Method for testing thickness of coating film

A coating chamber and marker technology, which is applied to measuring devices, instruments, etc., can solve problems such as the effect of corrosion time, achieve clear steps, improve operability, and save costs and time.

Inactive Publication Date: 2011-06-08
上海泰阳绿色能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The chemical etching method often has a gradual corrosion step at the corrosion interface, and the depth and width of the corrosion are also affected by the etching time; the mask method is suitable for most step preparation processes, but it is necessary to make a suitable narrow or with Mask material for thin and narrow grooves, new mask material is required for each coating

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] In this example:

[0025] First draw one or several lines with a marker pen on the glass substrate;

[0026] Then place it in the coating chamber for coating. The composition of the coating can be an inorganic compound, and the composition of the marker pen is oily. It is difficult for other substances to adhere and form on the glass substrate during sputtering;

[0027] Finally, after the coating, soak the glass substrate and the sample in ethanol, and the ink marks drawn by the marker pen will be reflected, revealing one or more clear steps, and then measure the thickness of the coating on a step meter.

Embodiment 2

[0029] In this example:

[0030] First draw one or several lines with ink on the stainless steel substrate;

[0031] Then place it in the coating chamber for coating. The composition of the coating can be metal. Since the composition of the ink pen is oily, it is difficult for other substances to adhere and form on the substrate during sputtering;

[0032] Finally, after the coating, soak the stainless steel substrate and the sample in acetone, and the ink marks drawn by the ink pen will be reflected, revealing one or more clear steps, and then measure the thickness of the coating on a step meter.

Embodiment 3

[0034] In this example:

[0035] First draw one or several lines with an ink pen on the organic material substrate;

[0036] Then place it in the coating chamber for coating. The composition of the coating can be metal. Since the composition of the ink pen is oily, it is difficult for other substances to adhere and form on the substrate during sputtering;

[0037] Finally, after the coating, soak the organic material substrate and the sample in ethanol, and the ink marks drawn by the ink pen will be reflected, revealing one or more clear steps, and then measure the thickness of the coating on a step meter.

[0038] As can be seen from the above embodiments, the present invention can solve the disadvantages of the inconvenient operation of the chemical etching method and the masking method in the prior art, because no mask or chemical etching solution is used, cost and time can be saved; marker pen or oil-based pen, Ethanol and acetone are common products, which are easy to ta...

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PUM

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Abstract

The invention discloses a method for testing thickness of a coating film. The method comprises the following steps of: drawing one or more strokes on a substrate by using a marking pen or an oil ink pen, and placing in a film coating chamber to coat a film, wherein the components of the marking pen or the oil ink pen are oily, so during sputtering, other substances are hardly adhered to the substrate and generated; and after the film is coated, soaking the substrate and a sample in a dissolving solution, reacting the ink marks drew with the marking pen or the oil ink pen to expose one or more passes of clear steps, and measuring on a step tester. The accuracy and easy manipulation of thickness testing in the film coating process can be improved. In the method, a mask or chemical corrosion liquid is not used, so that cost and time can be saved; the marking pen or the oil ink pen, ethanol and acetone, and the like are long-prepared products which are easy and convenient to take and use and operate; and the steps are clear.

Description

technical field [0001] The invention relates to a method for testing coating thickness, which belongs to the field of integrated circuit, semiconductor production or photovoltaic product production including coating process. Background technique [0002] Existing equipment for coating thickness testing mainly includes ellipsometers, step meters and other equipment made of optical principles. The ellipsometer and other instruments made of optical principles can not damage the surface of the sample when testing the thickness of the coating, but the optical path will be difficult to collect on the sample with a lot of fluctuations on the surface or the sample with a large curvature, and the test accuracy will be reduced. Decline; the sill meter is used as a way for the needle tip to scan on the sample, and the accuracy is very high. Although there is some damage to the sample surface, the damage can be controlled by adjusting the force between the needle tip and the film. Thi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/08
Inventor 孔慧李启龙
Owner 上海泰阳绿色能源有限公司
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