model:

[0029] A graphite crucible for SiC crystal growth production by a PVT method comprises a main mechanism 1, a fixing mechanism 2 and an auxiliary mechanism 3. The fixing mechanism 2 is fixedly arranged on the main mechanism 1, and the auxiliary mechanism 3 is fixedly arranged on one side of the main mechanism 1. The main mechanism 1 comprises an outer shell 101, an electromagnetic induction heating coil 102, a crucible 103, a top cover 104, a movable block 105, a connecting column 106, a circular ring 107, a placing ring 108 and a rotating column 109. The electromagnetic induction heating coil 102 is fixedly arranged inside the outer shell 101, the crucible 103 is fixedly arranged inside the electromagnetic induction heating coil 102, the top cover 104 is fixedly arranged on the top of the crucible 103, the movable block 105 is fixedly arranged on the top of the top cover 104, the connecting column 106 is fixedly arranged on the bottom of the movable block 105, the circular ring 107 is fixedly arranged on the bottom of the connecting column 106, the placing ring 108 is fixedly arranged on the bottom of the circular ring 107, and the rotating column 109 is fixedly arranged on the top of the top cover 104.

[0030] In this embodiment, preferably, the fixing mechanism 2 includes a fixing hole 201 , a fixing bolt 202 , a rotating handle 203 , a friction pattern 204 , a threaded ring 205 and a threaded groove 206 , and the fixing hole 201 is provided at the top of the top cover 104 .

[0031] According to the above solution, by providing the fixing holes 201 , the fixing bolts 202 can more firmly fix the crucible 103 and the top cover 104 .

[0032] In this embodiment, preferably, the fixing bolt 202 is movably disposed inside the fixing hole 201 , and the rotating handle 203 is fixedly disposed on the top of the rotating column 109 .

[0033] Through the above solution, the rotating handle 203 is provided so that the rotating column 109 can be rotated more conveniently.

[0034] In this embodiment, preferably, the friction pattern 204 is fixedly disposed on the rotating handle 203 , the threaded ring 205 is fixedly disposed on the periphery of the movable block 105 , and the threaded groove 206 is opened on the top of the top cover 104 .

[0035] According to the above solution, the friction pattern 204 is provided to prevent the rotating handle 203 from slipping when the rotating column 109 is used.

[0036] In this embodiment, preferably, the auxiliary mechanism 3 includes a controller 301 , a display screen 302 , an adjustment knob 303 , a control button 304 and a power interface 305 , and the controller 301 is fixedly disposed on one side of the housing 101 .

[0037] According to the above scheme, the controller 301 is provided to control the electromagnetic induction heating coil 102 to perform energized heating.

[0038] In this embodiment, preferably, the display screen 302 is fixedly disposed on the controller 301 , and the adjustment knob 303 is fixedly disposed on the display screen 302 .

[0039] Through the above solution, the heating temperature is adjusted by setting the adjustment knob 303.

[0040] In this embodiment, preferably, the control button 304 is fixedly arranged on the controller 301 , and the power interface 305 is opened on one side of the housing 101 .

[0041] According to the above solution, the power interface 305 is provided for connecting to electricity.

[0042] When using a graphite crucible for SiC crystal growth production by the PVT method of this embodiment, the raw materials are first placed in the crucible 103, and then the seed crystal is placed on the placement ring 108, and the rotating handle 203 is turned. Under the combined action of the rotating handle 203 and the rotating column 109, the movable block 105 rotates into the top cover 104, and the electromagnetic induction heating coil 102 is controlled by the controller 301 to make the raw materials in the graphite crucible 103 react to prepare SiC crystals. After the preparation is completed, the placement ring 108 can be taken out by rotating the rotating handle 203. The above design makes it more convenient for the device to place seed crystals and collect SiC crystals. By setting the fixing hole 201, the fixing bolt 202 can more firmly fix the crucible 103 and the top cover 104. By setting the rotating handle 203, the rotating column 109 can be rotated more conveniently. The above design improves the practicality of the device.

[0043] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A graphite crucible for SiC crystal growth production by PVT method, comprising a main mechanism (1), a fixing mechanism (2) and an auxiliary mechanism (3), characterized in that: The fixing mechanism (2) is fixedly arranged on the main mechanism (1), and the auxiliary mechanism (3) is fixedly arranged on one side of the main mechanism (1). The main mechanism (1) comprises a housing (101), an electromagnetic induction heating coil (102), a crucible (103), a top cover (104), a movable block (105), a connecting column (106), a circular ring (107), a placement ring (108) and a rotating column (109). The electromagnetic induction heating coil (102) is fixedly arranged inside the housing (101), and the crucible (103) is fixedly arranged inside the housing (101). 3) is fixedly arranged inside the electromagnetic induction heating coil (102), the top cover (104) is fixedly arranged on the top of the crucible (103), the movable block (105) is fixedly arranged on the top of the top cover (104), the connecting column (106) is fixedly arranged on the bottom of the movable block (105), the ring (107) is fixedly arranged on the bottom of the connecting column (106), the placement ring (108) is fixedly arranged on the bottom of the ring (107), and the rotating column (109) is fixedly arranged on the top of the top cover (104).

2. A graphite crucible for SiC crystal growth production by PVT method according to claim 1, characterized in that: The fixing mechanism (2) comprises a fixing hole (201), a fixing bolt (202), a rotating handle (203), a friction pattern (204), a threaded ring (205) and a threaded groove (206); the fixing hole (201) is provided at the top of the top cover (104).

3. A graphite crucible for SiC crystal growth production by PVT method according to claim 2, characterized in that: The fixing bolt (202) is movably arranged inside the fixing hole (201), and the rotating handle (203) is fixedly arranged on the top of the rotating column (109).

4. A graphite crucible for SiC crystal growth production by PVT method according to claim 2, characterized in that: The friction pattern (204) is fixedly arranged on the rotating handle (203), the threaded ring (205) is fixedly arranged on the periphery of the movable block (105), and the threaded groove (206) is opened on the top of the top cover (104).

5. The graphite crucible for SiC crystal growth production by PVT method according to claim 1, characterized in that: The auxiliary mechanism (3) comprises a controller (301), a display screen (302), an adjustment knob (303), a control button (304) and a power interface (305); the controller (301) is fixedly arranged on one side of the housing (101).

6. A graphite crucible for SiC crystal growth production by PVT method according to claim 5, characterized in that: The display screen (302) is fixedly arranged on the controller (301), and the adjustment knob (303) is fixedly arranged on the display screen (302).

7. The graphite crucible for SiC crystal growth production by PVT method according to claim 5, characterized in that: The control button (304) is fixedly arranged on the controller (301), and the power interface (305) is opened on one side of the housing (101).

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