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144 results about "Piezoelectric quartz" patented technology

Piezoelectric quartz crystal group for measuring multi-dimensional force, and manufacturing method for piezoelectric quartz crystal group

The invention discloses a piezoelectric quartz crystal group for measuring multi-dimensional force, and a manufacturing method for the piezoelectric quartz crystal group, belongs to the field of piezoelectric transducers, and relates to the piezoelectric quartz crystal group for measuring the multi-dimensional force, which is manufactured under the action of the multi-dimensional force according to the region charge distribution rule of quartz crystals. The piezoelectric quartz crystal group consists of an X0 cut quartz unit crystal group, a first Y0 cut crystal unit crystal group, a second Y0 cut crystal unit crystal group and two grounding electrodes. The piezoelectric quartz crystal group measures three forces or force moments by a method for producing coupled induced charge by using two X0 cut quartz crystals under the actions of normal force, and other two torques except the normal torque, and a decoupling method of multi-electrode arrangement and multi-area charge output superposition; and two normal forces and normal torques are measured by using four Y0 cut quartz crystals, so spiral six-dimensional force is measured. The manufacturing method is simple, high in manufacturability and stability, and low in cost; and the piezoelectric quartz crystal group is convenient to package, and can be applied to the fields of machining, aerospace, national defense and the like.
Owner:DALIAN UNIV OF TECH

Rotary three-dimensional piezoelectric force measurement cutter handle device

The invention discloses a rotary three-dimensional piezoelectric force measurement cutter handle device, belonging to the field of a force measurement device of a piezoelectric sensor, and particularly relates to a device for directly measuring an axial force, a tangential force and a torque applied to a cutter in a machining process such as milling and drilling. The device is composed of a replaceable milling cutter handle upper end, a piezoelectric sensor part, a signal transmission part and a cutter handle lower end, wherein the piezoelectric sensor part is composed of a sensor upper shell, a three-dimensional piezoelectric quartz measuring crystal group, an insulating sleeve, a sensor lower shell, a tangential force, an axial force, a torque signal inner lead wire and the like. By using three bearings to respectively serve as output paths for the axial force, the tangential force and the torque signal of the piezoelectric sensor, the rotary three-dimensional piezoelectric force measurement cutter handle device solves the signal wireless transmission problem when the piezoelectric sensor is arranged on a main shaft of a machine tool. The rotary three-dimensional piezoelectric force measurement cutter handle device reduces damage from cutting and a cutting liquid to a force measurement instrument, is suitable for monitoring a cutting force in the processing of precise parts, and improves the cutting automation level.
Owner:DALIAN UNIV OF TECH

Piezoelectric type grinding force measuring device for ultraprecise grinding machine of silicon wafer

The invention relates to a piezoelectric type grinding force measuring device for an ultraprecise grinding machine of a silicon wafer, which belongs to the technical fields of sensing, measurement and control, in particular relates to detection of the grinding force in the ultraprecise grinding process of the silicon wafer. The measuring device comprises a base, piezoelectric quartz force sensors, an upper cover, connecting screws, a patching board, a trapezoidal sleeve barrel, nuts, a stud bolt, flange fixing screws and a flange, wherein the base is in a circular ring type structure; four piezoelectric quartz force sensors are installed on the upper surface of the base and are uniformly distributed squarely; the base, the upper cover and the piezoelectric quartz force sensors are rigidly connected through the connecting screws to form a dynamometer assembly; and the piezoelectric quartz force sensors comprise two pairs of yx type unit crystal groups and a pair of xy type unit crystal groups. The piezoelectric type grinding force measuring device has the characteristics of simple structure, high sensitivity, good linearity and repeatability and high measuring accuracy, and can be used for detecting the grinding force in the grinding process of the silicon wafer in real time.
Owner:DALIAN UNIV OF TECH

Micro-nano orderly through-hole array metal film sensor based on piezoelectric substrate sheet and manufacturing method thereof

The invention relates to a micro-nano orderly through-hole array metal film sensor based on a piezoelectric substrate sheet. The micro-nano orderly through-hole array metal film sensor structurally comprises a micro-nano orderly through-hole array metal film, the piezoelectric substrate sheet and an annular metal film from top to bottom, wherein the substrate is made of piezoelectric quartz crystals or piezoelectric ceramic. A manufacturing method is further provided. According to the manufacturing method, micro-nano orderly array patterns and annular patterns are machined on a silicon wafer through photoetching, and then a composite stamp with a hard PDMS (A:B=1:3) pattern layer and an elastic PDMS (A:B=1:10) substrate layer is copied through polydimethylsiloxane (PDMS, obtained by mixing the component A and the component B); thiol ink is smeared on the surface of the stamp, the stamp is pressed on the piezoelectric substrate plated with a gold film, and then anti-corrosion patterns of a compact thiol monomolecular layer is formed through self assembly; a porous gold film and an annular gold film are manufactured through wet method etching. The micro-nano orderly through-hole array metal film sensor can be applied to the field of combined sensing through the optical abnormal transmission technology, the quartz crystal microbalance technology and the electrochemistry technology and other fields. The manufacturing method has the advantages of being easy and convenient to perform, low in cost, controllable, high in repeatability and the like.
Owner:SUN YAT SEN UNIV

Toll-by-weight charging ETC (electronic toll collection) system based on piezoelectric quartz sensor

The invention discloses a toll-by-weight ETC (electronic toll collection) system based on a piezoelectric quartz sensor. The system mainly comprises a piezoelectric quartz dynamic weighing system and an ETC automatic deduction system. The piezoelectric quartz dynamic weighing system can dynamically weigh vehicles passing at high speeds with high accuracy and transmit weighing results to the ETC automatic deduction system. The ETC automatic deduction system performs automatic deduction by weight on the vehicles such as wagons and the like requiring the deduction by weight in combination with the mileage information of the vehicles, and the wagons are not required to be stopped when passing the system at highway entrances and exits, so high-speed ETC deduction is realized. Simultaneously, the system has a complete vehicle type classification function, so deducted tolls does not comprise toll by weight when the vehicles such as passenger vehicles and the like not requiring toll by weight pass the system. By utilizing the system, ETC lanes which can be shared by the wagons and the passenger vehicles can be realized, and the traffic efficiency of highways is greatly improved.
Owner:深圳思量微系统有限公司

Non-contact electrode piezoelectric transducer device for monitoring strongly-corrosive gas and method

InactiveCN104535449AEliminate errors in adsorption capacity determinationReduce mass loadWeighing by absorbing componentQuartz crystal resonatorPiezoelectric quartz
The invention discloses a non-contact electrode piezoelectric transducer device for monitoring a strongly-corrosive gas and a method. The non-contact electrode piezoelectric transducer device comprises a piezoelectric quartz wafer, an exciting electrode, an adsorption measurement tank, a controller and an impedance analyzer. According to the invention, a piezoelectric transducer is adopted to monitor the interaction process of the strongly-corrosive gas and a solid surface; adsorbance measurement errors caused by corrosion of a silver-film or a gold-film electrode originally sprayed onto the surface of the quartz wafer is radically eliminated; after separation of the exciting electrode from the quartz wafer, the mass loading capacity of a quartz crystal resonator is enhanced, and the mass change linearity range detected by the transducer is expanded; and superior light transmittance of quartz is restored, a circular ring metal electrode is used in a matching manner, and optical fibers are additionally mounted in the circular ring to be connected with a spectral measurement instrument, so that information of both mass and spectral changes of the quartz surface can be determined at the same time.
Owner:SHANDONG NORMAL UNIV

Piezoelectric type six-dimensional force/torque sensor adopting six groups of force-measuring sensitive units

InactiveCN104677543AReduce usageReduces need for back-end signal conditioning circuitryWork measurementTorque measurementSignal conditioning circuitsPiezoelectric quartz
The invention discloses a piezoelectric type six-dimensional force/torque sensor adopting six groups of force-measuring sensitive units and belongs to multi-dimensional force/torque measuring devices. The piezoelectric type six-dimensional force/torque sensor comprises a base, the six groups of force-measuring sensitive units, an upper cover, an inner side sealing sleeve, signal leading-out wires and an insulation filling material, wherein the base is provided with a mounting disc and an output electrode socket, and the six groups of force-measuring sensitive units are clamped by an upper insulating electrode plate and a lower insulating electrode plate, are composed of two kinds of cut piezoelectric quartz wafers and are alternately and uniformly distributed on the mounting disc of the base; a first force-measuring sensitive unit is deviated from the X axis by an angle alpha; paired electrodes corresponding to the quartz wafers are arranged at the inner sides of the insulating electrode plates, and each pair of electrodes are connected with the output electrode socket of the base through the signal leading-out wires. The piezoelectric type six-dimensional force/torque sensor has the advantages of simple and compact structure, no redundancy sensitive unit, high rigidity, good dynamic performance, easiness in microminiaturization, low manufacturing cost and low requirements on sensor output signal conditioning circuit and can be applied to multiple fields, such as intelligent robots, automated detection, aeronautics & astronautics and machining.
Owner:CHONGQING UNIV

Multi-point partial pre-fastening method with adjustable load sharing mechanism

The invention relates to a multipoint local pretightening method for adjustable load sharing mechanisms, which belongs to the field of a sensing test method and a sensing test device. The method realizes multipoint local pretightening by adjustment of a pretightening screw to drive a pretightening slider, and realizes adjustment of structural parameters through a mounting length adjustable measuring rod. The multipoint local pretightening method adjusts the length of the measuring rod according to the actual demand of measurement and assembly, performs multipoint local pretightening force adjustment, and makes the measuring rod exerted by the pretightening force. The device adopted comprises six groups of adjustable load sharing mechanisms with the same structures, wherein each group of adjustable load sharing mechanisms consist of an upper platform, a lower platform, the pretightening screw, the pretightening slider, an upper connecting rod, a lower connecting rod, an upper round nut, a lower round nut, an upper connecting flange, a lower connecting flange, a group of piezoelectric quartz sensors and a positioning ring. The multipoint local pretightening method realizes multipoint local pretightening and adjustment of the structural parameters, and has the characteristics of good pretightening effect, strong large-load sharing capacity, convenient assembling operation, high precision, good stability and simple structure.
Owner:DALIAN UNIV OF TECH

Cascade large-optical-path-differece photoelastic modulating interferometer

InactiveCN103776536AIncrease modulation optical path differenceNo reflection lossInterferometric spectrometryZinc selenidePiezoelectric quartz
The present invention relates to a cascade large-optical-path-difference photoelastic modulating interferometer which comprises a light source. A polarizer which modulates emergent light to a certain direction to form an angle with the horizontal direction is arranged in the emergent light direction of the light source. A static birefringent crystal is arranged in the emergent light direction of the polarizer. A plurality of strong light modulators which can make emergent light reflect for a plurality of times are arranged in the emergent light direction of the static birefringent crystal. An analyzer is arranged in the emergent light direction of the strong light modulator. A detector which can acquire interfered light of the analyzer is arranged in the emergent light direction of the analyzer. The cascade large-optical-path photoelastic modulating interferometer generates a periodical driving force through a piezoelectric quartz crystal, and furthermore generates two-dimensional coupling longitudinal oscillation by means of a contour oscillation mode of zinc selenide crystal for obtaining higher modulation optical path difference. Based on a fact that a single photoelastic modulator realizes higher modulation optical path difference, the modulation optical path difference is furthermore increased through a cascade manner, thereby settling a problem of small modulation optical path difference in the existing photoelastic modulating interferometer and ensuring enough light flux.
Owner:ZHONGBEI UNIV

Piezoelectric type measuring device of control surface hinge moment

The invention belongs to the piezoelectric type sensor field, particularly to a piezoelectric type measuring device of control surface hinge moment. The measuring device employs a piezoelectric quartz crystal group with a double electrode structure and integrates an X0 cutting type piezoelectric quartz crystal group into an internal portion of an aerofoil. The measuring device comprises a control surface, shafts, screws, a machine body, a right covering plate, pre-tighten bolts, the X0 cutting type quartz unit crystal group with the double electrode structure, a lead, fixing bolts and a left covering plate. The X0 cutting type piezoelectric quartz unit crystal group is formed by an upper X0 cutting type quartz crystal wafer, a lower X0 cutting type quartz crystal wafer, a front semi-annular-shaped extraction electrode, a rear semi-annular-shaped extraction electrode, an upper grounding electrode and a lower grounding electrode have same shapes. The piezoelectric type measuring device of the control surface hinge moment has the advantages of being simple in structure, good in manufacturability, good in stability, convenient to use, small in size, capable of being applied to occasions of an aerodynamics wind tunnel experiment research and aircraft development and having more applications in fields of aeronautics and astronautics and defense military projects.
Owner:DALIAN UNIV OF TECH

Sheet metal hot stamping force measurement device

A sheet metal hot stamping force measurement device of the present invention belongs to the sensing, measurement and control technology field, in particular relates to a stamping force test technology during a sheet metal hot stamping processing process. The force measurement device is composed of a pedestal, an upper cover, four piezoelectric quartz sensors, a lead wire output interface, a lead wire, a sealing ring, a pre-tightening bolt and a protection pad. The four piezoelectric quartz sensors are distributed inside the force measurement device evenly, and the sensitivity of the force measurement device is improved by a method of combining a plurality of sensors. An integrated load sharing ring structure is arranged in the center of the pedestal, so that the force measurement device is compact in structure and large in rigidity, the situation that the sensors are damaged by the overlarge stamping forces, can be avoided, and the measuring range of the force measurement device is expanded. The upper cover is equipped with a cooling hole, so that the situation that the high temperature is transmitted to the sensors and a press, can be avoided, the service life of the force measurement device and the stamping precision of the sheet material are improved. The force measurement device has the excellent characteristics of being high in rigidity and sensitivity and being high temperature resistant, and can be installed between a hot stamping press sliding block and an upper die directly, thereby measuring the stamping force directly.
Owner:YANTAI VOCATIONAL COLLEGE

Clamping apparatus for shaft of parallel-connection type six-dimension force sensor

The invention discloses a clamp device for the shaft a parallel six-dimensional force sensor, belongs to the field of sensors and measurement control thereof, and in particular to fixation and partial load of a six-dimensional force sensor for detecting strained condition of the shaft of huge overloading operating equipment. The clamp device for the shaft of the parallel six-dimensional force sensor comprises an upper inner clamp body and an upper outer clamp body, a lower inner clamp body and a lower outer clamp body, an upper stay bolt and an upper lag bolt, a lower stay bolt and a lower lag bolt. The upper clamp bodies are arranged on the upper surface of a piezoelectric quartz force sensor, and rigidly connected with the piezoelectric quartz force sensor by 8 evenly distributed upper stay bolts and 8 evenly distributed upper lag bolts. The lower clamp bodies are arranged on the lower surface of the piezoelectric quartz force sensor, and rigidly connected with the piezoelectric quartz force sensor by 8 evenly distributed lower stay bolts and 8 evenly distributed lower lag bolts. The clamp has the advantages of simple structure, good performance and low cost, can keep rigid connection between the shaft and the sensor and have load sharing function, and can be used for fixing axle hole elements.
Owner:DALIAN UNIV OF TECH

Piezoelectric six-dimensional force sensor

The invention relates to a piezoelectric six-dimensional force sensor based on a Stewart structure design. The piezoelectric six-dimensional force sensor comprises an upper platform, a lower platform, six upper rod ball hinges, six upper connecting rods, six groups of piezoelectric one-dimensional sensors, six lower connecting rods and six lower rod ball hinges, wherein the upper platform and the lower platform are connected together through sensor branches formed by the connecting rods, the upper and lower ball hinges and the piezoelectric one-dimensional sensors; the six piezoelectric one-dimensional quartz crystal groups are respectively fixed in a groove formed between the upper connecting rods and the lower connecting rods through six uniformly-arranged bolts; each quartz crystal group consists of four xy type piezoelectric quartz wafers; the quartz crystal groups are bonded together by the quartz crystal wafers and electrode sheets through conductive adhesives. As a Stewart parallel structure and a partial load principle are utilized, the measurement of large range load is realized; as each crystal group consists of the four xy type piezoelectric quartz wafers, the piezoelectric six-dimensional force sensor has the characteristics of being high in measuring sensitivity, high in measuring result accuracy, simple in structure, convenient to mount and use and good in stability and can be applied to the measurement of strong load.
Owner:UNIV OF JINAN
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