Macrography/microcosmic association 12 freedom degree micro assembly system

Abstract

The invention relates to a 12-freedom micro installer, which comprises 6-freedom macro robot, 6-freedom micro robot, combination micro clamper, micro clamper, solid display and control computer; the invention has 12 freedoms, to realize high-accuracy and large-range movement; and the clamper combines the piezoelectric ceramic driving mechanical type, aerated adsorption type, and sheet open compression type. The invention can realize complex micro structure positioning, while its position accuracy is higher than 5micrometer, and maximum movable radius is larger than 700mm.

Description

technical field [0001] The invention relates to a macro / micro combination 12-degree-of-freedom micro-assembly system capable of assembling complex micro-miniature structural parts, belonging to the field of mechatronics. Background technique [0002] Micro-assembly belongs to the precision operation in the microscopic field, between the traditional macro-assembly and the emerging nano-assembly, by making the micro-scale objects move and rotate, they are packed into complex micro-systems. With the development of micromachining technology, the structure of micro-small parts is becoming more and more complex, which greatly increases the difficulty of assembly. Due to the physiological limitations of human hands and eyes, it is impossible to complete the assembly of complex micro-structure parts only by manual work, and the micro-assembly system must be used to realize the human-machine collaborative or automatic assembly of complex micro-structure parts. [0003] The micro-vis...

AI Technical Summary

Problems solved by technology

The design of this system is novel and bold, but it is still limited by the number of degrees of freedom, and it is impossible to assemble complex micro-structure parts; and due to the large number of micro-robots, complex vision systems, and relatively complex control systems, the real-time and accuracy of control are very low. Difficult to guarantee

[0005] The micro-assembly system imported from abroad is just a rigid line, and the product cannot be used after modification

At present, domestic research in the field of micro-manipulation can also reach the nanometer level, but it is mainly concentrated on the micro-motion platform, and the displacement range that can be achieved is also small.

[0006] Generally speaking, great progress has been made in the fields of microassembly and micromanipulation at home and abroad in recent years, but these achievements are almost all designed for MEMS devices or simple and special parts. The degree of freedom of the micro-operating system does not meet the requirements, especially the inability to complete the rotational movement within the scope of the working space, resulting in the restriction of the attitude of the complex micro-structure in space, and the use of a monocular micro-vision system, which can only be rotated in a certain direction Observing the spatial position information of components cannot obtain the exact position and orientation information of components in three-dimensional space, so the operation and assembly of components with a slightly complex structure cannot be completed, and the operating range of the micro-assembly system is also limited, which is not universal

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