Piezoelectric six-dimensional force/torque sensor with six sets of force-measuring sensitive units

Abstract

The invention discloses a piezoelectric type six-dimensional force / torque sensor adopting six groups of force-measuring sensitive units and belongs to multi-dimensional force / torque measuring devices. The piezoelectric type six-dimensional force / torque sensor comprises a base, the six groups of force-measuring sensitive units, an upper cover, an inner side sealing sleeve, signal leading-out wires and an insulation filling material, wherein the base is provided with a mounting disc and an output electrode socket, and the six groups of force-measuring sensitive units are clamped by an upper insulating electrode plate and a lower insulating electrode plate, are composed of two kinds of cut piezoelectric quartz wafers and are alternately and uniformly distributed on the mounting disc of the base; a first force-measuring sensitive unit is deviated from the X axis by an angle alpha; paired electrodes corresponding to the quartz wafers are arranged at the inner sides of the insulating electrode plates, and each pair of electrodes are connected with the output electrode socket of the base through the signal leading-out wires. The piezoelectric type six-dimensional force / torque sensor has the advantages of simple and compact structure, no redundancy sensitive unit, high rigidity, good dynamic performance, easiness in microminiaturization, low manufacturing cost and low requirements on sensor output signal conditioning circuit and can be applied to multiple fields, such as intelligent robots, automated detection, aeronautics & astronautics and machining.

Description

technical field

[0001] The invention relates to a force / torque sensor, in particular to a six-dimensional force / torque sensor, and more specifically to a piezoelectric six-dimensional force / torque sensor using six sets of force-measuring sensitive units. Background technique

[0002] The six-dimensional force sensor is a sensor that can simultaneously measure three-dimensional force and three-dimensional torque information in space. It has a wide range of application requirements in intelligent robots, automation, machining, aerospace and other fields. According to the way the six-dimensional force sensor perceives the measured force (torque), it can be divided into two categories from the sensor sensitivity mechanism: one is the indirect measurement type, which uses sensitive elements (such as strain gauges) installed on the elastic body , force sensitive resistors, etc.) to measure the deformation of the elastic body caused by the six-dimensional force to indirectly obtain...

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