Photoelastic high-speed Mueller matrix ellipsometer and in-situ calibration and measurement method thereof

Abstract

The invention discloses a photoelastic high-speed Mueller matrix ellipsometer and an in-situ calibration and measurement method thereof, and belongs to the technical field of optical measurement. Thephotoelastic high-speed Mueller matrix ellipsometer comprises a high-speed polarization module, a sample adjustment module and a real-time polarization analysis module. The in-situ calibration methodof the photoelastic high-speed Mueller matrix ellipsometer is implemented based on Bessel function infinite series expansion and discrete Fourier transform, the peak value and the static retardation of the photoelastic modulator are obtained at the same time, and high precision and high sensitivity of the photoelastic modulator in the whole working range are ensured. The measurement method of thephotoelastic high-speed Mueller matrix ellipsometer is carried out on the basis of double photoelastic modulation and spatial light splitting demodulation, and in-situ and high-precision measurement of the sample Mueller matrix can be realized under microsecond time resolution. Benefited from the high temporal resolution acquisition of the Mueller matrix, the method can be used for characterizingthe dynamic optical properties of the material in the rapid reaction process.

Description

technical field [0001] The invention belongs to the technical field related to optical measurement, and more specifically relates to a photoelastic high-speed Mueller matrix ellipsometer and an in-situ calibration and measurement method thereof. Background technique [0002] In some fast reaction processes, such as polymerization reaction and particle migration process, there are often rapid changes in local physical properties and shimmering nanostructures. For these rapid reaction processes involving different spatial scales (nanometers to microns or even larger scales) and time scales (microseconds to tens of seconds), due to the lack of means of synchronous observation, the regulation of the reaction process mostly needs to be continuously adjusted. Experience can achieve the desired effect. Therefore, in order to deeply understand the mechanism of these rapid reactions and realize the accurate control of the reaction process, it is of great significance to develop inst...

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Problems solved by technology

[0006] Aiming at the above defects or improvement needs of the prior art, the present invention provides a photoelastic high-speed Mueller matrix ellipsometer and its in-situ calibration and measurement method, thereby solving the problem that the prior art is difficult to break through the measurement time resolution of milliseconds. rate technical issues

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