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Quartz boat testing tool

A checking tool and quartz technology, applied in the field of quartz boat checking tool, can solve the problems of quartz boat accuracy or benchmark discrepancy, differences among multiple automation equipment, etc., and achieve the effect of improving the efficiency of boat testing

Inactive Publication Date: 2016-10-26
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is: in order to solve the problem that there are many pieces of automation equipment for insertion, and it is impossible to confirm whether the accuracy or benchmark of the quartz boat does not match, or there are differences between multiple automation equipment, a quartz boat inspection is now provided. Tool

Method used

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  • Quartz boat testing tool

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0016] Such as figure 1 , 2 As shown in and 3, a quartz boat inspection tool, the quartz boat 6 is equidistantly distributed with a number of slots, the inspection tool includes a bottom plate 1 and two positioning seats 3 arranged on the bottom plate 1, the positioning seats 3 A reference groove 301 for positioning the quartz boat 6 is opened above the top of the base plate 1, and a detection mechanism is provided between the two positioning seats 3 on the bottom plate 1;

[0017] The detection mechanism includes two uprights 5 , and a verification slide 4 matching the slot is slidably arranged between the two uprights 5 .

[0018] There are two detection mechanisms, and the detection mechanisms are respectively located at two ends of the positioning seat 3 .

[0019] An auxiliary positioning plate 2 is fixed on the outer side of one of the two positioning seats 3 .

[0020] When the above-mentioned quartz boat gauge is used for boat testing, the bottom surface of the quar...

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PUM

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Abstract

The invention relates to the technical field of quartz board testing equipment, and especially relates to a quartz boat testing tool. A quartz boat is provided with a plurality of clamping grooves at equal intervals. The testing tool comprises a bottom plate and two positioning seats on the bottom plate. A reference groove which is used for locating the quartz boat is disposed above the positioning seats. A part, located between the two positioning seats, of the bottom plate is provided with a detection mechanism. The detection mechanism comprises two vertical columns, and testing slide pieces which are matched with the clamping grooves are disposed between the two vertical columns in a sliding manner. The testing tool improves the testing efficiency of the quartz boat, provides a unified judgment standard for automation equipment, facilitates the adjustment of the automation equipment during deviation, and prevents the quartz boat testing on the automation equipment from damaging a silicon chip and affecting the productivity.

Description

technical field [0001] The invention relates to the technical field of quartz boat detection equipment, in particular to a quartz boat inspection tool. Background technique [0002] At present, as an emerging clean and renewable energy source, solar cells are widely used in daily life. Diffusion is a key process in the production of solar cells. The carrier of silicon wafers used in the diffusion process is a quartz boat, and the loading method of silicon wafers has also improved from the original manual insertion to the current automatic insertion. Therefore, higher precision requirements are put forward for the current quartz boat. Therefore, it is necessary to repeatedly test on the inserting equipment during the trial of the quartz boat. And the proportion of quartz boats that meet the equipment requirements of the demand is also low. Because there are many pieces of automation equipment for insertion, it is impossible to confirm whether the accuracy or benchmark of th...

Claims

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Application Information

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IPC IPC(8): G01B5/00
CPCG01B5/0002
Inventor 吴俊邹海军吴佳俊王少华吴家宏张凯胜姚伟忠孙铁囤
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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