Magnetron sputtering coating hanging plate and magnetron sputtering coating machine

Abstract

The utility model provides a magnetron sputtering coating hanging plate and a magnetron sputtering coating machine.The magnetron sputtering coating hanging plate comprises a hanging plate assembly, the hanging plate assembly is provided with a groove structure and a fixing structure, the fixing structure is connected with the groove structure, and the inner surface of the groove structure is provided with a plurality of protrusions; the supporting assembly is connected with the groove structure, the supporting assembly comprises a supporting structure, the distance between the supporting structure and the bottom of the groove structure is larger than the depth of the groove structure, the to-be-coated glass is arranged on the supporting structure, and the projection of the supporting structure is located in the projection of the to-be-coated glass in the direction perpendicular to the to-be-coated glass. According to the technical scheme, the problem that in the magnetron sputtering coating process in the prior art, a film layer exists in the edge position of the back face of a coated product is effectively solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of glass coating, and in particular to a magnetron sputtering coating hanger and a magnetron sputtering coating machine. BACKGROUND

[0002] With the continuous development of science and technology, glass is applied in many different fields, such as buildings, homes and electronic products, which are indispensable in daily life. In order to improve the light transmittance of glass, reduce glare, enhance waterproof and antifouling performance, and improve the heat insulation effect, it is usually necessary to coat the glass.

[0003] In industrial production, magnetron sputtering coating is widely used in glass coating due to its advantages such as fast deposition rate, low substrate temperature, strong large-area coating capacity, and environmental protection.

[0004] In the prior art, the glass is coated by using a magnetron sputtering coating method. The high-temperature adsorption pad needs to be pasted on the hanger first, and then the glass is fixed by using the adsorption pad. Therefore, there is a gap between the glass and the hanger, and some atoms or molecules rebound to the edge of the back of the glass after hitting the hanger, resulting in the existence of a film layer at the edge of the back of the glass after coating, such as CN214193438U. UTILITY MODEL CONTENT

[0005] One of the technical problems to be solved by the present application is that there is a film layer at the edge of the back of the product after magnetron sputtering coating.

[0006] To solve the above technical problems, the present application provides a magnetron sputtering coating hanger and a magnetron sputtering coating machine.

[0007] The magnetron sputtering coating hanger provided by the present application comprises a hanger assembly, the hanger assembly having a groove structure and a fixing structure, the fixing structure being connected with the groove structure, the inner surface of the groove structure having a plurality of protrusions; a support assembly, the support assembly being connected with the groove structure, the support assembly comprising a support structure, the distance between the support structure and the bottom of the groove structure being greater than the depth of the groove structure, the glass to be coated being arranged on the support structure, and the projection of the support structure being located inside the projection of the glass to be coated in a direction perpendicular to the glass to be coated.

[0008] In some embodiments, the depth of the groove structure is 1cm to 3cm.

[0009] In some embodiments, the support assembly further comprises a connecting structure, the connecting structure being rotatably connected with the support structure, and the connecting structure being connected with the groove structure.

[0010] In some embodiments, the connecting structure comprises a plurality of connecting structures, and the plurality of connecting structures are movably connected with the groove structure.

[0011] In some embodiments, the connection structure includes a spherical hinge and a bolt, the spherical hinge being rotatably connected to a support structure, and the groove structure having a threaded hole corresponding to the bolt, the bolt passing through the threaded hole and being connected to the spherical hinge.

[0012] In some embodiments, the support components include a plurality of components that are disposed in a one-to-one correspondence with the glass to be coated.

[0013] In some embodiments, the support component further includes a high-temperature adsorption pad, which is connected to the support structure.

[0014] In some embodiments, the support component further includes a horizontal drive structure disposed within the groove structure, and the connecting structure is connected to the horizontal drive structure.

[0015] In some embodiments, the connection structure includes a first connection segment and a second connection segment. The first connection segment is connected to the horizontal drive structure, the second connection segment is movably inserted within the first connection segment, and the second connection segment is rotatably connected to the support structure.

[0016] According to another aspect of this application, a magnetron sputtering coating machine is also provided. The magnetron sputtering coating machine adopts the above-mentioned magnetron sputtering coating mounting plate. The magnetron sputtering coating machine includes a housing, a mounting base and a roller. The roller is rotatably connected to the housing and is disposed inside the housing. The mounting base is connected to the housing. The target material is fixed on the mounting base. The fixing structure is connected to the roller.

[0017] Through the above technical solution, the magnetron sputtering coating mounting plate provided in this application places the glass to be coated on a supporting structure. At this time, the back of the glass to be coated faces the bottom of the groove structure. Due to the depth of the groove structure, atoms and molecules emitted into the groove structure are less likely to bounce back to the back of the glass. Furthermore, the multiple protrusions inside the groove structure change the reflection angle of atoms and molecules, further preventing the formation of a film layer at the edge of the back of the glass. The technical solution of this application effectively solves the problem in the prior art of film layer formation at the edge of the back of the product after coating during the magnetron sputtering coating process. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the front structure of the magnetron sputtering coating mounting plate disclosed in Embodiment 1 of this application is shown;

[0020] Figure 2 It shows Figure 1 A schematic diagram of the back structure of the magnetron sputtering coating mounting plate;

[0021] Figure 3 It shows Figure 1 A schematic diagram of the structure of the mounting plate assembly for magnetron sputtering coating;

[0022] Figure 4 It shows Figure 1 A schematic diagram of the support assembly for the magnetron sputtering coating mounting plate;

[0023] Figure 5 This paper shows a schematic diagram of the structure of the magnetron sputtering coating plate disclosed in Embodiment 2 of this application;

[0024] Figure 6 It shows Figure 5 A magnified schematic diagram of part A of the magnetron sputtering coating mounting plate.

[0025] Explanation of reference numerals in the attached figures:

[0026] 10. Mounting plate assembly; 11. Groove structure; 111. Threaded hole; 12. Fixing structure; 20. Support assembly; 21. Support structure; 22. Connecting structure; 221. Spherical hinge; 222. Bolt; 223. First connecting section; 224. Second connecting section; 23. Horizontal drive structure. Detailed Implementation

[0027] The embodiments of this application will be further described in detail below with reference to the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to illustrate the principles of this application by way of example, but should not be used to limit the scope of this application. This application can be implemented in many different forms and is not limited to the specific embodiments of the application herein, but includes all technical solutions falling within the scope of the claims.

[0028] These embodiments are provided to make the application thorough and complete, and to fully express the scope of the application to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values ​​illustrated in these embodiments should be interpreted as merely exemplary and not as limiting.

[0029] It should be noted that, in the description of this application, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationship, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0030] Furthermore, the terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. "Vertical" is not strictly vertical, but within the permissible margin of error. "Parallel" is not strictly parallel, but within the permissible margin of error. Terms such as "including" or "contains" mean that the element preceding the word encompasses the element listed after it, and do not exclude the possibility of encompassing other elements as well.

[0031] It should also be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, an intermediary device may or may not be present between the specific device and the first or second device.

[0032] All terms used in this application have the same meaning as understood by one of ordinary skill in the art to which this application pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless expressly defined herein.

[0033] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0034] like Figures 1 to 4As shown, the magnetron sputtering coating mounting plate disclosed in Embodiment 1 of this application includes: a mounting plate assembly 10 and a support assembly 20. The mounting plate assembly 10 has a groove structure 11 and a fixing structure 12. The fixing structure 12 is connected to the groove structure 11. The inner surface of the groove structure 11 has multiple protrusions. The support assembly 20 is connected to the groove structure 11. The support assembly 20 includes a support structure 21. The distance between the support structure 21 and the bottom of the groove structure 11 is greater than the depth of the groove structure 11. The glass to be coated is placed on the support structure 21. Along the direction perpendicular to the glass to be coated, the projection of the support structure 21 is located inside the projection of the glass to be coated.

[0035] Applying the technical solution of Embodiment 1, the glass to be coated is placed on the support structure 21, with the back side of the glass facing the bottom of the groove structure 11. Because the groove structure 11 has depth, atoms and molecules emitted into the groove structure 11 are less likely to bounce back to the back side of the glass. Furthermore, the multiple protrusions inside the groove structure 11 change the reflection angle of atoms and molecules, further preventing the formation of a film layer at the edge of the back side of the glass. The technical solution of Embodiment 1 effectively solves the problem in the prior art of film layer formation at the edge of the back side of the product after coating during magnetron sputtering coating.

[0036] It should be noted that the above-mentioned multiple protrusions may include regular protrusions and irregular protrusions. Multiple protrusions may be densely arranged, and materials with higher surface roughness may also be used to manufacture the hanging panel assembly 10.

[0037] like Figures 1 to 3 As shown, in the technical solution of Embodiment 1, the depth of the groove structure 11 is 1cm to 3cm. When the depth of the groove structure 11 is less than 1cm, the glass to be coated is close to the bottom of the groove structure 11, which easily leads to the formation of a film layer on the back edge of the glass, resulting in poor glass coating quality. When the depth of the groove structure 11 is greater than 3cm, the entire mounting plate assembly 10 is large in volume, while the internal space of the coating machine is limited, which is not conducive to the arrangement of the mounting plate assembly 10. Moreover, after the glass is installed, the glass is close to the target material, which is also not conducive to coating.

[0038] like Figure 1 , Figure 2 and Figure 4As shown, in the technical solution of Embodiment 1, the support component 20 further includes a connecting structure 22, which is rotatably connected to the support structure 21 and connected to the groove structure 11. By rotating the support structure 21, the tilt angle of the support structure 21 is changed, thereby changing the tilt angle of the glass disposed on the support structure 21. As the glass angle changes, the distance between the glass and the target material changes. When local film over-coating occurs during the glass coating process, the support structure 21 can be rotated to move the thicker film area away from the target material and the thinner film area closer to the target material, thereby ensuring the uniformity of the entire glass coating.

[0039] like Figure 1 , Figure 2 and Figure 4 As shown, in the technical solution of Embodiment 1, the connecting structure 22 includes multiple structures, which are movably connected to the groove structure 11. The arrangement of multiple connecting structures 22 ensures the connection stability between the entire support assembly and the hanging plate assembly 10. Adjusting different connecting structures 22 can also adjust the angle of the support structure 21. In Embodiment 1, the connecting structure 22 includes five structures, which are respectively arranged at the four corners and the center of the support structure 21, ensuring the stability of the support structure 21 and the glass disposed on the support structure 21 under stress.

[0040] like Figure 1 , Figure 2 and Figure 4 As shown, in the technical solution of Embodiment 1, the connecting structure 22 includes a spherical hinge 221 and a bolt 222. The spherical hinge 221 is rotatably connected to the support structure 21. The groove structure 11 has a threaded hole 111 corresponding to the bolt 222. The bolt 222 passes through the threaded hole 111 and is connected to the spherical hinge 221. By rotating the bolt 222, under the action of threaded transmission, the bolt 222 moves along its own axis. By rotating multiple bolts 222 in conjunction with the rotation of the spherical hinge 221, the angle of the support structure 21 can be changed. The method of adjusting the angle of the support structure 21 using the principle of threaded transmission is convenient to operate and has high adjustment efficiency.

[0041] like Figure 1 , Figure 2 and Figure 4 As shown, in the technical solution of Embodiment 1, the support assembly 20 includes multiple components corresponding to the glass to be coated. Multiple support assemblies 20 are provided on each mounting plate assembly 10, enabling simultaneous coating of multiple glasses with high processing efficiency. The size of the support structure 21 is smaller than the size of the glass to be coated, thus avoiding the problem of some atoms or molecules being emitted onto the support structure 21 and bouncing back onto the back of the glass. Based on the glass size and the size of the groove structure 11, the operator can adjust the number and installation position of the support assemblies 20.

[0042] like Figure 1 , Figure 2 and Figure 4 As shown, in the technical solution of Embodiment 1, the support component 20 further includes a high-temperature adsorption pad, which is connected to the support structure 21. The high-temperature adsorption pad can generate a large adsorption force in a high-temperature environment. One side of the high-temperature adsorption pad adheres to the surface of the support structure 21, and the other side adheres to the glass surface, thus fixing the glass. The size of the high-temperature adsorption pad is larger than the size of the support structure 21 but smaller than the size of the glass to be coated.

[0043] like Figure 1 and Figure 2 As shown, the difference between the technical solution of Embodiment 2 and Embodiment 1 is that the support component 20 further includes a horizontal driving structure 23, which is disposed within the groove structure 11, and the connecting structure 22 is connected to the horizontal driving structure 23. The horizontal driving structure 23 includes a guide rail and a slider, which is movably connected to the guide rail. Multiple sliders are arranged in a one-to-one correspondence with the connecting structure 22, thereby changing the relative positional relationship between the various connecting structures 22, thus adapting to various types of support structures 21 and corresponding glass to be coated, resulting in greater versatility. To avoid the slider detaching from the guide rail under centrifugal force, the slider and guide rail can be designed with a dovetail groove structure.

[0044] like Figure 4 and Figure 5 As shown, in the technical solution of Embodiment 2, the connecting structure 22 includes a first connecting segment 223 and a second connecting segment 224. The first connecting segment 223 is connected to the horizontal driving structure 23, and the second connecting segment 224 is movably inserted into the first connecting segment 223. The second connecting segment 224 is rotatably connected to the support structure 21. Moving the second connecting segment 224 changes the length of the entire connecting structure 22. By changing the lengths of multiple connecting structures 22, the angle of the support structure 21 can be adjusted, thereby adjusting the angle of the glass to be coated.

[0045] According to another aspect of this application, a magnetron sputtering coating machine is also provided. The magnetron sputtering coating electrode adopts the aforementioned magnetron sputtering coating mounting plate. The magnetron sputtering coating machine includes a housing, a mounting base, and a roller. The roller is rotatably connected to the housing and is disposed inside the housing. The mounting base is connected to the housing, and the target material is fixed on the mounting base. The fixing structure 12 is connected to the roller. Using the aforementioned magnetron sputtering coating mounting plate, during the coating process, not only can atoms and molecules be prevented from rebounding to the edge of the back of the glass, thus avoiding coating formation at the edge of the back of the glass, but the angle between the glass and the target material can also be adjusted to ensure the uniformity of the coating on the front of the glass.

[0046] In summary, as shown above, ifFigure 6 The diagram shows the mounting plate structure (mounting plate assembly 10) of this application, and the recessed cavity (groove structure 11) designed in this application, in which small protrusions can be arranged to reduce the probability of atomic and molecular reflection. Several feeding support plate structures (support structures 21) are distributed within it, and this structure can be increased or decreased according to the actual product requirements. A glass product can be attached to each support plate. Figure 5 The diagram shown is a front structural schematic of the mounting plate (mounting plate assembly 10) of this application. The number and position of the threaded holes 111 can be changed according to the actual product model and size. Figure 6 Figure 1 Figure 3 Figure 4 The diagram shows the structure of the feeding support plate (support structure 21) of this application, including: a universal ball (spherical hinge 221) and bolts 222. The universal ball structure at the top of the bolts allows for multi-angle rotation, and simultaneous adjustment of multiple bolts 222 raises or lowers the height of the feeding support plate. For example, if measurements indicate that the film thickness on one side of the glass is thicker, the bolts on that side can be adjusted simultaneously to lower the height of that side, causing the glass surface to tilt slightly. This increases the distance between the glass and the target material, resulting in a thinner coating and improved lateral uniformity. The specific adjustment method involves removing the hanging plate and using a wrench to tighten the bolts 222. The area of ​​the feeding support plate needs to be smaller than the corresponding product to avoid over-coating. To address the issue of over-plating defects caused by existing mounting plate structures, this application adds a hollow cavity structure (groove structure 11). Firstly, the area of ​​the loading support plate is smaller than the glass, allowing atoms and molecules to directly enter the hollow cavity during magnetron sputtering, rather than impacting and bouncing off the back plate as in existing technologies. Secondly, the cavity (groove structure 11) contains small protrusions to reduce the probability of atomic and molecular reflection. This application also incorporates a omnidirectional ball, allowing the height of the loading support plate at corresponding positions to be adjusted by adjusting bolts on the back of the mounting plate, thereby changing the distance between the glass and the target material.

[0047] The embodiments of this application have now been described in detail. To avoid obscuring the concept of this application, some details known in the art have not been described. Those skilled in the art can fully understand how to implement the technical solutions of this application based on the above description.

[0048] While specific embodiments of this application have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art should understand that modifications can be made to the above embodiments or equivalent substitutions can be made to some technical features without departing from the scope and spirit of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any manner.

Claims

1. A magnetron sputtering coating mounting plate, characterized in that, include: A mounting plate assembly (10) having a groove structure (11) and a fixing structure (12), wherein the fixing structure (12) is connected to the groove structure (11), and the inner surface of the groove structure (11) has a plurality of protrusions; A support assembly (20) is connected to the groove structure (11). The support assembly (20) includes a support structure (21). The distance between the bottom of the support structure (21) and the groove structure (11) is greater than the depth of the groove structure (11). The glass to be coated is placed on the support structure (21). Along the direction perpendicular to the glass to be coated, the projection of the support structure (21) is located inside the projection of the glass to be coated.

2. The magnetron sputtering coating plate according to claim 1, characterized in that, The depth of the groove structure (11) is 1cm to 3cm.

3. The magnetron sputtering coating plate according to claim 1, characterized in that, The support assembly (20) further includes a connecting structure (22), which is rotatably connected to the support structure (21) and is connected to the groove structure (11).

4. The magnetron sputtering coating plate according to claim 3, characterized in that, The connection structure (22) includes multiple structures, and the multiple connection structures (22) are movably connected to the groove structure (11).

5. The magnetron sputtering coating plate according to claim 3, characterized in that, The connection structure (22) includes a spherical hinge (221) and a bolt (222). The spherical hinge (221) is rotatably connected to the support structure (21). The groove structure (11) has a threaded hole (111) corresponding to the bolt (222). The bolt (222) passes through the threaded hole (111) and is connected to the spherical hinge (221).

6. The magnetron sputtering coating plate according to claim 1, characterized in that, The support assembly (20) includes multiple components that are arranged in a one-to-one correspondence with the glass to be coated.

7. The magnetron sputtering coating plate according to claim 1, characterized in that, The support component (20) also includes a high-temperature adsorption pad, which is connected to the support structure (21).

8. The magnetron sputtering coating plate according to claim 3, characterized in that, The support component (20) further includes a horizontal drive structure (23), which is disposed within the groove structure (11), and the connecting structure (22) is connected to the horizontal drive structure (23).

9. The magnetron sputtering coating plate according to claim 8, characterized in that, The connecting structure (22) includes a first connecting segment (223) and a second connecting segment (224). The first connecting segment (223) is connected to the horizontal driving structure (23), and the second connecting segment (224) is movably inserted inside the first connecting segment (223). The second connecting segment (224) is rotatably connected to the support structure (21).

10. A magnetron sputtering coating machine, characterized in that, The magnetron sputtering coating machine adopts the magnetron sputtering coating plate according to any one of claims 1 to 9. The magnetron sputtering coating machine includes a housing, a mounting base and a roller. The roller is rotatably connected to the housing and is disposed inside the housing. The mounting base is connected to the housing. The target material is fixed on the mounting base. The fixing structure (12) is connected to the roller.

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