144 results about "Piezoelectric quartz" patented technology

A piezoelectric quartz accelerometer includes a sensitive element, a signal processing circuit, a base, an outer case, and a socket, wherein the sensitive element includes two round piezoelectric quartz wafers, and a supporting frame, wherein the two round piezoelectric quartz wafers are symmetrically mounted on both sides of the center axial line of the supporting frame; the sensitive element further includes an axial shock buffer unit and a transverse retaining unit for protecting overload of the two round piezoelectric quartz wafers; the signal processing circuit includes an oscillation circuit for obtaining frequency signal, a frequency differential forming circuit for extracting signal, a phase lock and times frequency circuit for amplifying signal, compensating zero phase, compensating non-linearization and compensating temperature, and an output circuit.

The invention discloses a piezoelectric type dynamic strip-shaped weighing plate, which mainly comprises an upper cover plate, a lower cover plate and a structured quartz crystal set. The piezoelectric type dynamic strip-shaped weighing plate is characterized in that the upper cover plate and the lower cover plate are combined together by fastening a pretension bolt, the section of the upper cover plate and the section of the lower cover plate are both in I shapes, a groove is arranged at the combination part of the upper cover plate and the lower cover plate, the structured quartz crystal set is installed in the groove, and a deduced electrode is arranged on the quartz crystal set. In the invention, a piezoelectric quartz is utilized as a sensitive element, a structured element is embedded into a beam structure which is designed in an optimized mode so as to construct the strip-shaped weighing plate used for dynamically weighing a vehicle, and a separate structure is adopted, thereby the invention has the advantages of simple structure, convenient processing, debugging and installation, large dynamic range, high measurement accuracy and the like.

The invention relates to a piezoelectric-type four-dimensional cutting force-measuring platform belonging to the technical field of sensing measurement and control, in particular to a force-measuring platform for detecting normal force and torque in three directions in the cutting process. The force-measuring platform comprises a base, a middle plate, an upper plate, a lead output plug, a lead, a thermal baffle, a sealing ring, four piezoelectric quartz sensors, a protective pad and connecting screws, wherein the four piezoelectric quartz sensors in diamond arrangement between the base and the middle plate are uniformly distributed on the same circumference of the same horizontal plane. The piezoelectric-type four-dimensional cutting force-measuring platform can simultaneously measures the normal force and the torque in three directions in any cutting process, has the advantages of high sensitivity, good linearity and repeatability, little transversal interference and high measurement precision and has universality for measuring drilling, grinding, milling, lathing and planing, thereby having wide application range.

The invention relates to a big-force piezoelectric quartz multi-component force sensor. It is made up of the sensor body composed by the up cover, the pedestal, the force sensing component, the pretightening bolt, the hollow bolt, the lock ring and the sleeve with two apertures. The force sensing component in sensor is the quartz wafer. The four groups of quartz crystal are set in the form of square relative to the coordinate, which are installed between the up cover and pedestal buckle slot and were pretightened by the shrink range. The sensor has the simple structure, good character, low cost, high rigidity, high sensitivity, high natural frequency, good linearity, small coupling ratio and small cross distribution. So it can get the static, dynamic and instantaneous forces of six dimensions. It is mainly for measuring the six dimension big force in the heavy load operation device and the other axes. So it has widely use.

The invention belongs to the piezoelectric sensor, especially it relates to the big force splitting measurement technology of many dimension force measure in the condition of big load ability and the big force sensor with the shunt splitting actuating mode. The piezoelectric six-dimension big force sensor is made up of the up platform, low platform, the mechanism arm, six upper boom ball sockets, six connecting upper poles, six groups of piezoelectric quartz wafer, six connecting lower poles, six lower-pole ball sockets. The up and down platforms are connected with the mechanism arm through four connecting nuts, the piezoelectric quartz wafer is inserted into the flute which is matched with the boss; the upper pole is connected with the lower pole through four up and down bolts and nuts. The sensor is designed by the shunt partial load structure, which has the good load splitting effect, convenience installation, high precision, good stability and simple structure. So it is proper for measuring the six dimension big force in the heavy load operation device.

A method and device for detecting microbe with piezoelectric quarts crystal transducer includes leading microbial metablin CO2 from culture cell to basic solution detection cell, measuring reaction variation with transducer and counting it out with frequency counter, obtaining linear relation between FDT and microbial concentration for carrying out microbial quantitative and qualitative detection by measuring response curve of microbe in different concentration.

The invention discloses a piezoelectric quartz crystal group for measuring multi-dimensional force, and a manufacturing method for the piezoelectric quartz crystal group, belongs to the field of piezoelectric transducers, and relates to the piezoelectric quartz crystal group for measuring the multi-dimensional force, which is manufactured under the action of the multi-dimensional force according to the region charge distribution rule of quartz crystals. The piezoelectric quartz crystal group consists of an X0 cut quartz unit crystal group, a first Y0 cut crystal unit crystal group, a second Y0 cut crystal unit crystal group and two grounding electrodes. The piezoelectric quartz crystal group measures three forces or force moments by a method for producing coupled induced charge by using two X0 cut quartz crystals under the actions of normal force, and other two torques except the normal torque, and a decoupling method of multi-electrode arrangement and multi-area charge output superposition; and two normal forces and normal torques are measured by using four Y0 cut quartz crystals, so spiral six-dimensional force is measured. The manufacturing method is simple, high in manufacturability and stability, and low in cost; and the piezoelectric quartz crystal group is convenient to package, and can be applied to the fields of machining, aerospace, national defense and the like.

The invention discloses a rotary three-dimensional piezoelectric force measurement cutter handle device, belonging to the field of a force measurement device of a piezoelectric sensor, and particularly relates to a device for directly measuring an axial force, a tangential force and a torque applied to a cutter in a machining process such as milling and drilling. The device is composed of a replaceable milling cutter handle upper end, a piezoelectric sensor part, a signal transmission part and a cutter handle lower end, wherein the piezoelectric sensor part is composed of a sensor upper shell, a three-dimensional piezoelectric quartz measuring crystal group, an insulating sleeve, a sensor lower shell, a tangential force, an axial force, a torque signal inner lead wire and the like. By using three bearings to respectively serve as output paths for the axial force, the tangential force and the torque signal of the piezoelectric sensor, the rotary three-dimensional piezoelectric force measurement cutter handle device solves the signal wireless transmission problem when the piezoelectric sensor is arranged on a main shaft of a machine tool. The rotary three-dimensional piezoelectric force measurement cutter handle device reduces damage from cutting and a cutting liquid to a force measurement instrument, is suitable for monitoring a cutting force in the processing of precise parts, and improves the cutting automation level.

The invention relates to a piezoelectric type grinding force measuring device for an ultraprecise grinding machine of a silicon wafer, which belongs to the technical fields of sensing, measurement and control, in particular relates to detection of the grinding force in the ultraprecise grinding process of the silicon wafer. The measuring device comprises a base, piezoelectric quartz force sensors, an upper cover, connecting screws, a patching board, a trapezoidal sleeve barrel, nuts, a stud bolt, flange fixing screws and a flange, wherein the base is in a circular ring type structure; four piezoelectric quartz force sensors are installed on the upper surface of the base and are uniformly distributed squarely; the base, the upper cover and the piezoelectric quartz force sensors are rigidly connected through the connecting screws to form a dynamometer assembly; and the piezoelectric quartz force sensors comprise two pairs of yx type unit crystal groups and a pair of xy type unit crystal groups. The piezoelectric type grinding force measuring device has the characteristics of simple structure, high sensitivity, good linearity and repeatability and high measuring accuracy, and can be used for detecting the grinding force in the grinding process of the silicon wafer in real time.

The invention provides a piezoelectric sensor pre-tightening device, belongs to the field of sensors and measuring and control devices of the sensors and particularly relates to application of a piezoelectric quartz sensor in the field of three-dimensional force measurement. The piezoelectric sensor pre-tightening device consists of a stress block, an upper three-dimensional piezoelectric sensor, a lower three-dimensional piezoelectric sensor, a stud, a nut, an upper press block, a lower press block and a plurality of T-shaped groove nuts. The piezoelectric sensor pre-tightening device eliminates interference brought by pre-tightening force change by using the two sensors, avoids direct contact between an elastic pre-tightening part and the stress block, accordingly eliminates the influence on outputting, of the pre-tightening force change, when the pre-tightening part is stressed to deform, and improves consistency and accuracy of area measurement. The piezoelectric sensor pre-tightening device can perform three-dimensional force measurement, and a reliable measurement area can be further expanded through combined usage. The piezoelectric sensor pre-tightening device is simple in structure, easy to adjust, flexible and convenient to use and wide in application.

The invention relates to a micro-nano orderly through-hole array metal film sensor based on a piezoelectric substrate sheet. The micro-nano orderly through-hole array metal film sensor structurally comprises a micro-nano orderly through-hole array metal film, the piezoelectric substrate sheet and an annular metal film from top to bottom, wherein the substrate is made of piezoelectric quartz crystals or piezoelectric ceramic. A manufacturing method is further provided. According to the manufacturing method, micro-nano orderly array patterns and annular patterns are machined on a silicon wafer through photoetching, and then a composite stamp with a hard PDMS (A:B=1:3) pattern layer and an elastic PDMS (A:B=1:10) substrate layer is copied through polydimethylsiloxane (PDMS, obtained by mixing the component A and the component B); thiol ink is smeared on the surface of the stamp, the stamp is pressed on the piezoelectric substrate plated with a gold film, and then anti-corrosion patterns of a compact thiol monomolecular layer is formed through self assembly; a porous gold film and an annular gold film are manufactured through wet method etching. The micro-nano orderly through-hole array metal film sensor can be applied to the field of combined sensing through the optical abnormal transmission technology, the quartz crystal microbalance technology and the electrochemistry technology and other fields. The manufacturing method has the advantages of being easy and convenient to perform, low in cost, controllable, high in repeatability and the like.

A piezoelectric sensor arrangement for analysis of fluid samples includes a signal source, a measuring device and a docking system. The sensor arrangement comprises a first part provided with means for receiving a sensor element that exposes a piezoelectric quartz crystal, a second part comprising fluid channels for the sample and a flow cell element, which preferably is removable and which comprises a recess, and inlet and outlet fluid channels for leading a fluid through the recess. The first and second parts are movable in relation to each other between a closed position and an open position and are arranged such that in the closed position the recess of the flow cell element is sealingly covered by the piezoelectric quartz crystal so that a flow cell is formed by said flow cell element and the quartz crystal.

The invention discloses a toll-by-weight ETC (electronic toll collection) system based on a piezoelectric quartz sensor. The system mainly comprises a piezoelectric quartz dynamic weighing system and an ETC automatic deduction system. The piezoelectric quartz dynamic weighing system can dynamically weigh vehicles passing at high speeds with high accuracy and transmit weighing results to the ETC automatic deduction system. The ETC automatic deduction system performs automatic deduction by weight on the vehicles such as wagons and the like requiring the deduction by weight in combination with the mileage information of the vehicles, and the wagons are not required to be stopped when passing the system at highway entrances and exits, so high-speed ETC deduction is realized. Simultaneously, the system has a complete vehicle type classification function, so deducted tolls does not comprise toll by weight when the vehicles such as passenger vehicles and the like not requiring toll by weight pass the system. By utilizing the system, ETC lanes which can be shared by the wagons and the passenger vehicles can be realized, and the traffic efficiency of highways is greatly improved.

The invention discloses a non-contact electrode piezoelectric transducer device for monitoring a strongly-corrosive gas and a method. The non-contact electrode piezoelectric transducer device comprises a piezoelectric quartz wafer, an exciting electrode, an adsorption measurement tank, a controller and an impedance analyzer. According to the invention, a piezoelectric transducer is adopted to monitor the interaction process of the strongly-corrosive gas and a solid surface; adsorbance measurement errors caused by corrosion of a silver-film or a gold-film electrode originally sprayed onto the surface of the quartz wafer is radically eliminated; after separation of the exciting electrode from the quartz wafer, the mass loading capacity of a quartz crystal resonator is enhanced, and the mass change linearity range detected by the transducer is expanded; and superior light transmittance of quartz is restored, a circular ring metal electrode is used in a matching manner, and optical fibers are additionally mounted in the circular ring to be connected with a spectral measurement instrument, so that information of both mass and spectral changes of the quartz surface can be determined at the same time.

A piezoelectric quartz tuning fork resonator having a pair of tines formed from a common quartz plate, with a middle electrode and two outer electrodes being disposed at or on top and bottom surfaces of each of the pair of tines and interconnected such that the outer electrodes at or on the top and bottom surfaces of a first one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of a second one of the pair of tines and further interconnected such that the outer electrodes at or on the top and bottom surfaces of the second one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of the first one of the pair of tines.

The invention discloses a piezoelectric type device for measuring the drilling force of a deep hole, belonging to the technical field of sensing, observing and controlling, in particular a device fordetecting the drilling force and the torque moment of the deep hole in drilling process. The device comprises a base, an upper cover, a piezoelectric quartz sensor, a lead wire output plug, a lead wire, a gasket ring, a connecting bolt and a protection pad, wherein the piezoelectric quartz sensor clamped between the base and the upper cover is located in the right center of the device. The piezoelectric quartz sensor comprises a partition electrode, a complete electrode and a quartz wafer. The invention enhances sensitivity by combing a plurality of pieces of quartz crystals, only needs one sensor, and has the characteristics of simple structure, high sensitivity, favorable linearity and repetitiveness and high measurement precision. The piezoelectric type device for measuring the drillingforce of the deep hole can detect the drilling force and the torque moment in the deep hole processing in real time.

The invention discloses a piezoelectric type six-dimensional force / torque sensor adopting six groups of force-measuring sensitive units and belongs to multi-dimensional force / torque measuring devices. The piezoelectric type six-dimensional force / torque sensor comprises a base, the six groups of force-measuring sensitive units, an upper cover, an inner side sealing sleeve, signal leading-out wires and an insulation filling material, wherein the base is provided with a mounting disc and an output electrode socket, and the six groups of force-measuring sensitive units are clamped by an upper insulating electrode plate and a lower insulating electrode plate, are composed of two kinds of cut piezoelectric quartz wafers and are alternately and uniformly distributed on the mounting disc of the base; a first force-measuring sensitive unit is deviated from the X axis by an angle alpha; paired electrodes corresponding to the quartz wafers are arranged at the inner sides of the insulating electrode plates, and each pair of electrodes are connected with the output electrode socket of the base through the signal leading-out wires. The piezoelectric type six-dimensional force / torque sensor has the advantages of simple and compact structure, no redundancy sensitive unit, high rigidity, good dynamic performance, easiness in microminiaturization, low manufacturing cost and low requirements on sensor output signal conditioning circuit and can be applied to multiple fields, such as intelligent robots, automated detection, aeronautics & astronautics and machining.

A quartz resonator flow cell has a piezoelectric quartz wafer with an electrode, pads, and interconnects disposed on a first side thereof. The piezoelectric quartz wafer has a second electrode disposed on a second side thereof, the second electrode opposing the first electrode. A substrate is provided having fluid ports therein and the piezoelectric quartz wafer is mounted to the substrate such that the second side thereof faces the substrate with a cavity being formed between the substrate and the wafer. The fluid ports in the substrate are aligned with the electrode on the second side of the piezoelectric quartz wafer which is in contact with the cavity.

The present invention relates to a new piezoelectric quartz level sensor mainly applied in the attitude stabilized and control system of the aircraft, robot, vehicle, ship, oil drilling platform, construction, industrial automation equipment, radar, and satellite, comprising a sensitive element, signal processing circuit, base, outer case and socket. The piezoelectric quartz level sensor transfers the deflection angle of the object to the force exerted on two symmetrical mounted round piezoelectric quartz wafers, and then utilizing the prominent force sensitivity of the piezoelectric quartz, the level attitude parameter of an objected can be detected through the frequency variation due to the force exerted on the two piezoelectric quartz wafers. Therefore, the present invention can satisfy the demand of high stability and resolution, low non-linear degree, quick start time, wide measuring range and operating temperature, good ability to resist shock, and digital output.

The disclosed real time monitoring device is capable of sucking very fine granules from air. The device includes body case, and sampling chamber formed in cavity inside the case. Being setup on up part of the case, a sampling outlet is connected to the sampling chamber. Static sampling weighing electrodes are setup two sides inside the sampling chamber. Through electrical source, the two electrodes are connected to process component for signal conversion. Since piezoelectric quartz crystal is adopted as sampling electrode, sampling membrane is not needed in the invention to collect granules. Thus, there is no problem of influencing on collection rate of granules caused by size of membrane aperture, as well as there is no issue of process before and after sampling operations. Advantages are: high measuring accuracy, short working time, and redcing human error caused by the said middle sampling process step for membrane.

A piezoelectric quartz shear-mode resonator includes plasma etched quartz tethers, each including a mount. The tethers are for mounting the resonator to a semiconductor substrate for the purpose of isolating the thermally-induced stress from the mounts from the active resonating region, wherein the quartz tethers have rounded corners.

The invention relates to a multipoint local pretightening method for adjustable load sharing mechanisms, which belongs to the field of a sensing test method and a sensing test device. The method realizes multipoint local pretightening by adjustment of a pretightening screw to drive a pretightening slider, and realizes adjustment of structural parameters through a mounting length adjustable measuring rod. The multipoint local pretightening method adjusts the length of the measuring rod according to the actual demand of measurement and assembly, performs multipoint local pretightening force adjustment, and makes the measuring rod exerted by the pretightening force. The device adopted comprises six groups of adjustable load sharing mechanisms with the same structures, wherein each group of adjustable load sharing mechanisms consist of an upper platform, a lower platform, the pretightening screw, the pretightening slider, an upper connecting rod, a lower connecting rod, an upper round nut, a lower round nut, an upper connecting flange, a lower connecting flange, a group of piezoelectric quartz sensors and a positioning ring. The multipoint local pretightening method realizes multipoint local pretightening and adjustment of the structural parameters, and has the characteristics of good pretightening effect, strong large-load sharing capacity, convenient assembling operation, high precision, good stability and simple structure.

Delay line of acoustic surface wave comprises piezoelectric quartz substrate and two pieces of single-phase unidirectional transducer with gold poles. The delay line in single mode control structure includes a long transducer and a short transducer. Comb structure is adopted in the long transducer, and gap between Combs is equal to length of the short transducer. Distance between geometric centers of transducers is equal to length of the long transducer. Single-phase unidirectional structure of pole width control is adopted in the transducer. The delay line possesses features of low insertion loss. Oscillator is operated under state of single mode.

The present invention relates to a cascade large-optical-path-difference photoelastic modulating interferometer which comprises a light source. A polarizer which modulates emergent light to a certain direction to form an angle with the horizontal direction is arranged in the emergent light direction of the light source. A static birefringent crystal is arranged in the emergent light direction of the polarizer. A plurality of strong light modulators which can make emergent light reflect for a plurality of times are arranged in the emergent light direction of the static birefringent crystal. An analyzer is arranged in the emergent light direction of the strong light modulator. A detector which can acquire interfered light of the analyzer is arranged in the emergent light direction of the analyzer. The cascade large-optical-path photoelastic modulating interferometer generates a periodical driving force through a piezoelectric quartz crystal, and furthermore generates two-dimensional coupling longitudinal oscillation by means of a contour oscillation mode of zinc selenide crystal for obtaining higher modulation optical path difference. Based on a fact that a single photoelastic modulator realizes higher modulation optical path difference, the modulation optical path difference is furthermore increased through a cascade manner, thereby settling a problem of small modulation optical path difference in the existing photoelastic modulating interferometer and ensuring enough light flux.

The invention belongs to the piezoelectric type sensor field, particularly to a piezoelectric type measuring device of control surface hinge moment. The measuring device employs a piezoelectric quartz crystal group with a double electrode structure and integrates an X0 cutting type piezoelectric quartz crystal group into an internal portion of an aerofoil. The measuring device comprises a control surface, shafts, screws, a machine body, a right covering plate, pre-tighten bolts, the X0 cutting type quartz unit crystal group with the double electrode structure, a lead, fixing bolts and a left covering plate. The X0 cutting type piezoelectric quartz unit crystal group is formed by an upper X0 cutting type quartz crystal wafer, a lower X0 cutting type quartz crystal wafer, a front semi-annular-shaped extraction electrode, a rear semi-annular-shaped extraction electrode, an upper grounding electrode and a lower grounding electrode have same shapes. The piezoelectric type measuring device of the control surface hinge moment has the advantages of being simple in structure, good in manufacturability, good in stability, convenient to use, small in size, capable of being applied to occasions of an aerodynamics wind tunnel experiment research and aircraft development and having more applications in fields of aeronautics and astronautics and defense military projects.

A sheet metal hot stamping force measurement device of the present invention belongs to the sensing, measurement and control technology field, in particular relates to a stamping force test technology during a sheet metal hot stamping processing process. The force measurement device is composed of a pedestal, an upper cover, four piezoelectric quartz sensors, a lead wire output interface, a lead wire, a sealing ring, a pre-tightening bolt and a protection pad. The four piezoelectric quartz sensors are distributed inside the force measurement device evenly, and the sensitivity of the force measurement device is improved by a method of combining a plurality of sensors. An integrated load sharing ring structure is arranged in the center of the pedestal, so that the force measurement device is compact in structure and large in rigidity, the situation that the sensors are damaged by the overlarge stamping forces, can be avoided, and the measuring range of the force measurement device is expanded. The upper cover is equipped with a cooling hole, so that the situation that the high temperature is transmitted to the sensors and a press, can be avoided, the service life of the force measurement device and the stamping precision of the sheet material are improved. The force measurement device has the excellent characteristics of being high in rigidity and sensitivity and being high temperature resistant, and can be installed between a hot stamping press sliding block and an upper die directly, thereby measuring the stamping force directly.

The invention discloses a clamp device for the shaft a parallel six-dimensional force sensor, belongs to the field of sensors and measurement control thereof, and in particular to fixation and partial load of a six-dimensional force sensor for detecting strained condition of the shaft of huge overloading operating equipment. The clamp device for the shaft of the parallel six-dimensional force sensor comprises an upper inner clamp body and an upper outer clamp body, a lower inner clamp body and a lower outer clamp body, an upper stay bolt and an upper lag bolt, a lower stay bolt and a lower lag bolt. The upper clamp bodies are arranged on the upper surface of a piezoelectric quartz force sensor, and rigidly connected with the piezoelectric quartz force sensor by 8 evenly distributed upper stay bolts and 8 evenly distributed upper lag bolts. The lower clamp bodies are arranged on the lower surface of the piezoelectric quartz force sensor, and rigidly connected with the piezoelectric quartz force sensor by 8 evenly distributed lower stay bolts and 8 evenly distributed lower lag bolts. The clamp has the advantages of simple structure, good performance and low cost, can keep rigid connection between the shaft and the sensor and have load sharing function, and can be used for fixing axle hole elements.

Methods can be adapted for design of a sensitive monolayer for detection of hydrogen sulphide at room temperature with SAW / BAW devices. The sensitive monolayer can be synthesized based on chemical compounds, which belongs to a class of thiacalix[n]arenas, mercapto halides, mercapto alcohols and chloromethylated thiacalix[n]arenas. The sensitive monolayer can be directly immobilized or anchored at the surface of a piezoelectric quartz substrate in a covalently bonded manner by means of direct printing process. The piezoelectric quartz substrate can be activated in basic medium or in acid medium before the immobilization of the sensitive monolayer in order to increase the population of OH groups. Thus, the synthesized sensitive monolayer exhibits a high site density, fast response and long-term stability for H2S sensing.

The invention relates to a skeleton watch including:a case middle;a movement including: a frame;time display means;a reduction mechanism meshed with the time display means;a motor including: an electromagnet;a stator;a rotor bearing a pinion meshed with the reduction mechanism;an electronic circuit including: a piezoelectric quartz;a control circuit connected to the quartz and to the stator by means of electrical conductors;an additional plate which carries the electronic circuit, said additional plate being distinct from the back cover and fixed to the frame.

The invention relates to a piezoelectric six-dimensional force sensor based on a Stewart structure design. The piezoelectric six-dimensional force sensor comprises an upper platform, a lower platform, six upper rod ball hinges, six upper connecting rods, six groups of piezoelectric one-dimensional sensors, six lower connecting rods and six lower rod ball hinges, wherein the upper platform and the lower platform are connected together through sensor branches formed by the connecting rods, the upper and lower ball hinges and the piezoelectric one-dimensional sensors; the six piezoelectric one-dimensional quartz crystal groups are respectively fixed in a groove formed between the upper connecting rods and the lower connecting rods through six uniformly-arranged bolts; each quartz crystal group consists of four xy type piezoelectric quartz wafers; the quartz crystal groups are bonded together by the quartz crystal wafers and electrode sheets through conductive adhesives. As a Stewart parallel structure and a partial load principle are utilized, the measurement of large range load is realized; as each crystal group consists of the four xy type piezoelectric quartz wafers, the piezoelectric six-dimensional force sensor has the characteristics of being high in measuring sensitivity, high in measuring result accuracy, simple in structure, convenient to mount and use and good in stability and can be applied to the measurement of strong load.