Sealing method for degassing tube

A degassing tube and vacuum bag technology, which is applied in the field of semiconductor manufacturing, can solve problems such as air leakage, vacuum bag vacuum cannot be maintained, and gaps, etc., and achieve the effects of simple process, guaranteed vacuum degree, and convenient operation

CN102554571AActive Publication Date: 2012-07-11KONFOONG MATERIALS INTERNATIONAL CO LTD
5 Cites 5 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2012-07-11

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

Disclosed is a sealing method for a degassing tube. A first end of the degassing tube is connected with vacuum equipment, a second end of the degassing tube is connected with a vacuum sheath, and the sealing method is executed after vacuumizing treatment is performed in a heating environment. The sealing method includes the steps: separating the first end of the degassing tube from the vacuum equipment; performing heat treatment for the first end of the degassing tube at the temperature of 900-1100 DEG C; pinching the first end after heat treatment for multiple times to form a plurality of pinched positions; and pinching off the pinched position farthest away from the vacuum sheath. The sealing method for the degassing tube can be used for solving the technical problems that vacuum degree in the vacuum sheath cannot be maintained, and gaps and gas leakage occur in subsequent sheath cooling, storage and transportation process, and has the advantages of simple process, convenience in operation and fine sealing effect.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the field of semiconductor manufacturing, in particular to a method for sealing a degassing tube. Background technique

[0002] Large scale integrated circuits use sputtering targets for vacuum sputtering. When the sputtering target is made by powder metallurgy, the powder is prone to oxidation during isostatic pressing, so the powder needs to be put into the package, after degassing treatment, then the package is sealed, and then put into the isostatic pressing furnace Densification is carried out in the middle; when the sputtering target and the back plate are diffused and welded, it is also necessary to make a corresponding sheath to prevent oxidation, after degassing treatment, then seal the sheath, and then put it into an isostatic furnace for welding .

[0003] The above-mentioned degassing treatment is to put powder or metal block (the metal block includes the sputtering target and the back plate to be welded) into a w...

Examples

Embodiment Construction

[0033] The invention provides a method for sealing a degassing tube, such as figure 1 , to solve the technical problems that the vacuum degree in the vacuum bag cannot be maintained and the gaps and air leakage appear in the subsequent bag cooling, storage and transportation process, and has the advantages of simple process, convenient operation and good sealing effect. The degassing tube sealing method comprises:

[0034] Step S11, providing a degassing tube, one end of the degassing tube is connected to a vacuum device, and the other end is connected to a vacuum bag.

[0035] Step S12, disconnect the degassing tube from the vacuum equipment.

[0036] Step S13, performing heat treatment on the vacuum equipment end of the degassing tube, the heat treatment temperature being 900°C-1100°C.

[0037] Step S14 , performing multiple clamping treatments on the vacuum equipment end after the heat treatment to form multiple clamping places.

[0038] Step S15 , performing pinch-off p...