Laser processing device (1) with: a
pulsed laser oscillator (51) configured to oscillate a
pulsed laser beam (LB) at a predetermined repetition frequency; a main
polarization beam splitter (53) which is arranged in a
laser beam oscillation direction on a downstream side of the pulse
laser oscillator (51); a quarter-
wavelength plate (54) which is configured to convert a
pulsed laser beam (LB) passing through the main
polarization beam splitter (53) from P-polarized light into circularly polarized light; a photoelastic modulation element (55) which is configured to modulate a
pulsed laser beam passing through the quarter-
wavelength plate (54) into a P-polarized
pulsed laser beam and an S-polarized
pulsed laser beam; a frequency setting device (730a) which is configured to set a modulation frequency by means of the photoelastic modulation element (55); a subpolarization
beam splitter (56) configured to split the P-polarized pulsed
laser beam and the S-polarized pulsed laser beam, which are modulated by the photoelastic modulation element (55); a first reversing means (6a; 7a; 57a) for reversing the pulsed laser beam diverted from the P-polarized light by the subpolarization
beam splitter (56) to cause the pulsed laser beam to move in the reverse direction thereafter along an
optical path of a return path of the pulsed laser beam which is slightly inclined with respect to an
optical path of a forward path of the pulsed laser beam; a second reversing means (6b; 7b; 57b) for reversing the pulsed laser beam diverted from the S-polarized light by the subpolarization
beam splitter (56) to cause the pulsed laser beam to subsequently travel in the reverse direction along an
optical path of a return path of the pulsed laser beam which is slightly inclined with respect to an optical path of a forward path of the pulsed laser beam; and a condenser (580; 580a) arranged in paths of the pulsed
laser beams reflected by the main
polarization beam splitter (53), after the pulsed
laser beams inverted by the first inversion means (6a; 7a; 57a) and the second inversion means (6b; 7b; 57b) pass through the quarter-
wavelength plate (54), whereupon the pulsed
laser beams are converted into S-polarized pulsed laser beams.