Multi-stage fluorine material high-purity magnetic suspension pump

Abstract

The utility model discloses a multistage fluorine material high-purity magnetic suspension pump which comprises a magnetic suspension pump body, the lower end of the magnetic suspension pump body is fixedly connected with a bottom plate, the bottom plate is provided with a protection mechanism, the protection mechanism comprises a vertical rod fixedly connected to the upper end of the bottom plate, and the upper end of the vertical rod is provided with a square frame. According to the magnetic suspension pump, the protection mechanism is arranged outside the pump body, a block can be formed between the pump body and the outside, the possibility that the pump body is collided during use is reduced, a good protection effect is indirectly achieved on the magnetic suspension pump, the service life of the magnetic suspension pump is prolonged, and meanwhile the movable mechanism capable of being stored is further arranged on the protection mechanism. When the magnetic suspension pump needs to be carried, the moving mechanism can stretch out and can be easily moved through the rolling wheels, and when the moving mechanism does not need to be moved, the moving mechanism can be completely stored, so that the magnetic suspension pump can be firmly fixed during working and cannot slide at will, and the use convenience of the magnetic suspension pump is indirectly improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of magnetic suspension pumps, in particular to a multi-stage fluorine material high-purity magnetic suspension pump. Background Art

[0002] A magnetic levitation pump is a device that uses magnetic levitation technology to pump liquids. Generally, in the process of high-end semiconductor manufacturing, the chemical liquid supply system is an indispensable functional unit of high-end semiconductor equipment (such as immersion photolithography machines, wafer cleaning machines, chemical mechanical polishing systems, coating and developing machines, etc.). And its harsh process conditions require that the liquid supply system must have the characteristics of chemical corrosion resistance, no particle contamination, compact structure, large and stable pressure and flow adjustment range, low pulsation, high reliability, etc., and the magnetic levitation pump is the most suitable choice. The magnetic levitation pump includes a magnetic levitation motor and a pump driven by the magnetic levitation motor. The magnetic levitation pump supports and constrains the impeller rotor based on the principle of magnetic levitation, and can be completely sealed in an ultra-clean closed cavity without contact.

[0003] During use, the pump body of the existing magnetic levitation pump is directly exposed to the air. In noisy usage scenarios, it is easy to be hit, which may damage the pump body. At the same time, the magnetic levitation pump itself is heavy. When transporting or moving, it usually requires multiple people to carry it together, which is time-consuming, labor-intensive and very inconvenient. Utility Model Content

[0004] In order to solve the above problems, the purpose of the utility model is to provide a multi-stage fluorine material high-purity magnetic suspension pump.

[0005] To achieve the above-mentioned purpose, the utility model proposes a multi-stage fluorine material high-purity magnetic levitation pump, including a magnetic levitation pump body, the lower end of which is fixedly connected to a base plate, a protective mechanism is provided on the base plate, and the protective mechanism includes a vertical rod fixedly connected to the upper end of the base plate, and a square frame is provided at the upper end of the vertical rod.

[0006] Preferably, the protection mechanism further comprises a second spiral groove formed at the upper end of the vertical rod, the upper end of the square frame is provided with a first spiral groove, and the first spiral groove and the second spiral groove are threadedly connected with fixing screws.

[0007] Preferably, four vertical rods are provided, which are respectively fixedly connected to the corners of the upper surface of the bottom plate.

[0008] Preferably, a moving mechanism is provided inside the base plate, and the moving mechanism includes a spiral groove column penetrating the upper end of the base plate, and the inner wall of the lower end of the base plate is fixedly connected with the spiral column, and the spiral column is threadedly connected to the spiral groove column.

[0009] Preferably, the moving mechanism further comprises a cross bar rotatably connected to the spiral groove column, the lower end of the cross bar is fixedly connected to a connecting rod, the connecting rod passes through the lower end of the base plate and is fixedly connected to a roller.

[0010] Preferably, four rollers are provided, which are respectively fixedly connected to the corners of the lower end surface of the bottom plate.

[0011] The multi-stage fluorine material high-purity magnetic levitation pump proposed by the utility model can bring the following beneficial effects: by arranging a protection mechanism on the outside of the pump body, a barrier can be formed between the pump body and the outside world, reducing the possibility of collision with the pump body during use, indirectly playing a good protective effect on the magnetic levitation pump and improving its service life. At the same time, a storable moving mechanism is also provided on the protection mechanism. When the magnetic levitation pump needs to be moved, the moving mechanism can be extended and easily moved by rollers. When it is not necessary to move, the moving mechanism can be completely storable, so that the magnetic levitation pump can be firmly fixed during operation without sliding at will, indirectly improving the convenience of using the magnetic levitation pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0013] In the attached picture:

[0014] Figure 1 It is the overall structural view of the utility model.

[0015] Figure 2 It is a partial cross-sectional view of the protection mechanism of the utility model.

[0016] Figure 3 For the utility model Figure 2 Enlarged view of point A in the middle.

[0017] Figure 4 It is an overall bottom view of the utility model.

[0018] Figure 5 It is a partial cross-sectional view of the bottom plate of the utility model.

[0019] In the figure: 1. Magnetic levitation pump body; 2. Bottom plate; 3. Spiral groove column; 4. Spiral column; 5. Cross bar; 6. Connecting rod; 7. Roller; 8. Vertical rod; 9. Frame; 10. Fixing screw; 11. First spiral groove; 12. Second spiral groove. DETAILED DESCRIPTION

[0020] In order to more clearly illustrate the overall concept of the present invention, a detailed description is given below in the form of examples in conjunction with the accompanying drawings.

[0021] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0023] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] In the present utility model, unless otherwise clearly specified and limited, the first feature "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. In the description of this specification, the description of reference terms "one scheme", "some schemes", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the scheme or example are included in at least one scheme or example of the present utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same scheme or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more schemes or examples.

[0025] like Figure 1 to Figure 5As shown, an embodiment of the utility model proposes a multi-stage fluorine material high-purity magnetic levitation pump, including a magnetic levitation pump body 1, the lower end of the magnetic levitation pump body 1 is fixedly connected to a base plate 2, and a protection mechanism is provided on the base plate 2. The protection mechanism includes a vertical rod 8 fixedly connected to the upper end of the base plate 2, and a square frame 9 is provided at the upper end of the vertical rod 8. Through the use of multiple vertical rods 8 and square frames 9, a good protection effect can be achieved on the pump body of the magnetic levitation pump. At the same time, due to its hollow design, while protecting the pump body, it will not affect the heat dissipation of the pump body.

[0026] like Figure 2-Figure 3 As shown, the protection mechanism also includes a second spiral groove 12 opened at the upper end of the vertical rod 8, and a first spiral groove 11 is opened at the upper end of the frame 9. The first spiral groove 11 and the second spiral groove 12 are threadedly connected with fixing screws 10. The protection mechanism can be easily disassembled and assembled by the fixing screws 10, which is convenient for subsequent staff to repair and clean the magnetic levitation pump.

[0027] like Figure 1 As shown, four vertical rods 8 are provided and are respectively fixedly connected to the corners of the upper end surface of the base plate 2 .

[0028] like Figure 4-5 As shown, a moving mechanism is provided inside the base plate 2, and the moving mechanism includes a spiral groove column 3 penetrating the upper end of the base plate 2, and a spiral column 4 is fixedly connected to the inner wall of the lower end of the base plate 2, and the spiral column 4 is threadedly connected to the spiral groove column 3. The spiral groove column 3 and the spiral column 4 are used in combination to realize the lifting and lowering of the entire moving mechanism.

[0029] like Figure 4-5 As shown, the moving mechanism also includes a cross bar 5 rotatably connected to the spiral groove column 3, and the lower end of the cross bar 5 is fixedly connected to a connecting rod 6. The connecting rod 6 passes through the lower end of the base plate 2 and is fixedly connected to a roller 7. There are two cross bars 5, which are respectively used to connect two rollers 7, so that it can be more stable when moving.

[0030] like Figure 4 As shown, four rollers 7 are provided, which are respectively fixedly connected to the corners of the lower end surface of the bottom plate 2. The design of multiple rollers 7 makes it convenient for the staff to move the pump body.

[0031] Working principle: when it is necessary to block the magnetic levitation pump body 1, the square frame 9 can be first aligned and placed on the four vertical rods 8, and then the fixing screw 10 can be aligned with the first spiral groove 11 and the second spiral groove 12 and rotated to complete the installation of the protective mechanism, which can play a good blocking and protective effect around the magnetic levitation pump body 1, reduce the possibility of damage to the pump body due to collision, and indirectly increase the service life of the magnetic levitation pump. At the same time, the protective mechanism can be disassembled only by rotating the fixing screw 10, which is very convenient and convenient for the staff to clean or repair the magnetic levitation pump body 1 later. When the magnetic levitation pump body 1 needs to be moved, the spiral groove column 3 can be directly rotated. When the spiral groove column 3 rotates along the spiral column 4, it will begin to descend. While the spiral groove column 3 descends, it will drive the connecting rod 6 to move downward through the cross bar 5. When the connecting rod 6 moves downward, it will push the roller 7 out of the bottom plate 2. Stop rotating the spiral groove column 3 to complete the fixation, which is convenient for moving the magnetic levitation pump body 1, saving time and effort.

[0032] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0033] The above description is only an embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention shall be included in the scope of the claims of the present invention.

Claims

1. A multi-stage fluorine material high-purity magnetic levitation pump, comprising a magnetic levitation pump body (1), characterized in that: The lower end of the magnetic suspension pump body (1) is fixedly connected to a bottom plate (2), and a protection mechanism is provided on the bottom plate (2), wherein the protection mechanism comprises a vertical rod (8) fixedly connected to the upper end of the bottom plate (2), and a square frame (9) is provided at the upper end of the vertical rod (8); A moving mechanism is provided inside the base plate (2), the moving mechanism comprising a spiral groove column (3) penetrating the upper end of the base plate (2), a spiral column (4) is fixedly connected to the inner wall of the lower end of the base plate (2), and the spiral column (4) is threadedly connected to the spiral groove column (3).

2. A multi-stage fluorine material high-purity magnetic levitation pump according to claim 1, characterized in that: The protection mechanism also includes a second spiral groove (12) formed at the upper end of the vertical rod (8), a first spiral groove (11) formed at the upper end of the square frame (9), and a fixing screw (10) is threadedly connected to the first spiral groove (11) and the second spiral groove (12).

3. A multi-stage fluorine material high-purity magnetic levitation pump according to claim 1, characterized in that: There are four vertical rods (8) which are respectively fixedly connected to the corners of the upper end surface of the bottom plate (2).

4. A multi-stage fluorine material high-purity magnetic levitation pump according to claim 3, characterized in that: The moving mechanism also includes a cross bar (5) rotatably connected to the spiral groove column (3), the lower end of the cross bar (5) is fixedly connected to a connecting rod (6), and the connecting rod (6) passes through the lower end of the bottom plate (2) and is fixedly connected to a roller (7).

5. A multi-stage fluorine material high-purity magnetic levitation pump according to claim 4, characterized in that: Four rollers (7) are provided and are respectively fixedly connected to the corners of the lower end surface of the bottom plate (2).

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