Piezoelectric six-dimensional force/torque sensor with six sets of force-measuring sensitive units

A technology of torque sensor and sensitive unit, applied in the field of piezoelectric six-dimensional force/torque sensor, can solve the problems of difficult decoupling, many force-measuring sensitive units, and high manufacturing process requirements, achieve simple mechanical model, reduce manufacturing difficulty, The effect of reducing manufacturing costs

CN104677543BInactive Publication Date: 2019-11-29CHONGQING UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-11-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a piezoelectric type six-dimensional force / torque sensor adopting six groups of force-measuring sensitive units and belongs to multi-dimensional force / torque measuring devices. The piezoelectric type six-dimensional force / torque sensor comprises a base, the six groups of force-measuring sensitive units, an upper cover, an inner side sealing sleeve, signal leading-out wires and an insulation filling material, wherein the base is provided with a mounting disc and an output electrode socket, and the six groups of force-measuring sensitive units are clamped by an upper insulating electrode plate and a lower insulating electrode plate, are composed of two kinds of cut piezoelectric quartz wafers and are alternately and uniformly distributed on the mounting disc of the base; a first force-measuring sensitive unit is deviated from the X axis by an angle alpha; paired electrodes corresponding to the quartz wafers are arranged at the inner sides of the insulating electrode plates, and each pair of electrodes are connected with the output electrode socket of the base through the signal leading-out wires. The piezoelectric type six-dimensional force / torque sensor has the advantages of simple and compact structure, no redundancy sensitive unit, high rigidity, good dynamic performance, easiness in microminiaturization, low manufacturing cost and low requirements on sensor output signal conditioning circuit and can be applied to multiple fields, such as intelligent robots, automated detection, aeronautics & astronautics and machining.
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Description

technical field

[0001] The invention relates to a force / torque sensor, in particular to a six-dimensional force / torque sensor, and more specifically to a piezoelectric six-dimensional force / torque sensor using six sets of force-measuring sensitive units. Background technique

[0002] The six-dimensional force sensor is a sensor that can simultaneously measure three-dimensional force and three-dimensional torque information in space. It has a wide range of application requirements in intelligent robots, automation, machining, aerospace and other fields. According to the way the six-dimensional force sensor perceives the measured force (torque), it can be divided into two categories from the sensor sensitivity mechanism: one is the indirect measurement type, which uses sensitive elements (such as strain gauges) installed on the elastic body , force sensitive resistors, etc.) to measure the deformation of the elastic body caused by the six-dimensional force to indirectly obtain...

Examples

Embodiment Construction

[0012] Piezoelectric six-dimensional force / torque sensor with 6 sets of force-measuring sensitive units (refer to figure 1 , 2 , 3, 4), including a base 9 with a mounting plate 91 inside and an output electrode socket 13 outside, the force-measuring sensitive unit j0 installed on the internal mounting plate 91 of the base 9 clamps the force-measuring sensitive Two upper and lower insulating electrode plates 141, 142 of the unit j0; the upper cover 10 tightly pressed on the upper insulating electrode plate 141, connects the electrodes on the two insulating electrode plates 141, 142 and the output electrode socket 13 on the base 9 The signal lead-out wire 12 is used to fix and insulate the insulation filling material 11 of the signal lead-out wire 12, and the inner sealing sleeve 15 of the two is connected at the inner hole of the upper cover 10 and the base 9; wherein, the force measuring Sensitive unit j0 is made of several quartz wafers, and these quartz wafers are evenly di...