This application belongs to the field of precision optical measurement, specifically disclosing a three-photoelastic modulation type Mueller matrix polarization
system and its parameter
correction method. In this application, the polarizing arm includes a first
photoelastic modulator and a second
photoelastic modulator, while the analyzing arm contains only a third
photoelastic modulator. The three photoelastic modulators have different modulation frequencies. For the
optical path after the third photoelastic modulator, a
beam splitter divides the optical
signal into two sub-beams for separate polarization analysis. By controlling the
azimuth angles of the analyzers in the two split paths, two different three-photoelastic
azimuth angle polarization
system configurations are achieved. The measured two sets of 12 Mueller matrix elements are combined into a complete Mueller
matrix element, thus achieving the measurement of the complete Mueller
matrix element in a
single measurement. This application, by combining three photoelastics with different modulation frequencies and the splitting principle, achieves high-speed acquisition of the entire Mueller matrix of a sample in a
single measurement, filling the gap in mid-
infrared high-speed Mueller matrix ellipsometers.