Growth cavity assembly

Abstract

The utility model relates to the technical field of diamond crystal growth, in particular to a growth cavity assembly. The growth cavity assembly comprises a cavity; the scale ruler comprises a plurality of scale units arranged on the inner wall of the cavity, and the scale units are sequentially arranged in the height direction of the cavity. Therefore, the growth thickness of the diamond can be measured quickly and efficiently, growth parameters are adjusted, and the crystal growth thickness of the diamond can be controlled conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of diamond crystal growth, in particular to a growth cavity component. Background Art

[0002] Diamond is the material with the highest hardness and thermal conductivity known in nature. It has high Young's modulus, elastic modulus, and sound propagation speed, good optical transmittance, wide bandgap, high electron mobility, good chemical stability at room temperature, and good biocompatibility and excellent radiation resistance. It can be used in high-end cutting tools, emission windows of high-power lasers, laser crystals, lenses of high-power ultraviolet / infrared optical instruments, biosensors, high-energy particle detectors, audio diaphragms and other fields.

[0003] MPCVD, or microwave plasma chemical vapor deposition, is the best method for growing large-size, high-purity diamonds. Currently, the MPCVD method grows diamonds in a vacuum chamber, which has the following problems:

[0004] During the diamond crystal growth process, it is impossible to measure the growth thickness of the diamond during the growth process, which results in the inability to adjust the growth parameters in a timely manner, making it difficult to regulate the diamond crystal growth situation. Utility Model Content

[0005] The purpose of the utility model includes, for example, providing a growth chamber component, which can quickly and efficiently measure the diamond growth thickness and adjust the growth parameters, thereby facilitating the control of the diamond growth crystal thickness.

[0006] The embodiments of the present invention can be implemented as follows:

[0007] In a first aspect, the utility model provides a growth chamber assembly, comprising:

[0008] Cavity;

[0009] The scale ruler comprises a plurality of scale units arranged on the inner wall of the cavity, and the plurality of scale units are arranged in sequence along the height direction of the cavity.

[0010] In an optional embodiment, the scale unit is embedded on the inner wall of the cavity; the surface of the scale unit is flush with the inner wall surface of the cavity.

[0011] In an optional embodiment, a plurality of receiving grooves are provided on the inner wall of the cavity, and a plurality of the scale units are embedded in the plurality of receiving grooves one by one, each of the receiving grooves matches the corresponding scale unit, and the surface of each of the scale units is flush with the inner wall surface of the cavity.

[0012] In an optional embodiment, the scale unit is detachably disposed on the inner wall of the cavity.

[0013] In an optional embodiment, the scale units all extend along the direction of the inner circumference of the cavity; the scale units are in the shape of an arc or a ring; and along the height direction of the cavity, two adjacent scale units are spaced apart.

[0014] In an optional embodiment, the material of the scale unit is an inert metal;

[0015] And / or, the material of the scale unit is gold or silver.

[0016] In an optional embodiment, a transparent observation window is provided on the cavity;

[0017] The growth chamber assembly further includes an image acquisition mechanism, which is disposed outside the chamber, and an image acquisition window of the image acquisition mechanism faces the observation window and the scale ruler.

[0018] In an optional embodiment, the observation window faces the scale, and the image acquisition window of the image acquisition mechanism faces the observation window.

[0019] In an optional implementation, the image acquisition mechanism is a high-precision camera.

[0020] In an optional embodiment, it further includes a substrate stage and a sample stage;

[0021] The sample stage is arranged at the bottom of the cavity, and the substrate stage is arranged at the top of the sample stage;

[0022] The substrate stage is used for placing diamond seed crystals.

[0023] In an optional embodiment, the sample stage is movably disposed at the bottom of the cavity;

[0024] The growth chamber assembly further includes a controller, and the controller is electrically connected to the image acquisition mechanism and the sample stage respectively.

[0025] The beneficial effects of the embodiments of the present utility model include, for example:

[0026] The growth chamber assembly of the present scheme includes a chamber and a scale ruler. The chamber serves as a container for placing diamond seed crystals and diamond deposition crystal growth. The scale units of the scale ruler are arranged on the inner wall of the chamber, and the scale units are arranged in sequence along the height direction of the chamber. When in use, the diamond seed crystal is aligned with the preset scale unit, and the thickness of the grown crystal can be obtained by observing the distance / number of scales between the top-aligned scale unit and the preset scale unit after the diamond crystal growth. It is understandable that the preset scale unit here can be the 0 scale line. At the same time, because multiple scale units extend along the height direction of the chamber, the extension direction of the scale unit is the thickness direction of the grown crystal, thereby ensuring accurate measurement of the thickness of the grown crystal. In summary, the growth chamber assembly can quickly and conveniently measure the thickness of the diamond grown crystal, while realizing intuitive observation of the diamond thickness, facilitating adjustment of growth parameters, and facilitating control of the thickness of the diamond grown crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a schematic diagram of the structure of a growth chamber assembly according to an embodiment of the utility model;

[0029] Figure 2 A schematic structural diagram of a growth chamber assembly from another perspective of an embodiment of the utility model;

[0030] Figure 3 It is a partial schematic diagram of the scale scale of the growth chamber assembly of an embodiment of the utility model;

[0031] Figure 4 A schematic structural diagram of a scale ruler of an implementation manner of a growth chamber assembly of an embodiment of the utility model;

[0032] Figure 5 A schematic structural diagram of a scale ruler of another implementation manner of a growth chamber assembly of an embodiment of the utility model;

[0033] Figure 6 This is a schematic structural diagram of a scale ruler of another implementation manner of the growth chamber assembly of an embodiment of the present utility model.

[0034] Icons: 10-growth chamber assembly; 11-diamond seed crystal; 100-chamber; 110-observation window; 200-scale ruler; 201-scale unit; 300-image acquisition mechanism; 400-substrate stage; 500-sample stage. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0038] In the description of the present utility model, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the utility model product is usually placed when used. It is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present utility model.

[0039] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0040] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0041] MPCVD, or microwave plasma chemical vapor deposition, is a method of growing diamond in a vacuum chamber. Specifically, the chamber is similar to a hollow cylinder, which is placed in a microwave crystal growth furnace. The crystal growth furnace emits microwaves, causing the electrons in the chamber to collide with each other, generating a higher density plasma, which is then deposited to form (crystalline) diamond.

[0042] Since the crystal growth furnace is a microwave device and the cavity is a vacuum cavity, it is necessary to design a microwave shielding structure and a vacuum sealing structure to prevent microwave leakage and reduce the vacuum leakage rate. Therefore, the cavity is an opaque structure. Such structural characteristics make it impossible to measure the thickness of diamond growth during the diamond crystal growth process, and thus it is impossible to adjust the crystal growth parameters in time according to the crystal thickness, and it is impossible to ensure the quality of diamond crystal growth.

[0043] In order to improve the above technical problems, a growth chamber assembly 10 is provided in the following embodiment.

[0044] Please refer to Figure 1 This embodiment provides a growth chamber assembly 10 , including a chamber 100 , a scale 200 , and an image acquisition mechanism 300 .

[0045] Cavity 100;

[0046] The scale ruler 200 includes a plurality of scale units 201 disposed on the inner wall of the cavity 100 , and the plurality of scale units 201 are sequentially arranged along the height direction of the cavity 100 .

[0047] The cavity 100 serves as a container for placing the diamond seed crystal 11 and for depositing and growing diamond crystals.

[0048] The scale unit 201 of the scale ruler 200 is arranged on the inner wall of the cavity 100 to mark the thickness of the diamond crystal. Specifically, firstly, by observing and recording the scale unit 201 that the diamond is facing when the crystal is not growing; after the crystal growth starts, by observing and recording the other scale unit 201 that is facing the top after the diamond crystal is grown, the thickness of the crystal can be obtained by the scale number or the distance between the above two scale units 201. The multiple scale units 201 extend along the height direction of the cavity 100, so that the extension direction of the scale unit 201 is the thickness direction of the crystal growth, thereby ensuring the accurate measurement of the thickness of the crystal growth. In this way, the growth cavity assembly 10 can quickly and conveniently measure the thickness of the diamond crystal, and at the same time realize the intuitive observation of the diamond thickness, which is convenient for adjusting the growth parameters and controlling the thickness of the diamond crystal.

[0049] Please continue reading Figure 1 , Figure 2 and Figure 3 , to understand more structural details of the growth chamber assembly 10. As can be seen from the figure, optionally, in this embodiment, the chamber 100 is a hollow cylindrical barrel structure. The interior of the chamber 100 is used to place the diamond seed crystal 11 and accommodate the microwave plasma atmosphere. Optionally, the chamber 100 is made of an opaque material. In this embodiment, the chamber 100 is made of stainless steel.

[0050] A transparent observation window 110 is provided on the cavity 100 at the middle position along the height direction of the cavity 100. Furthermore, a circular through hole is provided on the cavity 100, and a quartz glass is sealedly provided on the through hole to form the observation window 110. The through hole and the side of the quartz glass close to the cavity 100 are both flush with the inner wall of the cavity 100, so that the inner surface of the cavity 100 is kept smooth, thereby avoiding interference with the deposition of plasma on the seed crystal, and ensuring that the microwave plasma in the cavity 100 can grow crystals smoothly.

[0051] from Figure 1 It can also be seen that the growth chamber assembly 10 also includes an image acquisition mechanism 300, which is arranged outside the chamber 100, and the image acquisition window of the image acquisition mechanism 300 faces the observation window 110 and the scale ruler 200. The image acquisition mechanism 300 can timely acquire the relative position relationship between the scale ruler 200 and the diamond crystal before growth. Specifically, the initial picture of the position of the diamond seed crystal 11 corresponding to the preset scale unit 201 before crystal growth, and the crystal growth picture of the position of the scale unit 201 corresponding to the highest point of the diamond crystal after crystal growth are recorded respectively. By comparing the difference of the scale unit 201 between the crystal growth picture and the initial picture, the thickness of the grown crystal can be measured.

[0052] Optionally, the image acquisition window of the image acquisition mechanism 300 is directly opposite to the scale ruler 200. The setting directly opposite to the scale ruler 200 can ensure that the image acquisition mechanism 300 obtains a clear picture with clear scale units 201, so as to facilitate accurate identification of the corresponding scale units 201 during shooting and recording.

[0053] Optionally, the image acquisition window of the image acquisition mechanism 300 faces the observation window 110. This ensures that the image acquisition device can efficiently and quickly acquire images of the relative position of the diamond relative to the scale ruler 200, that is, images of the scale unit 201 facing the top of the diamond at different growth stages.

[0054] Optionally, the image acquisition mechanism 300 is a high-precision camera. A high-precision camera has the advantages of high picture pixels and good clarity, which is conducive to accurately recording and identifying the corresponding scale unit 201 during shooting. Figure 2 , a high-precision camera is arranged directly in front of the observation window 110 .

[0055] The camera window of the high-precision camera covers the range of the observation window 110. Before the diamond starts to grow, the camera is used to directly observe or take pictures to determine whether the substrate stage 400 has reached the initial position. During the diamond growth process, the camera is used to directly observe or take pictures to observe the position of the diamond surface and the scale unit 201, and the growth parameters are adjusted according to the thickness change / to determine whether the thickness reaches the required thickness for crystal growth.

[0056] It is easy to understand that in other embodiments of the present invention, the growth chamber assembly 10 may not be provided with the image acquisition mechanism 300, but the position of the corresponding scale unit 201 of the diamond crystal during the crystal growth process is directly observed and recorded manually through the observation window 110.

[0057] Please continue reading Figure 1 , Figure 2 and Figure 3 As can be seen from the figure, optionally, the scale unit 201 is embedded on the inner wall of the cavity 100, and the surface of the scale unit 201 is flush with the inner wall surface of the cavity 100. In this way, the inner surface of the cavity 100 can be kept smooth, thereby avoiding interference with the deposition of plasma on the seed crystal, thereby achieving a flat and uniform plasma fireball when the vacuum cavity 100 resonates, ensuring that the microwave plasma in the cavity 100 can grow crystals smoothly, and thus ensuring the quality of diamond crystal growth.

[0058] Optionally, a plurality of receiving grooves are provided on the inner wall of the cavity 100, and a plurality of scale units 201 are embedded in the plurality of receiving grooves in a one-to-one correspondence, each receiving groove matches the corresponding scale unit 201, and the surface of each scale unit 201 is flush with the inner wall surface of the cavity 100. Specifically, each receiving groove matches the corresponding scale unit, and each receiving groove matches the shape and / or size of the corresponding scale unit. In this way, it is possible to ensure that the inner surface of the cavity 100 remains smooth, thereby avoiding interference with the deposition of plasma on the seed crystal, thereby achieving a flat and uniform plasma fireball when the vacuum cavity 100 resonates, ensuring that the microwave plasma in the cavity 100 can grow crystals smoothly, and thus ensuring the quality of diamond crystal growth.

[0059] Optionally, the material of the scale unit 201 is an inert metal. Inert metals have stable chemical properties and can prevent the scale unit 201 from reacting physically and chemically with the plasma in the cavity 100 during the crystal growth process, thereby affecting the growth of diamond crystals. Optionally, the material of the scale unit 201 is either gold or silver. Gold and silver have eye-catching colors, and when the image acquisition device acquires a photo, the image of the scale unit 201 facing the top of the diamond can be clearly shown.

[0060] Optionally, the scale unit 201 is detachably arranged on the cavity 100. The detachable matching mode of the scale unit 201 and the cavity 100 is conducive to the maintenance and care of the scale scale, and the loading and unloading is more convenient. Specifically, the scale unit 201 can be detachably embedded on the inner wall of the cavity 100. When a plurality of receiving grooves are provided on the inner wall of the cavity 100, the plurality of scale units 201 can be detachably embedded in the plurality of receiving grooves in a one-to-one correspondence.

[0061] Optionally, the multiple scale units 201 are integrally formed. The integrally formed arrangement has the advantages of being easy to process and disassemble. Figure 4 As shown, the scale ruler 200 as a whole can be an arc-shaped plate, and the diameter of the scale ruler 200 is the same as the diameter of the cavity 100 to ensure that the circumferential surface of the scale ruler 200 and the inner wall of the stainless steel cavity 100 remain flush.

[0062] Further, from Figure 3 and Figure 4 It can also be seen that the multiple scale units 201 are arranged in parallel along the height direction of the cavity 100, and the distances between adjacent scale units 201 are equal. In addition, along the circumferential direction of the cavity 100, the lengths of each scale unit 201 are the same, and the mid-perpendicular lines of each scale unit 201 remain coincident. Such an arrangement can ensure that the multiple scale units 201 are arranged in a centralized manner, so that a high-precision camera can take photos of the scales on the diamond relative scale ruler 200.

[0063] In this embodiment, from the bottom to the top of the cavity 100, the scale ruler 200 includes 11 scale units 201, and the multiple scale units 201 are marked 0, 1, 2, 3...11 from top to bottom, and the numbers indicate the height values ​​of adjacent scale units 201. That is, the name of each scale unit 201 is marked respectively, and it will be expressed as 0 scale line, 1 scale line, 2 scale line...11 scale line. That is, the scale units 201 at this time are scale lines engraved on the arc plate.

[0064] Optionally, two adjacent scale units 201 are spaced apart along the height direction of the chamber 100. In this way, the multiple scale units 201 are arranged in sequence and at intervals, which not only facilitates the loading and unloading of the scale units 201, but also facilitates the intuitive and rapid determination of the height of the growing crystal by reading the number of the scale units 201.

[0065] Optionally, in other embodiments, each scale unit 201 is separately arranged on the cavity 100; the scale units 201 extend along the inner circumference of the cavity 100, and the scale units 201 are flush with the inner wall surface of the cavity 100. That is, each scale unit 201 is a separate arc block with scales, so that the maintenance and care of the scale unit 201 are convenient, and the multiple scale units 201 arranged separately can improve the flexibility of setting the scale ruler 200.

[0066] from Figure 1 , Figure 2 and Figure 3It can also be seen that, optionally, the growth chamber assembly 10 further includes a substrate stage 400 and a sample stage 500; the sample stage 500 is disposed at the bottom of the chamber 100, and the substrate stage 400 is disposed at the top of the sample stage 500; the top of the substrate stage 400 is configured to place the diamond seed crystal 11. In this embodiment, the top of the substrate stage 400 can be lower than the bottom of the scale ruler 200, so that the diamond placed on the substrate stage 400 can be easily aligned with the 0 scale line.

[0067] Furthermore, along the height direction of the chamber 100, at least one of the substrate stage 400 and the sample stage 500 can be raised and lowered, so that the upper surface of the diamond is adjusted to be flush with the 0 scale line on the scale ruler 200 before crystal growth, thereby simplifying the identification and measurement of the height of the grown crystal. That is, when the top of the diamond after crystal growth is facing which scale line, it indicates the height value of the diamond crystal.

[0068] Optionally, the sample stage 500 is arranged at the bottom of the chamber 100 in a liftable manner; the growth chamber assembly 10 may further include a controller, which is electrically connected to the image acquisition mechanism 300 and the sample stage 500. When in use, the controller cooperates with the image acquisition mechanism 300, the substrate stage 400, and the sample stage 500, and the substrate stage 400 and / or the sample stage 500 can be automatically lifted and lowered by taking the initial photo of the diamond seed crystal 11, so as to ensure that the upper surface of the diamond is flush with the 0 scale line on the scale ruler 200.

[0069] Optionally, the scale unit 201 is in an arc shape or an annular shape. Such a configuration is conducive to the scale unit 201 being attached to the inner wall of the cavity 100, thereby ensuring the tightness of the structure.

[0070] See also Figure 4 The cross-sectional shape of the scale unit 201 can be set to be an arc shape with a minor arc. The arc-shaped scale unit 201 has the advantages of occupying a small space and being closely attached to the inner wall of the cavity 100. In another embodiment, as Figure 5 The cross-sectional shape of the scale unit 201 can be set to a semicircular ring. The semicircular ring scale unit 201 has the advantages of occupying a small space and being conveniently attached to the inner wall of the cavity 100. In another embodiment, as Figure 6 The cross-sectional shape of the scale unit 201 can be set to be annular. The annular scale unit 201 has the advantages of being close to and tight to the inner wall of the cavity 100 and increasing the strength of the inner wall of the cavity 100. This is just an example and is not limited to it, as long as the scale unit 201 can measure the diamond growth thickness.

[0071] When the growth chamber assembly 10 is used:

[0072] 1. Clean the diamond and place it on the substrate stage 400;

[0073] 2. Place the substrate stage 400 with diamond on it on the sample stage 500 and close the sample placement door of the chamber 100;

[0074] 3. A high-precision camera is set on the observation window 110 in front of the cavity 100 to observe the initial position of the diamond through the high-precision camera. When the upper surface of the diamond is flush with the 0 scale line on the scale ruler 200, vacuum is drawn, luminescence is started, and growth begins;

[0075] 4. During the growth process, the thickness of the diamond crystal is obtained by observing the position of the upper surface of the diamond and the scale lines on the scale ruler 200;

[0076] 5. Adjust the diamond growth parameters by thickness until the diamond thickness reaches the required thickness for crystal growth.

[0077] In summary, the growth chamber assembly 10 provided in this embodiment has at least the following advantages:

[0078] 1. It is convenient to locate the initial position of the substrate stage 400, which is helpful to determine whether the initial position of the substrate stage 400 is accurate;

[0079] 2. It solves the problem that the diamond thickness cannot be measured during the crystal growth process, which is conducive to intuitively observing the diamond thickness, adjusting the growth parameters, and controlling the thickness of the diamond crystal.

[0080] The above are only specific implementations of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A growth chamber assembly, characterized in that: include: Cavity (100); A scale ruler (200), the scale ruler (200) comprising a plurality of scale units (201) arranged on the inner wall of the cavity (100), the plurality of scale units (201) being arranged in sequence along a height direction of the cavity (100).

2. The growth chamber assembly according to claim 1, characterized in that: The scale unit (201) is embedded on the inner wall of the cavity (100); The surface of the scale unit (201) is flush with the inner wall surface of the cavity (100).

3. The growth chamber assembly according to claim 1, characterized in that: A plurality of receiving grooves are provided on the inner wall of the cavity (100), and a plurality of scale units (201) are embedded in the plurality of receiving grooves in a one-to-one correspondence, each of the receiving grooves matches a corresponding scale unit (201), and a surface of each of the scale units (201) is flush with the inner wall surface of the cavity (100).

4. The growth chamber assembly according to claim 1, characterized in that: The scale unit (201) is detachably arranged on the inner wall of the cavity (100).

5. The growth chamber assembly according to claim 2, characterized in that: The scale units (201) all extend along the direction of the inner circumference of the cavity (100); The scale unit (201) is in the shape of an arc or a ring; Along the height direction of the cavity (100), two adjacent scale units (201) are arranged at intervals.

6. The growth chamber assembly according to claim 1, characterized in that: The material of the scale unit (201) is an inert metal; And / or, the material of the scale unit (201) is either gold or silver.

7. The growth chamber assembly according to any one of claims 1 to 6, characterized in that: The cavity (100) is provided with a transparent observation window (110); The growth chamber component further comprises an image acquisition mechanism (300), wherein the image acquisition mechanism (300) is arranged outside the chamber (100), and an image acquisition window of the image acquisition mechanism (300) faces the observation window (110) and the scale ruler (200).

8. The growth chamber assembly according to claim 7, characterized in that: The observation window (110) faces the scale (200), and the image acquisition window of the image acquisition mechanism (300) faces the observation window (110).

9. The growth chamber assembly according to claim 7, characterized in that: Also includes a substrate stage (400) and a sample stage (500); The sample stage (500) is arranged at the bottom of the cavity (100), and the substrate stage (400) is arranged at the top of the sample stage (500); The substrate stage (400) is used to place a diamond seed crystal (11).

10. The growth chamber assembly according to claim 9, characterized in that: The sample stage is arranged at the bottom of the cavity (100) in a liftable manner; The growth chamber assembly further includes a controller, and the controller is electrically connected to the image acquisition mechanism and the sample stage respectively.

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