Diamond substrate with heat dissipation and detection functions and diamond equipment

Abstract

The utility model discloses a diamond substrate with heat dissipation and detection functions and diamond equipment. The diamond base body comprises a plurality of diamond pieces which are arranged in a stacked mode, every two adjacent diamond pieces are fixedly combined, and the multiple diamond pieces comprise the first diamond piece, the second diamond piece, the third diamond piece and the fourth diamond piece, a heat dissipation fluid channel is arranged between the first diamond piece and the second diamond piece, and the diamond base body is further provided with a medium inlet and a medium outlet which are communicated with the heat dissipation fluid channel. A detection structure is also arranged between the third diamond sheet and the fourth diamond sheet, and the detection structure is also in heat conduction contact with the third diamond sheet and / or the fourth diamond sheet. According to the utility model, the heat exchange efficiency of the detection structure and the diamond substrate is improved, so that the diamond substrate can bear higher power, the detection precision is higher, and the defect of cost increase caused by direct utilization of a diamond thick film is overcome.

Description

Technical Field

[0001] The utility model particularly relates to a diamond matrix and diamond equipment with heat dissipation and detection functions, belonging to the technical field of diamond equipment. Background Art

[0002] Large-sized diamond thick films can be used on windows due to their excellent corrosion resistance and high thermal conductivity. However, the low growth rate and low processing yield of large-sized diamond thick films currently face high costs. At the same time, the detection of windows during use is far away from the window surface, and the detection accuracy is insufficient. Utility Model Content

[0003] The main purpose of the utility model is to provide a diamond substrate and a diamond device with heat dissipation and detection functions, thereby overcoming the deficiencies in the prior art.

[0004] In order to achieve the above-mentioned utility model purpose, the technical solution adopted by the utility model includes:

[0005] The first aspect of the embodiment of the utility model provides a diamond substrate with heat dissipation and detection functions, comprising a plurality of stacked diamond sheets, two adjacent diamond sheets are fixedly combined, the plurality of diamonds include a first diamond sheet and a second diamond sheet arranged adjacently, and a third diamond sheet and a fourth diamond sheet arranged adjacently, a heat dissipation fluid channel is provided between the first diamond sheet and the second diamond sheet, and the diamond substrate is further provided with a medium inlet and a medium outlet connected to the heat dissipation fluid channel;

[0006] A detection structure is disposed between the third diamond sheet and the fourth diamond sheet, and the detection structure is in thermal contact with the third diamond sheet and / or the fourth diamond sheet.

[0007] A second aspect of the embodiment of the utility model provides a diamond device, wherein the diamond device comprises a window, and the window comprises the diamond substrate having heat dissipation and detection functions.

[0008] Compared with the prior art, the advantages of the utility model include: the utility model provides a diamond substrate with heat dissipation and detection functions, the diamond substrate includes a plurality of stacked diamond sheets, two adjacent diamond sheets are fixedly combined, the plurality of diamonds include a first diamond sheet and a second diamond sheet that are adjacently arranged, and a third diamond sheet and a fourth diamond sheet that are adjacently arranged, a heat dissipation fluid channel is provided between the first diamond sheet and the second diamond sheet, and a medium inlet and a medium outlet that are connected to the heat dissipation fluid channel are also provided on the diamond substrate; a detection structure is provided between the third diamond sheet and the fourth diamond sheet, and the detection structure is in thermal contact with the third diamond sheet and / or the fourth diamond sheet; due to the diamond The multiple diamond sheets in the diamond matrix are fixedly combined, and there is no need to directly grow a thick diamond thick film. A thicker diamond matrix can be formed by splicing multiple thinner diamond sheets in the thickness direction, which can overcome the high cost problems caused by the low growth rate and low processing yield faced by the integrated growth of large-size diamond thick films, and is conducive to reducing costs; moreover, by setting a heat dissipation fluid channel in the diamond matrix, the heat exchange efficiency of the detection structure and the diamond matrix is ​​improved, so that the diamond matrix can withstand higher power; in addition, the detection structure in the diamond matrix is ​​set inside, and the detection accuracy is higher than the solution of setting the detection structure outside to detect the diamond matrix. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0010] Figure 1 It is a cross-sectional view of a diamond substrate with heat dissipation and detection functions provided in a typical implementation case of the utility model;

[0011] Figure 2 yes Figure 1 A schematic diagram of the local structure of a diamond substrate with heat dissipation and detection functions;

[0012] Figure 3 It is a structural schematic diagram of a first diamond sheet in a typical implementation case of the utility model;

[0013] Figure 4 It is a structural schematic diagram of one side surface of the second diamond sheet in a typical implementation case of the utility model;

[0014] Figure 5It is a structural schematic diagram of the other side surface of the second diamond sheet in a typical implementation case of the utility model. DETAILED DESCRIPTION

[0015] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the utility model after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.

[0016] The utility model provides a diamond substrate with heat dissipation and detection functions, comprising a plurality of diamond sheets arranged in a stacked manner, wherein two adjacent diamond sheets are fixedly combined, the plurality of diamond sheets comprise a first diamond sheet and a second diamond sheet arranged adjacently, and a third diamond sheet and a fourth diamond sheet arranged adjacently, a heat dissipation fluid channel is provided between the first diamond sheet and the second diamond sheet, and a medium inlet and a medium outlet communicated with the heat dissipation fluid channel are further provided on the diamond substrate.

[0017] A detection structure is arranged between the third diamond sheet and the fourth diamond sheet, and the detection structure is in thermal contact with the third diamond sheet and / or the fourth diamond sheet.

[0018] By setting a heat dissipation fluid channel in the diamond matrix, the heat exchange efficiency of the detection structure and the diamond matrix is ​​improved, so that the diamond matrix can withstand higher power; moreover, the detection structure in the diamond matrix is ​​set inside, and the detection accuracy is higher than the scheme of setting the detection structure outside to detect the diamond matrix.

[0019] Furthermore, the transverse width of a portion of the heat dissipation fluid channel that is relatively close to the detection structure is greater than the transverse width of a portion that is relatively far from the detection structure.

[0020] Furthermore, the lateral width of the heat dissipation fluid channel decreases gradually in a direction away from the detection structure.

[0021] Furthermore, a first groove-shaped structure is provided on the surface of the first diamond sheet, and the first groove-shaped structure and the second diamond sheet are combined to form a heat dissipation fluid channel.

[0022] Alternatively, a second groove-shaped structure is provided on the surface of the second diamond sheet, and the second groove-shaped structure and the first diamond sheet are combined to form a heat dissipation fluid channel.

[0023] Alternatively, a first groove-like structure is provided on the surface of the first diamond sheet, and a second groove-like structure is provided on the surface of the second diamond sheet. The first groove-like structure, the second groove-like structure, the first diamond sheet, and the second diamond sheet together enclose a heat dissipation fluid channel, wherein the medium inlet and the medium outlet are provided on the outer peripheral side of the first diamond sheet and / or the second diamond sheet.

[0024] Furthermore, the first groove-shaped structure and / or the second groove-shaped structure is an annular structure, a spiral structure or a folded-line structure.

[0025] Furthermore, a plurality of first micro-protrusion structures are spaced apart on the inner wall of the heat dissipation fluid channel on one side close to the detection structure, and the first micro-protrusion structures are in direct thermal contact with the first diamond sheet or the second diamond sheet.

[0026] Furthermore, the first micro-protrusion structure is integrated with the first diamond sheet or the second diamond sheet.

[0027] Furthermore, the height of the first micro-protrusion structure is smaller than the height of the heat dissipation fluid channel.

[0028] Furthermore, the first micro-protrusion structure is a cylindrical protrusion.

[0029] Furthermore, the third diamond sheet is located between the fourth diamond sheet and the second diamond sheet, the third diamond sheet has a third groove structure, the third groove structure and the fourth diamond sheet enclose a cavity, and the detection structure is arranged in the cavity.

[0030] Furthermore, the third diamond sheet also has a plurality of second micro-protrusion structures distributed at intervals, the plurality of second micro-protrusion structures are arranged at the bottom of the third groove structure, and the detection structure is arranged on the plurality of second micro-protrusion structures and is in thermal contact with the plurality of second micro-protrusion structures.

[0031] By forming a micro-protrusion structure on the surface of the diamond sheet inside the diamond matrix, the heat exchange efficiency of the detection structure and the diamond matrix is ​​further improved, so that the diamond matrix can withstand higher power.

[0032] Furthermore, at least one vent is provided on the circumferential side surface of the third diamond sheet, and each vent is communicated with the cavity.

[0033] Further, the detection structure is completely arranged in the third groove-shaped structure, or a fourth groove-shaped structure is also arranged on the fourth diamond sheet, and the detection structure is completely arranged in the fourth groove-shaped structure, or a part of the detection structure is arranged in the third groove-shaped structure and the other part is arranged in the fourth groove-shaped structure, and the third groove-shaped structure and the fourth groove-shaped structure enclose a cavity; wherein, at least one vent is also arranged on the circumferential side surface of the fourth diamond sheet, and each vent is respectively connected to the cavity.

[0034] Furthermore, the detection structure includes a temperature detection structure.

[0035] Furthermore, the temperature detection structure includes a temperature sensing circuit.

[0036] In a more specific embodiment, the second diamond sheet and the third diamond sheet are arranged between the first diamond sheet and the fourth diamond sheet, and the second diamond sheet is in contact with the third diamond sheet; or, at least one diamond sheet is arranged between the second diamond sheet and the third diamond sheet; or, the second diamond sheet and the third diamond sheet are two parts of the same diamond sheet, that is, the second diamond sheet and the third diamond sheet are grown as one body.

[0037] Furthermore, two adjacent diamond sheets that are not grown in one piece are fixedly bonded by bonding, for example, two diamond sheets can be pressed together for a set time (for example, 24 hours) in a vacuum chamber at a set pressure and a set temperature to achieve bonding of the two diamond sheets. It is understandable that in other embodiments, bonding can be achieved in other ways (for example, by providing a bonding material between the two diamond sheets), and is not limited to the above-mentioned scheme, which will not be given one by one here.

[0038] The utility model utilizes a plurality of large-sized diamond sheets with relatively high growth rates and relatively thin thicknesses, and integrates them into a whole through a certain process, thereby overcoming the high cost problems caused by the low growth rate and low processing yield rate faced by the integrated growth of large-sized diamond thick films, and is conducive to reducing costs; and the diamond matrix prepared by this process meets the pressure resistance requirements of the subsequent use environment and the strength requirements of surface processing.

[0039] The utility model also provides a diamond device, which comprises a window, and the window comprises a diamond matrix with heat dissipation and detection functions.

[0040] Furthermore, the diamond equipment also includes a fluid medium circulation mechanism, which is respectively connected to the medium inlet and the medium outlet, and is used to introduce heat dissipation fluid into the diamond substrate through the medium inlet and collect the heat dissipation fluid flowing out of the medium outlet.

[0041] The technical solution, its implementation process and principle will be further explained below in conjunction with the accompanying drawings and specific implementation cases. Unless otherwise specified, the diamond sheet in the embodiment of the utility model and the process of forming the micro-protrusion structure and the groove structure on the diamond sheet are known to those skilled in the art and are not specifically limited here.

[0042] See also Figure 1 , Figure 1It is a cross-sectional view of a diamond substrate with heat dissipation and detection functions provided in a typical implementation case of the utility model. The diamond substrate includes a first diamond sheet 110, a second diamond sheet 120 and a fourth diamond sheet 130 which are stacked in sequence. A heat dissipation fluid channel 140 for continuous passage of a fluid heat exchange medium is provided between the first diamond sheet 110 and the second diamond sheet 120. A detection structure 200 is also provided between the second diamond sheet 120 and the fourth diamond sheet 130. The detection structure 200 is also in thermal contact with the fourth diamond sheet 130.

[0043] For details, please refer to Figure 3 and Figure 4 The diamond substrate is also provided with a medium inlet 141 and a medium outlet 142 connected to the heat dissipation fluid channel 140. The fluid heat exchange medium enters the heat dissipation fluid channel 140 from the medium inlet 141 and then flows out from the medium outlet 142, and heat exchange with the diamond substrate is achieved in this process. Specifically, the medium inlet 141 and the medium outlet 142 can be correspondingly arranged on the circumferential side surfaces of the first diamond sheet 110 and the second diamond sheet 120.

[0044] Specifically, the detection structure 200 is preferably arranged corresponding to the heat dissipation fluid channel 140. Specifically, the corresponding arrangement means that in the thickness direction (or longitudinal direction or stacking direction) of the diamond substrate, the orthographic projection area of ​​the detection structure 200 and the orthographic projection area of ​​the heat dissipation fluid channel 140 at least partially overlap. As a preferred solution, the orthographic projection area of ​​the detection structure 200 is completely located within the orthographic projection area of ​​the heat dissipation fluid channel 140, thereby improving the heat exchange efficiency between the detection structure 200 and the fluid heat exchange medium in the heat dissipation fluid channel 140.

[0045] Specifically, the lateral width of the portion of the heat dissipation fluid channel 140 relatively close to the detection structure 200 is greater than the lateral width of the portion relatively far from the detection structure 200, that is, the lateral width of the portion of the heat dissipation fluid channel 140 close to the second diamond sheet 120 is greater than the lateral width of the portion close to the first diamond sheet 110. By increasing the lateral width of the portion of the heat dissipation fluid channel 140 relatively close to the detection structure 200, the contact area between the fluid heat exchange medium in the heat dissipation fluid channel 140 and the second diamond sheet 120 can be increased, thereby improving the heat exchange efficiency between the fluid heat exchange medium and the detection structure 200. The lateral width of the portion of the heat dissipation fluid channel 140 relatively far from the detection structure 200 is smaller, and the flow speed of the fluid heat exchange medium in this portion can be faster, that is, compared with the structure with uniform lateral width, the heat dissipation fluid channel 140 with lateral width difference adopted in the utility model improves the heat exchange efficiency with the detection structure 200 while ensuring a relatively faster flow rate.

[0046] More specifically, Figure 1 and Figure 2 The longitudinal cross-section of the heat dissipation fluid channel 140 shown in the figure is a “convex” shape. Of course, the transverse width of the heat dissipation fluid channel 140 may also decrease gradually in the direction away from the detection structure 200 .

[0047] Specifically, the heat dissipation fluid channel 140 can be completely disposed in the first diamond sheet 110, or the heat dissipation fluid channel 140 can be completely disposed in the second diamond sheet 120; or, a portion of the heat dissipation fluid channel 140 is disposed in the first diamond sheet 110, and the other portion is disposed in the second diamond sheet 120. After comprehensively weighing factors such as structural strength and heat exchange effect, it is preferred to dissipate a portion of the heat dissipation fluid channel 140 in the first diamond sheet 110, and the other portion in the second diamond sheet 120. This is because, when the thickness of the diamond sheet is fixed, if the heat dissipation fluid channel 140 is disposed in one of the diamond sheets, the structural strength of the diamond sheet (mainly the structural strength of the diamond sheet remaining at the bottom of the heat dissipation fluid channel 140) will be reduced.

[0048] Please refer again Figure 1 , Figure 2 , Figure 3 and Figure 4 The surface of the first diamond sheet 110 is provided with a first groove-like structure 111, and the surface of the second diamond sheet 120 is provided with a second groove-like structure 121. The lateral width of the first groove-like structure 111 is smaller than the lateral width of the second groove-like structure 121. The first groove-like structure 111, the second groove-like structure 121, the first diamond sheet 110, and the second diamond sheet 120 together enclose a heat dissipation fluid channel 140. The medium inlet 141 and the medium outlet 142 are provided on the outer peripheral side of the first diamond sheet 110 and the second diamond sheet 120. It should be noted that the surfaces of the first diamond sheet 110 and the second diamond sheet 120 except for the first groove-like structure 111 and the second groove-like structure 121 are bonded without gaps. More specifically, the depth of the first groove-like structure 111 is 1 / 6-1 / 3 of the thickness of the first diamond sheet 110, and the depth of the second groove-like structure 121 is 1 / 6-1 / 3 of the thickness of the second diamond sheet 120.

[0049] For details, please refer to Figure 3 and Figure 4 The planar shapes of the first groove-shaped structure 111 and the second groove-shaped structure 121 are the same. More specifically, the first groove-shaped structure 111 and the second groove-shaped structure 121 are both one of an annular structure, a spiral structure or a zigzag structure.

[0050] For more details, please refer to Figure 1 , Figure 2 and Figure 4, the bottom of the second groove structure 121 is spaced apart with a plurality of first micro-protrusion structures 150, the first micro-protrusion structures 150 are in direct heat-conducting contact with the second diamond sheet 120, and the plurality of first micro-protrusion structures 150 can further increase the contact area between the fluid heat exchange medium in the heat dissipation fluid channel 140 and the second diamond sheet 120, thereby further improving the heat exchange efficiency. More specifically, the height of the first micro-protrusion 150 is less than the depth of the second groove structure 121. More specifically, the first micro-protrusion structure 150 is integral with the second diamond sheet 120, and illustratively, the first micro-protrusion 150 can be formed by etching the second diamond sheet 120. Exemplarily, the first micro-protrusion structure 150 is a cylindrical protrusion.

[0051] Specifically, Figure 5 As shown, the second diamond sheet 120 is further provided with a third groove-like structure 122 on the side surface facing away from the first diamond sheet 110, and the groove bottom of the third groove-like structure 122 is further provided with a plurality of second micro-protrusion structures 160 distributed at intervals, and the detection structure 200 is arranged on the plurality of second micro-protrusion structures 160 and is in thermal contact with the plurality of second micro-protrusion structures 160, and there is a gap between the detection structure 200 and the groove bottom of the third groove-like structure 122. Two vents are further provided on the circumferential side surface of the second diamond sheet 120, and the two vents are respectively connected to the third groove-like structure 122. More specifically, the two vents are respectively connected to the gap between the detection structure 200 and the groove bottom of the third groove-like structure 122, so that an airflow channel is formed between the two vents and the gap, and heat exchange with the fluid heat exchange medium is achieved through the second micro-protrusion structure 160 and the detection structure 200. By forming an airflow channel in the second diamond sheet 120, the heat exchange effect of the detection structure 200 is further improved.

[0052] Specifically, the plurality of second micro-protrusion structures 160 may correspond one-to-one to the plurality of first micro-protrusions 150. More specifically, the depth of the third groove-shaped structure 122 is 1 / 6-1 / 3 of the thickness of the second diamond sheet 120.

[0053] It should be noted that the detection structure 200 is completely disposed in the third groove-shaped structure 122, and the second diamond sheet 120 and the fourth diamond sheet 130 are bonded without gaps in the area other than the third groove-shaped structure 122. Alternatively, a fourth groove-shaped structure is further disposed on the surface of the fourth diamond sheet 130, and the detection structure 200 is embedded in the fourth groove-shaped structure, but the detection structure 200 still maintains contact with the plurality of second micro-protrusion structures 160, and the second diamond sheet 120 and the fourth diamond sheet 130 are bonded without gaps in the area other than the third groove-shaped structure 122 and the fourth groove-shaped structure.

[0054] Specifically, the detection structure 200 includes a temperature detection structure 200. Exemplarily, the temperature detection structure 200 includes a temperature sensing circuit. By setting the temperature sensing circuit, the temperature of the window can be detected in real time. When the temperature reaches the set temperature, timely feedback is given to stop the system from working to prevent damage caused by excessive temperature.

[0055] Specifically, the appearance and other structural parameters of the first diamond sheet 110, the second diamond sheet 120 and the fourth diamond sheet 130 are completely the same. The size of the first diamond sheet 110, the second diamond sheet 120 and the fourth diamond sheet 130 is ≥2 inches, the thickness can be 400μm, the optical transmittance is >70@10.6μm, and the surface Ra is <1nm. Specifically, the first diamond sheet 110, the second diamond sheet 120 and the fourth diamond sheet 130 are all subjected to surface group modification treatment, and the hanging groups on their surfaces are -OH groups, so that they can undergo C-OH+OH-C=CO-C+H2O reaction, so as to achieve the bonding of two adjacent diamond sheets later.

[0056] The embodiment of the utility model provides a diamond substrate with heat dissipation and detection functions, which adopts a bonding process to reduce the problem of high growth cost caused by low growth rate during the growth of original large-sized diamond thick films. Since multiple thin slices are combined and formed, a heat dissipation channel can be better formed inside the diamond, and the power that the diamond window can withstand is increased. At the same time, some detection structure circuits can be added between the diamond slices to form a detection and feedback system with the external system.

[0057] The embodiment of the utility model provides a diamond substrate with heat dissipation and detection functions, which utilizes multiple large-sized diamond sheets with relatively high growth rates and thin thicknesses, and bonds them together to form a whole, thereby reducing the problem of slow growth rate of the original large-sized diamond thick film. At the same time, the large-sized diamond thick film prepared by this process meets the pressure resistance requirements of the subsequent use environment and the strength requirements of surface processing.

[0058] The embodiment of the utility model provides a diamond substrate with heat dissipation and detection functions, which further improves the heat exchange efficiency of the detection structure and the diamond substrate by improving the structure of the heat dissipation fluid channel and forming a micro-protrusion structure on the surface of the diamond sheet, so that the diamond substrate can withstand higher power.

[0059] Although the utility model has been described with reference to illustrative embodiments, it will be understood by those skilled in the art that various other changes, omissions and / or additions may be made without departing from the spirit and scope of the utility model, and the elements of the embodiments may be replaced by substantial equivalents. In addition, many modifications may be made without departing from the scope of the utility model to adapt specific situations or materials to the teachings of the utility model. Therefore, it is not intended herein to limit the utility model to the disclosed specific embodiments for performing the utility model, but it is intended that the utility model will include all embodiments within the scope of the appended claims. In addition, unless specifically stated, any use of the terms first, second, etc. does not indicate any order or importance, but uses the terms first, second, etc. to distinguish one element from another element.

[0060] It should be understood that the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A diamond substrate with heat dissipation and detection functions, characterized in that: include: A plurality of stacked diamond sheets, wherein two adjacent diamond sheets are fixedly connected, and the plurality of diamond sheets include a first diamond sheet and a second diamond sheet that are adjacently arranged, and a third diamond sheet and a fourth diamond sheet that are adjacently arranged; A heat dissipation fluid channel is provided between the first diamond sheet and the second diamond sheet, and a medium inlet and a medium outlet communicating with the heat dissipation fluid channel are also provided on the diamond substrate; A detection structure is disposed between the third diamond sheet and the fourth diamond sheet, and the detection structure is in thermal contact with the third diamond sheet and / or the fourth diamond sheet.

2. The diamond substrate with heat dissipation and detection functions according to claim 1, characterized in that: The lateral width of the heat dissipation fluid channel at a portion relatively close to the detection structure is greater than the lateral width of the portion relatively far from the detection structure; And / or, the lateral width of the heat dissipation fluid channel decreases gradually in a direction away from the detection structure.

3. The diamond substrate with heat dissipation and detection functions according to claim 2, characterized in that: The surface of the first diamond sheet is provided with a first groove-like structure, and the first groove-like structure and the second diamond sheet are combined to form the heat dissipation fluid channel, or the surface of the second diamond sheet is provided with a second groove-like structure, and the second groove-like structure and the first diamond sheet are combined to form the heat dissipation fluid channel, or the surface of the first diamond sheet is provided with a first groove-like structure, and the surface of the second diamond sheet is provided with a second groove-like structure, and the first groove-like structure, the second groove-like structure, the first diamond sheet, and the second diamond sheet are combined to form the heat dissipation fluid channel; wherein the medium inlet and the medium outlet are provided on the outer peripheral side of the first diamond sheet and / or the second diamond sheet; And / or, the first groove-shaped structure and / or the second groove-shaped structure is an annular structure, a spiral structure or a folded-line structure.

4. The diamond substrate with heat dissipation and detection functions according to claim 2, characterized in that: A plurality of first micro-protrusion structures are also spaced apart on the inner wall of the heat dissipation fluid channel on one side close to the detection structure, and the first micro-protrusion structures are in direct thermal contact with the first diamond sheet or the second diamond sheet; And / or, the first micro-protrusion structure is integrated with the first diamond sheet or the second diamond sheet; and / or, the height of the first micro-protrusion structure having heat dissipation and detection functions is smaller than the height of the heat dissipation fluid channel; And / or, the first micro-protrusion structure is a cylindrical protrusion.

5. The diamond substrate with heat dissipation and detection functions according to any one of claims 1 to 4, characterized in that: The third diamond sheet is located between the fourth diamond sheet and the second diamond sheet, the third diamond sheet has a third groove-shaped structure, the third groove-shaped structure and the fourth diamond sheet enclose a cavity, and the detection structure is arranged in the cavity.

6. The diamond substrate with heat dissipation and detection functions according to claim 5, characterized in that: The third diamond sheet further has a plurality of second micro-protrusion structures distributed at intervals, the plurality of second micro-protrusion structures are arranged at the bottom of the third groove-shaped structure, and the detection structure is arranged on the second micro-protrusion structure and is in thermal contact with the second micro-protrusion structure.

7. The diamond substrate with heat dissipation and detection functions according to claim 5, characterized in that: The third diamond sheet is also provided with at least one vent on the circumferential side surface, and each of the vents is respectively connected to the cavity; the detection structure is completely arranged in the third groove-shaped structure; Alternatively, a fourth groove-like structure is further provided on the fourth diamond sheet, and the detection structure is completely provided in the fourth groove-like structure; alternatively, a part of the detection structure is provided in the third groove-like structure and another part is provided in the fourth groove-like structure, and the third groove-like structure and the fourth groove-like structure enclose the cavity; wherein at least one vent is further provided on the circumferential side surface of the fourth diamond sheet, and each of the vents is respectively communicated with the cavity.

8. The diamond substrate with heat dissipation and detection functions according to claim 1, characterized in that: The second diamond sheet and the third diamond sheet are arranged between the first diamond sheet and the fourth diamond sheet, the second diamond sheet is in contact with the third diamond sheet, or at least one diamond sheet is arranged between the second diamond sheet and the third diamond sheet, or the second diamond sheet and the third diamond sheet are two parts of the same diamond sheet.

9. A diamond device, characterized in that: The diamond device comprises a window, and the window comprises the diamond substrate with heat dissipation and detection functions as claimed in any one of claims 1 to 8.

10. The diamond equipment according to claim 9, characterized in that The diamond equipment further comprises: a fluid medium circulation mechanism, which is respectively connected to the medium inlet and the medium outlet, and is used to introduce heat dissipation fluid into the diamond matrix through the medium inlet, and to collect the heat dissipation fluid flowing out of the medium outlet.

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