Water jacket built-in permanent magnet for monocrystalline silicon furnace

Abstract

The utility model discloses a permanent magnet for a monocrystalline silicon furnace with a built-in water jacket, and belongs to the technical field of monocrystalline silicon furnace accessories. A cooling cavity is formed in the cooling water jacket; the axis of the cooling water jacket is vertically arranged; the sealing cavity is positioned in the cooling cavity; the lower wall of the sealing cavity is made of a magnetic conductive material; the permanent magnet is arranged in the sealing cavity, and the permanent magnet is arranged around the axis of the cooling water jacket; magnetic poles of the permanent magnets are respectively positioned at the upper end and the lower end; the permanent magnet comprises a plurality of sub-blocks which are distributed in the vertical direction; the sealing cavity is arranged in the cooling cavity of the cooling water jacket, and the permanent magnet is arranged in the sealing cavity, so that the external space of the monocrystalline silicon furnace is not occupied; meanwhile, the temperature of the permanent magnet can be constant through the cooling cavity, stable magnetic performance of the permanent magnet is guaranteed, and the magnetic field intensity generated by the permanent magnet is stable; furthermore, the permanent magnet does not generate energy consumption during use, the structure is simple, and the use and maintenance cost is low.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon furnace accessories, in particular to a permanent magnet for a single crystal silicon furnace with a water jacket built in. Background Art

[0002] A single crystal silicon furnace is a manufacturing equipment that produces single crystal silicon by the Czochralski method. During the growth process of silicon crystals, due to the conductivity of molten silicon, the flow of molten silicon will cause an induced current under the condition of an external magnetic field. The induced current and the external magnetic field will work together to produce a Lorentz force opposite to the flow direction. The Lorentz force can inhibit the flow of the melt, reduce the precipitation of oxygen in the crucible, reduce the oxygen content of the silicon rod, and improve the quality of the silicon crystal.

[0003] At present, the external magnetic field is usually generated by superconducting magnets or electromagnetic coil magnets installed on the periphery of the single crystal silicon furnace. Superconducting magnets and electromagnetic coil magnets are not only complex in structure and occupy the external space of the single crystal silicon furnace, but also have relatively high use and maintenance costs, poor economic efficiency, and lack the value of large-scale promotion and use.

[0004] Therefore, it is an urgent problem to be solved at this stage to develop and design a permanent magnet for a single crystal silicon furnace that has a simple structure, does not occupy the external space of the single crystal silicon furnace, generates a stable magnetic field strength, and has lower use and maintenance costs. Utility Model Content

[0005] In order to solve the problems existing in the prior art, the utility model provides a permanent magnet for a single crystal silicon furnace with a built-in water jacket. A sealed chamber is provided in the cooling chamber of the cooling water jacket, and the permanent magnet is arranged in the sealed chamber, which will not occupy the external space of the single crystal silicon furnace; at the same time, the cooling chamber can make the temperature of the permanent magnet constant, ensure the stability of the magnetic properties of the permanent magnet, and make the magnetic field intensity generated by the permanent magnet stable; further, the permanent magnet does not consume energy when in use, has a simple structure, and has low maintenance costs.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0007] The utility model provides a permanent magnet for a single crystal silicon furnace with a water jacket built in, comprising:

[0008] A cooling water jacket, wherein the cooling water jacket has a cooling cavity therein; the axis of the cooling water jacket is arranged vertically;

[0009] A sealed cavity, the sealed cavity is located in the cooling cavity; the lower wall of the sealed cavity is made of magnetic conductive material;

[0010] A permanent magnet is disposed in the sealed cavity and is arranged around the axis of the cooling water jacket; the magnetic poles of the permanent magnet are respectively located at the upper end and the lower end thereof; the permanent magnet includes a plurality of sub-blocks, and the plurality of sub-blocks are distributed in the vertical direction.

[0011] As a preferred technical solution, it also includes a single crystal silicon furnace, the cooling water jacket is located above the single crystal silicon furnace, and the axis of the single crystal silicon furnace is colinear with the axis of the cooling water jacket.

[0012] As a preferred technical solution, a crucible is provided in the single crystal silicon furnace, and the axis of the crucible is colinear with the axis of the single crystal silicon furnace;

[0013] And / or, the cooling water jacket has a pulling channel, the axis of the pulling channel is colinear with the axis of the cooling water jacket, and the cooling cavity is arranged around the pulling channel.

[0014] As a preferred technical solution, the cooling water jacket has a coolant inlet and a coolant outlet communicated with the cooling cavity.

[0015] As a preferred technical solution, the sealing cavity is formed by splicing a blocking plate, an outer plate, a bottom plate and an inner plate; the blocking plate is located above the bottom plate.

[0016] As a preferred technical solution, the blocking plate is made of non-magnetic conductive material, and the outer plate, the bottom plate and the inner plate are all made of magnetic conductive material;

[0017] And / or, a support plate is provided at the bottom of the cooling chamber, and the support plate is fixedly connected to the bottom plate;

[0018] And / or, the blocking plate and the outer plate, the outer plate and the bottom plate, the bottom plate and the inner plate, and the inner plate and the blocking plate are all fixedly connected by bolts or welded.

[0019] As a preferred technical solution, the permanent magnets are fixedly connected to the outer plate and the inner plate respectively by bolts;

[0020] And / or, a plurality of the sub-blocks are provided with connecting through holes, the blocking plate is provided with connecting threaded holes, the connecting through holes are provided with connecting screws, the connecting screws sequentially pass through the connecting through holes and are threadedly connected to the connecting threaded holes;

[0021] And / or, adjacent sub-blocks are bonded by adhesive.

[0022] As a preferred technical solution, the cross section of the sub-block is set to be rectangular or trapezoidal;

[0023] And / or, the radial width of the sub-block located at the bottom is greater than the radial widths of the other sub-blocks.

[0024] As a preferred technical solution, the permanent magnet is set to be ring-shaped;

[0025] Alternatively, the permanent magnet includes a plurality of arc segments, there are gaps between adjacent arc segments, and the plurality of arc segments are distributed along the circumferential direction.

[0026] As a preferred technical solution, a waterproof layer is coated on the outer surface of the permanent magnet.

[0027] The beneficial effects of the utility model are as follows:

[0028] 1. A sealed cavity is provided in the cooling cavity of the cooling water jacket of the utility model, and the permanent magnet is arranged in the sealed cavity, which will not occupy the external space of the single crystal silicon furnace; at the same time, the coolant circulating in the cooling cavity can make the temperature of the permanent magnet constant, thereby ensuring the stability of the magnetic properties of the permanent magnet and the stability of the magnetic field intensity generated by the permanent magnet; further, the permanent magnet is used as a magnetic source, no energy consumption is generated when in use, the structure is simple, and the use and maintenance cost is low.

[0029] 2. The blocking plate forming the sealed cavity of the utility model is made of non-magnetic material, and the outer plate, bottom plate and inner plate are all made of magnetic material. On the one hand, the blocking plate can block the magnetic lines of force of the permanent magnet to prevent the magnetic lines of force from leaking to the invalid area; on the other hand, the blocking plate, outer plate and inner plate can conveniently fix and position the permanent magnet to ensure the stability of the magnetic field generated by the permanent magnet. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic diagram of the overall structure of an embodiment of a permanent magnet for a single crystal silicon furnace with a water jacket built in the utility model;

[0031] Figure 2 for Figure 1 A magnified image of area A;

[0032] Figure 3 for Figure 1 A top view of a sub-block in .

[0033] In the figure: 1-cooling water jacket, 11-cooling chamber, 12-pulling channel, 13-support plate, 2-sealing chamber, 21-blocking plate, 211-connecting threaded hole, 22-outer plate, 23-bottom plate, 24-inner plate, 3-permanent magnet, 31-sub-block, 311-connecting through hole, 32-connecting screw. DETAILED DESCRIPTION

[0034] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0035] Please refer to Figure 1-Figure 3 , is an embodiment of a permanent magnet for a single crystal silicon furnace with a water jacket provided by the utility model, comprising:

[0036] A cooling water jacket 1, wherein the cooling water jacket 1 has a cooling chamber 11, wherein the cooling chamber 11 is filled with a coolant, and the coolant is used to cool the single crystal silicon rod during pulling, thereby improving the quality of the single crystal silicon; the axis of the cooling water jacket 1 is arranged vertically, so that the single crystal silicon rod can pass through the cooling water jacket 1 during pulling;

[0037] The sealed chamber 2 is located in the cooling chamber 11, and the permanent magnet 3 is disposed in the sealed chamber 2; the lower wall of the sealed chamber 2 is made of a magnetic conductive material, and the magnetic lines of force generated by the permanent magnet 3 can pass through the lower wall of the sealed chamber 2;

[0038] Permanent magnet 3, permanent magnet 3 is arranged around the axis of cooling water jacket 1; the magnetic poles of permanent magnet 3 are respectively located at the upper end and the lower end thereof, and permanent magnet 3 can generate a magnetic field at the crystal liquid surface and at a certain depth of the crystal liquid surface in the single crystal silicon furnace; permanent magnet 3 includes a plurality of sub-blocks 31, and the plurality of sub-blocks 31 are distributed along the vertical direction. On the premise of ensuring the strength of the magnetic field, the specifications of each sub-block 31 can be adjusted according to the shape of cooling cavity 11, which is convenient for installation and production.

[0039] Specifically, the coolant is preferably water or heat transfer oil.

[0040] It should be noted that the utility model should also include a single crystal silicon furnace (not shown in the figure), the cooling water jacket 1 is located above the single crystal silicon furnace, and the axis of the single crystal silicon furnace is collinear with the axis of the cooling water jacket 1, so as to facilitate the production of single crystal silicon by the direct pulling method; further, a crucible should be provided in the single crystal silicon furnace, and molten silicon is located in the crucible; the axis of the crucible is collinear with the axis of the single crystal silicon furnace; further, a pulling channel 12 should be provided on the cooling water jacket 1, and the axis of the pulling channel 12 is collinear with the axis of the cooling water jacket 1, and the cooling chamber 11 is arranged around the pulling channel 12 to ensure that the single crystal silicon rod can effectively dissipate heat during pulling.

[0041] In this embodiment, please refer to Figure 1 and Figure 2 The sealed chamber 2 is composed of a blocking plate 21, an outer plate 22, a bottom plate 23 and an inner plate 24, which ensures that the sealed chamber 2 and the cooling chamber 11 are isolated from each other to prevent the coolant from directly contacting the permanent magnet 3; the blocking plate 21 is located above the bottom plate 23; specifically, the blocking plate 21 and the outer plate 22, the outer plate 22 and the bottom plate 23, the bottom plate 23 and the inner plate 24, and the inner plate 24 and the blocking plate 21 are all fixedly connected by bolts or welded to ensure the stability and sealing of the sealed chamber 2.

[0042] It should be noted that the blocking plate 21 is made of non-magnetic material, and the outer plate 22, the bottom plate 23 and the inner plate 24 are all made of magnetic material. The magnetic lines of force generated by the permanent magnet 3 can pass through the outer plate 22, the bottom plate 23 and the inner plate 24, ensuring that a magnetic field can be generated at the crystal liquid level in the single crystal silicon furnace and at a certain depth of the crystal liquid level.

[0043] In this embodiment, please refer to Figure 1 and Figure 2 A support plate 13 is provided at the bottom of the cooling chamber 11, and the support plate 13 is fixedly connected to the bottom plate 23. The support plate 13 can fix the sealing chamber 2 in the cooling chamber 11; specifically, the support plate 13 and the bottom plate 23 are preferably fixedly connected by bolts or welding.

[0044] It should be noted that the cooling water jacket 1 should have a coolant inlet and a coolant outlet connected to the cooling chamber 11. The coolant enters the cooling chamber 11 from the coolant inlet and is discharged from the coolant outlet to achieve the circulation of the coolant and ensure the heat dissipation effect.

[0045] In this embodiment, please refer to Figure 1 and Figure 2 , several sub-blocks 31 are provided with connecting through holes 311, the blocking plate 21 is provided with connecting threaded holes 211, and connecting screws 32 are provided in the connecting through holes 311. The connecting screws 32 pass through the connecting through holes 311 in turn and are threadedly connected with the connecting threaded holes 211, which can firmly fix the permanent magnet 3 in the sealed cavity 2; further, the permanent magnet 3 is fixedly connected to the outer plate 22 and the inner plate 24 respectively by bolts, which can further improve the fixing effect between the permanent magnet 3 and the sealed cavity 2; in other embodiments, the adjacent sub-blocks 31 in the permanent magnet 3 can also be fixedly connected by adhesive bonding, so as to ensure that all the sub-blocks 31 are stably fixed together.

[0046] In this embodiment, please refer to Figure 1 and Figure 2 The cross section of the sub-block 31 can be set to a rectangle or a trapezoid, which is convenient for production and processing; further, the radial width of the sub-block 31 located at the bottom is greater than the radial width of other sub-blocks 31, which can maximize the strength of the generated magnetic field while matching the shape of the cooling cavity 11.

[0047] It should be noted that the circumferential direction and radial direction in the present invention are both based on the axis of the cooling water jacket 1 .

[0048] In this embodiment, please refer to Figure 3The permanent magnet 3 includes several arc segments, and the gaps between adjacent arc segments form a flow channel for the coolant to prevent the permanent magnet 3 from blocking the flow of the coolant; the several arc segments are evenly distributed along the circumference, and the shape of the sub-blocks 31 of each arc segment is fan-shaped; in other embodiments, the permanent magnet 3 can also be set to a ring shape so as to be able to generate a stable magnetic field.

[0049] It should be noted that the outer surface of the permanent magnet 3 should be coated with a waterproof layer to prevent the coolant from entering the sealed cavity 2 and affecting the magnetism of the permanent magnet 3; specifically, the waterproof layer can be a nickel-plated layer, a copper-plated layer or an epoxy resin coating.

[0050] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A permanent magnet for a single crystal silicon furnace with a built-in water jacket, characterized in that: include: A cooling water jacket (1), wherein the cooling water jacket (1) has a cooling cavity (11); the axis of the cooling water jacket (1) is arranged vertically; A sealed cavity (2), the sealed cavity (2) being located in the cooling cavity (11); the lower wall of the sealed cavity (2) being made of a magnetic conductive material; A permanent magnet (3), the permanent magnet (3) being arranged in the sealed cavity (2), the permanent magnet (3) being arranged around the axis of the cooling water jacket (1); the magnetic poles of the permanent magnet (3) being respectively located at the upper end and the lower end thereof; the permanent magnet (3) comprising a plurality of sub-blocks (31), the plurality of sub-blocks (31) being distributed in a vertical direction.

2. The permanent magnet for a single crystal silicon furnace with a water jacket as claimed in claim 1, characterized in that: It also comprises a single crystal silicon furnace, wherein the cooling water jacket (1) is located above the single crystal silicon furnace, and the axis of the single crystal silicon furnace is colinear with the axis of the cooling water jacket (1).

3. The permanent magnet for a single crystal silicon furnace with a water jacket as claimed in claim 2, characterized in that: A crucible is provided in the single crystal silicon furnace, and the axis of the crucible is collinear with the axis of the single crystal silicon furnace; And / or, the cooling water jacket (1) has a lifting channel (12), the axis of the lifting channel (12) is colinear with the axis of the cooling water jacket (1), and the cooling cavity (11) is arranged around the lifting channel (12).

4. A permanent magnet for a single crystal silicon furnace with a built-in water jacket according to claim 1 or 3, characterized in that: The cooling water jacket (1) is provided with a cooling liquid inlet and a cooling liquid outlet which are in communication with the cooling cavity (11).

5. The permanent magnet for a single crystal silicon furnace with a water jacket as claimed in claim 1, characterized in that: The sealed cavity (2) is formed by splicing a blocking plate (21), an outer plate (22), a bottom plate (23) and an inner plate (24); the blocking plate (21) is located above the bottom plate (23).

6. The permanent magnet for a single crystal silicon furnace with a built-in water jacket according to claim 5, characterized in that: The blocking plate (21) is made of a non-magnetic material, and the outer plate (22), the bottom plate (23) and the inner plate (24) are all made of a magnetic material; And / or, a support plate (13) is provided at the bottom of the cooling chamber (11), and the support plate (13) is fixedly connected to the bottom plate (23); And / or, the blocking plate (21) and the outer plate (22), the outer plate (22) and the bottom plate (23), the bottom plate (23) and the inner plate (24), and the inner plate (24) and the blocking plate (21) are all fixedly connected by bolts or welded.

7. The permanent magnet for a single crystal silicon furnace with a water jacket as claimed in claim 6, characterized in that: The permanent magnet (3) is fixedly connected to the outer plate (22) and the inner plate (24) respectively by bolts; And / or, a plurality of the sub-blocks (31) are provided with a connecting through hole (311), the blocking plate (21) is provided with a connecting threaded hole (211), a connecting screw (32) is provided in the connecting through hole (311), and the connecting screw (32) passes through the connecting through hole (311) in sequence and is threadedly connected to the connecting threaded hole (211); And / or, adjacent sub-blocks (31) are bonded together by adhesive.

8. The permanent magnet for a single crystal silicon furnace with a water jacket as claimed in claim 1, characterized in that: The cross section of the sub-block (31) is set to be rectangular or trapezoidal; And / or, the radial width of the sub-block (31) located at the bottom is greater than the radial widths of the other sub-blocks (31).

9. The permanent magnet for a single crystal silicon furnace with a built-in water jacket according to claim 1 or 8, characterized in that: The permanent magnet (3) is in the shape of a ring; Alternatively, the permanent magnet (3) comprises a plurality of arc segments, there is a gap between adjacent arc segments, and the plurality of arc segments are distributed along the circumferential direction.

10. The permanent magnet for a single crystal silicon furnace with a water jacket as claimed in claim 1, characterized in that: The outer surface of the permanent magnet (3) is coated with a waterproof layer.

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