Precise positioning platform with six freedom of motion

A technology of precise positioning and degrees of freedom, applied in the parts, instruments, casings and other directions of the instrument, can solve the problems of difficult to guarantee assembly accuracy, complex structure, limited adjustment stroke, etc., to improve assembly accuracy, simple structure, and reduce manufacturing. effect of difficulty

CN101488371BActive Publication Date: 2010-12-29SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2010-12-29

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Abstract

The invention provides a 6 degree of freedom precision positioning platform which is used for bearing objects and adjusting the position of a suction bed plate within the scope of the 6 degree of freedom. The 6 degree of freedom precision positioning platform comprises a horizontal adjustment platform and a vertical adjustment platform, wherein, the horizontal adjustment platform can be used for adjusting the position of the suction bed in the directions of an X axis, a Y axis and a Theta z axis, comprising a horizontal output platform which is fixedly connected with the suction bed and is used for bearing the suction bed, three groups of revolute pair flexible articulated mechanisms which are distributed evenly along a circumference and a horizontal base which is connected with the horizontal output platform by the revolute pair flexible articulated mechanisms. The vertical adjustment platform comprises three groups of adjustment mechanisms which are evenly distributed along the circumference and are used for adjusting the position of the suction bed in the directions of a Z axis, a Theta X axis and a Theta y axis. In the invention, the horizontal adjustment platform and the vertical adjustment platform are connected only by a cuniform mechanism and a vertical flexible spring, thus simplifying the structure of the positioning platform, reducing manufacturing difficulty and improving assembly accuracy.
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Description

technical field

[0001] The invention relates to a positioning platform, and in particular to a six-degree-of-freedom precision positioning platform composed of a piezoelectric driver and a rotating joint flexible hinge. Background technique

[0002] Various types of precision positioning stages are used in the fields of semiconductor device manufacturing, precision machining, biomedical processing, and optical and image alignment. For example, the wafer positioning platform used in the lithography machine, the reticle positioning platform, etc. In these fields, most precision positioning platforms need to have technical characteristics such as multiple degrees of freedom and high precision, and the installation space is very limited, especially in the height direction.

[0003] Patent CN1534689A discloses a fine-tuning stage. The tilting stage realizes fine-tuning and positioning of the three degrees of freedom Z-θx-θy through three wedge-shaped segments evenly distributed...

Examples

Embodiment Construction

[0024] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.

[0025] figure 1 Shown is the front view of the six-degree-of-freedom precision positioning platform of a preferred embodiment of the present invention; Fig. 2 shows figure 1 The rotated sectional view along A-A in the center. Please refer to figure 1 and Figure 2.

[0026] The six-degree-of-freedom precision positioning platform disclosed in this embodiment is used to carry the reticle 406 printed with patterns for exposure, so as to position the pattern to be exposed to a designated position.

[0027] The overall structure of the six-degree-of-freedom precision positioning platform is divided into a suction plate 103 , a horizontal adjustment platform, a vertical adjustment platform and a base 101 from top to bottom.

[0028] The suction table 103 is used to vacuum absorb the reticle 406 to re...