Wafer box anti-falling mechanism

Abstract

The utility model provides a wafer box anti-falling mechanism, which comprises at least one pair of anti-falling assemblies, two anti-falling assemblies in each pair of anti-falling assemblies are symmetrically arranged along the transverse direction of a wafer box, each anti-falling assembly comprises a mounting bottom plate, a supporting unit and a driving unit, and the mounting bottom plate is used for being connected with an OHT trolley; the supporting units are in sliding connection with the mounting bottom plate, and a clamping space used for clamping a wafer box is formed between the two supporting units; the driving unit comprises a driving part, a rocker and a cam plate which are arranged on the mounting bottom plate, a cam follower is arranged on the rocker, the cam plate is connected with the supporting unit and is provided with a track for the cam follower to move, and the driving part drives the rocker to enable the cam plate to move transversely; therefore, the size of the clamping space is adjusted by adjusting the distance between the two supporting units. According to the utility model, a simple and reliable mechanism is used for solving the problem that the wafer box is easy to be damaged due to impact or vibration when the wafer box is clamped in the prior art.

Description

Technical Field

[0001] The utility model relates to the technical field of OHT equipment, in particular to a wafer box anti-falling mechanism. Background Art

[0002] In semiconductor manufacturing plants, the OHT (Overhead Hoist Transfer) system is a key automatic handling system that grabs and carries wafer boxes (Front Opening Unified Pod, referred to as FOUP) to designated workstations through a gripper. However, during the upward movement and movement of the FOUP by the OHT, there is a risk of the FOUP shaking and falling, especially when the gripper fails. In order to ensure the safety of personnel in the factory and improve the stability and safety of the equipment, effective anti-falling measures need to be taken.

[0003] Existing technical solutions mostly use a multi-link connection method to clamp and support the FOUP side wall through motor drive. However, this clamping process often causes impact and damage to the FOUP side wall, and the mechanical structure of the multi-link is complex, which is not only difficult to maintain, but also increases the cost. Therefore, the development of a new device that can safely and effectively prevent FOUP from falling is of great significance to the operation of semiconductor manufacturing plants. Utility Model Content

[0004] The utility model aims to provide a wafer box anti-falling mechanism to solve the problem in the prior art that when the wafer box is clamped, the wafer box is easily damaged by impact or vibration.

[0005] In order to achieve the above-mentioned purpose of the utility model, an embodiment of the utility model provides a wafer box anti-falling mechanism, comprising at least one pair of anti-falling components, two anti-falling components in each pair of anti-falling components are symmetrically arranged along the transverse direction of the wafer box, and the anti-falling components include:

[0006] Install the base plate for connection with the OHT trolley;

[0007] A support unit is slidably connected to the mounting base plate, and a clamping space for clamping the wafer box is formed between two support units;

[0008] The driving unit includes a driving member, a rocker and a cam plate arranged on a mounting base plate. A cam follower is arranged on the rocker. The cam plate is connected to the supporting unit and has a track for the cam follower to move. The driving member drives the rocker to move the cam plate laterally, thereby adjusting the distance between the two supporting units to adjust the size of the clamping space.

[0009] As a further improvement of an embodiment of the utility model, the track includes a guide through hole arranged on the cam plate, the cam follower is slidably arranged in the guide through hole, the guide through hole has two side walls in the sliding direction of the cam follower, the cam follower has a first state locked with one of the two side walls and a second state abutting with the other, in the first state, the two support units are close to each other to clamp the wafer box, and in the second state, the two support units are away from each other to release the wafer box.

[0010] As a further improvement of an embodiment of the utility model, it also includes a first sensor, which includes a first positioning member connected to the rocker and a first sensing member arranged on the mounting base plate, and the first sensing member is used to detect the position of the first positioning member to determine whether the cam follower is in a first state. When the cam follower is in the first state, the driving member is controlled to stop running.

[0011] As a further improvement of an embodiment of the utility model, it also includes a second sensor, which includes a second positioning member connected to the support unit and a second sensing member arranged on the mounting base plate, the second positioning member passes through the mounting base plate and can move relative to the mounting base plate in the horizontal direction, the second sensing member is used to detect the position of the second positioning member to determine whether the cam follower is in the second state, and when the cam follower is in the second state, the driving member is controlled to stop running.

[0012] As a further improvement of one embodiment of the utility model, the support unit includes a connecting plate, the connecting plate is provided with a guide rail or a guide groove matching the guide rail, the mounting base is provided with the guide groove or guide rail, and the guide rail is slidably arranged in the guide groove.

[0013] As a further improvement of an embodiment of the utility model, a limit plate is provided on the mounting base plate at a position at one end of the guide groove or guide rail away from the wafer box.

[0014] As a further improvement of one embodiment of the utility model, the supporting unit also includes a clamping block, a guide groove or a guide column is provided on the clamping block, a guide column or a guide groove is provided on the end face of the connecting plate facing the wafer box, and the guide column is inserted into the guide groove.

[0015] As a further improvement of an embodiment of the utility model, a buffer is further provided between the connecting plate and the clamping block.

[0016] As a further improvement of an embodiment of the utility model, a blocking plate is provided at least at one end of the clamping block in the longitudinal direction of the wafer box, and the blocking plate extends from the clamping block to outside one side in the longitudinal direction of the wafer box.

[0017] As a further improvement of an embodiment of the utility model, the driving component includes a driving motor and a motor seat, the motor seat is arranged on the mounting base plate, and the driving motor is fixedly connected to the motor seat.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] By arranging two anti-falling components symmetrically on both sides of the wafer box in the lateral direction, the two supporting units contained in the two anti-falling components can apply force from both sides of the wafer box in the lateral direction, so that the forces received by both sides are relatively balanced; and the clamping force is driven by a cam mechanism, and the cam mechanism drive can make the supporting unit move precisely and controllably, so that accurate and stable force transmission can be achieved, which helps the supporting unit reduce the impact and vibration on the wafer box. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the structure of a wafer box anti-falling mechanism clamping a wafer box provided by an embodiment of the utility model;

[0021] Figure 2 for Figure 1 A schematic diagram of the structure of a fall prevention component;

[0022] Figure 3 for Figure 2 A schematic diagram of the structure from another perspective;

[0023] Figure 4 for Figure 3 Schematic diagram of the structure when the cam follower is in the first state.

[0024] The above description of the drawings includes the following reference numerals:

[0025] 1. Anti-fall components;

[0026] 11. Install the bottom plate; 111. Avoidance hole; 112. Guide rail; 113. Limit plate;

[0027] 12, support unit; 121, connecting plate; 1211, guide groove; 1212, guide column; 122, clamping block; 1221, support protrusion; 123, buffer; 124, blocking plate;

[0028] 13. driving unit; 131. driving member; 1311. driving motor; 1312. motor seat; 132. rocker; 1321. cam follower; 133. cam plate; 1331. track;

[0029] 14. first sensor; 141. first positioning member; 142. first sensing member;

[0030] 15. second sensor; 151. second positioning member; 152. second sensing member;

[0031] 2. Wafer box. DETAILED DESCRIPTION

[0032] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0033] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0034] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directional words are not used to limit the present invention.

[0035] In order to solve the problem in the prior art that a wafer box is easily damaged by impact or vibration when the wafer box is clamped, the utility model provides a wafer box anti-falling mechanism.

[0036] like Figure 1-4 As shown, the wafer box anti-falling mechanism provided by the utility model comprises at least one pair of anti-falling components 1 , and the two anti-falling components in each pair of anti-falling components are symmetrically arranged along the transverse direction of the wafer box 2 .

[0037] The anti-fall assembly 1 includes a mounting base plate 11 , a supporting unit 12 and a driving unit 13 .

[0038] The mounting base plate 11 is used to be connected to the OHT trolley; the support unit 12 is slidably connected to the mounting base plate 11 , and a clamping space for clamping the wafer box 2 is formed between the two support units 12 .

[0039] Furthermore, the driving unit 13 includes a driving member 131, a rocker 132 and a cam plate 133 arranged on the mounting base 11, the rocker 132 is provided with a cam follower 1321, the cam plate 133 is connected to the support unit 12 and has a track 1331 for the cam follower 1321 to move, the driving member 131 drives the rocker 132 to move the cam plate 133 laterally, thereby adjusting the distance between the two support units 12 to adjust the size of the clamping space.

[0040] Specifically, in the present invention, the driving member 131 is in transmission cooperation with the rocking arm 132. After the driving member 131 is started, the rocking arm 132 can be driven to swing. The cam follower 1321 is fixedly arranged on the rocking arm 132. When the rocking arm 132 swings, the cam follower 1321 moves together with the rocking arm 132, so that the cam follower 1321 moves in the track 1331 on the cam plate 133, thereby driving the cam plate 133 to move in the lateral direction.

[0041] In this embodiment, the driving member 131 may include a driving motor 1311 and a motor seat 1312 . The motor seat 1312 is disposed on the mounting base 11 . The driving motor 1311 is fixedly connected to the motor seat 1312 and is transmission-connected to the rocker 132 .

[0042] Since the support unit 12 is fixedly connected to the cam plate 133, when the cam plate 133 moves in the lateral direction, the support unit 12 can be driven to move in the lateral direction, thereby adjusting the size of the clamping space. When the size of the clamping space is adjusted, the wafer box 2 can be released or clamped.

[0043] By arranging two anti-falling components 1 symmetrically on both sides of the wafer box 2 in the lateral direction, the two supporting units 12 included in the two anti-falling components can apply force from both sides of the wafer box 2 in the lateral direction, so that the forces received by both sides are relatively balanced; and the clamping force is driven by a cam mechanism, and the cam mechanism drive can make the supporting unit 12 move precisely and controllably, so that precise and stable force transmission can be achieved, which helps the supporting unit 12 reduce the impact and vibration on the wafer box 2.

[0044] Optionally, in this embodiment, refer to Figure 2-3 As shown, the track 1331 includes a guide through hole arranged on the cam plate 133, and the cam follower 1321 is slidably arranged in the guide through hole.

[0045] With such a configuration, the cam follower 1321 can better cooperate with the cam plate 133, and when the cam follower 1321 moves in the track 1331, it is not easy to get off the track; and the extension range of the guide through hole also determines the stroke of the cam follower 1321, thereby indirectly limiting the magnitude of the force applied by the support unit 12 to the wafer box 2. With such a configuration, it is possible to avoid the impact and vibration of the wafer box 2 caused by excessive clamping force.

[0046] Still reference Figure 2-3 As shown, the guide through hole has two side walls in the sliding direction of the cam follower 1321, and the cam follower 1321 has a first state of being locked with one of the two side walls and a second state of being abutted with the other one.

[0047] Further, in the first state, the two support units 12 are close to each other. It can be understood that in the first state, the two support units 12 can clamp the wafer box 2; in the second state, the two support units 12 are away from each other to release the wafer box 2, so in the second state, the wafer box 2 can pass between the two support units 12.

[0048] It should be emphasized that, in the first state, the cam follower 1321 is locked with one of the two side walls, thereby being in a stable static state, and the static state does not require additional force to be applied from the outside to maintain the static state.

[0049] Furthermore, the wafer box anti-falling mechanism also includes a first sensor 14, which includes a first positioning member 141 connected to the rocker 132 and a first sensing member 142 arranged on the mounting base 11, and the first sensing member 142 is used to detect the position of the first positioning member 141.

[0050] Specifically, refer to Figure 4 As shown, when the first positioning member 141 is located within the monitoring range of the first sensing member 142, the first sensing member 142 detects the position of the first positioning member 141 and can determine that the cam follower 1321 is in the first state. Therefore, the first sensing member 142 can transmit a signal to the driving member 131, so that the driving member 131 is controlled to stop running.

[0051] It should be noted that when the cam follower 1321 is in the first state, it indicates that the cam follower 1321 is in a state of being locked with one of the two side walls, and at this time, the two support units 12 are close to each other and can clamp the wafer box. Due to the existence of the locking structure, the driving member 131 is no longer required to apply power. The first sensing member 142 can obtain the first positioning member 141 within its monitoring range, that is, the first positioning member 141 is located within the monitoring range of the first sensing member 142. Therefore, the first sensing member 142 can promptly transmit a signal to the driving member 131 to notify it to stop running, thereby effectively saving energy.

[0052] Of course, in some embodiments, when the first positioning member 141 is within the monitoring range of the first sensing member 142, the driving member 131 can keep running, and when the first positioning member 141 is not within the first sensing member 142, it can be determined that the cam follower 1321 is in the first state, and then the first sensing member 142 can transmit a signal to the driving member 131, and the driving member 131 can be controlled to close.

[0053] Furthermore, the wafer box anti-falling mechanism also includes a second sensor 15, the second sensor 15 includes a second positioning member 151 connected to the supporting unit 12 and a second sensing member 152 arranged on the mounting base plate 11, the second positioning member 151 passes through the mounting base plate 11 and can move relative to the mounting base plate 11 in the horizontal direction.

[0054] Specifically, a through-long avoidance hole 111 is provided on the installation base plate 11 along the transverse direction, and the second positioning member 151 is passed through the avoidance hole 111 .

[0055] In this embodiment, the second sensing member 152 is used to detect the position of the second positioning member 151. When the second positioning member 151 is within the monitoring range of the second sensing member 152, the second sensing member 152 can detect the position of the second positioning member 151, and then determine that the cam follower 1321 is in the second state. The second sensing member 152 can transmit a signal to the driving member 131, and then the driving member 131 is controlled to close.

[0056] It should be noted that when the cam follower 1321 is in the second state, it indicates that the cam follower 1321 is in contact with the other of the two side walls, and at this time, the two support units 12 are away from each other, and the wafer box 2 can pass between the two support units 12. At this time, the driving member 131 can stop applying the driving force to achieve the purpose of energy saving.

[0057] Of course, in some embodiments, when the second positioning member 151 is within the monitoring range of the second sensing member 152, the driving member 131 can keep running, and when the second positioning member 151 is outside the monitoring range of the second sensing member 152, it can be determined that the cam follower 1321 is in the second state, and therefore, the driving member 131 can be controlled to close.

[0058] It should be emphasized that corresponding to Figure 2 and Figure 3 In the present invention, the lateral direction of the wafer box is the direction of the x-axis in the figure, and the longitudinal direction of the wafer box is the direction of the y-axis in the figure. This definition makes it easier to understand the technical solution in this embodiment.

[0059] Optionally, in some embodiments, when the cam follower 1321 is in the second state, the cam follower 1321 can be configured to be in a state of being locked with the other of the two side walls, thereby preventing the two support units 12 from being accidentally closed after being in the open state.

[0060] Further, in this embodiment, the support unit 12 includes a connecting plate 121, and a guide rail or a guide groove matched with the guide rail is provided on the connecting plate 121, and the guide groove or guide rail is provided on the mounting base plate 11. The guide rail is slidably arranged in the guide groove, so that the support unit 12 can slide more smoothly relative to the mounting base plate 11.

[0061] In this embodiment, the guide groove 1211 is provided on the connecting plate 121 , and the guide rail 112 is provided on the installation base plate 11 .

[0062] Furthermore, a limiting plate 113 is provided on the mounting base plate 11 at a position of the guide groove or guide rail at an end away from the wafer box 2 .

[0063] Corresponding to this embodiment, reference Figure 3 As shown, the limit plate 113 is arranged at a position of one end of the guide rail 112 away from the wafer box 2. With such arrangement, when the guide groove 1211 moves relative to the guide rail 112, the limit plate 113 limits the guide groove 1211, thereby preventing the cam follower 1321 from impacting the track 1331 when moving in the track 1331 and causing damage to the track.

[0064] Furthermore, the support unit 12 also includes a clamping block 122, and a guide groove or a guide column is provided on the clamping block 122. The end surface of the connecting plate 121 facing the wafer box 2 is provided with a guide column or a guide groove, and the guide column is inserted into the guide groove.

[0065] Specifically in this embodiment, refer to Figure 2As shown, the connecting plate 121 is provided with the guide column 1212, and the clamping block 121 is provided with the guide groove (not shown in the figure), and the guide groove has a travel track for the guide column 1212 to move, so that when the clamping block 121 is clamped on the wafer box 2, a certain buffering effect can be achieved.

[0066] Furthermore, a buffer member 123 is further provided between the connecting plate 121 and the clamping block 122. The buffer member 123 is provided so as to further provide a certain buffer to the wafer box 2 when the clamping block 122 clamps the wafer box 2.

[0067] In this embodiment, the buffer member 123 can be configured as a rubber pad, a buffer sponge, a compression spring, etc. The present invention does not limit this, and any technical solution similar to the present embodiment should be included in the scope of protection of the present invention.

[0068] Furthermore, a blocking plate 124 is provided at least at one end of the clamping block 122 in the longitudinal direction of the wafer box 2. Since the two clamping blocks 122 clamp the wafer box 2 from both sides, the blocking plate 124 extends from the clamping block 122 to one side of the wafer box 2 in the longitudinal direction (y axis). This arrangement can prevent the wafer box 2 from falling from one side in the longitudinal direction.

[0069] Furthermore, each of the two clamping blocks 122 has a support protrusion 1221 protruding toward the other clamping block 122, and when the cam follower 1321 is in the first state, the two support protrusions 1221 are used to support the wafer box 2 to limit the longitudinal position of the wafer box 2.

[0070] Preferably, the upper surface of the supporting protrusion 1221 forms a step surface, and the wafer box 2 can be stably supported on the step surface.

[0071] In summary, the embodiments of the present invention achieve the following technical effects:

[0072] By arranging two anti-falling components 1 symmetrically on both sides of the wafer box 2 in the lateral direction, the two supporting units 12 included in the two anti-falling components can apply force from both sides of the wafer box 2 in the lateral direction, so that the forces received by both sides are relatively balanced; and the clamping force is driven by a cam mechanism, and the cam mechanism drive can make the supporting unit 12 move precisely and controllably, so that precise and stable force transmission can be achieved, which helps the supporting unit 12 reduce the impact and vibration on the wafer box 2.

[0073] Obviously, the embodiments described above are only some embodiments of the utility model, not all embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0074] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0075] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0076] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A wafer box anti-falling mechanism, characterized in that: It comprises at least one pair of anti-falling components, wherein two anti-falling components in each pair of anti-falling components are symmetrically arranged along the transverse direction of the wafer box, and the anti-falling components comprise: Install the base plate for connection with the OHT trolley; A support unit is slidably connected to the mounting base plate, and a clamping space for clamping the wafer box is formed between two support units; The driving unit includes a driving member, a rocker and a cam plate arranged on a mounting base plate. A cam follower is arranged on the rocker. The cam plate is connected to the supporting unit and has a track for the cam follower to move. The driving member drives the rocker to move the cam plate laterally, thereby adjusting the distance between the two supporting units to adjust the size of the clamping space.

2. The wafer box anti-falling mechanism according to claim 1, characterized in that: The track includes a guide through hole arranged on the cam plate, the cam follower is slidably arranged in the guide through hole, the guide through hole has two side walls in the sliding direction of the cam follower, the cam follower has a first state locked with one of the two side walls and a second state abutting with the other, in the first state, the two support units are close to each other to clamp the wafer box, and in the second state, the two support units are away from each other to release the wafer box.

3. The wafer box anti-falling mechanism according to claim 2, characterized in that: It also includes a first sensor, which includes a first positioning member connected to the rocker and a first sensing member arranged on the mounting base plate, and the first sensing member is used to detect the position of the first positioning member to determine whether the cam follower is in a first state. When the cam follower is in the first state, the driving member is controlled to stop running.

4. The wafer box anti-falling mechanism according to claim 3, characterized in that: It also includes a second sensor, which includes a second positioning member connected to the support unit and a second sensing member arranged on the mounting base plate, the second positioning member passes through the mounting base plate and can move relative to the mounting base plate in the horizontal direction, and the second sensing member is used to detect the position of the second positioning member to determine whether the cam follower is in the second state. When the cam follower is in the second state, the driving member is controlled to stop running.

5. The wafer box anti-falling mechanism according to claim 1, characterized in that: The support unit comprises a connecting plate, a guide rail or a guide groove matched with the guide rail is arranged on the connecting plate, the guide groove or the guide rail is arranged on the mounting base plate, and the guide rail is slidably arranged in the guide groove.

6. The wafer box anti-falling mechanism according to claim 5, characterized in that: A limiting plate is provided on the mounting base plate at a position of one end of the guide groove or guide rail away from the wafer box.

7. The wafer box anti-falling mechanism according to claim 5, characterized in that: The support unit further comprises a clamping block, on which a guide groove or a guide column is arranged, and a guide column or a guide groove is arranged on the end surface of the connecting plate facing the wafer box, and the guide column is inserted into the guide groove.

8. The wafer box anti-falling mechanism according to claim 7, characterized in that: A buffer is also provided between the connecting plate and the clamping block.

9. The wafer box anti-falling mechanism according to claim 7, characterized in that: At least one end of the clamping block in the longitudinal direction of the wafer box is provided with a blocking plate, and the blocking plate extends from the clamping block to the outside of one side in the longitudinal direction of the wafer box.

10. The wafer box anti-falling mechanism according to claim 1, characterized in that: The driving component includes a driving motor and a motor seat. The motor seat is arranged on the mounting base plate, and the driving motor is fixedly connected to the motor seat.

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