A waveguide pressure sensor and detection method based on m-z structure

A pressure sensor, M-Z technology, used in fluid pressure measurement using optical methods, measurement of force by measuring the change of optical properties of materials when they are stressed, instruments, etc., can solve problems such as limited range

Inactive Publication Date: 2021-09-10
SHANDONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In the prior art, for example, traditional M-Z structure interference optical pressure sensors are mostly based on force-sensitive films, and the measurement range is limited by the fracture pressure of the film, so the range is limited; silicon-based optical MEMS pressure sensors mainly detect pressure through changes in output light intensity size, but the relationship between pressure and light intensity is nonlinear, so the sensor is nonlinear

Method used

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  • A waveguide pressure sensor and detection method based on m-z structure
  • A waveguide pressure sensor and detection method based on m-z structure
  • A waveguide pressure sensor and detection method based on m-z structure

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Embodiment 1

[0044] A waveguide pressure sensor based on M-Z structure, such as figure 1 As shown, it includes a single-wavelength light source 5, an M-Z structure 6 and an optical power meter 7; the single-wavelength light source 5, the M-Z structure 6 and the optical power meter 7 are connected in sequence, and the M-Z structure 6 includes an input coupler 8 connected in sequence, consisting of two different lengths The pressure sensing region 9 and the output coupler 10 are composed of a single-mode waveguide 11 . Such as Figure 6 As shown, one of the two single-mode waveguides 11 is linear and the other is sinusoidal, and the length difference ΔL between the two single-mode waveguides 11 is 0-10 mm. Since the sinusoidal shape is easy to design in the optical simulation software and export the pattern, it can be used as the preferred type.

[0045] The single-mode waveguide 11 is a strip waveguide or a ridge waveguide, the width of the single-mode waveguide 11 is 0.5-8 μm, and the thic...

Embodiment 2

[0049] According to the waveguide pressure sensor based on the M-Z structure provided in Embodiment 1, the difference is that:

[0050] Such as Figure 7 As shown, among the two single-mode waveguides 11, one is linear, and the other is arc spliced, and the length difference between the two single-mode waveguides 11 is 0-50 mm. When ΔL is 50mm, the sensor range is 2MPa.

[0051] The upper part of the two single-mode waveguides 11 with different lengths in the pressure sensing area 9 is provided with a force equalization module, such as image 3 and Figure 4 As shown, the shape of the uniform force module is a regular pyramid. The bottom surface of the force equalizing module is arranged on the pressure sensing area 9 , and the bottom surface of the force equalizing module coincides with the surface of the pressure sensing area 9 .

Embodiment 3

[0053] According to the waveguide pressure sensor based on the M-Z structure provided in Embodiment 1, the difference is that:

[0054] Such as Figure 8 As shown, among the two single-mode waveguides 11, one is linear, and the other is formed by splicing the two ends of the linear waveguide 12 with the arc waveguide 13 respectively, and the length difference between the two single-mode waveguides 11 is 0 -50mm.

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Abstract

The present invention relates to a waveguide pressure sensor based on an M-Z structure and a detection method thereof. The waveguide pressure sensor based on an M-Z structure includes a single-wavelength light source, an M-Z structure and an optical power meter; the single-wavelength light source, the M-Z structure It is sequentially connected with the optical power meter, and the M-Z structure includes a sequentially connected input coupler, a pressure sensing area composed of two single-mode waveguides with different lengths, and an output coupler. The waveguide pressure sensor provided by the present invention uses the change of the effective refractive index to measure the pressure, so it will not change the nature of the force-applying object itself; compared with the traditional detection method, the measurement accuracy of this patent can reach 0.001μW, and the range can reach 12Mpa ; At the same time, the pressure detection process is completely based on the photoelastic effect and interference effect of the crystal, without current generation, so zero power consumption, energy saving and environmental protection.

Description

technical field [0001] The invention relates to a waveguide pressure sensor based on an M-Z structure and a detection method, belonging to the technical field of pressure detection. Background technique [0002] Sensing technology, together with computer technology and communication, is called the three pillars of information technology. Sensing technology is a multidisciplinary modern science and engineering technology about obtaining information from natural sources, processing (transforming) and identifying it, which involves sensors (also known as transducers), information processing and identification Activities such as planning and design, development, manufacturing / construction, testing, application and evaluation of improvements. Sensing technology is the cutting-edge technology in today's world. It is developing rapidly and attracting people's attention. It is widely used in various fields such as life and production. Among them, pressure sensors are the most comm...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/24G01L11/02
CPCG01L1/241G01L11/02
Inventor 季伟丁其业尹锐
Owner SHANDONG UNIV
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