Ion source

A technology of ion source and main body, which is applied in the field of vacuum coating auxiliary equipment, can solve the problems of ion source disconnection and interruption, and achieve the effect of avoiding the interruption of the coating process

Inactive Publication Date: 2008-06-04
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disconnection of the cathode filament 121 will cause the ion source to be disconnected, and the vacuum state is usually broken between replacing the cathode filament 221 so that the coating process is interrupted

Method used

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Embodiment Construction

[0014] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0015] Please refer to FIG. 2 , the ion source 200 according to the first embodiment of the present invention includes a main body 210 and clamping arms 220 and 230 . The clamping arms 220 , 230 are pivotally connected to the body 210 .

[0016] An opening 260 is disposed on the top of the body 210 , and a cathode electrode 250 is disposed adjacent to the opening 260 on the top of the body 210 . To pivotally connect the clamping arms 220 , 230 to the body 210 , a pair of rotating shafts 240 may be provided on the sidewall adjacent to the top of the body 210 . Preferably, the axis of the rotating shaft 240 is located on the same plane as the central axis of the cathode electrode 250 . The cathode electrode 250 is two metal blocks, and the two metal blocks are oppositely arranged on both sides of the opening 260 , and the shape can be any shape, such as a cyl...

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Abstract

The invention relates to an ion source which comprises a body comprising a discharge chamber and an anode arranged in the discharge chamber. A gap is disposed on the top of the body, and a cathode electrode corresponding to the anode electrode is arranged on the junction place of the top of the body and the gap. The ion source also includes a plurality of clamping arms, each of which comprises a clamping portion and an insulating portion connected with the clamping portion one end of the clamping portion is connected with one end of the insulating portion, and the other end of the clamping portion holds a cathode filament. The other end of the insulating portion is connected with the pivot of the body. The clamping portion of the clamping arm can be electrically connected with the cathode electrode through rotation of the clamping portion and the cathode filament of the clamping arm is located on the gap position to form an electric circuit with the anode.

Description

technical field [0001] The invention relates to an auxiliary equipment for vacuum coating, in particular to an ion source for ion-assisted coating. Background technique [0002] Traditional vacuum coating equipment uses electron beams to heat the film material to the evaporation temperature under vacuum conditions, evaporates it and deposits it on the substrate to form a thin film to achieve the purpose of coating. However, the energy of the atoms of the evaporated film material is low, the adhesion of the coated film layer is poor, and the density is low, and the properties of the film are greatly affected by the environment, easy to fall off, and unstable. In addition, when electrons are evaporated, the grid voltage of the electron gun is 6000-10000V, which is easy to cause high-voltage discharge and ignition, which affects the quality of the film. [0003] In order to increase the adhesion and density of the vacuum coating, an ion source needs to be used to bombard the s...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): H01J27/02H01J37/08C23C14/22
Inventor凌维成
OwnerHONG FU JIN PRECISION IND (SHENZHEN) CO LTD