Manual and electric integrated cover opening device for buffer cavity cover

Abstract

The utility model relates to the field of semiconductor process equipment, in particular to a buffer cavity cover manual and electric integrated uncovering device which comprises a side edge fixing plate, a top end cover is fixed above one side of the outer wall of the side edge fixing plate, and a lower base is fixed at the bottom of one side of the outer wall of the side edge fixing plate. A buffering cavity connecting plate fixed to the buffering cavity cover is arranged at the front end of the outer wall of the side edge fixing plate and located between the top end cover and the lower base, a lifting component is arranged at the end, close to the side edge fixing plate, of the buffering cavity connecting plate, and a power component for driving the lifting component is arranged at the top end of the outer wall of the top end cover. According to the utility model, the operation process is simplified, the uncovering stability is improved, the safety is enhanced, the labor intensity is reduced, the production efficiency is improved, the convenient, quick, safe and reliable uncovering experience is brought to a user, and the uncovering device has obvious advantages and beneficial effects.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor process equipment, in particular to a buffer cavity cover integrated manual and electric opening device. Background Art

[0002] Semiconductor etching equipment is one of the key equipment in semiconductor technology, which is used to etch semiconductor materials to form fine structures and patterns. In order to protect the etching chamber environment from external contamination, it is usually necessary to install a buffer chamber cover on the etching chamber.

[0003] The existing buffer chamber cover opening device has the following shortcomings when used:

[0004] 1. Complex operation: The traditional manual lid opening device needs to be operated manually, and the opening force and angle need to be accurately controlled. The operator needs to have certain technical experience and professional training;

[0005] 2. Unstable opening: Due to individual differences of operators and human factors, there may be problems such as inconsistent force and angle deviation during the opening process, resulting in poor stability of opening the lid and prone to misoperation;

[0006] 3. Safety risks: Manual operation has certain safety risks, which may cause accidental injury to the operator or damage to the equipment. Especially in the case of frequent operations and long working hours, operator fatigue may further increase the risk of accidents;

[0007] 4. High labor intensity: Manual opening requires the operator to perform continuous physical labor, which places high demands on the operator's physical condition and physical strength, and can easily cause fatigue and discomfort to the operator.

[0008] In summary, it is necessary to invent a buffer chamber cover manual and electric integrated opening device. Utility Model Content

[0009] The manual opening device for the buffer cavity cover in the prior art has problems and disadvantages such as complicated operation, unstable opening, high safety risk and high labor intensity. In order to improve these problems and improve operating efficiency and safety, the utility model provides a manual-electric integrated opening device for the buffer cavity cover, which effectively solves the problems and disadvantages in the prior art.

[0010] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a buffer cavity cover manual and electric integrated opening device, comprising a side fixing plate, a top cover is fixed on the upper side of one side of the outer wall of the side fixing plate, a lower base is fixed on the bottom side of one side of the outer wall of the side fixing plate, a buffer cavity connecting plate fixed to the buffer cavity cover is arranged at the front end of the outer wall of the side fixing plate and located between the top cover and the lower base, a lifting component is arranged at one end of the buffer cavity connecting plate close to the side fixing plate, and a power component for driving the lifting component is arranged at the top end of the outer wall of the top cover.

[0011] Preferably, the lifting component includes a screw rod, the upper end of the screw rod is rotatably connected to the bottom end of the inner wall of the top cover, and the bottom of the outer wall of the screw rod is sleeved with a sleeve rod.

[0012] Preferably, the bottom end of the outer wall of the screw rod is rotatably connected to the upper part of the inner wall of the sleeve rod, the bottom end of the sleeve rod is fixed to the top end of the outer wall of the lower base, the outer wall sliding sleeve of the sleeve rod is provided with a flange linear bearing, and the outer side of the flange linear bearing is provided with a linear motion module.

[0013] Preferably, the bottom end of the linear motion module is fixed to a bottom sealing plate connected to the bottom of the flange linear bearing, a flange nut is fixed to the upper inner wall of the linear motion module through a through hole, and the inner wall of the flange nut is threadedly connected to the outer wall of the screw rod.

[0014] Preferably, the outer wall of the buffer chamber connecting plate and one end close to the side fixed plate are connected to the bottom of the outer wall of the linear motion module, and the front and rear sides of the outer wall of the lower base and the outer side of the buffer chamber connecting plate are fixed with a cam bolt ball bearing device for limiting the position, and the front and rear sides of the outer wall of the buffer chamber connecting plate are slidingly connected to the opposite side of the cam bolt ball bearing device, and the outer wall of the buffer chamber connecting plate and the left side of the cam bolt ball bearing device are rotatably connected with an eccentric wheel.

[0015] Preferably, the power component includes a motor, which is arranged on a side of the screw rod away from the side fixing plate. A connecting shaft is rotatably connected to the top of the top cover and at a position corresponding to the screw rod, and the bottom end of the connecting shaft is fixed to the top end of the screw rod.

[0016] Preferably, the top output end of the motor is connected to the outer wall of the connecting shaft via a pulley mechanism, a hand crank handle is fixed to the top of the connecting shaft for easy manual cranking, and a protective cover is provided on the outside of the power component for protection.

[0017] Preferably, the side end of the protective cover is connected to the side end of the outer wall of the side fixing plate, and a through groove is provided at the bottom end of the outer wall of the protective cover at a position corresponding to the screw rod.

[0018] The beneficial effects of the utility model are:

[0019] 1. Convenient and fast: It adopts electric drive. The operator only needs to press the corresponding button to complete the cover opening action. The operation is simple and fast, which improves the convenience and efficiency of operation.

[0020] 2. Stable opening: Through electric drive, the device can accurately control the force and angle of opening the lid, ensuring the stability and consistency of the opening action, avoiding the instability and risk of misoperation in traditional manual opening.

[0021] 3. Safe and reliable: The device is reasonably designed and has an automatic stop function. When the cover opening action is completed, the device will automatically stop to avoid the risk of accidental injury to the operator. At the same time, the mechanical structure of the electric drive is reasonably designed to provide a stable cover opening process, ensuring the safety and reliability of the device.

[0022] 4. Reduced labor intensity: With electric drive, the operator no longer needs to perform continuous physical labor, which reduces labor intensity, reduces operator fatigue, and improves work comfort and efficiency.

[0023] 5. Improve production efficiency: Due to the convenience and speed of operation, the buffer chamber cover manual and electric integrated opening device can greatly improve work efficiency, reduce time waste during the opening process, and help improve production efficiency and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model in the front view direction;

[0025] Figure 2 For this utility model Figure 1 Schematic diagram of the three-dimensional structure after removing the protective cover and the linear motion module;

[0026] Figure 3 For this utility model Figure 1 Schematic diagram of the overall explosion structure.

[0027] In the figure: 100, side fixing plate; 200, top cover; 210, motor; 220, pulley mechanism; 230, hand crank handle; 240, protective cover; 300, screw rod; 310, flange nut; 320, sleeve rod; 330, flange linear bearing; 340, linear motion module; 400, buffer chamber connecting plate; 410, lower base; 420, cam bolt ball bearing device; 430, eccentric wheel. DETAILED DESCRIPTION

[0028] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0029] See attached Figure 1-3 The utility model provides a buffer cavity cover manual and electric integrated opening device, including a side fixing plate 100, the side fixing plate 100 is provided to fix the device at a suitable position, a top cover 200 is fixed on the upper side of the outer wall of the side fixing plate 100, a lower base 410 is fixed on the bottom side of the outer wall of the side fixing plate 100, a buffer cavity connecting plate 400 fixed to the buffer cavity cover is provided at the front end of the outer wall of the side fixing plate 100 and between the top cover 200 and the lower base 410, and the buffer cavity connecting plate 400 can be fixed to the buffer cavity cover by bolts and other fixing parts, so that the buffer cavity connecting plate 400 can open and close the cavity cover when moving;

[0030] A lifting component is provided at one end of the buffer chamber connecting plate 400 close to the side fixing plate 100, and the lifting component includes a screw rod 300, the upper end of the screw rod 300 is rotatably connected to the bottom end of the inner wall of the top cover 200, and a sleeve rod 320 is sleeved at the bottom of the outer wall of the screw rod 300, and the bottom end of the outer wall of the screw rod 300 is rotatably connected to the upper part of the inner wall of the sleeve rod 320, and the sleeve rod 320 is provided to support the bottom end of the screw rod 300, and the bottom end of the sleeve rod 320 is fixed to the top end of the outer wall of the lower base 410, and the outer wall sliding sleeve of the sleeve rod 320 is provided with a flange linear bearing 330, and the flange linear bearing 330 is provided to seal the bottom end of the linear motion module 340, and can also The flange linear bearing 330 is provided with a linear motion module 340 on its outer side, and the bottom end of the linear motion module 340 is fixed to the bottom end sealing plate connected to the bottom of the flange linear bearing 330. The linear motion module 340 is provided to drive the buffer cavity connecting plate 400 to move during the lifting process, so that the buffer cavity connecting plate 400 can drive the cavity cover to move. The upper part of the inner wall of the linear motion module 340 is fixed with a flange nut 310 through a through hole. The inner wall of the flange nut 310 is threadedly connected to the outer wall of the screw rod 300. When the screw rod 300 rotates, The flange nut 310 provided can drive the upper end of the linear motion module 340 to move through the cooperation of the threaded connection, so that the linear motion module 340 can drive the buffer chamber connecting plate 400 to move, and the outer wall of the buffer chamber connecting plate 400 and one end close to the side fixing plate 100 are connected to the outer wall bottom of the linear motion module 340, and the outer wall of the buffer chamber connecting plate 400 can be fixed to the outer wall bottom of the linear motion module 340 through a pin shaft, and the front and rear sides of the outer wall of the lower base 410 and the outer side of the buffer chamber connecting plate 400 are fixed with a cam bolt ball bearing device 420 for limiting position, and the front and rear sides of the outer wall of the buffer chamber connecting plate 400 and the cam bolt ball shaft The bearing device 420 is slidably connected to one side of the buffer chamber connecting plate 400, and the outer wall of the buffer chamber connecting plate 400 is located on the left side of the cam bolt ball bearing device 420 and is rotatably connected with an eccentric wheel 430. The cam bolt ball bearing device 420 and the eccentric wheel 430 are provided to limit the movement of the buffer chamber connecting plate 400, so that the movement trajectory of the buffer chamber connecting plate 400 is consistent with the trajectory of the buffer chamber cover switch cover. At the same time, limit sensors need to be installed at the upper and lower limit positions of the entire device. When the lower device moves to the limit position and touches the limit switch, the entire device is powered off to realize the automatic stop function to ensure safety. The manual cover opening is mechanically limited when the device moves to the limit position.

[0031] A power component for driving the lifting component is arranged at the top of the outer wall of the top cover 200, and the power component includes a motor 210. The motor 210 is arranged on a side of the screw rod 300 away from the side fixing plate 100. A connecting shaft is rotatably connected at the top of the top cover 200 and at a position corresponding to the screw rod 300. The bottom end of the connecting shaft is fixed to the top of the screw rod 300, and the top output end of the motor 210 is connected to the outer wall of the connecting shaft through a pulley mechanism 220. Specifically, the motor 210 can drive the connecting shaft to rotate through the pulley mechanism 220 after being energized, thereby driving the screw rod 300 to rotate forward and reversely. The pulley mechanism 220 includes two pulleys and a transmission belt. The top of the connecting shaft is fixed with a pulley mechanism 220 for easy manual shaking by personnel. The hand crank handle 230 is provided to manually drive the screw rod 300 to rotate when the motor 210 is powered off, so that the buffer chamber cover can be opened and closed manually by the operator. A protective cover 240 is provided on the outside of the power component. The side end of the protective cover 240 is connected to the side end of the outer wall of the side fixing plate 100. A through groove is provided at the bottom end of the outer wall of the protective cover 240 and at a position corresponding to the screw rod 300. The protective cover 240 is made of aluminum alloy sheet metal and welded to ensure the corrosion resistance and oxidation resistance of the entire device. The protective cover 240 is used to support the motor 210 on the one hand, and to protect the motor 210 and the screw rod 300 from debris that affect their service life on the other hand.

[0032] The use process of the utility model is as follows: the utility model has two ways to open the cover, the first way is mainly to drive the screw rod 300 to rotate by the motor 210 to drive the device to rise, and the buffer chamber connecting plate 400 can be connected with the buffer chamber cover by bolts and other connecting parts in advance, so that the buffer chamber cover can be opened and closed, and the second way is to drive the screw rod 300 to rotate by the hand crank handle 230 to drive the device to rise. Both ways drive the device to rise by rotating the screw rod 300;

[0033] The specific steps are as follows: when the buffer chamber cover is closed, the motor 210 is energized to rotate the screw rod 300 through the pulley mechanism 220 and the connecting shaft, and the flange nut 310 installed on the linear motion module 340 cooperates with the screw rod 300. The rotation of the screw rod 300 drives the linear motion module 340 to move, and the buffer chamber connecting plate 400 on the linear motion module 340 starts to move. The buffer chamber connecting plate 400 is limited up and down by the cam bolt ball bearing device 420 and the eccentric wheel 430 to make the movement trajectory of the buffer chamber connecting plate 400 consistent with the trajectory of the buffer chamber cover switch cover. Limit sensors are installed at the upper and lower limit positions of the entire device. When the lower device moves to the limit position and touches the limit switch, the entire device is powered off to realize the automatic stop function to ensure safety. The manual opening of the cover is mechanically limited when the device moves to the limit position.

[0034] The above is only a preferred embodiment of the utility model. Any person skilled in the art may modify the utility model by using the above technical solution or modify it into an equivalent technical solution. Therefore, any simple modification or equivalent replacement based on the technical solution of the utility model shall fall within the scope of protection claimed by the utility model.

Claims

1. A manual and electric integrated opening device for a buffer chamber cover, comprising a side fixing plate (100), a top cover (200) being fixed on one side of the outer wall of the side fixing plate (100), and a lower base (410) being fixed on one side of the outer wall of the side fixing plate (100), characterized in that: A buffer cavity connecting plate (400) fixed to the buffer cavity cover is arranged at the front end of the outer wall of the side fixing plate (100) and between the top cover (200) and the lower base (410); a lifting component is arranged at one end of the buffer cavity connecting plate (400) close to the side fixing plate (100); and a power component for driving the lifting component is arranged at the top end of the outer wall of the top cover (200).

2. The buffer chamber cover manual and electric integrated opening device according to claim 1, characterized in that: The lifting component comprises a screw rod (300), the upper end of the screw rod (300) is rotatably connected to the bottom end of the inner wall of the top cover (200), and the bottom of the outer wall of the screw rod (300) is sleeved with a sleeve rod (320).

3. The buffer chamber cover manual and electric integrated opening device according to claim 2, characterized in that: The bottom end of the outer wall of the screw rod (300) is rotatably connected to the upper part of the inner wall of the sleeve rod (320), the bottom end of the sleeve rod (320) is fixed to the top end of the outer wall of the lower base (410), the outer wall of the sleeve rod (320) is slidably sleeved with a flange linear bearing (330), and the outer side of the flange linear bearing (330) is sleeved with a linear motion module (340).

4. The buffer chamber cover manual and electric integrated opening device according to claim 3, characterized in that: The bottom end of the linear motion module (340) is fixed to a bottom end sealing plate connected to the bottom of the flange linear bearing (330), and a flange nut (310) is fixed to the upper part of the inner wall of the linear motion module (340) through a through hole, and the inner wall of the flange nut (310) is threadedly connected to the outer wall of the screw rod (300).

5. The buffer chamber cover manual and electric integrated opening device according to claim 4, characterized in that: The outer wall of the buffer chamber connecting plate (400) and one end close to the side fixing plate (100) are connected to the bottom of the outer wall of the linear motion module (340); the front and rear sides of the outer wall of the lower base (410) and located on the outer side of the buffer chamber connecting plate (400) are fixed with a cam bolt ball bearing device (420) for limiting position; the front and rear sides of the outer wall of the buffer chamber connecting plate (400) are slidably connected to the opposite side of the cam bolt ball bearing device (420); the outer wall of the buffer chamber connecting plate (400) and located on the left side of the cam bolt ball bearing device (420) are rotatably connected with an eccentric wheel (430).

6. The buffer chamber cover manual and electric integrated opening device according to claim 2, characterized in that: The power component comprises a motor (210), the motor (210) being arranged on a side of the screw rod (300) away from the side fixing plate (100), a connecting shaft being rotatably connected at the top end of the top cover (200) and at a position corresponding to the screw rod (300), and the bottom end of the connecting shaft being fixed to the top end of the screw rod (300).

7. The buffer chamber cover manual and electric integrated opening device according to claim 6, characterized in that: The top output end of the motor (210) is connected to the outer wall of the connecting shaft via a pulley mechanism (220); a hand crank handle (230) is fixed to the top of the connecting shaft for easy manual cranking; and a protective cover (240) is provided on the outside of the power component for protection.

8. The buffer chamber cover manual and electric integrated opening device according to claim 7, characterized in that: The side end of the protective cover (240) is connected to the side end of the outer wall of the side fixing plate (100), and a through groove is provided at the bottom end of the outer wall of the protective cover (240) and at a position corresponding to the screw rod (300).

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