Sapphire crystal growing defect and surface defect optical detecting method and detecting system thereof
A defect optics and detection system technology, applied in the direction of optical testing flaws/defects, etc., can solve the problems of different detection accuracy, expensive detection equipment, low efficiency, etc., to achieve good stability and uniformity, and fast detection efficiency. , the effect of saving labor
Inactive Publication Date: 2016-10-05
SUZHOU ORCHID OPTOELECTRONICS TECH
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Problems solved by technology
[0004] 1. The detection process is relatively complicated and the efficiency is not high;
[0005] 2. The detection equipment is relatively expensive and has certain risks;
[0006] 3. The detection content is relatively simple (only the growth crystal defects can be detected), and the defects such as grinding scratches and edge chipping introduced in the post-processing process cannot be detected
However, this method also has insurmountable shortcomings such as low efficiency, different detection accuracy, and poor uniformity.
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[0038] refer to figure 2 As shown, the optical detection method of this sapphire crystal growth defect and surface defect provided in this embodiment is as follows: align the lens of the camera vertically with the surface of the sapphire to be detected, control the camera to take pictures of the sapphire, and At the moment before the sapphire is photographed, a light source is used to vertically project a parallel light beam passing through the camera lens to the surface of the sapphire to be detected, and image processing software is used to analyze the captured sapphire image, and then judge the sapphire Whether there are crystal growth defects or surface defects.
[0039] like figure 1 and figure 2 As shown, this embodiment also discloses an optical detection system corresponding to the above-mentioned detection method, which includes: an xy displacement platform, a camera 4, a light source 8, a sample box 17, an industrial robot 16, a light source controller 2, and Co...
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The invention discloses a sapphire crystal growing defect and surface defect optical detecting method and a detecting system thereof. When the detecting system is utilized, a lens of a camera is vertically aligned to the surface of a sapphire to be detected, shooting of the sapphire is conducted through controlling the camera, when the camera conducts shooting on the sapphire, a bunch of parallel beams which pass through the lens of the camera is vertically projected to the surface of the sapphire to be detected through utilizing a light source, analysis of an obtained image of the sapphire through shooting is conducted through utilizing image processing software, and whether the crystal growing defects and the surface defects exist on the sapphire or not is judged. By means of the sapphire crystal growing defect and surface defect optical detecting system, full-automatic intelligent detection can be conducted on the defects which exist in the crystal growing process of the sapphire and the surface defects produced in the machining process simultaneously; the sapphire crystal growing defect and surface defect optical detecting system has the advantages of being fast in detection efficiency, high in accuracy, and good in stability and uniformity.
Description
technical field [0001] The invention relates to the application field of optical detection technology, in particular to an optical detection method and an optical detection system for sapphire crystal growth defects and surface defects. Background technique [0002] During the growth process of sapphire crystal, it is inevitably affected by various external complex factors. Therefore, it is impossible for the crystals to develop in an ideal way. In the internal structure of actual crystals, the arrangement of particles does not strictly obey the spatial lattice rules, but there are various defects, such as bubbles, cracks, dislocations, etc. At the same time, in the process of processing sapphire crystals into wafers, other types of defects, such as grinding scratches and chipping, will inevitably be introduced. [0003] At present, the main technical method for detecting defects in sapphire crystals is the method of X-ray diffraction. But this method has the following pr...
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IPC IPC(8): G01N21/88
Inventor潘传鹏闫峰姚红文
OwnerSUZHOU ORCHID OPTOELECTRONICS TECH