Piezoelectric quartz crystal group for measuring multi-dimensional force, and manufacturing method for piezoelectric quartz crystal group

Abstract

The invention discloses a piezoelectric quartz crystal group for measuring multi-dimensional force, and a manufacturing method for the piezoelectric quartz crystal group, belongs to the field of piezoelectric transducers, and relates to the piezoelectric quartz crystal group for measuring the multi-dimensional force, which is manufactured under the action of the multi-dimensional force according to the region charge distribution rule of quartz crystals. The piezoelectric quartz crystal group consists of an X0 cut quartz unit crystal group, a first Y0 cut crystal unit crystal group, a second Y0 cut crystal unit crystal group and two grounding electrodes. The piezoelectric quartz crystal group measures three forces or force moments by a method for producing coupled induced charge by using two X0 cut quartz crystals under the actions of normal force, and other two torques except the normal torque, and a decoupling method of multi-electrode arrangement and multi-area charge output superposition; and two normal forces and normal torques are measured by using four Y0 cut quartz crystals, so spiral six-dimensional force is measured. The manufacturing method is simple, high in manufacturability and stability, and low in cost; and the piezoelectric quartz crystal group is convenient to package, and can be applied to the fields of machining, aerospace, national defense and the like.

Description

technical field [0001] The invention belongs to the field of piezoelectric sensors, and in particular relates to the manufacture of a piezoelectric quartz crystal group for measuring multi-dimensional forces based on the law of charge distribution in the surface domain of piezoelectric quartz wafers under the action of multi-dimensional forces Background technique [0002] In the field of traditional multidimensional force measurement, there are two typical types: [0003] A Strain-type multi-dimensional force measurement device based on strain gauges [0004] The strain gauge sensor is based on the physical property changes of specific materials during the deformation process, such as resistance, etc., and has the advantages of light weight, fast response, and small volume. Because the strain gauge has the characteristics of simple structure, flexible layout, high sensitivity, and good stability, various sensors based on strain gauges have been widely used. Since it must ...

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Problems solved by technology

[0007] The technical problem to be solved in the present invention is to change the problem that the traditional multi-dimensional piezoelectric test system is too large and cannot be applied in some occasions, and to invent a multi-dimensional force measurement piezoelectric quartz crystal group with multi-dimensional force measurement function and its manufacturing process.

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