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22 results about "Piezoelectric quartz" patented technology

Piezoelectric quartz wafer grinding control method and system based on grinding frequency monitoring

The invention provides a piezoelectric quartz wafer grinding control method and system based on grinding frequency monitoring, and relates to the technical field of grinding control, the method comprises the following steps: executing multi-source data perception of piezoelectric quartz wafer grinding, and establishing an original behavior observation data stream; behavior modeling of each round of grinding is carried out; the time sequence grinding behavior data set is used for conducting grinding working condition sensing; activating a non-contact thickness sensing unit to execute real-time piezoelectric quartz wafer thickness sensing; with the target grinding requirement as a control target, grinding control reconstruction based on the real-time sensing result and the thickness sensing result is executed, and a reconstruction result is established; and carrying out grinding control management on the piezoelectric quartz wafer. The technical problem that in the prior art, due to the fact that grinding control depends on fixed parameters and lacks real-time sensing and feedback, the quality of the piezoelectric quartz wafer is unstable is solved, the grinding process is optimized and adjusted through the multiple sensing sources, and the machining precision and quality of piezoelectric quartz wafer grinding are improved.
Owner:唐山万士和电子有限公司

Automatic system for brake spring force detection

The invention discloses an automatic system for brake spring force detection, which relates to the technical field of mechanical engineering and automatic control, and is characterized in that a multi-physics field coupling measurement module adopts a nested force sensor group (a strain gauge and piezoelectric quartz compound) and non-contact displacement measurement, and is combined with a thermal expansion compensation ring to correct temperature influence in real time; the environmental interference suppression module eliminates electromagnetic and thermal interference through an electromagnetic shielding cavity and a temperature control platform; the dynamic error compensation engine realizes drift prediction and physical field fusion by using six-dimensional attitude sensing and edge calculation (LSTM + GPR double-stage model); the self-calibration executing mechanism completes nanoscale positioning and micro-force control based on air flotation driving and the bionic clamping jaw. The method solves the problem of measurement misalignment caused by environmental interference, material thermal deformation and clamping errors in traditional detection, and is suitable for high-precision spring force detection under complex working conditions.
Owner:JIANGSU COLLEGE OF INFORMATION TECH

Double-layer piezoelectric sensor and application and method of double-layer piezoelectric sensor in characterization of beta-phase polyvinylidene fluoride membrane adsorptive pollution

PendingCN120076699AUltrafiltrationCoatingsPiezoelectric quartzMechanical engineering
The invention discloses a double-layer piezoelectric sensor and an application and method of the double-layer piezoelectric sensor in representing beta-phase polyvinylidene fluoride membrane adsorptive pollution, a piezoelectric beta-phase polyvinylidene fluoride membrane is a porous membrane formed by a blending system of polyvinylidene fluoride and ionic liquid and has a beta-phase crystal structure and a piezoelectric response characteristic, and the piezoelectric beta-phase polyvinylidene fluoride membrane is prepared by spin-coating a PVDF solution on a chip. The double-layer piezoelectric sensor containing the beta-phase polyvinylidene fluoride membrane is obtained, and QCM-D detection is carried out to characterize the adsorptive pollution condition of the beta-phase polyvinylidene fluoride membrane. Adsorption and desorption behaviors of organic matters with different dissolvability and mixtures thereof on the beta-phase PVDF membrane layer are represented, the adsorption result is matched with the hole blocking resistance in the actual membrane pollution process, and the hole blocking resistance is calculated by monitoring the fifth overtone of the piezoelectric quartz sensor. And the quality of soluble organic matters adsorbed on the PVDF surface and the property of an adsorption layer can be evaluated by using a frequency change value and a dissipation value, and a scheme is provided for researching the pollution behavior of the beta-phase polyvinylidene fluoride membrane.
Owner:NANJING TECH UNIV

Piezoelectric macro-micro force sensing device and measuring method

The invention discloses a piezoelectric type macro-micro force sensing device and a measurement method, solves the problem that an existing force sensor is difficult to meet quasi-static measurement of micro force, and belongs to the technical field of macro-micro force measurement. Two force measuring units with piezoelectric ceramics as sensitive elements and a piezoelectric quartz reference unit with a piezoelectric quartz wafer as a sensitive element are used as sensors, the piezoelectric quartz reference unit is used for measuring macroscopic force, the force measuring units are used for measuring micro force, and continuous quasi-static measurement of the micro force can be realized through alternation of the two force measuring units. The resolution of the sensor is improved by utilizing the characteristic of high sensitivity of piezoelectric ceramics; and the stability of the sensor is improved by utilizing the characteristics of good linearity, high temperature stability and no hysteresis of piezoelectric quartz. Two indexes of high precision and wide range of the force sensor can be considered, multi-range quasi-static macro-micro force measurement is realized, and the force sensor has the advantages of high rigidity, high frequency response and the like.
Owner:HARBIN INST OF TECH

Gold electrode piezoelectric quartz crystal humidity sensor

ActiveCN223664458UWeighing by absorbing componentThermodynamicsPiezoelectric quartz
The utility model provides a gold electrode piezoelectric quartz crystal humidity sensor, which relates to the technical field of humidity sensors and comprises a heat insulation shell, a humidity sensor body is fixedly mounted in the heat insulation shell, an air cavity is arranged in the heat insulation shell, and a connecting wire is fixed at the tail end of the heat insulation shell. A protection assembly is installed on the surface of the connecting wire and comprises an installation box, the installation box is fixed to the surface of the connecting wire, eight sets of drying cylinders are installed in one end of the installation box at equal intervals, the drying cylinders are filled with drying cotton strips, and an air inlet pipe is arranged at the position, corresponding to one set of drying cylinders, of the outer side of the installation box. Compared with the prior art, the humidity sensor has the advantages that the protection assembly is communicated with the heat insulation shell, air flow around the humidity sensor is achieved, the humidity sensor is dry, the temperature is reduced, meanwhile, the gold electrode is prevented from being corroded by wet gas, and the humidity sensor body in the heat insulation shell is well protected.
Owner:SICHUAN MDH TECH CO LTD

A wafer wet etching immersion device and immersion method

PendingCN123035859AWaferingPiezoelectric quartz
The application belongs to the technical field of piezoelectric quartz wafer processing, and discloses a wafer wet etching infiltration device and method, which comprises a fixed plate, a double-output-shaft motor fixedly connected to the fixed plate, a hollow shaft as an output shaft of the double-output-shaft motor, a fixed seat installed at an output end of the double-output-shaft motor, a suction cup arranged on a lower surface of the fixed seat and used for adsorbing a wafer, and a rotary joint connected to a tail end of the double-output-shaft motor and connected to a vacuum generator negative pressure source through an air pipe. The wafer is horizontally placed, and two surfaces of the wafer are infiltrated respectively, so that the time difference of infiltration etching time at each position on the wafer can be eliminated, and the etching consistency at each position on the wafer can be maintained. Based on the infiltration device and method, the problem of differences in product sizes on the same wafer is improved, the overall size consistency is improved from a deviation of ±5 μm to ±1.5 μm, and the performance requirement of high-end crystal vibration is met.
Owner:HEFEI JINGWEITE ELECTRONICS CO LTD

Automobile overweight detection device for traffic transportation

The invention relates to the technical field of traffic transportation safety, and provides an automobile overweight detection device for traffic transportation, which comprises a base, a fixed cavity is formed in the base, a quartz plate lower electrode is fixedly mounted at the bottom of the fixed cavity, and a piezoelectric quartz plate is fixedly mounted on the upper surface of the quartz plate lower electrode. And a quartz plate upper electrode is fixedly mounted on the upper surface of the piezoelectric quartz plate. By changing the opening state of the distribution valve, when the temperature is higher than the optimal temperature range of the piezoelectric quartz plate, the distribution valve enables the L pipe to be communicated with the upper oil pipe, and when the temperature is lower than the optimal temperature range of the piezoelectric quartz plate, the distribution valve enables the L pipe to be communicated with the lower oil pipe; and insulating heat-conducting hydraulic oil in the oil storage cavity is pumped into the fixed cavity through the oil inlet pipe, so that the piezoelectric quartz plate is ensured to be in an optimal temperature range, and the problem that the accuracy of automobile overweight detection is greatly reduced due to the fact that existing equipment cannot ensure that the quartz crystal is in a relatively proper working environment is solved.
Owner:GUYE CONSTR ENG HEBEI CO LTD

Small-size low-frequency-deviation quartz wafer and SMD (Surface Mounted Device) crystal resonator

The invention discloses a small-size low-frequency-deviation quartz wafer and an SMD (Surface Mounted Device) crystal resonator, and relates to the technical field of piezoelectric quartz wafers and quartz crystal resonators. A quartz wafer adopts an SC shear stress compensation cut type, the quartz wafer is of a cuboid structure, and a notch penetrating through a wafer body is formed in one wide edge side of the quartz wafer; the SMD crystal resonator comprises a metal upper cover, a surface rubber conductive adhesive point, an upper-layer gold electrode, a quartz wafer, a lower-layer gold electrode, a bottom rubber conductive adhesive point and a ceramic base which are sequentially arranged from top to bottom. According to the invention, the frequency drift of the small-size crystal resonator caused by stress can be reduced, so that the frequency precision of the crystal resonator is improved.
Owner:HEBEI FAREAST COMM SYST ENG

Welding supporting device for machining piezoelectric quartz crystal resonator

The utility model provides a welding support device for processing a piezoelectric quartz crystal resonator, which belongs to the technical field of resonator processing, and comprises a fixed seat, a mounting frame, a support frame, an adjusting and fixing assembly, a cooling assembly and a welding assembly, the mounting frame is fixedly arranged at the upper end of the fixed seat, the support frame is fixedly arranged above the mounting frame, and the adjusting and fixing assembly is fixedly arranged above the cooling assembly. The welding assembly is arranged on the supporting frame, and the adjusting and fixing assembly and the cooling assembly are arranged on the mounting frame. According to the welding supporting device for machining the piezoelectric quartz crystal resonator, the elastic supporting piece is matched with the rotating motor and the rotating disc, the welding supporting device can adapt to resonators of different sizes and shapes, rapid and accurate fixing and convenient position adjusting are achieved, and welding precision, stability and product consistency are guaranteed. The cooling assembly driven by the power pump can timely use cooling liquid to dissipate heat of the resonator in the welding process, the performance is prevented from being damaged by high temperature, the product stability and reliability are effectively improved, and the production requirement is met in an all-around mode.
Owner:LANGFANG CHINA ELECTRONICS PANDA CRYSTAL TECH

A patch piezoelectric quartz device test fixture and test method

The present invention relates to the field of patch piezoelectric quartz device testing, and in particular to a patch piezoelectric quartz device testing fixture and a testing method. A patch piezoelectric quartz device testing fixture is used in combination with a piezoelectric quartz oscillator, comprising: a base with a slide rail; a self-limiting lifting platform, which is arranged on the slide rail and can move up and down along the slide rail and stay at any movable position; an impedance matching circuit board, which is arranged on the lifting platform and can establish an electrical connection with the piezoelectric quartz oscillator; an external test pin, which is arranged on the lifting platform and connected to the impedance matching circuit board and is used to detect the patch piezoelectric quartz device; and a side-pressure right-angle chuck, which is arranged on the base and located below the test pin and is used to quickly fix the patch piezoelectric quartz device. The use of actively controlled test probes for measurement provides more convenient operation. Based on the lifting function, the test probes are placed externally, simplifying the cleaning process and difficulty of the test probes. Based on this top-down measurement method, a flexible and adaptable side-pressure right-angle chuck is used to further improve the adaptability and fixing efficiency of the test fixture to different shapes, ultimately achieving improved test efficiency and test accuracy of patch piezoelectric quartz devices.
Owner:GUANGZHOU JINGYOU ELECTRONICS TECH

Piezoelectric quartz wafer automatic material bonding device and use method thereof

The invention relates to the technical field of piezoelectric quartz wafer production, in particular to a piezoelectric quartz wafer automatic bonding device which comprises an X moving module, a Y moving module is arranged on the X moving module, an electric telescopic rod is arranged on the Y moving module, the extending end of the electric telescopic rod is fixedly connected with a suction cup and a pressing plate, and the pressing plate is arranged on the X moving module. A supporting plate is mounted on one side of the X moving module, a lengthening structure is mounted on the supporting plate, and an adhesive tape body is placed on the lengthening structure; and an auxiliary structure is installed on the surface of the supporting plate and comprises a [-shaped shell, and the [-shaped shell is fixedly connected to the side wall of the supporting plate. According to the material bonding device, the grinding roller capable of moving along the V-shaped track is arranged, the adhesive tape body bonded to the bottom face of the quartz plate can be ground, the adhesive tape body can be completely and tightly bonded to the bottom face of the quartz plate, the bonding strength of the adhesive tape body and the quartz plate can be effectively improved, and the using effect of the device is improved.
Owner:JIYUAN CRYSTAL PHOTOELECTRIC FREQUENCY TECH CO LTD

QCM and LSPR dual-technology fusion biological detection system and method

The invention discloses a QCM (Quartz Crystal Microbalance) and LSPR (Local Surface Plasmon Resonance) dual-technology fusion biological detection method, which comprises the following steps of: preparing a primer according to an object to be detected, fixing a nano composite probe on the surface of a piezoelectric quartz wafer, switching on a control circuit, controlling the reaction temperature through a temperature control optimization algorithm, and introducing a PBS (Phosphate Buffer Solution) until the output frequency of a sensing chip is stable; recording the frequency as a reference frequency f1 when the frequency is no-load, introducing a nucleic acid sample into a measuring cell, fully reacting the nucleic acid sample with a primer until a chip output frequency signal is stable, recording the frequency at the moment as f2, obtaining multiple parameters of a biological membrane according to two frequency changes (f1-f2) Hz in combination with a biological membrane multi-parameter fusion algorithm, and calculating a result according to the parameters of the biological membrane. According to the invention, high-precision, quick-response, high-integration and miniaturized intelligent sensing biological detection is realized, and the system can be applied to early diagnosis of serious diseases such as tumors and cardiovascular and cerebrovascular diseases, and has a wide prospect in the POCT (point-of-care testing) market.
Owner:ZHENJIANG RUIXIN TECHNOLOGY CO LTD

Piezoelectric quartz vehicle load dynamic monitoring system and method based on visual recognition

PendingCN122360658AVehicle dynamicsPiezoelectric quartz
The application discloses a piezoelectric quartz vehicle load dynamic monitoring system and method based on visual identification and belongs to the technical field of vehicle dynamic weighing. The system comprises an image information data acquisition module, a charge signal data acquisition module, a database, a model management module, a real-time monitoring module and a warning module. The image information data acquisition module is used for acquiring image information data. The charge signal data acquisition module is used for acquiring charge signal data, calculating vehicle axle load and vehicle estimated total load. The database is used for storing historical data. The model management module is used for establishing a regional error analysis model and analyzing the influence of errors of each monitoring area on vehicle load dynamic monitoring results. The real-time monitoring module is used for outputting current vehicle estimated total load results. The warning module is used for real-time warning of overweight vehicles. The application compensates for errors of each monitoring area, thereby improving the weighing precision of vehicle load dynamic monitoring.
Owner:NANJING LIJIA SENSOR TECH CO LTD

Aero-engine bearing inner ring passive temperature measurement system and method

PendingCN122448387APiezoelectric quartzDemodulation
The application discloses an aero-engine bearing inner ring passive temperature measurement system and method, and relates to the technical field of aero-engine temperature measurement.The application uses a high-temperature-resistant composite piezoelectric quartz crystal resonator as a passive resonant temperature-sensitive unit, combines a non-contact coupling reading antenna and an advanced signal demodulation and temperature calculation module, and realizes high-precision, high-reliability and real-time measurement of the temperature of the bearing inner ring under all working conditions.The application not only overcomes the limitations of traditional temperature measurement methods, but also significantly improves the accuracy and reliability of temperature measurement data, provides strong support for the health management of aero-engines, and has the advantages of compact structure, convenient installation, long service life and the like, and has wide engineering application prospects and important economic value.
Owner:SHENYANG AEROSPACE UNIVERSITY +1

Annular electrode type piezoelectric quartz crystal humidity sensor

The utility model provides an annular electrode type piezoelectric quartz crystal humidity sensor which comprises a sensor body, a connecting end is fixed at the tail end of the sensor body, a connecting wire is fixed at the connecting end, a protection assembly is arranged on the periphery of the sensor body, the protection assembly comprises a first half frame and a second half frame, and the first half frame and the second half frame are arranged in parallel. The first half frame and the second half frame wrap the two sides of the sensor body, a vertical plate is slidably connected to the surface of the connecting end in a sleeving mode, compared with the prior art, the protection assembly composed of the two semicircular frames can wrap the periphery of the sensor when the sensor is not used, dust is prevented from falling on the surface of the sensor, and before packaging protection, the protection assembly is not prone to falling on the surface of the sensor. The inner ring, the outer ring, the upper end surface and the lower end surface of the annular sensor are wiped and cleaned through the first wiping rod assembly and the second wiping rod assembly, residual moisture is cleaned up, when the sensor is used, the first half frame and the second half frame are separated and moved to the rear end of the sensor, and use of the sensor is facilitated.
Owner:SICHUAN MDH TECH CO LTD

Double-sided asymmetric mesa type piezoelectric quartz wafer

The invention discloses a double-sided asymmetric table-board type piezoelectric quartz wafer. The quartz crystal wafer comprises a quartz crystal wafer body (1), two sides of the quartz crystal wafer body (1) are respectively provided with a boss, and the bosses on the two sides of the quartz crystal wafer are respectively a large-size boss (2) and a small-size boss (3). And the arrangement position of the small-size boss (3) is correspondingly positioned in the large-size boss (2). The invention provides a double-sided asymmetric mesa type piezoelectric quartz wafer. Bosses on the two sides of the quartz wafer are arranged to be a large-size boss (2) and a small-size boss (3) respectively. The arrangement position of the small-size boss (3) is correspondingly located on the inner side of the large-size boss (2), the actual vibration area of the quartz wafer is a small area, namely the vibration area of the quartz wafer is the area of the small-size boss (3), frequency change caused by dislocation of the upper boss and the lower boss is avoided, and the vibration area of the electrode can be utilized to the maximum extent.
Owner:CHENGDU TAIMEIKE CRYSTAL TECHNOLOGY CO LTD

Packaging method of piezoelectric quartz sensor and piezoelectric quartz sensor

ActiveCN115101660BWaferingPiezoelectric quartz
The application relates to the technical field of sensors, in particular to a packaging method of a piezoelectric quartz sensor and the piezoelectric quartz sensor. The method comprises the following steps: forming a piezoelectric sensor wafer, the piezoelectric sensor wafer comprising a first pin area on a front surface and a second pin area on a back surface, the first pin area and the second pin area being arranged in a diagonal direction; providing a first quartz wafer, forming a first notch on the first quartz wafer at a position corresponding to the first pin area and forming a second notch at a position corresponding to the second pin area, thereby forming a first packaging side part; providing a second quartz wafer, forming a third notch on the second quartz wafer at a position corresponding to the second pin area and forming a fourth notch at a position corresponding to the first pin area, thereby forming a second packaging side part; and bonding the first packaging side part with the front surface of the piezoelectric sensor wafer and bonding the second packaging side part with the back surface of the piezoelectric sensor wafer respectively, so that the bonding mode is adopted to improve the performance of the device.
Owner:CHENGDU TAIMEIKE CRYSTAL TECHNOLOGY CO LTD

Drying device for piezoelectric quartz crystal frequency chip production

A drying device for piezoelectric quartz crystal frequency chip production comprises a support and a drying box transversely installed on the support, a transversely-arranged drying cylinder is installed in the drying box, a conveyor used for moving a piezoelectric quartz crystal frequency chip is further installed on the support, and the conveyor transversely penetrates through the drying cylinder and the drying box; the drying cylinder is rotationally installed in the drying box, a power device used for driving the drying cylinder to swing in a reciprocating mode is further installed in the drying box, and a heater used for heating and drying the piezoelectric quartz crystal frequency piece is installed in the drying cylinder; one side of the drying box is provided with an inlet matched with the conveyor, the other side of the drying box is provided with an outlet matched with the conveyor, the drying box at the inlet is provided with a blower, and the drying box at the outlet is provided with an exhaust fan. According to the drying device, the piezoelectric quartz crystal frequency piece can be uniformly and efficiently dried, meanwhile, manual intervention is reduced, and the drying efficiency is improved.
Owner:LIANYUNGANG QIXIANG ELECTRONICS CO LTD

Piezoelectric quartz sensor with automatic sensitivity compensation and measuring method

The invention provides a piezoelectric quartz sensor with automatic sensitivity compensation and a measuring method, and relates to the technical field of sensors.The piezoelectric quartz sensor comprises a sensor shell, a quartz sensing unit, a pre-tightening unit, a signal processing unit and a quartz ring unit, and the quartz ring unit is arranged on the pre-tightening unit in a sleeving mode; the pre-tightening unit applies a pre-tightening force to the quartz ring unit, and the values of the pre-tightening forces applied to the quartz ring unit and the quartz sensing unit are equal; when external force is applied, the quartz sensing unit generates a first electric signal according to the sum of the pre-tightening force and the external force, and the quartz ring unit generates a second electric signal according to the difference between the pre-tightening force and the external force; the quartz ring unit and the quartz sensing unit are electrically connected with the signal processing unit, and the signal processing unit performs differential operation on the first electric signal and the second electric signal to obtain an output signal. And the pre-tightening force is counteracted through differential operation, so that the finally obtained output signal is not influenced by the change of the pre-tightening force, and the sensitivity change caused by the change of the pre-tightening force is automatically compensated.
Owner:CHENGDU JEEWAY TECH CO LTD

Piezoelectric quartz crystal humidity sensor based on asymmetric n-m electrode structure

ActiveCN223308035UFouling preventionWebs handlingThermodynamicsPiezoelectric quartz
The utility model provides a piezoelectric quartz crystal humidity sensor based on an asymmetric n-m electrode structure, which relates to the technical field of sensors, and comprises a base, a piezoelectric crystal is fixed on the base, electrode layers are fixed at the top and the bottom of the piezoelectric crystal, a sensor body is mounted on the electrode layer at the upper end of the piezoelectric crystal, and the piezoelectric crystal is fixed on the sensor body. A piezoelectric crystal is arranged on the base, a protective layer is arranged on the outer surface of the sensor body, a cleaning assembly is arranged on the side, located on the piezoelectric crystal, of the base and comprises a transverse plate, a cover plate is arranged on the transverse plate, moisture absorption paper is clamped between the cover plate and the transverse plate, and pressing and covering assemblies are arranged on the two sides of the base. The upper end of the protection layer is cleaned through the cleaning assembly, the pressing and covering assembly is matched with the cleaning assembly to unfold moisture absorption paper to cover the top of the protection layer, dustproof and moistureproof protection is conducted on the upper end of the whole device, next use is facilitated, and the service life is prolonged.
Owner:SICHUAN MDH TECH CO LTD

A piezoelectric quartz sensor with automatic sensitivity compensation and a measuring method

This invention provides a piezoelectric quartz sensor with automatic sensitivity compensation and a measurement method, relating to the field of sensor technology. The piezoelectric quartz sensor includes a sensor housing, a quartz sensing element, a pre-tightening unit, a signal processing unit, and a quartz ring unit. The quartz ring unit is fitted onto the pre-tightening unit, which applies a pre-tightening force to the quartz ring unit. The pre-tightening forces applied to the quartz ring unit and the quartz sensing element are equal. When an external force is applied, the quartz sensing element generates a first electrical signal based on the sum of the pre-tightening force and the external force, and the quartz ring unit generates a second electrical signal based on the difference between the pre-tightening force and the external force. Both the quartz ring unit and the quartz sensing element are electrically connected to the signal processing unit. The signal processing unit performs a differential operation on the first and second electrical signals to obtain an output signal. By canceling the pre-tightening force through differential operation, the final output signal is unaffected by changes in the pre-tightening force, automatically compensating for sensitivity changes caused by variations in the pre-tightening force.
Owner:CHENGDU JEEWAY TECH CO LTD

Piezoelectric macro- and micro force sensing devices and measurement methods

This invention relates to a piezoelectric macro-micro force sensing device and measurement method, which solves the problem that existing force sensors cannot meet the requirements for quasi-static measurement of minute forces, belonging to the field of macro-micro force measurement technology. The invention utilizes two force-measuring units with piezoelectric ceramics as sensing elements and a piezoelectric quartz reference unit with a piezoelectric quartz crystal as the sensing element as sensors. The piezoelectric quartz reference unit measures macroscopic forces, while the force-measuring units measure minute forces. Continuous quasi-static measurement of minute forces can be achieved by alternating between the two force-measuring units. The high sensitivity of piezoelectric ceramics improves sensor resolution; the good linearity, high temperature stability, and no hysteresis of piezoelectric quartz improve sensor stability. This invention balances the high accuracy and large range of force sensors, enabling the measurement of multi-range quasi-static macro-micro forces, and also possesses advantages such as high stiffness and high frequency response.
Owner:HARBIN INST OF TECH