Touch panel, touch display panel and mask plate

Abstract

The utility model provides a touch panel, a touch display panel and a mask plate. The touch panel comprises a substrate and a touch electrode, the touch electrode is located on one side of the substrate, the touch electrode comprises wires which intersect with one another to form a grid shape, the wires form intersection nodes at the intersection positions, and each intersection node comprises a connecting part and four branch parts; the four branch parts are distributed on the periphery of the connecting part at intervals and connected with the connecting part into a whole. According to the touch panel, the area of the cross nodes of the wires can be reduced, so that the shielding of the cross nodes of the latticed wires on pixels in the display panel comprising the touch panel can be reduced, and the bad gray spots and moire patterns occurring when the display panel displays can be improved or avoided.

Description

Technical Field

[0001] The utility model belongs to the display field, and specifically relates to a touch panel, a touch display panel and a mask plate. Background Art

[0002] OLED (Organic Light-Emitting Diode) display panels have attracted widespread attention due to their advantages such as self-luminescence, low power consumption, lightness, flexibility, bright colors, high contrast, and fast response rate. Utility Model Content

[0003] The utility model provides a touch panel, a touch display panel and a mask plate to solve the problem that the grid lines and grid nodes of the touch layer block the OLED light-emitting device, resulting in gray dots and moiré patterns when the OLED display panel displays. The touch panel can reduce the area of ​​the crossing nodes of the routing, thereby reducing the blocking of the pixels in the display panel containing the touch panel by the crossing nodes of the grid routing, thereby improving or avoiding the gray dots and moiré patterns when the display panel displays.

[0004] The utility model provides a touch panel, comprising a substrate and a touch electrode, wherein the touch electrode is located on one side of the substrate.

[0005] The touch electrodes include interconnected wires in a grid pattern, wherein the interconnects form intersection nodes at the intersection positions.

[0006] The cross node includes a connection portion and four branch portions, wherein the four branch portions are distributed at intervals around the connection portion and the four branch portions are connected to the connection portion as a whole.

[0007] In some embodiments, among the four branches, two of the branches that are arranged opposite to each other are arranged along the extension direction of one of the two intersecting routing lines and are connected to the routing line, and the other two of the branches that are arranged opposite to each other are arranged along the extension direction of the other routing line and are connected to the routing line;

[0008] At the intersection node position, the two routing lines intersect to form a pair of acute angles and a pair of obtuse angles.

[0009] In some embodiments, the orthographic projection of the intersection node on the substrate is H-shaped.

[0010] In some embodiments, the width of the connecting portion along the pair of acute-angle diagonal arrangement directions and the width of the connecting portion along the pair of obtuse-angle diagonal arrangement directions are both greater than the width of the routing line;

[0011] The width of the branch portion along a direction perpendicular to the extension direction thereof is greater than the width of the routing line.

[0012] In some embodiments, the width of the branch portion along a direction perpendicular to its extension direction is greater than the width of the routing line by 1 / 4 to 1 / 3 of the width of the branch portion;

[0013] And / or, the width of the connection portion along the pair of acute-angle diagonal arrangement directions is greater than the width of the routing line by 1 / 4 to 1 / 3 of the width of the connection portion along the pair of acute-angle diagonal arrangement directions.

[0014] In some embodiments, the width of the trace is in the range of 2 to 3 μm.

[0015] In some embodiments, the width of the connecting portion along the pair of acute angles is in the range of 5.5 to 8 μm.

[0016] The width of the connecting portion along the pair of obtuse-angled diagonal arrangement directions is in the range of 8 to 13 μm;

[0017] The width of the branch portion along a direction perpendicular to the extension direction thereof is in the range of 2.5 to 4.0 μm.

[0018] In some embodiments, the area of ​​the connecting portion ranges from 50 to 80 μm. 2 .

[0019] In some embodiments, an orthographic projection of the branch portion on the substrate includes an arc segment.

[0020] The utility model also provides a touch display panel, comprising a display substrate, wherein the display substrate comprises a plurality of pixels;

[0021] Also includes the above-mentioned touch panel, the touch panel is located on the display side of the display substrate;

[0022] The orthographic projections of some grid-shaped routings and / or at least some cross nodes of the touch electrodes in the touch panel on the display substrate overlap with the pixels.

[0023] The utility model also provides a mask plate, comprising a transparent substrate and a phase conversion layer pattern, wherein the phase conversion layer pattern is located on one side of the transparent substrate.

[0024] The phase conversion layer pattern includes strip portions that intersect each other in a grid shape; the strip portions form a first intersection node at the intersection position;

[0025] A hollow pattern is provided in the strip-shaped portion, and the hollow pattern extends along the extension direction of the strip-shaped portion;

[0026] The first cross node includes a central block and four limb blocks, wherein the four limb blocks are spaced apart and distributed around the central block and the four limb blocks are connected to the central block as a whole;

[0027] The phase conversion layer pattern is used to form the pattern of the touch electrode in the touch panel.

[0028] In some embodiments, the hollow pattern and the width center line of the strip portion where the hollow pattern is located coincide with each other;

[0029] The distance between any side edge of the hollow pattern and the corresponding side edge of the strip portion where the hollow pattern is located is equal;

[0030] The total width of the strip portion along a direction perpendicular to its extension direction ranges from 7.5 to 9.5 μm;

[0031] The width of the hollow pattern along a direction perpendicular to its extension direction ranges from 2.5 to 4.0 μm.

[0032] In some embodiments, the strip portion includes a main body portion and a compensation block, and the main body portion surrounds the hollow pattern;

[0033] The compensation block is located at a position of the main body portion that is 10 to 20 μm away from the center of the first intersection node, and the compensation block is connected to the main body portion as a whole.

[0034] In some embodiments, the hollow pattern separates one of the strip portions into a first main body portion and a second main body portion, and the first main body portion and the second main body portion are located on opposite sides of the extension direction of the hollow pattern;

[0035] The compensation block is located on a side of the first main body away from or close to the hollow pattern, and / or the compensation block is located on a side of the second main body away from or close to the hollow pattern.

[0036] In some embodiments, the long side of the compensation block is parallel to the extension direction of the strip portion, and the wide side of the compensation block is parallel to the wide side of the strip portion;

[0037] The length of the long side of the compensation block ranges from 10 to 15 μm;

[0038] The length of the wide side of the compensation block is in the range of 0.5 to 1 μm.

[0039] In some embodiments, the center of the central block coincides with the center of the first intersection node;

[0040] The two limb blocks arranged opposite to each other are arranged along the extension direction of one of the two crossed strip portions and connected to the strip portion, and the other two limb blocks arranged opposite to each other are arranged along the extension direction of the other strip portion and connected to the strip portion.

[0041] In some embodiments, the two strip-shaped portions at the first intersection node position intersect to form a pair of acute angles and a pair of obtuse angles;

[0042] The four limb blocks are respectively formed with hollowed-out grooves on one side thereof located in the acute-angle diagonal region;

[0043] The first intersection node further includes two compensation parts, the two compensation parts are respectively located in the pair of obtuse diagonal regions, and the compensation part in each obtuse region is connected to the two adjacent limb blocks and the central block;

[0044] The center of the central block is located at the midpoint of a line connecting the centers of the two compensation parts.

[0045] In some embodiments, the width of the limb block along a direction perpendicular to its extension direction is greater than the width of the hollow pattern;

[0046] The width centerline of the limb block does not coincide with the width centerline of the hollow pattern;

[0047] The width of the central block along the direction in which the pair of acute-angle diagonals are arranged and the width of the central block along the direction in which the pair of obtuse-angle diagonals are arranged are both greater than the width of the hollow pattern.

[0048] In some embodiments, the distance between the center of the central block and the hollow pattern ranges from 8.5 to 13 μm;

[0049] The distance between adjacent hollow patterns and hollow grooves ranges from 2.0 to 3.0 μm;

[0050] The distance between the bottom of the hollowed-out groove and the width center line of the strip portion connected to the limb block where the hollowed-out groove is located is in the range of 0.7 to 1.7 μm;

[0051] The distance between the side edge of the limb block away from the hollowed-out groove and the width center line of the strip portion to which the limb block is connected is in the range of 2.4 to 4.0 μm;

[0052] The width of the compensation portion along the direction of the center line of the two compensation portions is the maximum width of the compensation portion, and the maximum width of the compensation portion ranges from 1.5 to 2.5 μm;

[0053] The width of the central block along the pair of acute angles is in the range of 4.0 to 5.0 μm;

[0054] The width of the central block along the pair of obtuse-angled diagonal arrangement directions ranges from 3.0 to 8.0 μm.

[0055] In some embodiments, an orthographic projection of the limb block on the transparent substrate comprises an arc segment.

[0056] Beneficial effects of the present invention: The touch panel provided by the present invention can reduce the area of ​​the crossing nodes of the routing by making the crossing nodes include a connecting portion and four branch portions, the four branch portions are spaced apart at the periphery of the connecting portion and the four branch portions are connected to the connecting portion as a whole, thereby reducing the occlusion of the pixels in the display panel including the touch panel by the crossing nodes of the grid-like routing, thereby improving or avoiding the gray dots and moiré defects that appear when the display panel displays.

[0057] The touch display panel provided by the utility model can reduce the shielding of pixels in the display substrate by the grid-shaped wiring in the touch panel by adopting the above touch panel, thereby improving or avoiding the gray dots and moiré defects that appear when the touch display panel displays.

[0058] The mask plate provided by the utility model can form a routing line thinner than the current routing line width by opening a hollow pattern in the strip portion, and by making the first intersection node include a central block and four limb blocks, the four limb blocks are distributed at intervals on the periphery of the central block and the four limb blocks are connected to the central block as a whole; it can form an intersection node with a smaller area than the diamond node formed by the intersection of the current touch layer grid lines, thereby reducing the occlusion of the pixels in the display panel by the grid-like routing and its intersection nodes, and further improving or avoiding the gray dots and moiré defects that appear when the display panel is displayed. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] Figure 1a A schematic diagram showing gray dots appearing when displaying on a current OLED display panel;

[0060] Figure 1b A schematic diagram of the current double-line crossing design in the touch layer grid line;

[0061] Figure 1c This is an enlarged schematic diagram of the double-line crossing design in the current touch layer grid line;

[0062] Figure 2a It is a schematic top view of a partial structure of a touch panel in an embodiment of the utility model;

[0063] Figure 2b For along Figure 2a Schematic diagram of the structural section view of the CC' section line;

[0064] Figure 2c for Figure 2a The enlarged schematic diagram of the D part;

[0065] Figure 2d It is a schematic top view of a touch electrode in a touch panel according to an embodiment of the utility model;

[0066] Figure 2e For along Figure 2d Schematic diagram of the structural section along the EE' section line;

[0067] Figure 2f This is a schematic top view of a touch electrode in an embodiment of the utility model;

[0068] Figure 2g A schematic top view of a cross node in an embodiment of the utility model;

[0069] Figure 3 It is a schematic top view of a partial structure of a touch display panel in an embodiment of the utility model;

[0070] Figure 4a It is a schematic top view of a local structure of a mask plate in an embodiment of the utility model;

[0071] Figure 4b For along Figure 4a Structural section view of the FF' section line;

[0072] Figure 4c It is a partial top view of the phase conversion layer pattern in the embodiment of the utility model;

[0073] Figure 4d A schematic diagram showing the comparison of exposure light intensity of a common mask and a phase shift mask;

[0074] Figure 4e A schematic top view of the structure of the first intersection node in an embodiment of the utility model;

[0075] Figure 4f This is a schematic diagram showing that the line width is particularly small at a certain distance from the center of the cross node after the routing preparation is completed;

[0076] Figure 4g A schematic diagram of a setting position of a compensation block in an embodiment of the utility model;

[0077] Figure 4h This is another schematic diagram of the arrangement position of the compensation block in the embodiment of the utility model;

[0078] Figure 4i A schematic diagram of the area setting of the connection portion of the cross node in the embodiment of the utility model;

[0079] Figure 4j Another schematic diagram of the area setting of the connection portion of the cross node in the embodiment of the utility model. DETAILED DESCRIPTION

[0080] In order to enable those skilled in the art to better understand the technical solution of the present invention, a touch panel, a touch display panel and a mask plate of the present invention are further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0081] At present, in order to realize the touch function of display panels (such as OLED display panels, LCD display panels, electronic paper, etc.), a touch layer is usually set on the display side of the display panel to realize a touch display panel. For example, in order to realize the touch function of an OLED display panel, the touch layer is usually integrated on the encapsulation layer of the OLED light-emitting device in the OLED display panel, that is, an FMLOC (Flexible Multi Layer On Cell) OLED display panel.

[0082] In the related art, in order to enable the entire display surface of the OLED display panel to be touch-controlled and to improve the touch resolution and touch sensitivity, the touch layer is designed to be in a grid shape (i.e., Metal Mesh), and the grid touch layer covers the entire display surface of the OLED display panel. The grid touch layer has excellent impedance performance, but the grid lines and grid nodes of the touch layer are prone to block the OLED light-emitting devices. For example, for a high-resolution OLED display panel, the OLED light-emitting devices in the panel are densely distributed, and the grid lines and grid nodes of the touch layer are more likely to block the OLED light-emitting devices, causing gray spots to appear when the OLED display panel is displayed (such as Figure 1a The gray dots and moire patterns are caused by the overlapping occlusion phenomenon after the touch layer grid lines are attached to the OLED display panel. They are optical problems caused by the grid lines and grid nodes occluding the OLED light-emitting device.

[0083] After each OLED display panel is prepared, the angle of the moiré caused by the setting of the touch layer grid lines and grid nodes is fixed. To further reduce the impact of the moiré, it is necessary to further reduce the line width of the touch layer grid lines, thereby reducing the occlusion of the touch layer grid lines on the OLED light-emitting device.

[0084] Currently, if Figure 1b and Figure 1c As shown, the touch layer grid lines are designed to be double lines 4 that cross obliquely, and the double lines cross to form diamond nodes 5. Figure 1b , the area of ​​the diamond node 5 can be equivalent to the area of ​​the rectangle A. The area calculation method of the rectangular node is: length × width; for example, the node design in a current product is: length 14.5μm, width 6μm; then the node area is: 14.5×6=87μm2 However, due to the actual exposure process, the length of the node of the actual product is 21.9μm, the width is 7.7μm, and the area of ​​the node is 21.9×7.7=168.63μm 2 It can be seen that the actual value of the intersection node area of ​​the touch layer grid line in the actual production product is obviously much larger than the design value. The reason is that the exposure resolution of the exposure machine makes it impossible to form a pattern when the mask pattern opening width in the mask plate is less than 6μm. The current achievable line width level of the touch layer grid line is 3.5~4.4μm.

[0085] In order to solve the problem that the grid lines and grid nodes of the touch layer block the OLED light-emitting device, resulting in gray dots and moiré patterns appearing when the OLED display panel displays, the embodiment of the utility model provides a touch panel, such as Figure 2a , Figure 2b and Figure 2c As shown, the touch panel includes a substrate 1 and a touch electrode 10, the touch electrode 10 is located on one side of the substrate 1, the touch electrode 10 includes wiring 101 that cross each other in a grid shape, the wiring 101 forms a cross node 102 at the cross position, the cross node 102 includes a connecting portion 1021 and four branch portions 1022, the four branch portions 1022 are spaced apart and distributed around the connecting portion 1021, and the four branch portions 1022 are connected to the connecting portion 1021 as a whole.

[0086] Among them, Figure 2d and Figure 2e As shown, the touch electrode 10 includes a plurality of driving electrode strips 103 and a plurality of sensing electrode strips 104. The plurality of driving electrode strips 103 extend along a first direction X respectively, and the plurality of sensing electrode strips 104 extend along a second direction Y respectively, and the first direction X intersects with the second direction Y. The plurality of driving electrode strips 103 and the plurality of sensing electrode strips 104 are arranged in the same layer, and the sensing electrode strips 104 are disconnected at positions intersecting with the driving electrode strips 103. The touch electrode 10 also includes a plurality of bridge portions 105. The plurality of bridge portions 105 are located in the same layer, and the bridge portions 105 are in different layers from the driving electrode strips 103 and the sensing electrode strips 104. An insulating layer 3 is arranged between the bridge portions 105 and the driving electrode strips 103 and the sensing electrode strips 104. The sensing electrode strips 104 are connected to the bridge portions 105 at the disconnected positions through via holes provided in the insulating layer 3. The sensing electrode strips 104 are electrically connected to the bridge portions 105 to form a whole strip intersecting with the driving electrode strips 103 in space. The driving electrode strips 103 and the sensing electrode strips 104 form mutual capacitance at the spatial intersection, that is, the display panel in this embodiment can realize mutual capacitance touch control. In this embodiment, the bridge 105, the driving electrode strips 103 and the sensing electrode strips 104 are all made of meshed metal wires.

[0087] In some embodiments, Figure 2fAs shown, the touch electrodes 10 are all in a grid shape, for example, they can be double-layered, one layer is a driving electrode including a metal grid, and the other layer is a sensing electrode including a metal grid, the driving electrode includes a plurality of strip-shaped channels (i.e., driving electrode strips 103) formed by cutting a plurality of metal grids, and the sensing electrode includes a plurality of strip-shaped channels (i.e., sensing electrode strips 104) formed by cutting a plurality of metal grids; the metal grids of the two layers are staggered and correspond to each other; Figure 2f As shown, the thicker lines represent the metal mesh of one layer, and the thinner lines represent the metal mesh of another layer.

[0088] In this embodiment, Figure 2d and Figure 2e As shown, the driving electrode and the sensing electrode are located in the same layer, and the sensing electrode is connected by a bridge at the intersection of the strip channels of the driving electrode and the sensing electrode, that is, the driving electrode and the sensing electrode do not cross at the metal wire inside the strip channel, but cross at the bridge. Figure 2d Schematically showing the driving electrode strips 103 and the sensing electrode strips 104 located in the same layer macroscopically; Figure 2e Schematically shows the connection between the sensing electrode strip 104 and the bridge portion 105 at the bridge.

[0089] In this embodiment, each layer of metal grid adopts the metal grid routing structure in this embodiment.

[0090] In this embodiment, by making the intersection node 102 include a connecting portion 1021 and four branch portions 1022, the four branch portions 1022 are spaced apart around the connecting portion 1021 and the four branch portions 1022 are connected to the connecting portion 1021 as a whole, the area of ​​the intersection node of the routing 101 can be reduced, thereby reducing the occlusion of the pixels in the display panel including the touch panel by the intersection node 102 of the grid routing 101, thereby improving or avoiding the gray dots and moiré defects that appear when the display panel displays.

[0091] In some embodiments, Figure 2c As shown, among the four branches 1022, two branches 1022 arranged opposite to each other are arranged along the extension direction of one of the two crossed lines 101 and connected to the line 101, and the other two branches 1022 arranged opposite to each other are arranged along the extension direction of the other line 101 and connected to the line 101; the two lines 101 intersect at the intersection node 102 to form a pair of acute angles and a pair of obtuse angles. Such an arrangement is equivalent to hollowing out and removing part of the area of ​​the diamond node formed by the current double-line intersection, which is located in the pair of acute angles and the pair of obtuse angles, thereby reducing the area of ​​the intersection node 102.

[0092] The routing line 101 described throughout this embodiment refers to the independently extended lead portion outside the cross node 102 .

[0093] In some embodiments, the cross node 102 has an H-shaped orthographic projection on the substrate 1. Compared with the diamond-shaped node formed by the current double-line intersection, the cross node 102 in this embodiment is equivalent to hollowing out the diamond-shaped node, reducing the area of ​​the original diamond-shaped node, so that the area of ​​the diamond-shaped node is reduced to the area of ​​the H-shaped node, thereby greatly reducing the area of ​​the cross node 102, thereby improving or avoiding the cross node 102 from seriously blocking the pixel and causing gray points and moiré defects.

[0094] In some embodiments, the width L1 of the connection portion 1021 along a pair of acute angle diagonal arrangement directions and the width L2 along a pair of obtuse angle diagonal arrangement directions are both greater than the width n of the routing line 101; the width L3 of the branch portion 1022 along a direction perpendicular to its extension is greater than the width n of the routing line 101. Such a configuration, on the one hand, is conducive to a firm connection between the cross node 102 and the routing line 101; on the other hand, it is conducive to increasing the amount of touch sensing signals at the cross node 102, thereby improving the touch sensing sensitivity of the touch electrode 10.

[0095] In some embodiments, the width of the branch portion 1022 along a direction perpendicular to its extension is greater than the width of the routing 101 by 1 / 4 to 1 / 3 of the width of the branch portion 1022; and / or the width of the connecting portion 1021 along a pair of acute-angled diagonal arrangement directions is greater than the width of the routing 101 by 1 / 4 to 1 / 3 of the width of the connecting portion 1021 along a pair of acute-angled diagonal arrangement directions.

[0096] In some embodiments, the width n of the routing line 101 ranges from 2 to 3 μm. Compared with the line width of the current touch layer grid line, the line width of the routing line 101 in this embodiment is reduced, thereby reducing the shielding of the pixels in the display panel including the touch panel by the grid routing line 101, thereby improving or avoiding the gray dots and moiré defects that appear when the display panel is displayed.

[0097] In some embodiments, the width L1 of the connecting portion 1021 along a pair of acute-angle diagonal arrangement directions ranges from 5.5 to 8 μm; the width L2 of the connecting portion 1021 along a pair of obtuse-angle diagonal arrangement directions ranges from 8 to 13 μm; the width L3 of the branch portion 1022 along a direction perpendicular to its extension direction ranges from 2.5 to 4.0 μm.

[0098] In some embodiments, the area of ​​the connection portion 1021 ranges from 50 to 80 μm. 2The area of ​​the connection portion 1021 is equivalent to the actual area of ​​the intersection node in this embodiment. Compared with the area of ​​the diamond node formed by the current double-line intersection, the area of ​​the intersection node in this embodiment is greatly reduced, so that the blocking of the pixels in the display panel including the touch panel by the intersection node 102 of the grid-shaped routing 101 can be reduced to a greater extent, thereby improving or avoiding the gray dots and moiré defects that appear when the display panel is displayed.

[0099] In some embodiments, Figure 2g As shown, the orthographic projection of the branch portion 1022 on the substrate 1 includes an arc segment. For example, the orthographic projection of the branch portion 1022 on the substrate 1 is an S-shaped arc. This can ensure that each branch portion 1022 is firmly connected to each corresponding trace 101 on the one hand, and on the other hand, it is beneficial to increase the amount of touch sensing signals at the intersection node 102, thereby improving the touch sensing sensitivity of the touch electrode 10.

[0100] The touch panel provided in this embodiment can reduce the area of ​​the cross-node of the routing 101 by making the cross-node 102 include a connecting portion 1021 and four branch portions 1022, and the four branch portions 1022 are spaced apart and distributed around the connecting portion 1021 and the four branch portions 1022 are connected to the connecting portion 1021 as a whole. This can reduce the occlusion of the pixels in the display panel including the touch panel by the cross-node 102 of the grid-like routing 101, thereby improving or avoiding the gray dots and moiré defects that appear when the display panel is displayed.

[0101] The present invention also provides a touch display panel. Figure 3 As shown, it includes a display substrate, which includes multiple pixels 100; it also includes the touch panel in the above embodiment, which is located on the display side of the display substrate; the positive projection of part of the grid-like routing and / or at least part of the cross nodes of the touch electrode 10 in the touch panel on the display substrate overlaps with the pixel 100.

[0102] In some embodiments, the touch panel can be directly attached to the display side of the display substrate; in some embodiments, the substrate in the touch panel can also be peeled off, that is, the touch electrode 10 in the touch panel is directly formed on the display side surface of the display substrate.

[0103] In some embodiments, the pixel 100 is a pixel in an OLED light-emitting element, a Mini OLED light-emitting element, a Micro OLED light-emitting element, an LCD display panel, or electronic paper.

[0104] The touch display panel, by adopting the touch panel in the above embodiment, can reduce the shielding of pixels in the display substrate by the grid-shaped wiring in the touch panel, thereby improving or avoiding gray dots and moiré defects that appear when the touch display panel displays.

[0105] The touch display panel can be: OLED panel, OLED TV, Mini OLED panel, Micro OLED panel, LCD panel, electronic paper, mobile phone, tablet computer, notebook computer, display, notebook computer, digital photo frame, navigator and any other product or component with display function.

[0106] The utility model also provides a mask plate, such as Figure 4a-4c As shown, it includes a transparent substrate 6 and a phase conversion layer pattern 2, the phase conversion layer pattern 2 is located on one side of the transparent substrate 6, and the phase conversion layer pattern 2 includes strip portions 200 that cross each other in a grid shape; the strip portions 200 form a first intersection node 202 at the intersection position; a hollow pattern 201 is opened in the strip portion 200, and the hollow pattern 201 extends along the extension direction of the strip portion 200; the first intersection node 202 includes a central block 2021 and four limb blocks 2022, the four limb blocks 2022 are distributed at intervals around the central block 2021, and the four limb blocks 2022 are connected to the central block 2021 as a whole; the phase conversion layer pattern 2 is used to form the pattern of the touch electrode in the above-mentioned touch panel.

[0107] Among them, the hollow pattern 201 corresponds to the pattern of the routing line 101 formed by exposure, the central block 2021 of the first intersection node 202 corresponds to the pattern of the connecting part 1021 of the intersection node 102 formed by exposure, and the four limb blocks 2022 of the first intersection node 202 correspond to the pattern of the four branch parts 1022 of the intersection node 102 formed by exposure.

[0108] In this embodiment, the mask plate adopts PSM (Phase Shift Mask) technology, that is, the mask plate is a phase shift mask plate. Phase shift layer material exists in the phase shift layer pattern 2 area of ​​the mask plate, and there is no phase shift layer material in the area outside the phase shift layer pattern 2 area. The function of the phase shift layer pattern 2 is to change the phase of the exposure light; the working principle of the phase shift mask is: using the mutual interference between the light that undergoes phase change and the light that does not undergo phase change to improve the dephase capability of the exposure light, so that the grid line width of the touch electrode can be made thinner.

[0109] like Figure 4d , which is a schematic diagram comparing the exposure light intensity of a common mask plate and a phase shift mask plate, wherein the common mask plate 91 is a transparent substrate 6 provided with a light shielding layer pattern 8, and the exposure light irradiated on the light shielding layer pattern 8 cannot pass through, while the exposure light irradiated on the area 80 outside the light shielding layer pattern 8 can pass through, so as to expose the touch electrode film layer. Figure 4dIt can be seen that the exposure light passing through the phase shift mask 92 is distributed in a relatively narrow range, while the exposure light passing through the ordinary mask 91 is distributed in a relatively wide range; thereby, the phase shift layer pattern 2 in the phase shift mask 92 can still form a pattern when the line width of the pattern to be formed is less than 6μm, and further, the grid line width of the touch electrode can be made finer by using the phase shift mask 92 than by using the ordinary mask 91.

[0110] In this embodiment, by opening a hollow pattern 201 in the strip portion 200, a routing line thinner than the current routing line width can be formed, and by making the first intersection node 202 include a central block 2021 and four limb blocks 2022, the four limb blocks 2022 are spaced apart around the central block 2021 and the four limb blocks 2022 are connected to the central block 2021 as a whole; an intersection node with a smaller area than the diamond node formed by the intersection of the current touch layer grid lines can be formed, thereby reducing the occlusion of the pixels in the display panel by the grid-like routing and its intersection nodes, and further improving or avoiding the gray dots and moiré defects that appear when the display panel is displayed.

[0111] In some embodiments, Figure 4c and Figure 4e As shown, the width center line of the hollow pattern 201 and the strip portion 200 where it is located coincides; the distance s1 between any side edge of the hollow pattern 201 and the corresponding side edge of the strip portion 200 where the hollow pattern 201 is located is equal. The distance s1 can also be approximately equal. The total width a of the strip portion 200 along the direction perpendicular to its extension is in the range of 7.5 to 9.5 μm; the width b of the hollow pattern 201 along the direction perpendicular to its extension is in the range of 2.5 to 4.0 μm.

[0112] Among them, the hollow pattern 201 corresponds to the routing of the area outside the cross node in the touch electrode. The hollow pattern 201 in the above width range can make the line width of the routing formed by exposure 2 to 3 μm; the line width of the routing in this embodiment is significantly reduced relative to the current routing line width, thereby being able to effectively reduce the occlusion of pixels by the grid-like routing, and further being able to effectively improve or avoid the gray dots and moiré defects that appear when the display panel is displayed.

[0113] In some embodiments, Figure 4c As shown, the strip portion 200 includes a main body 203 and a compensation block 204. The main body 203 surrounds the hollow pattern 201. The compensation block 204 is located at a position P10 to 20 μm away from the center of the intersection node 202 of the main body 203, and the compensation block 204 is connected to the main body 203 as a whole.

[0114] In this embodiment, Figure 4fAs shown, after the routing 101 is prepared, the line width will be particularly small at a position 10 to 20 μm away from the center of the intersection node 102. In order to prevent the routing 101 from being broken at the position where the line width is particularly small, a compensation block 204 is set on the main body 203 corresponding to the position where the line width is particularly small, so as to compensate the line width of the routing 101 at the position where the line width is particularly small.

[0115] In some embodiments, Figure 4c , Figure 4g and Figure 4h As shown, the hollow figure 201 separates a strip portion 200 into a first main body portion 203a and a second main body portion 203b, and the first main body portion 203a and the second main body portion 203b are located on opposite sides of the extension direction of the hollow figure 201; the compensation block 204 is located on the side of the first main body portion 203a that is away from or close to the hollow figure 201, and / or the compensation block 204 is located on the side of the second main body portion 203b that is away from or close to the hollow figure 201.

[0116] In some embodiments, the long side of the compensation block 204 is parallel to the extension direction of the strip portion 200, and the wide side of the compensation block 204 is parallel to the wide side of the strip portion 200; the length e of the long side of the compensation block 204 ranges from 10 to 15 μm; the length f of the wide side of the compensation block 204 ranges from 0.5 to 1 μm.

[0117] In some embodiments, the thickness of the main body 203 and the compensation block 204 of the strip portion 200 can be ignored, that is, the main body 203 and the compensation block 204 of the strip portion 200 can be regarded as plane figures, and the above-mentioned size limitations on the strip portion 200 and its main body 203 and the compensation block 204 are all limitations on its plane figures.

[0118] In some embodiments, Figure 4e As shown, the center of the central block 2021 coincides with the center P of the first intersection node 202; the two limb blocks 2022 arranged opposite to each other are arranged along the extension direction of one of the two intersecting strip portions 200 and connected to the strip portion 200, and the other two limb blocks 2022 arranged opposite to each other are arranged along the extension direction of the other strip portion 200 and connected to the strip portion 200.

[0119] In some embodiments, the thickness of the central block 2021 and the four limb blocks 2022 of the first intersection node 202 can be ignored, that is, the central block 2021 and the four limb blocks 2022 of the first intersection node 202 can be regarded as plane figures, and the subsequent size limitations of the central block 2021 and the four limb blocks 2022 of the first intersection node 202 are all limited to their plane figures.

[0120] In some embodiments, the orthographic projection of the first intersection node 202 on the transparent substrate 6 is approximately in an “H” shape or an “I” shape.

[0121] In some embodiments, Figure 4e As shown, at the position of the first intersection node 202, two strip portions 200 intersect to form a pair of acute-angled corners and a pair of obtuse-angled corners; four limb blocks 2022 respectively form hollow grooves 2022a on one side thereof located in the acute-angled diagonal area; the first intersection node 202 also includes two compensation portions 2023, the two compensation portions 2023 are respectively located in a pair of obtuse-angled diagonal areas, and the compensation portions 2023 in each obtuse-angle area are connected to the two adjacent limb blocks 2022 and the central block 2021; the center of the central block 2021 is located at the midpoint of the line Q connecting the centers of the two compensation portions 2023.

[0122] In some embodiments, Figure 4e As shown, the width s2 of the limb block 2022 along the direction perpendicular to its extension direction is greater than the width b of the hollow pattern 201; the width center line M of the strip portion 200 coincides with the width center line M' of the hollow pattern 201; wherein, the width center line M of the strip portion 200 is the width center line of the entire strip portion 200 including the hollow pattern 201.

[0123] The width center line of the limb block 2022 does not coincide with the width center line M′ of the hollow pattern 201 .

[0124] The width H of the center block 2021 along a pair of acute-angle diagonal arrangement directions and the width N along a pair of obtuse-angle diagonal arrangement directions are both greater than the width b of the hollow pattern 201 .

[0125] In some embodiments, Figure 4e As shown, the distance C between the center of the center block 2021 and the hollow pattern 201 ranges from 8.5 to 13 μm; the distance D between the adjacent hollow pattern 201 and the hollow groove 2022a ranges from 2.0 to 3.0 μm; the distance E between the bottom of the hollow groove 2022a and the width center line M of the strip portion 200 connected to the limb block 2022 where the hollow groove 2022a is located ranges from 0.7 to 1.7 μm; the side line of the limb block 2022 away from the hollow groove 2022a and the limb block 202 The distance F between the width center lines M of the connected strip portions 200 is in the range of 2.4 to 4.0 μm; the width G of the compensation portion 2023 along the center line Q of the two compensation portions 2023 is the maximum width of the compensation portion 2023, and the maximum width of the compensation portion 2023 is in the range of 1.5 to 2.5 μm; the width H of the central block 2021 along a pair of acute angle diagonal arrangement directions is in the range of 4.0 to 5.0 μm; the width N of the central block 2021 along a pair of obtuse angle diagonal arrangement directions is in the range of 3.0 to 8.0 μm.

[0126] In some embodiments, the total width of the central block 2021 and the two compensation portions 2023 along a pair of obtuse-angled diagonal arrangement directions ranges from 7.0 to 10.0 μm.

[0127] In some embodiments, when the width H of the center block 2021 along a pair of acute angles is unchanged, the smaller the distance E between the bottom of the hollowed-out groove 2022a and the width center line M of the strip portion 200 to which the limb block 2022 where the hollowed-out groove 2022a is located is, the smaller the distance F between the side edge of the limb block 2022 that is away from the hollowed-out groove 2022a and the width center line M of the strip portion 200 to which the limb block 2022 is connected is, the smaller the area of ​​the center block 2021 of the first intersection node 202 is; Figure 4i As shown, the E value is 0.7 μm, the F value is 3 μm, the H value is 5.7 μm, and the area of ​​the connection portion 1021 formed by the corresponding exposure of the central block 2021 is 54.2 μm 2 ;like Figure 4j As shown, the E value is 1.2 μm, the F value is 3 μm, the H value is 8.0 μm, and the area of ​​the connection portion 1021 formed by the central block 2021 corresponding to the exposure is 76 μm 2 .

[0128] In some embodiments, the orthographic projection of the limb block 2022 on the transparent substrate 6 includes arc segments, such as the orthographic projection of the limb block 2022 on the transparent substrate 6 is an S-shaped arc. In this way, the branch portions of the intersection nodes of the touch electrodes forming the S-shaped arc can be correspondingly exposed.

[0129] The mask plate provided in the present embodiment can form a routing line thinner than the current routing line width by opening a hollow pattern 201 in the strip portion 200, and by making the first intersection node 202 include a central block 2021 and four limb blocks 2022, the four limb blocks 2022 are spaced apart around the central block 2021 and the four limb blocks 2022 are connected to the central block 2021 as a whole; it can form an intersection node with a smaller area than the diamond node formed by the intersection of the current touch layer grid lines, thereby reducing the occlusion of the pixels in the display panel by the grid-like routing and its intersection nodes, and further improving or avoiding the gray dots and moiré defects that appear when the display panel is displayed.

[0130] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A touch panel, comprising a substrate and a touch electrode, wherein the touch electrode is located on one side of the substrate. The touch electrodes include interconnected wires in a grid pattern, wherein the interconnects form intersection nodes at the intersection positions. It is characterized in that The cross node includes a connection portion and four branch portions, wherein the four branch portions are distributed at intervals around the connection portion and the four branch portions are connected to the connection portion as a whole.

2. The touch panel according to claim 1, characterized in that: Among the four branches, two of the branches arranged opposite to each other are arranged along the extension direction of one of the two intersecting routings and connected to the routing, and the other two of the branches arranged opposite to each other are arranged along the extension direction of the other routing and connected to the routing; At the intersection node position, the two routing lines intersect to form a pair of acute angles and a pair of obtuse angles.

3. The touch panel according to claim 2, characterized in that: The orthographic projection shape of the intersection node on the substrate is H-shaped.

4. The touch panel according to claim 2, characterized in that: The width of the connecting portion along the direction in which the pair of acute-angle diagonals are arranged and the width of the connecting portion along the direction in which the pair of obtuse-angle diagonals are arranged are both greater than the width of the routing line; The width of the branch portion along a direction perpendicular to the extension direction thereof is greater than the width of the routing line.

5. The touch panel according to claim 4, characterized in that: The width of the branch portion along a direction perpendicular to its extension is greater than the width of the routing line by 1 / 4 to 1 / 3 of the width of the branch portion; And / or, the width of the connection portion along the pair of acute-angle diagonal arrangement directions is greater than the width of the routing line by 1 / 4 to 1 / 3 of the width of the connection portion along the pair of acute-angle diagonal arrangement directions.

6. The touch panel according to claim 5, characterized in that: The width of the wiring is in the range of 2 to 3 μm.

7. The touch panel according to claim 5, characterized in that: The width of the connecting portion along the pair of acute angles arranged diagonally ranges from 5.5 to 8 μm; The width of the connecting portion along the pair of obtuse-angled diagonal arrangement directions is in the range of 8 to 13 μm; The width of the branch portion along a direction perpendicular to the extension direction thereof is in the range of 2.5 to 4.0 μm.

8. The touch panel according to claim 7, characterized in that: The area size of the connecting portion ranges from 50 to 80 μm 2 .

9. The touch panel according to claim 2, characterized in that: An orthographic projection of the branch portion on the base includes an arc segment.

10. A touch display panel, comprising a display substrate, wherein the display substrate comprises a plurality of pixels; It is characterized in that Also comprising the touch panel according to any one of claims 1 to 9, wherein the touch panel is located on the display side of the display substrate; The orthographic projections of some grid-shaped routings and / or at least some cross nodes of the touch electrodes in the touch panel on the display substrate overlap with the pixels.

11. A mask plate, comprising a transparent substrate and a phase conversion layer pattern, wherein the phase conversion layer pattern is located on one side of the transparent substrate. It is characterized in that The phase conversion layer pattern includes strip portions that intersect each other in a grid shape; the strip portions form a first intersection node at the intersection position; A hollow pattern is provided in the strip-shaped portion, and the hollow pattern extends along the extension direction of the strip-shaped portion; The first cross node includes a central block and four limb blocks, wherein the four limb blocks are spaced apart and distributed around the central block and the four limb blocks are connected to the central block as a whole; The phase conversion layer pattern is used to form a pattern of a touch electrode in the touch panel according to any one of claims 1 to 9.

12. The mask plate according to claim 11, characterized in that: The width center line of the hollow pattern and the strip portion where the hollow pattern is located coincides; The distance between any side edge of the hollow pattern and the corresponding side edge of the strip portion where the hollow pattern is located is equal; The total width of the strip portion along a direction perpendicular to its extension direction ranges from 7.5 to 9.5 μm; The width of the hollow pattern along a direction perpendicular to its extension direction ranges from 2.5 to 4.0 μm.

13. The mask plate according to claim 12, characterized in that: The strip-shaped portion includes a main body portion and a compensation block, and the main body portion surrounds the hollow pattern; The compensation block is located at a position of the main body portion that is 10 to 20 μm away from the center of the first intersection node, and the compensation block is connected to the main body portion as a whole.

14. The mask plate according to claim 13, characterized in that: The hollowed-out pattern separates one of the strip-shaped portions into a first main body portion and a second main body portion, wherein the first main body portion and the second main body portion are located at opposite sides of the extending direction of the hollowed-out pattern; The compensation block is located on a side of the first main body away from or close to the hollow pattern, and / or the compensation block is located on a side of the second main body away from or close to the hollow pattern.

15. The mask plate according to claim 14, characterized in that: The long side of the compensation block is parallel to the extension direction of the strip portion, and the wide side of the compensation block is parallel to the wide side of the strip portion; The length of the long side of the compensation block ranges from 10 to 15 μm; The length of the wide side of the compensation block is in the range of 0.5 to 1 μm.

16. The mask plate according to claim 11, characterized in that: The center of the central block coincides with the center of the first intersection node; The two limb blocks arranged opposite to each other are arranged along the extension direction of one of the two crossed strip portions and connected to the strip portion, and the other two limb blocks arranged opposite to each other are arranged along the extension direction of the other strip portion and connected to the strip portion.

17. The mask plate according to claim 16, characterized in that: At the first intersection node position, two strip-shaped portions intersect to form a pair of acute angles and a pair of obtuse angles; The four limb blocks are respectively formed with hollowed-out grooves on one side thereof located in the acute-angle diagonal region; The first intersection node further includes two compensation parts, the two compensation parts are respectively located in the pair of obtuse diagonal regions, and the compensation part in each obtuse region is connected to the two adjacent limb blocks and the central block; The center of the central block is located at the midpoint of a line connecting the centers of the two compensation parts.

18. The mask plate according to claim 17, characterized in that: The width of the limb block along a direction perpendicular to its extension is greater than the width of the hollow pattern; The width centerline of the limb block does not coincide with the width centerline of the hollow pattern; The width of the central block along the direction in which the pair of acute-angle diagonals are arranged and the width of the central block along the direction in which the pair of obtuse-angle diagonals are arranged are both greater than the width of the hollow pattern.

19. The mask plate according to claim 18, characterized in that: The distance between the center of the central block and the hollow pattern ranges from 8.5 to 13 μm; The distance between adjacent hollow patterns and hollow grooves ranges from 2.0 to 3.0 μm; The distance between the bottom of the hollowed-out groove and the width center line of the strip portion connected to the limb block where the hollowed-out groove is located is in the range of 0.7 to 1.7 μm; The distance between the side edge of the limb block away from the hollowed-out groove and the width center line of the strip portion to which the limb block is connected is in the range of 2.4 to 4.0 μm; The width of the compensation portion along the direction of the center line of the two compensation portions is the maximum width of the compensation portion, and the maximum width of the compensation portion ranges from 1.5 to 2.5 μm; The width of the central block along the pair of acute angles is in the range of 4.0 to 5.0 μm; The width of the central block along the pair of obtuse-angle diagonal arrangement directions ranges from 3.0 to 8.0 μm.

20. The mask plate according to claim 18, characterized in that: The orthographic projection of the limb block on the transparent substrate includes an arc segment.

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